CN103681292A - Band expanding device - Google Patents
Band expanding device Download PDFInfo
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- CN103681292A CN103681292A CN201310435231.0A CN201310435231A CN103681292A CN 103681292 A CN103681292 A CN 103681292A CN 201310435231 A CN201310435231 A CN 201310435231A CN 103681292 A CN103681292 A CN 103681292A
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- clamping
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- band
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Basic Packing Technique (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a band expanding device used for expanding a rectangular band. The band expanding device is provided with a first clamping component clamping a first edge of the band; a second clamping component clamping a second edge opposite to the first edge; a third clamping component clamping a third edge perpendicular to the first edge and the second edge; a fourth clamping component clamping a fourth edge opposite to the third edge; and an expanding component enabling the first clamping component, the second clamping component, the third clamping component and the fourth clamping component to move in a direction perpendicular to the clamped edges. Each of the first clamping component, the second clamping component, the third clamping component and the fourth clamping component is provided with a lower side clamping mechanism and an upper side clamping mechanism. The upper part of each lower side clamping mechanism and the lower part of each upper clamping mechanism are provided with a plurality of rollers rotating along the direction of the clamped edges. Either of the lower clamping mechanism and the upper side clamping mechanism is provided with a support block supporting the rollers at a predetermined interval so as to rotate; and a pressing component used for pressing action positions of the support block halving a distance between the two rollers.
Description
Technical field
The present invention relates to be with extension fixture, it,, for expanding the splicing tape that is pasted with wafer, gives external force to wafer.
Background technology
In semiconductor device manufacturing process, marking off a plurality of regions for the surface of the semiconductor wafer of circular plate shape roughly by being arranged as the cancellate preset lines of cutting apart that is called spacing track, in the region marking off at this, form IC(integrated circuit), LSI(large scale integrated circuit) etc. device.Then, along spacing track, cut off semiconductor wafer, thereby to being formed with the region of device, cutting apart and produce device one by one thus.In addition, for the surface at sapphire substrate, be laminated with the optical device wafer of gallium nitride compound semiconductor etc., also along the predetermined preset lines of cutting apart, cut off, be partitioned into thus the optical device such as light-emitting diode, laser diode one by one, and extensively use electric equipment.
As the method for cutting apart the machined objects such as described semiconductor wafer or optical device wafer, following methods is practical: use the pulse laser light with respect to this machined object with radioparent wavelength, the inside that focal point is registered to the region that need to cut apart is irradiated, inside at machined object forms modified layer continuously along spacing track, along owing to being formed with this modified layer, the spacing track of strength decreased applies external force, cut apart thus machined object (for example,, with reference to patent documentation 1).
And, as along owing to being formed with modified layer, the spacing track of strength decreased applies the technology of external force, at following patent documentation 2, record following technology: expansion is pasted with the splicing tape of wafer, then, under the state of having expanded splicing tape by ring-shaped frame around be divided into device one by one wafer paste splicing tape.
Prior art document
Patent documentation 1: No. 3408805 communique of Japanese Patent
Patent documentation 2: TOHKEMY 2006-229021 communique
Yet, there is following problem to being pasted with the technology that the splicing tape of wafer expands in what be recorded in described patent documentation 2: owing to being opposed two methods that limit stretches of clamping splicing tape, so two vertical limits dwindle, thereby the device that sticks on splicing tape and be divided into is one by one sustained damage.And there is following problem: while stretching opposed two limits under the state that has clamped two vertical limits, splicing tape is fully expansion not.
Summary of the invention
The present invention completes in view of the described fact, its major technique problem is to provide band extension fixture, even if opposed two limits of its clamping splicing tape stretch and make splicing tape expansion, two vertical limits can not dwindle yet, even and if can fully expand splicing tape under the state that has clamped two vertical limits yet.
