CN104103585A - Tape expanding device - Google Patents
Tape expanding device Download PDFInfo
- Publication number
- CN104103585A CN104103585A CN201410144272.9A CN201410144272A CN104103585A CN 104103585 A CN104103585 A CN 104103585A CN 201410144272 A CN201410144272 A CN 201410144272A CN 104103585 A CN104103585 A CN 104103585A
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- clamping
- clamping components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Basic Packing Technique (AREA)
Abstract
A tape expanding device, even opposite two sides of a splicing tape are clamped to perform extending, so as to expand the splicing tape, perpendicular two sides cannot narrow, and the splicing tape can be fully expanded even in the state of clamping the perpendicular two sides. The tape expanding device comprises: a first clamping member for clamping a first side of the tape; a second clamping member for clamping a second side opposite to the first side; a third clamping member for clamping a third side perpendicular to the first side; a fourth clamping member for clamping a fourth side opposite to the third side; and an expanding member for enabling the first to fourth clamping members to respectively move in the directions perpendicular to the clamped sides, wherein the first to fourth clamping members respectively comprise a lower side clamping mechanism and an upper side clamping mechanism, an upper part of the lower side clamping mechanism is provided with a plurality of rollers, a lower part of the upper side clamping mechanism is provided with a plurality of rollers, in the first and second clamping members and/or third and fourth clamping members, the lower side and upper side clamping mechanisms consist of center clamping regions and end clamping regions, the end clamping regions are respectively configured to protrude towards the opposite side compared with the center clamping regions.
Description
Technical field
The present invention relates to for making the splicing tape that is pasted with wafer expand the band extension fixture that wafer is applied to external force.
Background technology
In semiconductor device manufacturing process, mark off multiple regions on the surface for the semiconductor wafer of circular plate shape roughly by being the preset lines of cutting apart that is known as spacing track that clathrate arranges, form IC(Integrated Circuit in the region that this marks off: integrated circuit), LSI(Large-scale Integration: large scale integrated circuit) etc. device.And, by semiconductor wafer being cut off along spacing track, cut apart thus and be formed with device area, produce device one by one.In addition, the optical device wafer forming for the superficial layer Azide gallium based compound semiconductor at sapphire substrate etc., also the preset lines of cutting apart specifying by edge is cut off, and is divided into the optical device such as light-emitting diode, laser diode one by one, is widely used in electric equipment.
As the method for cutting apart the above-mentioned machined object such as semiconductor wafer or optical device wafer, following such method is actually applied: use the pulse laser light this machined object to radioparent wavelength, the inside of focal point being aimed to the region that should cut apart is irradiated, form continuously modified layer along spacing track in the inside of machined object, along because of form this modified layer strength decreased spacing track apply external force, cut apart thus machined object.(for example,, with reference to patent documentation 1.）
And, as along because of form this modified layer strength decreased spacing track apply the technology of external force, in following patent documentation 2, record such technology: make to be pasted with the splicing tape expansion of wafer, then, make, under the state of splicing tape expansion, the framework of ring-type to be pasted on to splicing tape round being divided into the wafer of device one by one.
Patent documentation 1: No. 3408805 communique of Japanese Patent
Patent documentation 2: TOHKEMY 2006-229021 communique
And, what above-mentioned patent documentation 2 was recorded makes the technology of the splicing tape expansion that is pasted with wafer have such problem: owing to being the method that clips opposed 2 limits stretching of splicing tape, therefore, 2 vertical limits dwindle, and the device being partitioned into one by one that is pasted on splicing tape is sustained damage.In addition, if stretch opposed two limits under the state that is clamping 2 vertical limits, exist splicing tape fully not expand such problem.
Summary of the invention
The present invention completes in view of above-mentioned situation, its main technical task is to provide a kind of band extension fixture, even if clamping opposed 2 limits of splicing tape stretches and makes splicing tape expansion, 2 vertical limits of splicing tape also can not dwindle, and, even if clamping under the state on 2 vertical limits, also can make splicing tape fully expand.
