CN112746260B - Process for manufacturing rotary target material by cold spraying and production equipment thereof - Google Patents
Process for manufacturing rotary target material by cold spraying and production equipment thereof Download PDFInfo
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- CN112746260B CN112746260B CN202011612505.5A CN202011612505A CN112746260B CN 112746260 B CN112746260 B CN 112746260B CN 202011612505 A CN202011612505 A CN 202011612505A CN 112746260 B CN112746260 B CN 112746260B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C24/00—Coating starting from inorganic powder
- C23C24/02—Coating starting from inorganic powder by application of pressure only
- C23C24/04—Impact or kinetic deposition of particles
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Abstract
The invention discloses a process for manufacturing a rotary target material by cold spraying and production equipment thereof, wherein the process comprises the following steps: 1) Sequentially carrying out ultrasonic cleaning, drying and sand blasting treatment on the matrix; 2) Carrying out vacuum pumping operation on the area where the matrix is located; 3) Guiding ITO powder into a spray gun; simultaneously introducing inert gas into the spray gun; 4) The substrate is driven and controlled to rotate, and the spray gun is controlled to move along the axial direction of the substrate, so that the ITO target is formed. The ITO target material prepared by the steps is always in the helium protective atmosphere during spraying, so that the oxygen content and the mixing of other impurities are reduced, in addition, when the target material is subjected to cold spraying, particles impact a substrate at a high speed to fully deform to form a coating, the coating tissue is compact, the relative density of the target material can reach more than 99.9%, the grain tissue inside the target material is uniform and fine, no defect tissue exists, the deposition efficiency is high, and the production cost is reduced.
Description
Technical Field
The invention relates to the technical field of rotary target processing, in particular to a process for manufacturing a rotary target by cold spraying and production equipment thereof.
Background
The rotary target is a magnetic control target. The target material is made into a cylinder shape, a static magnet is arranged in the target material and rotates at a slow speed, and the target material has the advantages that the utilization rate is up to more than 70 percent, and the defect is high manufacturing cost. The glass is used for solar cells, architectural glass, automobile glass, semiconductors, flat-panel televisions and the like.
Most of the existing rotary targets are processed in a cold spraying mode, the main operation is to spray target raw materials to the surface of a substrate through high-pressure gas, and meanwhile, the substrate rotates at a constant speed, so that the targets are uniformly laid until the target raw materials are sprayed to a cylindrical shape.
In the existing target material processing process, the connection between the substrate and the target material is not tight, the separation after processing is easy to occur, and the target material is inconvenient to use.
Disclosure of Invention
The invention aims to: the process for manufacturing the rotary target material by cold spraying can improve the connection tightness and the production equipment thereof are provided.
The technical scheme adopted by the invention is as follows:
a process for manufacturing a rotary target material by cold spraying comprises the following steps:
the method comprises the following steps: selecting a non-magnetic metal pipe fitting as a matrix, and sequentially carrying out ultrasonic cleaning, drying and sand blasting on the matrix;
step two: fixing the matrix on a frame, and vacuumizing the area where the matrix is located;
step three: selecting ITO powder with the average particle size of 100-300 meshes, and guiding the ITO powder into a spray gun; simultaneously introducing inert gas into the spray gun; (the inert gas can be argon, helium, etc.);
step four: the substrate is driven and controlled to rotate, and the spray gun is controlled to move along the axial direction of the substrate, so that the ITO target is formed;
step five: and machining the sprayed target material into the required size and precision to obtain a finished product.
The ITO target prepared by the steps is always in the helium protective atmosphere during spraying, so that the oxygen content and the mixing of other impurities are reduced, in addition, particles impact a substrate at a high speed during cold spraying of the target to fully deform to form a coating, the coating tissue is compact, the relative density of the target can reach more than 99.9%, the grain tissue in the target is uniform and fine, no defect tissue exists, the deposition efficiency is high, and the production cost is reduced.
In order to avoid target oxidation and impurity invasion in the spraying process, the existing spraying process can be vacuumized in advance, and then inert gas is used as spraying gas to ensure the stability of the quality of finished products.