In order to solve above-mentioned major technique problem, according to the present invention, provide a kind of band extension fixture, it is for expanding the band of rectangular shape, describedly with extension fixture, is characterised in that, and it possesses: the 1st clamping components, it is for the 1st limit of clamping band, the 2nd clamping components, its for clamping band with opposed the 2nd limit, described the 1st limit, the 3rd clamping components, it is for 3rd limit vertical with described the 1st limit and described the 2nd limit of clamping band, the 4th clamping components, its for clamping band with opposed the 4th limit, described the 3rd limit, and expansion, it is for making described the 1st clamping components, described the 2nd clamping components, described the 3rd clamping components and described the 4th clamping components move in the direction vertical with respect to each limit of clamping respectively, described the 1st clamping components, described the 2nd clamping components, described the 3rd clamping components and described the 4th clamping components have respectively downside fixture and upside fixture, on the top of described downside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping, in the bottom of described upside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping, either party in described downside fixture and upside fixture possesses: rest pad, it be take the mode with predetermined space by two rollers and supports as rotating, and pressing member, it is for pressing the binary active position in the interval by two rollers of described rest pad.
Described pressing member consists of following part: briquetting, and it is supported to two rest pads can be respectively in described active position rotation; And actuator, its for press described briquetting by the binary pressing position of described active position of two rest pads.
In the band extension fixture forming according to the present invention, the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components have respectively downside fixture and upside fixture, on the top of downside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping, in the bottom of upside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping, therefore, when for example clamping the 3rd limit of splicing tape and the 4th limit and expand, even if utilize clamping 1st limit vertical with the 3rd limit and the 4th limit and the 1st clamping components on the 2nd limit and downside fixture and the upside fixture of the 2nd clamping components to clamp, owing to being equipped on a plurality of roller rotations of downside fixture and upside fixture, so can expand fully splicing tape.In addition, on clamping the 1st limit of splicing tape and when the 2nd limit expands, even if utilize clamping 3rd limit vertical with the 1st limit and the 2nd limit and the 3rd clamping components on the 4th limit and downside fixture and the upside fixture of the 4th clamping components to clamp, owing to being equipped on a plurality of roller rotations of downside fixture and upside fixture, so can expand fully splicing tape.
In addition, in based on band extension fixture of the present invention, because the either party in downside fixture and upside fixture possesses: rest pad, it be take the mode with predetermined space by two rollers and supports as rotating; And pressing member, it is for pressing the binary active position in the interval by two rollers of rest pad, therefore, owing to respectively the binary active position in the interval of two rollers being pressed supporting a plurality of rest pads of two rollers, so can and be provided in upside fixture or a plurality of rollers of the downside hold assembly of downside fixture by paired two all rollers, clamp each limit of splicing tape with impartial power.
Accompanying drawing explanation
Fig. 1 is the stereogram with extension fixture forming according to the present invention.
Fig. 2 is the major part stereogram of the upside fixture with extension fixture shown in pie graph 1.
Fig. 3 is by the stereogram shown in the major part decomposition of the upside fixture shown in Fig. 2.
Fig. 4 amplifies to represent the downside fixture of the clamping components with extension fixture shown in pie graph 1 and the front view of the major part of upside fixture.
Fig. 5 is the key diagram by the band of implementing with the extension fixture clamping operation shown in Fig. 1.
Fig. 6 is with the 1st key diagram with expansion process of implementing with extension fixture shown in Fig. 1.
Fig. 7 is with the 2nd key diagram with expansion process of implementing with extension fixture shown in Fig. 1.
Fig. 8 means to stick on and has implemented the 1st with expansion process and the 2nd key diagram with the state that is divided into device one by one on the splicing tape of expansion process.
Fig. 9 is the key diagram by the frame installation operation of implementing with extension fixture shown in Fig. 1.
Figure 10 means the frame installation operation of having implemented shown in Fig. 9, and the wafer 10 that is formed with interval (s) between splicing tape is by the device being divided into is one by one bearing in the cutaway view of the state of ring-shaped frame.
Figure 11 is by the vertical view of the splicing tape with extension fixture expansion.
