CN103765179B - 电容式压力传感器和其制造方法及输入装置 - Google Patents

电容式压力传感器和其制造方法及输入装置 Download PDF

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Publication number
CN103765179B
CN103765179B CN201280041882.5A CN201280041882A CN103765179B CN 103765179 B CN103765179 B CN 103765179B CN 201280041882 A CN201280041882 A CN 201280041882A CN 103765179 B CN103765179 B CN 103765179B
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China
Prior art keywords
diaphragm
pressure transducer
dielectric layer
pressure
contact
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CN201280041882.5A
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English (en)
Chinese (zh)
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CN103765179A (zh
Inventor
井上胜之
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Omron Corp
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Omron Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
CN201280041882.5A 2011-11-14 2012-11-12 电容式压力传感器和其制造方法及输入装置 Active CN103765179B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2011-249181 2011-11-14
JP2011249181A JP5737148B2 (ja) 2011-11-14 2011-11-14 静電容量型圧力センサとその製造方法及び入力装置
PCT/JP2012/079314 WO2013073506A1 (ja) 2011-11-14 2012-11-12 静電容量型圧力センサとその製造方法及び入力装置

Publications (2)

Publication Number Publication Date
CN103765179A CN103765179A (zh) 2014-04-30
CN103765179B true CN103765179B (zh) 2016-08-17

Family

ID=48429564

Family Applications (1)

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CN201280041882.5A Active CN103765179B (zh) 2011-11-14 2012-11-12 电容式压力传感器和其制造方法及输入装置

Country Status (5)

Country Link
JP (1) JP5737148B2 (ja)
KR (1) KR101553786B1 (ja)
CN (1) CN103765179B (ja)
TW (1) TWI529379B (ja)
WO (1) WO2013073506A1 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI125958B (en) * 2013-05-10 2016-04-29 Murata Manufacturing Co Improved safe measuring box
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
KR101489302B1 (ko) * 2013-07-31 2015-02-04 전자부품연구원 압력센서
ITTO20130931A1 (it) * 2013-11-15 2015-05-16 St Microelectronics Srl Sensore di forza microelettromeccanico di tipo capacitivo e relativo metodo di rilevamento di forza
JP6331447B2 (ja) * 2014-02-14 2018-05-30 オムロン株式会社 静電容量型圧力センサ及び入力装置
JP6311341B2 (ja) * 2014-02-14 2018-04-18 オムロン株式会社 静電容量型圧力センサ及び入力装置
TWI567611B (zh) * 2015-11-23 2017-01-21 恆顥科技股份有限公司 壓力感測器及壓力觸控模組
TWI581169B (zh) * 2016-04-28 2017-05-01 友達光電股份有限公司 雙模式電容觸控顯示面板
KR102522033B1 (ko) * 2016-07-06 2023-04-18 삼성디스플레이 주식회사 표시 장치
KR102552294B1 (ko) * 2016-07-15 2023-07-10 삼성디스플레이 주식회사 압력 센서 및 이를 포함하는 표시 장치
JP2020046177A (ja) 2016-12-20 2020-03-26 株式会社村田製作所 圧力センサ素子およびそれを備えた圧力センサモジュール
CN107272961B (zh) * 2017-06-30 2020-07-24 厦门天马微电子有限公司 一种显示面板及显示装置
WO2019107558A1 (ja) * 2017-11-30 2019-06-06 住友理工株式会社 トランスデューサ及びその製造方法
JP2021105519A (ja) * 2018-03-09 2021-07-26 株式会社村田製作所 圧力センサ
JP2021165636A (ja) * 2018-05-16 2021-10-14 株式会社村田製作所 圧力センサ
CN109387348B (zh) * 2018-11-22 2019-09-24 华中科技大学 一种柔性多量程电容式压力传感器及其制备方法和应用
CN110510572B (zh) * 2019-08-30 2022-06-10 西安电子科技大学 一种电容式压力传感器及其制作方法
CN110779965B (zh) * 2019-10-22 2022-08-02 电子科技大学 一种大面积表面损伤柔性探测装置
CN112729626B (zh) * 2021-01-15 2022-07-05 福州大学 线性电容型触觉传感器及其制备方法
CN112925445B (zh) * 2021-03-05 2023-03-07 武汉天马微电子有限公司 触控模组、显示模组、显示装置及检测方法
CN117007215B (zh) * 2023-07-21 2024-03-22 湖南大学 一种介电常数可变的压力传感器模拟系统及其设计方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3399688B2 (ja) * 1995-03-29 2003-04-21 長野計器株式会社 圧力センサ
JP2003139628A (ja) * 2002-07-02 2003-05-14 Nitta Ind Corp 静電容量式センサー
JP2005083801A (ja) * 2003-09-05 2005-03-31 Alps Electric Co Ltd 圧力センサ
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP2005321257A (ja) * 2004-05-07 2005-11-17 Alps Electric Co Ltd 静電容量型圧力センサ
JP4020318B2 (ja) * 2004-05-19 2007-12-12 株式会社山武 容量式圧力センサ
JP2006210843A (ja) * 2005-01-31 2006-08-10 Fujitsu Ltd 可変キャパシタ及びその製造方法
JP2007101222A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 圧力センサ
JP2007225344A (ja) * 2006-02-21 2007-09-06 Epson Toyocom Corp 圧力センサ

Also Published As

Publication number Publication date
WO2013073506A1 (ja) 2013-05-23
TWI529379B (zh) 2016-04-11
KR20140048996A (ko) 2014-04-24
CN103765179A (zh) 2014-04-30
JP2013104797A (ja) 2013-05-30
TW201319537A (zh) 2013-05-16
JP5737148B2 (ja) 2015-06-17
KR101553786B1 (ko) 2015-09-16

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