Therefore, the invention also discloses production equipment for manufacturing the rotary target material by cold spraying, which comprises a processing chamber, wherein a spray gun is arranged in the processing chamber, a horizontal deviation device for controlling the spray gun is also arranged in the processing chamber, the spray gun is also provided with an air vent and a material through hole, and the bottom end of the spray gun is provided with a spraying head communicated with the air vent and the material through hole; a substrate is also arranged in the processing chamber, and a clamping device for fixing the substrate is arranged on the side wall of the processing chamber; the bottom end of the processing chamber is also provided with a material changing chamber, and the side wall of the top end of the material changing chamber is provided with a sealing device; and the side wall of the bottom end of the material changing chamber is provided with a material changing device. The setting of the spray gun in the processing chamber, through blow vent and the intercommunication that leads to the material mouth, spout the target raw materials to the base member surface by the shower nozzle, the setting of clamping device then is used for fixing a position the base member, horizontal deviation device then is used for adjusting the horizontal position of spray gun, the setting of reloading room then is used for changing the base member through the reloading device, closing device's setting then can reduce the influence of reloading process to reloading room air circumstance, is convenient for realize the processing operation of continuity.
Preferably, a vacuum pump communicated with the processing chamber is arranged on the side wall of the processing chamber, and a pressure sensor is further arranged in the processing chamber. The vacuum pump is used for pumping out the air in the processing chamber in advance, so that the spraying effect is prevented from being influenced by impurities in the air.
Preferably, the horizontal deviation device comprises a deviation screw rod which is rotatably arranged in the processing chamber, a deviation motor which is in transmission connection with the deviation screw rod is further arranged on the side wall of the processing chamber, and a threaded through hole which is matched with the deviation screw rod is arranged on the spray gun. The offset screw is used for driving the spray gun to offset along the offset screw under the driving of the offset motor, so that the position of the spray gun is adjusted.
Preferably, a positioning rod parallel to the offset screw rod is further arranged in the processing chamber, and the positioning rod penetrates through the spray gun. The setting of locating lever then can avoid the skew screw rod to rotate the time spray gun along skew screw rod rotation direction emergence rotation, prescribes a limit to the orbit of spray gun, guarantees the stability of processing.
Preferably, be provided with the air inlet on the lateral wall of process chamber and advance the target mouth, air inlet and blow vent advance the target mouth and all set up through coupling hose intercommunication with the logical material mouth, the cover is equipped with a plurality of holding rings on the locating lever, be provided with the hanging tube through-hole on the holding ring, coupling hose passes the setting of hanging tube through-hole. The setting of air inlet and feed inlet is used for transporting inert gas (helium usually) and target raw materials to the spraying mouth through coupling hose respectively, and the setting of holding ring and hanging pipe through-hole then can avoid the skew process to appear coupling hose flagging to the condition that influences the spraying, can add the pressure spring between the holding ring during in-service use to control each holding ring interval, further improve its result of use.
Preferably, the clamping device is including setting up the first clamping telescopic link on the processing chamber lateral wall and keeping away from the rotation motor that first clamping telescopic link set up, be provided with a clamping section of thick bamboo on the piston of first clamping telescopic link, a rolling bearing has set firmly in the clamping section of thick bamboo, be provided with the rotation room in the pivot of rotation motor, be provided with the second clamping telescopic link in the rotation room, rolling bearing's rotation portion and all be provided with the clamping head on the piston of second clamping telescopic link, the base member both ends be provided with clamping head complex clamping groove. The clamping cylinder is arranged on the rotating motor, the rotating bearing in the clamping cylinder can rotate freely along with the base body when the base body rotates, the rotating motor and the second clamping telescopic rod are arranged, the base body can be clamped and controlled to rotate, the processing purpose is achieved, the clamping head and the clamping groove are arranged and used for being matched with the clamping base body, the clamping head can be arranged to be in a shape like a Chinese character 'mi' (or other central symmetrical structures) during actual use, and when the driving motor is prevented from rotating, the clamping head can rotate freely in the clamping groove.