Label declaration
1: splicing tape;
2: band extension fixture;
20: fixed pedestal;
3: circular holding table;
4a: the 1st clamping components;
4b: the 2nd clamping components;
4c: the 3rd clamping components;
4d: the 4th clamping components;
41: movable base;
42: downside fixture;
422: downside hold assembly;
423: roller;
43: upside fixture;
433: roller;
434: rest pad;
435: pressing member;
436: briquetting;
437: actuator;
44: the 1 travel mechanisms;
45: the 2 travel mechanisms;
5a: the 1st band expansion;
5b: the 2nd band expansion;
5c: the 3rd band expansion;
5d: the 4th band expansion;
7: ring-shaped frame;
10: wafer.
Embodiment
Below, with reference to accompanying drawing, the preferred implementation with extension fixture forming according to the present invention is elaborated.
Figure 11 represents by the vertical view of the splicing tape with extension fixture expansion.Illustrated splicing tape 1 forms square (rectangle), and has: the 1st limit 1a, with opposed the 2nd limit 1b of the 1st limit 1a, the 3rd limit 1c vertical with the 1st limit 1a and the 2nd limit 1b and with opposed the 4th limit 1d of the 3rd limit 1c.Surface-coated at the splicing tape 1 forming like this has adhesive linkage, at this surperficial central portion, is pasted with wafer 10.In addition, in the illustrated embodiment, wafer 10 consists of such semiconductor wafer: at surperficial 10a, be clathrate and be formed with a plurality of spacing tracks 101, and in a plurality of regions that mark off by the plurality of spacing track 101, be formed with respectively device 102, wafer 10 is divided into device 102 one by one along spacing track 101.
Then, referring to figs. 1 through Fig. 3, the band extension fixture of expansion splicing tape 1 is described, on described splicing tape 1, be pasted with the described wafer 10 of device 102 one by one that is divided into.
At Fig. 1, show according to the present invention and the stereogram of the execution mode with extension fixture that forms.
Described fixed pedestal 20 forms rectangular shape, thereon surface be formed be spaced from each other 90 degree angle the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d that in the holding table 3 of described circle, are formed centrally.In addition, the peripheral part that is formed with described the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d of fixed pedestal 20 forms towards foreign side outstanding.
By supporting member 30, the holding table of described circle 3 is bearing in to the upper surface of fixed pedestal 20.In the illustrated embodiment, this supporting member 30 is configured to, and holding table 3 can be moved at above-below direction.
Respectively described the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are equipped on the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d forming at described fixed pedestal 20.That is, 4 clamping components 4a, 4b, 4c, 4d the spaced equal angles of Zhou Fangxiang set.In the illustrated embodiment, the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d that are equipped on like this on fixed pedestal 20 are identical structure, and they have separately: movable base 41, and it forms L word shape; Downside fixture 42 and upside fixture 43, they are arranged on this movable base 41 in the mode that can move at above-below direction; He 1 travel mechanism 44 and the 2nd travel mechanism 45, they make respectively this downside fixture 42 and upside fixture 43 move at above-below direction.Movable base 41 is by moving part 411 and from the upper surface of this moving part 411, erect the support 412 that arranges and form and form.Lower surface at moving part 411 is respectively arranged with the directed track 411a chimeric with described the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d, this directed track 411a is chimeric with described the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d respectively, and movable base 41 is configured to and can along described the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d, at fixed pedestal 20, moves respectively thus.In addition, in moving part 411, be formed through internal thread 411b.At the medial surface of described support 412 (face of an opposed side mutually), be provided with the guide rail 412a extending at above-below direction, at the lateral surface of described support 412, be formed with the elongated slot 412b extending at above-below direction.In addition, at guide rail 412a, be formed with the slotted hole 412c that arrives described elongated slot 412b and extend at above-below direction from medial surface.