In order to solve above-mentioned technical task, according to the present invention, provide a kind of band extension fixture, its band to rectangle is expanded, is describedly characterised in that with extension fixture,
Described band extension fixture possesses:
The 1st clamping components, the 1st limit of its clamping band; The 2nd clamping components, its clamping band with opposed the 2nd limit, the 1st limit; The 3rd clamping components, 3rd limit vertical with the 2nd limit with the 1st limit of its clamping band; The 4th clamping components, its clamping band with opposed the 4th limit, the 3rd limit; And expansion, it moves up respectively the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components in the side vertical with each limit of clamping,
The 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components possess respectively downside fixture and upside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping on the top of this downside fixture, in the bottom of this upside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping
Either party in this downside fixture and this upside fixture is made up of following part: rest pad, and it makes 2 rollers have the interval of regulation, and these 2 rollers are supported to and can be rotated; And pressing member, its press on this rest pad by the active position of the interval of 2 rollers 2 deciles,
At the 1st clamping components and the 2nd clamping components both and/or the 3rd clamping components and the 4th clamping components in both, this downside fixture and this upside fixture are made up of central clamping zone and the end clamping zone that is positioned at the both sides of this central authorities' clamping zone, and this end clamping zone is configured to respectively than this central authorities' clamping zone one side-prominent to opposite one another.
Be equipped with for circular table in the central authorities that surrounded by above-mentioned the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components, the mode that this end clamping zone in the 1st clamping components and the 2nd clamping components both and/or the 3rd clamping components and the 4th clamping components both downside fixture and upside fixture is oriented to the periphery of copying circular table is outstanding.
Above-mentioned pressing member is made up of following part: briquetting, and its active position place at 2 rest pads is supported to 2 rest pads respectively and can rotates; And actuator, its press in this briquetting by the pressing position of these active position 2 deciles of 2 rest pads.
In the band extension fixture forming according to the present invention, due to the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components possess respectively downside fixture and upside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping on the top of downside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping in the bottom of upside fixture, therefore, for example, in the time clamping the 3rd limit of splicing tape and the 4th limit and expanding, even if utilize clamping 1st limit vertical with the 4th limit with the 3rd limit and the 1st clamping components on the 2nd limit and downside fixture and the upside fixture of the 2nd clamping components to clamp, due to the multiple roller rotations that arrange on downside fixture and upside fixture, therefore splicing tape can be expanded fully.In addition, in the time clamping the 1st limit of splicing tape and the 2nd limit and expanding, even if utilize clamping 3rd limit vertical with the 2nd limit with the 1st limit and the 3rd clamping components on the 4th limit and downside fixture and the upside fixture of the 4th clamping components to clamp, due to the multiple roller rotations that arrange on downside fixture and upside fixture, therefore splicing tape can be expanded fully.
In addition, in band extension fixture of the present invention, because any one party in downside fixture and upside fixture possesses: rest pad, it makes 2 rollers have the interval of regulation, and these 2 rollers are supported to and can be rotated; And pressing member, its press on rest pad by the active position of the interval of 2 rollers 2 deciles, therefore, the multiple rest pads that are supported with 2 rollers are being pressed the active position of the interval of 2 rollers 2 deciles respectively, therefore, be configured to a pair of all 2 rollers can be disposed in multiple rollers on the downside hold assembly of upside fixture or downside fixture each limit with uniform power clamping splicing tape 1.
In addition, in band extension fixture of the present invention, at the 1st clamping components and the 2nd clamping components both and/or the 3rd clamping components and the 4th clamping components in both, downside fixture and upside fixture are made up of central clamping zone and the end clamping zone of the both sides that are positioned at central clamping zone, end clamping zone is configured to respectively than central clamping zone one side-prominent to opposite one another, therefore,, in the time of spreading belt, the tensile force that can overcome the band of four jiaos clamps securely.
Brief description of the drawings
Fig. 1 is the stereogram with extension fixture forming according to the present invention.
Fig. 2 is the major part stereogram of the upside fixture with extension fixture shown in pie graph 1.
Fig. 3 is by the stereogram shown in the major part decomposition of the upside fixture shown in Fig. 2.
Fig. 4 is by the front view shown in the major part amplification of the downside fixture of the clamping components with extension fixture shown in pie graph 1 and upside fixture.
Fig. 5 is the key diagram that uses the band of implementing with the extension fixture clamping operation shown in Fig. 1.
Fig. 6 uses the 1st key diagram with expansion process of implementing with extension fixture shown in Fig. 1.
Fig. 7 uses the 2nd key diagram with expansion process of implementing with extension fixture shown in Fig. 1.
Fig. 8 be illustrated in implemented the 1st with expansion process and the 2nd key diagram of the state that is divided into device one by one with pasting on the splicing tape after expansion process.
Fig. 9 is the key diagram that uses the frame installation operation of implementing with extension fixture shown in Fig. 1.
Figure 10 is the cutaway view that following state is shown: implemented the frame installation operation shown in Fig. 9, the wafer 10 that is formed with interval (s) between the device being divided into is one by one supported in the framework of ring-type via splicing tape.