Preferably, a support rod is further arranged on the side wall of the processing chamber, a rotating wheel is arranged on the support rod, and the rotating wheel is in contact with the rotating chamber. The rotating wheel is arranged, so that the rotating chamber can be supported, and the acting force of the rotating chamber is prevented from directly acting on the motor screw.
Preferably, the closing device include with the room of sealing of chamber intercommunication reloads, it seals the telescopic link to be provided with on the lateral wall of room to seal, it seals the pole to seal to be provided with on the piston of telescopic link, it separates to seal the pole and be applicable to when sealing the telescopic link and stretching out the process chamber with the chamber of reloading. The setting of the room of sealing can be under the promotion of the telescopic link of sealing, through sealing the pole with the processing chamber with the involution of chamber of reloading, reduce the gaseous outflow of process of reloading, avoid external gas to get into in the processing chamber.
Preferably, the room bottom of reloading is provided with the telescopic link of reloading, be provided with the support arc board on the piston of the telescopic link of reloading, it is right to support the arc board be applicable to the base member supports, the device of reloading include with the feed space of reloading room intercommunication, be provided with the feed inlet on the feed space lateral wall, the feed space is kept away from the one end of reloading room still is provided with the feeding telescopic link, be provided with on the piston of feeding telescopic link and seal the pusher, it is applicable to the involution to seal the pusher the feed space with the room of reloading, the room of reloading is kept away from the one end of feed space still is provided with the discharge gate, the articulated board of sealing that is provided with on the discharge gate. The arrangement of the sealing pushing head can seal the feeding chamber before feeding, so that gas is prevented from entering the processing chamber from the feeding chamber, the arrangement of the supporting arc plate and the material changing telescopic rod is used for controlling the putting in and taking out of the base body, and the application effect is ensured.
In summary, due to the adoption of the technical scheme, the invention has the beneficial effects that:
1. in the invention, because the target material is always in a helium protective atmosphere during spraying, the oxygen content and the mixing of other impurities are reduced, in addition, when the target material is subjected to cold spraying, particles impact a substrate at a high speed to be fully deformed to form a coating, the coating tissue is compact, the relative density of the target material can reach more than 99.9%, the grain tissue inside the target material is uniform and fine, no defect tissue exists, the deposition efficiency is high, the production cost is reduced, meanwhile, the tightness of the connection between the target material and the substrate can be greatly improved by a sand blasting treatment mode, the separation phenomenon is avoided, and the subsequent processing and use are facilitated.
2. According to the invention, the target material is sprayed to the surface of the substrate from the spraying head through the communication of the vent and the material through hole, the clamping device is used for positioning the substrate, the horizontal deviation device is used for adjusting the horizontal position of the spraying gun, the material changing chamber is used for changing the substrate through the material changing device, and the sealing device is arranged, so that the influence of the material changing process on the air environment of the material changing chamber can be reduced, and the continuous processing operation is convenient to realize.
3. According to the invention, the air inlet and the target inlet are respectively used for conveying inert gas and target raw materials into the spraying port through the connecting hose, and the positioning ring and the hanging tube through hole are arranged, so that the condition that the spraying is influenced due to the fact that the connecting hose sags in the deviation process can be avoided.
4. According to the invention, the clamping cylinder is arranged on the rotating motor, the rotating bearing in the clamping cylinder can rotate freely along with the base body when the base body rotates, the rotating motor and the second clamping telescopic rod are arranged, so that the base body can be clamped and the rotation of the base body can be controlled at the same time, and the processing purpose is achieved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic view of the structure of a production apparatus of the present invention.
Fig. 2 is an enlarged schematic view of region a in fig. 1.
Fig. 3 is an enlarged schematic view of the region B in fig. 1.
Fig. 4 is an enlarged schematic view of region C in fig. 1.