Described downside fixture 42 consists of following part: supporting arm 421, and it is adapted to and can moves along the guide rail 412a that is arranged at the support 412 of described movable base 41; And downside hold assembly 422, it is installed on this supporting arm 421.Cardinal extremity at supporting arm 421 is provided with the directed groove 421a chimeric with described guide rail 412a, by making this directed groove 421a and guide rail 412a chimeric, supporting arm 421 is configured to and can at above-below direction, moves along the guide rail 412a of the support 412 of movable base 41.In addition, at the base portion of supporting arm 421, be provided with the internal thread piece 421c with internal thread 421b, this internal thread piece 421c sets to run through the mode of described slotted hole 412c.In the illustrated embodiment, described downside hold assembly 422 forms rectangular-shaped, and sets long side direction towards the direction vertical with directed track 411a.The upper surface of the clamping face side of the downside hold assembly 422 forming like this in conduct, is equipped with a plurality of rollers 423 in the long side direction rotation of downside hold assembly 422.
Described upside fixture 43 possesses: supporting arm 431, and it is adapted to and can moves along the guide rail 412a that is arranged at the support 412 of described movable base 41; And supporting cover 432, it is installed on this supporting arm 431.Cardinal extremity at supporting arm 431 is provided with the directed groove 431a chimeric with described guide rail 412a, by making this directed groove 431a and guide rail 412a chimeric, supporting arm 431 is configured to and can along guide rail 412a, at above-below direction, moves at the support 412 of movable base 41.In addition, at the base portion of supporting arm 431, be provided with the internal thread piece 431c with internal thread 431b, this internal thread piece 431c sets to run through the mode of described slotted hole 412c.
With reference to Fig. 2 and Fig. 3, the component parts in the described supporting cover 432 of being provided in of upside fixture 43 is described.Upside fixture 43 shown in Fig. 2 and Fig. 3 possesses: rest pad 434, and it be take two rollers 433 respectively the mode with predetermined interval and supports as rotating; And pressing member 435, it is for pressing the binary active position in the interval by two rollers of this rest pad.Rest pad 434 possesses roller support 434a and press service portion 434b, press service portion 434b at this roller support 434a from upper end horizontal-extending.At roller support 434a, separate predetermined space and be equipped with two bolster 433a, at these two bolster 433a, in the mode that can rotate, be supported with roller 433 respectively.In addition, what form rest pad 434, press service portion 434b, by two rollers 433 of two bolster 433a() the binary active position in interval be provided with axle and run through patchhole 434c.The rest pad 434 forming like this take two press as the member 435 that is pressed over the ground.
Pressing member 435 consists of following part: briquetting 436, and it is bearing in active position by two rest pads 434 in the mode that can rotate respectively; And actuator 437, it is for pressing the binary pressing position of the active position by two rest pads 434 of this briquetting 436.Briquetting 436 consists of upper wall 436a, sidewall 436b and 436c and end wall 436d and 436e, forms the open case shape of downside.Describedly be arranged at the axle of pressing service portion 434b that forms rest pad 434 to run through patchhole 434c chimeric with two bolsters (not shown) of sidewall 436b of briquetting 436 that are installed on such formation in the mode that can rotate respectively.Upper wall 436a in the briquetting 436 forming like this, is provided with for linking a pair of connecting member 438a, the 438b of actuator 437.At a connecting member 438a, be formed with and run through patchhole 438c, at another connecting member, 438b is formed with screwed hole 438d.In the illustrated embodiment, actuator 437 consists of cylinder mechanism, at the terminal part of its piston rod 437a, is formed with connect apertures 437b.The terminal part of the piston rod 437a of the actuator 437 forming is like this positioned between a pair of connecting member 438a, 438b, binder bolt 439 is run through to be inserted into and be formed at running through patchhole 438c and being formed at the connect apertures 437b of the terminal part of piston rod 437a of a connecting member 438a, and screw togather with the screwed hole 438d that is formed at another connecting member 438b, thus, the piston rod 437a that forms actuator 437 is linked with a pair of connecting member 438a, the 438b that are arranged on the upper wall 436a of briquetting 436.The actuator 437 forming is like this installed on the upper wall of described supporting cover 432.
The upside fixture 43 and opposed the setting of described downside fixture 42 that form in this way.And, by a plurality of rest pads 434 respectively by twos a plurality of rollers 433 of supporting set as opposed with a plurality of rollers 423 of downside hold assembly 422 that are equipped on described downside fixture 42.