Figure 11 is the vertical view of the splicing tape by expanding with extension fixture.
Label declaration
1: splicing tape;
2: band extension fixture;
20: fixed pedestal;
3: circular table;
4a: the 1st clamping components;
4b: the 2nd clamping components;
4c: the 3rd clamping components;
4d: the 4th clamping components;
41: movable base;
42A, 42B: downside fixture;
422A, 422B: downside hold assembly;
423: roller;
43A, 43B: upside fixture;
433: roller;
434: rest pad;
435: pressing member;
436: briquetting;
437: actuator;
44: the 1 travel mechanisms;
45: the 2 travel mechanisms;
5a: the 1st band expansion;
5b: the 2nd band expansion;
5c: the 3rd band expansion;
5d: the 4th band expansion;
7: the framework of ring-type;
10: wafer.
Embodiment
Below, with reference to accompanying drawing, to preferred embodiment at length the describing with extension fixture forming according to the present invention.
Figure 11 illustrates the vertical view of the splicing tape by expanding with extension fixture.Illustrated splicing tape 1 is formed as square (rectangle), and possesses: the 1st limit 1a; The 2nd limit 1b, itself and the 1st limit 1a are opposed; The 3rd limit 1c, it is vertical with the 2nd limit 1b with the 1st limit 1a; With the 4th limit 1d, itself and the 3rd limit 1c are opposed.Surface-coated at the splicing tape 1 forming like this has adhesive linkage, is pasted with wafer 10 at its surperficial central portion.And, for wafer 10, in the illustrated embodiment, be clathrate at surperficial 10a and be formed with multiple spacing tracks 101, and, wafer 10 is made up of the semiconductor wafer that is formed with respectively device 102 in the multiple regions that marked off by the plurality of spacing track 101, and wafer 10 has been divided into device 102 one by one along spacing track 101.
Next, describe referring to figs. 1 through Fig. 3 for the band extension fixture for expanding splicing tape 1, on described splicing tape 1, be pasted with the wafer 10 that is divided into above-mentioned device one by one 102.
Figure 1 illustrates the stereogram of the execution mode with extension fixture forming according to the present invention.
Band extension fixture 2 in execution mode shown in Fig. 1 possesses: fixed pedestal 20; Circular table 3, the central portion upper surface that it is disposed in this fixed pedestal 20, loads above-mentioned splicing tape 1; The 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d, they arrange round this circular table 3, and the above-mentioned splicing tape 1 being loaded on circular table 3 is clamped; And the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c and the 4th band expansion 5d, they make respectively the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d moving radially along circular table 3.And, in the illustrated embodiment, the 1st clamping components 4a clamps the 1st limit 1a of above-mentioned splicing tape 1, the 2nd clamping components 4b clamping and opposed the 2nd limit 1b of the 1st limit 1a, the 3rd clamping components 4c clamping 3rd limit 1c vertical with the 2nd limit 1b with the 1st limit 1a, the 4th clamping components 4d clamping and opposed the 4th limit 1d of the 3rd limit 1c.In addition, the 1st with expansion 5d, the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are moved respectively with the 4th with expansion 5c in the direction vertical with each limit of the splicing tape 1 of clamping with expansion 5b, the 3rd with expansion 5a, the 2nd.
Above-mentioned fixed pedestal 20 is formed as rectangle, surface is formed with the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d thereon, these guiding grooves have mutually 90 degree angle towards the center of above-mentioned circular table 3 and form.In addition, the peripheral part that is formed with above-mentioned the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d of fixed pedestal 20 is formed as to foreign side outstanding.
Above-mentioned circular table 3 is supported member 30 and is supported on the upper surface of fixed pedestal 20.This supporting member 30 is configured in the illustrated embodiment and can makes circular table 3 move up at upper and lower.
Above-mentioned the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are disposed in respectively the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d top that are formed at above-mentioned fixed pedestal 20., 4 clamping components 4a, 4b, 4c, 4d are arranged in week and upwards have mutually equal angle.The 1st clamping components 4a and the 2nd clamping components 4b that are disposed in like this on fixed pedestal 20 are identical structure in the illustrated embodiment, and possess respectively: movable base 41, and it is formed as L word shape; Downside fixture 42A and upside fixture 43A, they are installed on this movable base 41 in the mode that can move up at upper and lower; And the 1st travel mechanism 44 and the 2nd travel mechanism 45, they move up respectively this downside fixture 42A and upside fixture 43A at upper and lower.In addition, the 3rd clamping components 4c and the 4th clamping components 4d are identical structure in the illustrated embodiment, and possess respectively: movable base 41, and it is formed as L word shape; Downside fixture 42B and upside fixture 43B, they are installed on this movable base 41 in the mode that can move up at upper and lower; And the 1st travel mechanism 44 and the 2nd travel mechanism 45, they move up respectively this downside fixture 42B and upside fixture 43B at upper and lower.Like this, the 1st clamping components 4a and the 2nd clamping components 4b, same the 3rd clamping components 4c and the 4th clamping components 4d, except downside fixture 42A and upside fixture 43A and downside fixture 42B and upside fixture 43B, are configured to identical structure.