The labels in the figure are: 1-processing chamber, 2-spray gun, 3-vent, 4-vent, 5-spray head, 6-substrate, 7-changing chamber, 8-vacuum pump, 9-pressure sensor, 10-offset screw, 11-offset motor, 12-positioning rod, 13-air inlet, 14-target inlet, 15-connecting hose, 16-positioning ring, 17-first clamping telescopic rod, 18-rotating motor, 19-clamping cylinder, 20-rotating bearing, 21-rotating chamber, 22-second clamping telescopic rod, 23-clamping head, 24-clamping groove, 25-supporting rod, 26-rotating wheel, 27-sealing chamber, 28-sealing telescopic rod, 29-sealing rod, 30-changing telescopic rod, 31-supporting arc plate, 32-feeding chamber, 33-feed inlet, 34-feeding telescopic rod, 35-sealing pushing head, 36-discharge outlet, 37-sealing plate.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the detailed description and specific examples, while indicating embodiments of the invention, are given by way of illustration only, not by way of limitation, i.e., the embodiments described are intended as a selection of the best mode contemplated for carrying out the invention, not as a full mode. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
It is noted that relational terms such as "first" and "second," and the like, may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.
A process for manufacturing a rotary target material by cold spraying comprises the following steps:
the method comprises the following steps: selecting a non-magnetic metal pipe fitting as a matrix, and sequentially carrying out ultrasonic cleaning, drying and sand blasting on the matrix;
step two: fixing the matrix on a frame, and vacuumizing the area where the matrix is located;
step three: selecting ITO powder with the average particle size of 100-300 meshes, and guiding the ITO powder into a spray gun; meanwhile, introducing inert gas (argon, helium and the like can be selected as the inert gas) into the spray gun, wherein helium is selected in the case, and the flow of the helium is controlled to be 500-1000SCCH;
step four: the substrate is driven and controlled to rotate, and the spray gun is controlled to move along the axial direction of the substrate, so that the ITO target is formed;
step five: and machining the sprayed target material into the required size and precision to obtain a finished product.
In addition, the invention also discloses a rotary target production device, as shown in fig. 1-4, a process for manufacturing a rotary target by cold spraying and the production device thereof comprise a processing chamber 1, wherein a spray gun 2 is arranged in the processing chamber 1, a horizontal deviation device for controlling the spray gun 2 is also arranged in the processing chamber 1, an air vent 3 and a material through port 4 are also arranged on the spray gun 2, and a spraying head 5 communicated with the air inlet 13 and the target inlet 14 is arranged at the bottom end of the spray gun 2; a substrate 6 is also arranged in the processing chamber 1, and a clamping device for fixing the substrate 6 is arranged on the side wall of the processing chamber 1; the bottom end of the processing chamber 1 is also provided with a material changing chamber 7, and the side wall of the top end of the material changing chamber 7 is provided with a sealing device; a material changing device is arranged on the side wall of the bottom end of the material changing chamber 7; a vacuum pump 8 communicated with the processing chamber 1 is arranged on the side wall of the processing chamber 1, and a pressure sensor 9 is also arranged in the processing chamber 1; the horizontal deviation device comprises a deviation screw rod 10 which is rotatably arranged in the processing chamber 1, a deviation motor 11 which is in transmission connection with the deviation screw rod 10 is further arranged on the side wall of the processing chamber 1, and a threaded through hole which is matched with the deviation screw rod 10 is arranged on the spray gun 2; a positioning rod 12 parallel to the offset screw 10 is further arranged in the processing chamber 1, and the positioning rod 12 penetrates through the spray gun 2; the side wall of the processing chamber 1 is provided with an air inlet 13 and a target inlet 14, the air inlet 13 is communicated with the air vent 3, the target inlet 14 is communicated with the material through hole 4 through a connecting hose 15, the positioning rod 12 is sleeved with a plurality of positioning rings 16, the positioning rings 16 are provided with hanging pipe through holes, and the connecting hose 15 penetrates through the hanging pipe through holes; the clamping device comprises a first clamping