Getting back to Fig. 1 goes on to say, the 1st travel mechanism 44 that described downside fixture 42 moves at above-below direction is consisted of: external thread rod 441 following part, itself and guide rail 412a are equipped in the elongated slot 412b that the support 412 in described movable base 41 forms abreast, and screw togather with the internal thread 421b of internal thread piece 421c that is arranged at the base portion of described supporting arm 421; Axle supporting member 442, it is equipped on the support 412 of movable base 41, and by an overhang bracket of external thread rod 441 for rotating; And impulse motor 443, the other end of itself and external thread rod 441 is connected, and for driving external thread rod 441 rotations.The 1st travel mechanism's 44 driving pulse motors 443 that form like this make external thread rod 441 rotate to a direction or other direction, make thus downside fixture 42 move at above-below direction along guide rail 412a.
Making the 2nd travel mechanism 45 that described upside fixture 43 moves at above-below direction is structures same with described the 1st travel mechanism 44, and it is equipped on the upside of the 1st travel mechanism 44.; the 2nd travel mechanism 45 consists of following part: external thread rod 451; itself and guide rail 412a are equipped in the elongated slot 412b that the support 412 in described movable base 41 forms abreast, and screw togather with the internal thread 431b of internal thread piece 431c that is arranged at the base portion of described supporting arm 431; Axle supporting member 452, it is equipped on the support 412 of movable base 41, and by an overhang bracket of external thread rod 451 for rotating; And impulse motor 453, the other end of itself and external thread rod 451 is connected, and for driving external thread rod 451 rotations.The 2nd travel mechanism's 45 driving pulse motors 453 that form like this make external thread rod 451 rotate to a direction or other direction, make thus upside fixture 43 move at above-below direction along guide rail 412a.
For make described the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d respectively along circular holding table 3 move radially the 1st with expansion 5a, the 2nd, with expansion 5b, the 3rd, with expansion 5c, the 4th, with expansion 5d, along described the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d that are formed at described fixed pedestal 20, set respectively.Described the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band expansion 5d consist of following part: external thread rod 51, it sets respectively as parallel with the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d, and screws togather with the internal thread 411b that is formed at the moving part 411 of described movable base 41; Axle supporting member 52, it is equipped on described fixed pedestal 20, and by an overhang bracket of external thread rod 51 for rotating; And pulse motor 53, the other end of itself and external thread rod 51 links, for driving external thread rod 51 rotations.By driving pulse motor 53 respectively, external thread rod 51 is rotated to a direction or another direction, what form in the above described manner the 1st makes 1st clamping components 4a, 2nd clamping components 4b, 3rd clamping components 4c, 4th clamping components 4d respectively moving radially along circular holding table 3 with expansion 5c, the 4th with expansion 5d with expansion 5b, the 3rd with expansion 5a, the 2nd.
By not shown carrying device by being pasted with wafer 10(at surperficial central portion and being divided into device 102 one by one shown in described Figure 11) splicing tape 1 be loaded on holding table 3.At this moment splicing tape 1 is assembled into the 1st limit 1a towards the 1st clamping components 4a, and the 2nd limit 1b is towards the 2nd clamping components 4b, and the 3rd limit 1c is towards the 3rd clamping components 4c, and the 4th limit 1d is towards the 4th clamping components 4d.In addition, at this moment the upper surface of holding table 3 is positioned to form the downside hold assembly 422 of downside fixture 42 and the height in the centre position of a plurality of rest pads 434 of upside fixture 43 of described the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d.
