TWI529379B - 電容性壓力感測器及其製造方法以及輸入裝置 - Google Patents

電容性壓力感測器及其製造方法以及輸入裝置 Download PDF

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Publication number
TWI529379B
TWI529379B TW101139188A TW101139188A TWI529379B TW I529379 B TWI529379 B TW I529379B TW 101139188 A TW101139188 A TW 101139188A TW 101139188 A TW101139188 A TW 101139188A TW I529379 B TWI529379 B TW I529379B
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TW
Taiwan
Prior art keywords
pressure sensor
diaphragm
dielectric
dielectric layer
pressure
Prior art date
Application number
TW101139188A
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English (en)
Chinese (zh)
Other versions
TW201319537A (zh
Inventor
井上勝之
Original Assignee
歐姆龍股份有限公司
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Publication date
Application filed by 歐姆龍股份有限公司 filed Critical 歐姆龍股份有限公司
Publication of TW201319537A publication Critical patent/TW201319537A/zh
Application granted granted Critical
Publication of TWI529379B publication Critical patent/TWI529379B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
TW101139188A 2011-11-14 2012-10-24 電容性壓力感測器及其製造方法以及輸入裝置 TWI529379B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011249181A JP5737148B2 (ja) 2011-11-14 2011-11-14 静電容量型圧力センサとその製造方法及び入力装置

Publications (2)

Publication Number Publication Date
TW201319537A TW201319537A (zh) 2013-05-16
TWI529379B true TWI529379B (zh) 2016-04-11

Family

ID=48429564

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101139188A TWI529379B (zh) 2011-11-14 2012-10-24 電容性壓力感測器及其製造方法以及輸入裝置

Country Status (5)

Country Link
JP (1) JP5737148B2 (ja)
KR (1) KR101553786B1 (ja)
CN (1) CN103765179B (ja)
TW (1) TWI529379B (ja)
WO (1) WO2013073506A1 (ja)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI125958B (en) * 2013-05-10 2016-04-29 Murata Manufacturing Co Improved safe measuring box
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
KR101489302B1 (ko) * 2013-07-31 2015-02-04 전자부품연구원 압력센서
ITTO20130931A1 (it) 2013-11-15 2015-05-16 St Microelectronics Srl Sensore di forza microelettromeccanico di tipo capacitivo e relativo metodo di rilevamento di forza
JP6311341B2 (ja) * 2014-02-14 2018-04-18 オムロン株式会社 静電容量型圧力センサ及び入力装置
JP6331447B2 (ja) * 2014-02-14 2018-05-30 オムロン株式会社 静電容量型圧力センサ及び入力装置
TWI567611B (zh) * 2015-11-23 2017-01-21 恆顥科技股份有限公司 壓力感測器及壓力觸控模組
TWI581169B (zh) * 2016-04-28 2017-05-01 友達光電股份有限公司 雙模式電容觸控顯示面板
KR102522033B1 (ko) 2016-07-06 2023-04-18 삼성디스플레이 주식회사 표시 장치
KR102552294B1 (ko) * 2016-07-15 2023-07-10 삼성디스플레이 주식회사 압력 센서 및 이를 포함하는 표시 장치
JP2020046177A (ja) 2016-12-20 2020-03-26 株式会社村田製作所 圧力センサ素子およびそれを備えた圧力センサモジュール
CN107272961B (zh) * 2017-06-30 2020-07-24 厦门天马微电子有限公司 一种显示面板及显示装置
CN114466296B (zh) * 2017-11-30 2023-07-14 住友理工株式会社 换能器及其制造方法
JP2021105519A (ja) * 2018-03-09 2021-07-26 株式会社村田製作所 圧力センサ
JP2021165636A (ja) 2018-05-16 2021-10-14 株式会社村田製作所 圧力センサ
CN109387348B (zh) * 2018-11-22 2019-09-24 华中科技大学 一种柔性多量程电容式压力传感器及其制备方法和应用
CN110510572B (zh) * 2019-08-30 2022-06-10 西安电子科技大学 一种电容式压力传感器及其制作方法
CN110779965B (zh) * 2019-10-22 2022-08-02 电子科技大学 一种大面积表面损伤柔性探测装置
CN112729626B (zh) * 2021-01-15 2022-07-05 福州大学 线性电容型触觉传感器及其制备方法
CN112925445B (zh) * 2021-03-05 2023-03-07 武汉天马微电子有限公司 触控模组、显示模组、显示装置及检测方法
CN117007215B (zh) * 2023-07-21 2024-03-22 湖南大学 一种介电常数可变的压力传感器模拟系统及其设计方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3399688B2 (ja) * 1995-03-29 2003-04-21 長野計器株式会社 圧力センサ
JP2003139628A (ja) * 2002-07-02 2003-05-14 Nitta Ind Corp 静電容量式センサー
JP2005083801A (ja) * 2003-09-05 2005-03-31 Alps Electric Co Ltd 圧力センサ
JP2005233877A (ja) * 2004-02-23 2005-09-02 Alps Electric Co Ltd 圧力センサ
JP2005321257A (ja) * 2004-05-07 2005-11-17 Alps Electric Co Ltd 静電容量型圧力センサ
JP4020318B2 (ja) * 2004-05-19 2007-12-12 株式会社山武 容量式圧力センサ
JP2006210843A (ja) * 2005-01-31 2006-08-10 Fujitsu Ltd 可変キャパシタ及びその製造方法
JP2007101222A (ja) * 2005-09-30 2007-04-19 Seiko Epson Corp 圧力センサ
JP2007225344A (ja) * 2006-02-21 2007-09-06 Epson Toyocom Corp 圧力センサ

Also Published As

Publication number Publication date
TW201319537A (zh) 2013-05-16
JP5737148B2 (ja) 2015-06-17
KR101553786B1 (ko) 2015-09-16
JP2013104797A (ja) 2013-05-30
KR20140048996A (ko) 2014-04-24
CN103765179A (zh) 2014-04-30
WO2013073506A1 (ja) 2013-05-23
CN103765179B (zh) 2016-08-17

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