telescopic rod 17 arranged on the side wall of the processing chamber 1 and a rotating motor arranged far away from the first clamping telescopic rod 17, a clamping cylinder 19 is arranged on a piston of the first clamping telescopic rod 17, a rotating bearing 20 is fixedly arranged in the clamping cylinder 19, a rotating chamber 21 is arranged on a rotating shaft of the rotating motor, a second clamping telescopic rod 22 is arranged in the rotating chamber 21, clamping heads 23 are respectively arranged on a rotating part of the rotating bearing 20 and a piston of the second clamping telescopic rod 22, and clamping grooves 24 matched with the clamping heads 23 are arranged at two ends of the base body 6; a support rod 25 is further arranged on the side wall of the processing chamber 1, a rotating wheel 26 is arranged on the support rod 25, and the rotating wheel 26 is arranged in contact with the rotating chamber 21; the sealing device comprises a sealing chamber 27 communicated with the material changing chamber 7, a sealing telescopic rod 28 is arranged on the side wall of the sealing chamber 27, a sealing rod 29 is arranged on a piston of the sealing telescopic rod 28, and the sealing rod 29 is suitable for separating the processing chamber 1 from the material changing chamber 7 when the sealing telescopic rod 28 extends out; the bottom of reloading room 7 is provided with reloading telescopic link 30, be provided with support arc board 31 on reloading telescopic link 30's the piston, it is right that support arc board 31 is applicable to the base member supports, the device of reloading include with the feed space 32 of reloading room 7 intercommunication, be provided with feed inlet 33 on the feed space 32 lateral wall, the feed space 32 is kept away from the one end of reloading room 7 still is provided with feeding telescopic link 34, be provided with on feeding telescopic link 34's the piston and seal the pusher 35, it is applicable to the involution to seal the pusher 35 the feed space 32 with reloading room 7, the reloading room 7 is kept away from the one end of feed space 32 still is provided with discharge gate 36, the articulated board 37 that seals that is provided with on discharge gate 36.
In the using process, the substrate 6 is firstly placed in the feeding chamber 32 from the feeding hole 33, the substrate 6 is pushed to the supporting arc plate 31 through the feeding telescopic rod 34, then the substrate 6 is pushed to be level with the horizontal height of the clamping head 23 and the clamping groove 24 through the material changing telescopic rod 30, then the first clamping telescopic rod 17 and the second clamping telescopic rod 22 are controlled to extend out, the substrate 6 is clamped, the material changing telescopic rod 30 is retracted, the vacuum pump 8 is started, when the pressure in the processing chamber 1 is sensed to reach a specified value through the pressure sensor 9, the rotating motor and the deviation motor 11 are started, meanwhile, the air inlet 13 and the target inlet 14 are controlled to respectively introduce compressed helium and target raw materials, so that the target raw materials are uniformly sprayed on the surface of the substrate 6, after the spraying is finished, the material changing telescopic rod 30 is controlled to extend out, after the substrate 6 is supported, the first clamping telescopic rod and the second clamping telescopic rod are controlled to retract, the material changing telescopic rod 30 drives the substrate 6 to move downwards into the material changing chamber 7, then the telescopic rod 28 is controlled to extend out, the material changing telescopic rod 7 is controlled to separate the material changing chamber 7 from the sealing rod 29, meanwhile, the feeding hole 33 is sealed, the substrate 6, the processing chamber can be processed through the air, the feeding telescopic rod 34, the feeding hole 32, the processing chamber can be repeatedly, the situation of the substrate 6 can be prevented from interfering with the processing of the processing chamber, the processing chamber 7, and the processing chamber can be processed, and the processing of the substrate can be repeatedly processed, and the processing chamber 6 can be repeatedly realized, and the situation of the processing chamber can be realized, and the processing chamber 6 can be processed, and the processing of the processing chamber.
The above description is intended to be illustrative of the preferred embodiment of the present invention and should not be taken as limiting the invention, but rather, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.