Then, the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c and the 4th band expansion 5d are moved, downside fixture 42 and the upside fixture 43 of the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are navigated to the position that can clamp splicing tape 1.Then, the 1st travel mechanism 44 and the 2nd travel mechanism 45 that form the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are moved, and the actuator 437 that makes to form upside fixture 43 move and via briquetting 436, rest pad 434 is pressed downwards.Consequently, as shown in FIG. 4 and 5, by be equipped on downside fixture 42 downside hold assembly 422 a plurality of rollers 423 and be supported respectively piece 434(with reference to Fig. 3) supporting the roller 433 of two two, each limit (band clamping operation) that clamps splicing tape 1, described rest pad 434 is pressed respectively by a plurality of briquettings 436 of upside fixture 43.Now, owing to respectively the binary active position in the interval of two rollers 433 being pressed supporting a plurality of rest pads 434 of the roller 433 of two two, therefore, can and be provided in a plurality of rollers 423 of the downside hold assembly 422 of downside fixture 42 by paired two all rollers 433, with impartial power, clamp each limit of splicing tape 1.
As shown in FIG. 4 and 5, by a plurality of rollers 423 that are equipped on the downside hold assembly 422 of downside fixture 42, after the roller 433 of two two that is bearing in respectively the rest pad 434 of being pressed respectively by a plurality of briquettings 436 of upside fixture 43 has clamped each limit of splicing tape 1, for example make the 3rd band expansion 5c and the 4th band expansion 5d move, as shown in Figure 6, make to form the downside fixture 42 of the 3rd clamping components 4c and the 4th clamping components 4d and upside fixture 43 along take the direction shown in arrow A 1 and A2 (be left and right directions in Fig. 6) movement in Fig. 6.Its result is that splicing tape 1 is stretched in the direction shown in arrow A 1 and A2 (being left and right directions in Fig. 6) and expands (the 1st band expansion process).At this moment, a plurality of rollers 423 that the downside hold assembly 422 forming downside fixture 42 of the 1st clamping components 4a and the 2nd clamping components 4b sets, 2 rollers 433 that support respectively with the rest pad 434 of pressing respectively in a plurality of briquettings 436 that are configured upside fixture 43 set as rotating at long side direction (along the direction of the 1st limit 1a and the 2nd limit 1b), 1st limit 1a and the 2nd limit 1b vertical with the 4th limit 1d with being configured the downside fixture 42 of the 3rd clamping components 4c and the 4th clamping components 4d and the 3rd limit 1c of upside fixture 43 clampings of described the 1st clamping components 4a and the 2nd clamping components 4b clamping splicing tape 1, therefore when splicing tape 1 is stretched while expanding in the direction shown in arrow A 1 and A2 (being left and right directions in Fig. 6), a plurality of rollers 423 that set at the downside hold assembly 422 that forms downside fixture 42, and 2 rollers 433 that the rest pad 434 of pressing respectively in a plurality of briquettings 436 that are configured upside fixture 43 supports respectively rotate.Therefore, when clamping the 3rd limit 1c of splicing tape 1 and the 4th limit 1d expand, even if utilize the clamping 1st limit 1a vertical with the 3rd limit 1c and the 4th limit 1d and the 1st clamping components 4a of the 2nd limit 1b and downside fixture 42 and the upside fixture 43 of the 2nd clamping components 4b to clamp, a plurality of rollers 423 that set due to the downside hold assembly 422 forming downside fixture 42, and 2 rollers 433 that the rest pad 434 of pressing respectively in a plurality of briquettings 436 that are configured upside fixture 43 supports respectively rotate, so can expand fully splicing tape 1.