Movable base 41 is made up of moving part 411 and support 412, and this support 412 erects setting and forms from the upper surface of this moving part 411.Be provided with at the lower surface of moving part 411 the directed track 411a being embedded in respectively in above-mentioned the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d, by this directed track 411a is embedded in respectively in above-mentioned the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d, movable base 41 is formed on fixed pedestal 20 in the mode that can move along above-mentioned the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d respectively.In addition, in moving part 411, run through and be formed with internal thread 411b.On the face (face of a side opposite one another) of the inner side of above-mentioned support 412, be provided with at the upwardly extending guide rail 412a of upper and lower, on the face in the outside of above-mentioned support 412, be formed with at the upwardly extending elongated slot 412b of upper and lower.In addition, be formed with slotted hole 412c on guide rail 412a, this slotted hole 412c arrives above-mentioned elongated slot 412b from the face of inner side, and extends on above-below direction.
Downside fixture 42A, the 42A of above-mentioned the 1st clamping components 4a and the 2nd clamping components 4b are made up of following part respectively: supporting arm 421, and it is arranged to and can moves along the guide rail 412a of setting on the support 412 in above-mentioned movable base 41; With downside hold assembly 422A, it is installed on this supporting arm 421.Be provided with the directed groove 421a chimeric with above-mentioned guide rail 412a at the cardinal extremity of supporting arm 421, by by chimeric to this directed groove 421a and guide rail 412a, thus, supporting arm 421 is configured to and can moves up at upper and lower along the guide rail 412a of the support of movable base 41 412.In addition, be provided with internal thread piece 421c at the base portion of supporting arm 421, this internal thread piece 421c possesses internal thread 421b, and this internal thread piece 421c is arranged to pass through and inserts in above-mentioned slotted hole 412c.Above-mentioned downside hold assembly 422A is formed as rectangular-shaped in the illustrated embodiment, and is arranged to length direction towards the direction vertical with directed track 411a.Downside hold assembly 422A, the 422A of downside fixture 42A, 42A forming like this possesses respectively central clamping zone 422a and is positioned at end clamping zone 422b, the 422b of the both sides of the clamping zone 422a of these central authorities, and this end clamping zone 422b, 422b are arranged to respectively than central clamping zone 422a one side-prominent to opposite one another.Be upper surface in the downside hold assembly 422A forming like this, the clamping face side of 422A, be equipped with the multiple rollers 423 that rotate on the length direction of downside hold assembly 422A.
Downside fixture 42B, the 42B of above-mentioned the 3rd clamping components 4c and the 4th clamping components 4d are made up of following part respectively: supporting arm 421, and it is arranged to and can moves along the guide rail 412a of setting on the support 412 in above-mentioned movable base 41; With downside hold assembly 422B, it is installed on this supporting arm 421.Be provided with the directed groove 421a chimeric with above-mentioned guide rail 412a at the cardinal extremity of supporting arm 421, by by chimeric to this directed groove 421a and guide rail 412a, thus, supporting arm 421 is configured to and can moves up at upper and lower along the guide rail 412a of the support of movable base 41 412.In addition, be provided with internal thread piece 421c at the base portion of supporting arm 421, this internal thread piece 421c possesses internal thread 421b, and this internal thread piece 421c is arranged to pass through and is inserted in above-mentioned slotted hole 412c.Above-mentioned downside hold assembly 422 is formed as rectangular-shaped in the illustrated embodiment, and is arranged to length direction towards the direction vertical with directed track 411a.Downside hold assembly 422B, the 422B of downside fixture 42B, the 42B forming are like this formed as linearity, and are that upper surface is equipped with the multiple rollers 423 that rotate on the length direction of downside hold assembly 422B in clamping face side.