Claims (7)
1. The utility model provides a cold spraying makes rotatory target production facility, includes process chamber (1), its characterized in that, be provided with spray gun (2) in process chamber (1), still be provided with in process chamber (1) and be used for controlling the horizontal deviation device of spray gun (2), wherein:
the spray gun (2) is also provided with an air vent (3) and a material through hole (4), and the bottom end of the spray gun (2) is provided with a spraying head (5) communicated with the air vent (3) and the material through hole (4);
a substrate (6) is also arranged in the processing chamber (1), and a clamping device for fixing the substrate (6) is arranged on the side wall of the processing chamber (1);
the bottom end of the processing chamber (1) is also provided with a material changing chamber (7), and the side wall of the top end of the material changing chamber (7) is provided with a sealing device;
a material changing device is arranged on the side wall of the bottom end of the material changing chamber (7);
the bottom end of the material changing chamber (7) is provided with a material changing telescopic rod (30), a piston of the material changing telescopic rod (30) is provided with a supporting arc plate (31), the supporting arc plate (31) is suitable for supporting the base body (6), the material changing device comprises a feeding chamber (32) communicated with the material changing chamber (7), the side wall of the feeding chamber (32) is provided with a feeding hole (33), one end, far away from the material changing chamber (7), of the feeding chamber (32) is also provided with a feeding telescopic rod (34), a piston of the feeding telescopic rod (34) is provided with a sealing push head (35), the sealing push head (35) is suitable for sealing the feeding chamber (32) and the material changing chamber (7), one end, far away from the feeding chamber (32), of the material changing chamber (7) is also provided with a discharging hole (36), and the discharging hole (36) is hinged with a sealing plate (37);
the closing device include with room (27) seals of reloading room (7) intercommunication, it seals telescopic link (28) to be provided with on the lateral wall of room (27) to seal, it seals pole (29) to be provided with on the piston of telescopic link (28) to seal, it is applicable to when sealing telescopic link (28) and stretching out to seal pole (29) and separate processing room (1) with reloading room (7).
2. The cold spray manufacturing rotary target production equipment according to claim 1, wherein a vacuum pump (8) communicated with the processing chamber (1) is arranged on the side wall of the processing chamber (1), and a pressure sensor (9) is further arranged in the processing chamber (1).
3. The cold spray manufacturing rotary target production equipment according to claim 1, wherein the horizontal offset device comprises an offset screw (10) rotatably disposed in the processing chamber (1), an offset motor (11) in transmission connection with the offset screw (10) is further disposed on a side wall of the processing chamber (1), and a threaded through hole matched with the offset screw (10) is disposed on the spray gun (2).
4. The cold spray rotary target production equipment according to claim 3, wherein a positioning rod (12) parallel to the offset screw (10) is further disposed in the processing chamber (1), and the positioning rod (12) is disposed through the spray gun (2).
5. The equipment for producing the rotary target material by cold spraying according to claim 4, wherein the sidewall of the processing chamber (1) is provided with an air inlet (13) and a target inlet (14), the air inlet (13) and the air vent (3) are arranged, the target inlet (14) and the material through port (4) are communicated through a connecting hose (15), the positioning rod (12) is sleeved with a plurality of positioning rings (16), the positioning rings (16) are provided with hanging tube through holes, and the connecting hose (15) passes through the hanging tube through holes.
6. The cold spray coating manufacturing rotary target production equipment according to claim 1, wherein the clamping device comprises a first clamping telescopic rod (17) arranged on a side wall of the processing chamber (1) and a rotating motor arranged far away from the first clamping telescopic rod (17), a clamping cylinder (19) is arranged on a piston of the first clamping telescopic rod (17), a rotating bearing (20) is fixedly arranged in the clamping cylinder (19), a rotating chamber (21) is arranged on a rotating shaft of the rotating motor, a second clamping telescopic rod (22) is arranged in the rotating chamber (21), clamping heads (23) are arranged on a rotating part of the rotating bearing (20) and a piston of the second clamping telescopic rod (22), and clamping grooves (24) matched with the clamping heads (23) are arranged at two ends of the base body (6).
7. The equipment for producing the rotary target material through cold spraying according to claim 6, wherein a support rod (25) is further disposed on the side wall of the processing chamber (1), a rotating wheel (26) is disposed on the support rod (25), and the rotating wheel (26) is in contact with the rotating chamber (21).
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| CN202011612505.5A CN112746260B (en) | 2020-12-30 | 2020-12-30 | Process for manufacturing rotary target material by cold spraying and production equipment thereof |
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|---|---|---|---|---|
| CN114293155A (en) * | 2021-10-22 | 2022-04-08 | 紫金矿业集团黄金珠宝有限公司 | Preparation method of silver-palladium-copper alloy target material |
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