Then, the 3rd limit 1c and the 4th limit 1d at the clamping splicing tape 1 shown in described Fig. 6 have carried out under the state of expansion, as shown in Figure 7, make to form the downside fixture 42 of the 1st clamping components 4a and the 2nd clamping components 4b and upside fixture 43 direction (being above-below direction in Fig. 7) shown in arrow B 1 and B2 in Fig. 7 mobile.Its result is that splicing tape 1 is stretched in the direction shown in arrow B 1 and B2 (being above-below direction in Fig. 7) and expands (the 2nd band expansion process).At this moment, a plurality of rollers 423 that the downside hold assembly 422 at downside fixture 42 of the 3rd clamping components 4c and the 4th clamping components 4d sets, 2 rollers 433 that support respectively with rest pad 434 being pressed respectively by a plurality of briquettings 436 of upside fixture 43 set as rotating at long side direction (along the direction of the 3rd limit 1c and the 4th limit 1d), 3rd limit 1c and the 4th limit 1d vertical with the 2nd limit 1b with being configured the downside fixture 42 of the 1st clamping components 4a and the 2nd clamping components 4b and the 1st limit 1a of upside fixture 43 clampings of described the 3rd clamping components 4c and the 4th clamping components 4d clamping splicing tape 1, therefore when splicing tape 1 is stretched while expanding in the direction shown in arrow B 1 and B2 (being above-below direction in Fig. 7), a plurality of rollers 423 that set at the downside hold assembly 422 that forms downside fixture 42, and 2 rollers 433 that the rest pad 434 of pressing respectively in a plurality of briquettings 436 that are configured upside fixture 43 supports respectively rotate.Therefore, when clamping the 1st limit 1a of splicing tape 1 and the 2nd limit 1b expand, even if utilize the clamping 3rd limit 1c vertical with the 1st limit 1a and the 2nd limit 1b and the 3rd clamping components 4c of the 4th limit 1d and downside fixture 42 and the upside fixture 43 of the 4th clamping components 4d to clamp, a plurality of rollers 423 that set due to the downside hold assembly 422 forming downside fixture 42, and 2 rollers 433 that the rest pad 434 of pressing respectively in a plurality of briquettings 436 that are configured upside fixture 43 supports respectively rotate, so can expand fully splicing tape 1.
In addition, in described execution mode, show such example: clamping under the 1st limit 1a of splicing tape 1 and the state of the 2nd limit 1b and the 3rd limit 1c and the 4th limit 1d, separately implement the 3rd limit 1c of expansion splicing tape 1 and the 4th limit 1d the 1st with expansion process, with the 1st limit 1a of expansion splicing tape 1 and the 2nd band expansion process of the 2nd limit 1b, but also can implement the 1st band expansion process simultaneously, be with expansion process with the 2nd.
By expanding as mentioned above the 3rd limit 1c and the 4th limit 1d and the 1st limit 1a and the 2nd limit 1b of splicing tape 1, as shown in Figure 8, at the wafer 10 that is pasted on splicing tape 1, be divided between the device 102 obtaining one by one, be formed with gap S.
In addition, even if longitudinal size and lateral dimension at device are different, be equipped on the file of device of wafer when different with the quantity of line, by the number of devices with setting, adjust accordingly the 1st limit 1a of splicing tape 1 and the expansion amount of the 2nd limit 1b and the 3rd limit 1c and the 4th limit 1d expansion amount, the gap S that can make to be divided between device is one by one constant, and can make gap form point-blank.
Then, at the described wafer 10 that is pasted on splicing tape 1, be divided into one by one and be formed with under the state of gap S between the device 102 that forms, as shown in Figure 9, the ring-shaped frame 7 with the big or small peristome 70 of taking in wafer 10 is installed to the surface that is coated with adhesive linkage (frame installation operation) of splicing tape 1.Its result is that as shown in figure 10, the wafer 10 that is formed with interval (s) between the device 102 being divided into is one by one received to the peristome 70 of ring-shaped frame 7, and is supported by ring-shaped frame 7 through splicing tape 1.Like this, ring-shaped frame 7 is being installed to behind the surface of splicing tape 1, along the periphery of ring-shaped frame 7, is cutting off splicing tape 1.Then, the wafer 10(that is bearing in ring-shaped frame 7 through splicing tape 1 being formed with to interval (s) between device 102) conveyance is to the operation of picking up of pickup device.
Above, according to illustrated execution mode, describe the present invention, but the present invention is not merely defined in execution mode, can in the scope of purport of the present invention, carries out various distortion.In described execution mode, show following example: a plurality of rest pads 434 and a plurality of pressing member 435 are provided in to upside fixture 43, a plurality of rest pads 434 support two rollers 433 for rotating, a plurality of pressing members 435 are pressed a plurality of rest pads 434, but also a plurality of rest pads 434 and a plurality of pressing member 435 can be provided in to downside fixture 42.
In addition, in said embodiment, show the example of expanding being pasted with the splicing tape 1 of the wafer 10 after cutting apart along spacing track 101, but, band extension fixture of the present invention also can be applied to following situation: the splicing tape that is formed with the wafer of modified layer to being pasted with along spacing track 101 in inside is expanded, thereby cuts apart wafer along the spacing track that is formed with modified layer.
Claims (2)
1. a band extension fixture, it is for expanding the band of rectangular shape,
Describedly with extension fixture, be characterised in that, it possesses:
The 1st clamping components, it is for the 1st limit of clamping band;
The 2nd clamping components, its for clamping band with opposed the 2nd limit, described the 1st limit;
The 3rd clamping components, it is for 3rd limit vertical with described the 1st limit and described the 2nd limit of clamping band;
The 4th clamping components, its for clamping band with opposed the 4th limit, described the 3rd limit; And
Expansion, it is for described the 1st clamping components, described the 2nd clamping components, described the 3rd clamping components and described the 4th clamping components are moved in the direction vertical with respect to each limit of clamping respectively,
Described the 1st clamping components, described the 2nd clamping components, described the 3rd clamping components and described the 4th clamping components have respectively downside fixture and upside fixture, on the top of described downside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping, in the bottom of described upside fixture, be equipped with a plurality of rollers at the direction rotation on the limit along clamping
Either party in described downside fixture and upside fixture possesses: rest pad, and it be take the mode with predetermined space by two rollers and supports as rotating; And pressing member, it is for pressing the binary active position in the interval by two rollers of described rest pad.
2. band extension fixture according to claim 1, wherein, described pressing member consists of following part: briquetting, it is supported to two rest pads can at active position, to rotate respectively; And actuator, it is for pressing the binary pressing position of the active position by two rest pads of described briquetting.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-209875 | 2012-09-24 | ||
| JP2012209875A JP6009885B2 (en) | 2012-09-24 | 2012-09-24 | Tape expansion unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103681292A true CN103681292A (en) | 2014-03-26 |
| CN103681292B CN103681292B (en) | 2017-08-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310435231.0A Active CN103681292B (en) | 2012-09-24 | 2013-09-23 | Band extension fixture |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6009885B2 (en) |
| KR (1) | KR101953395B1 (en) |
| CN (1) | CN103681292B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109637948A (en) * | 2017-10-06 | 2019-04-16 | 株式会社迪思科 | Extended method and expanding unit |
| CN109985829A (en) * | 2019-05-06 | 2019-07-09 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector dilator body |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6087707B2 (en) * | 2013-04-15 | 2017-03-01 | 株式会社ディスコ | Tape expansion unit |
| JP6468789B2 (en) * | 2014-10-20 | 2019-02-13 | リンテック株式会社 | Spacing device |
| JP6408366B2 (en) * | 2014-12-05 | 2018-10-17 | リンテック株式会社 | Separation device and separation method |
| KR102110282B1 (en) * | 2019-12-09 | 2020-05-13 | (주)한길패키지 | Cutoff apparatus for plastic bag manufacture apparatus and plastic bag manufacture apparatus |
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| US5769297A (en) * | 1994-07-20 | 1998-06-23 | Loomis; James W. | Apparatus and method for dicing semiconductor wafers |
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| CN109637948A (en) * | 2017-10-06 | 2019-04-16 | 株式会社迪思科 | Extended method and expanding unit |
| CN109637948B (en) * | 2017-10-06 | 2023-09-15 | 株式会社迪思科 | Expansion method and expansion device |
| CN109985829A (en) * | 2019-05-06 | 2019-07-09 | 山东泓瑞光电科技有限公司 | A kind of LED wafer automatic fraction collector dilator body |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101953395B1 (en) | 2019-02-28 |
| CN103681292B (en) | 2017-08-11 |
| KR20140040013A (en) | 2014-04-02 |
| JP6009885B2 (en) | 2016-10-19 |
| JP2014067749A (en) | 2014-04-17 |
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