Upside fixture 43A, the 43A of above-mentioned the 1st clamping components 4a and the 2nd clamping components 4b possess: supporting arm 431, and it is arranged to and can moves along the guide rail 412a of setting on the support 412 in above-mentioned movable base 41; With supporting cover 432A, 432A, they are installed on this supporting arm 431.Be provided with the directed groove 431a chimeric with above-mentioned guide rail 412a at the cardinal extremity of supporting arm 431, by by chimeric to this directed groove 431a and guide rail 412a, thus, supporting arm 431 is configured on the support 412 of movable base 41 and can moves up at upper and lower along guide rail 412a.In addition, be provided with internal thread piece 431c at the base portion of supporting arm 431, this internal thread piece 431c possesses internal thread 431b, and this internal thread piece 421c is arranged to pass through and is inserted in above-mentioned slotted hole 412c.
Above-mentioned supporting cover 432A, 432A possess respectively central clamping zone 432a and are positioned at end clamping zone 432b, the 432b of the both sides of the clamping zone 432a of these central authorities, and this end clamping zone 432b, 432b are arranged to respectively than central clamping zone 432a one side-prominent to opposite one another.For the component parts in supporting cover 432A, the 432A forming like this that is disposed in of upside fixture 43A, 43A, describe with reference to Fig. 2 and Fig. 3.Upside fixture 43A, 43A shown in Fig. 2 and Fig. 3 possess respectively: rest pad 434, and it makes 2 rollers 433 have the interval of regulation and they is supported to and can be rotated; With pressing member 435, its press on this rest pad by the active position of the interval of 2 rollers 2 deciles.Rest pad 434 possesses roller support 434a and presses service portion 434b, this press service portion 434b on this roller support 434a from upper end horizontal-extending.The compartment of terrain that separates regulation on roller support 434a is equipped with 2 bolster 433a, and roller 433 is supported on this 2 bolster 433a in the mode that can rotate respectively.And, form rest pad 434 press on service portion 434b by 2 bolster 433a(2 rollers 433) the active position of interval 2 deciles be provided with axle and pass through jack 434c.The rest pad 434 forming is like this pressed taking 2 as a pair of member 435 that is pressed.
Pressing member 435 is made up of following part: briquetting 436, and its active position place at 2 rest pads 434 is supported to 2 rest pads 434 respectively and can rotates; With actuator 437, its press in this briquetting 436 by the pressing position of the active position of 2 rest pads 434 2 deciles.Briquetting 436 is made up of upper wall 436a, sidewall 436b and 436c and end wall 436d and 436e, and briquetting 436 is formed as the unlimited case shape of downside.2 bolsters (not shown) of installing on the sidewall 436b of the briquetting 436 forming are like this embedded in the above-mentioned axle arranging on service portion 434b of pressing forming rest pad 434 in the mode that can rotate respectively and pass through in jack 434c.On the upper wall 436a of the briquetting 436 forming like this, a pair of connecting member 438a, 438b for linking actuator 437 are installed.On a connecting member 438a, be formed with and pass through jack 438c, on another connecting member 438b, be formed with screwed hole 438d.Actuator 437 is made up of cylinder mechanism in the illustrated embodiment, is formed with connect apertures 437b at the terminal part of its piston rod 437a.The terminal part of the piston rod 437a of the actuator 437 forming is like this positioned between a pair of connecting member 438a, 438b, binder bolt 439 is run through and is inserted in the connect apertures 437b that passes through jack 438c and form at the terminal part of piston rod 437a forming on a connecting member 438a, and be screwed together in the screwed hole 438d forming on another connecting member 438b, thus, the piston rod 437a that forms actuator 437 is linked up with upper a pair of connecting member 438a, the 438b of the upper wall 436a that is arranged on briquetting 436.The actuator 437 forming is like this installed in the upper wall of above-mentioned supporting cover 432A.
The upside fixture 43A, the 43A that form are as above arranged to above-mentioned downside fixture 42A, 42A opposed., be positioned to respectively with central clamping zone 422a and end clamping zone 422b, the 422b of downside fixture 42A, 42A that forms downside fixture 42A, 42A opposed by forming the central clamping zone 432a of supporting cover 432A, 432A of upside fixture 43A, 43A and end clamping zone 432b, 432b.And, on multiple rest pads 434 of upside fixture 43A, be supported with respectively multiple rollers 433 of 2 be adapted to downside hold assembly 422A at above-mentioned downside fixture 42A on multiple rollers 423 of arranging opposed.And the end clamping zone 432b in end clamping zone 422b, 422b and upside fixture 43A, 43A in downside fixture 42A, 42A, the mode that 432b is oriented to the periphery of copying circular table 3 are given prominence to.
Return to Fig. 1 and go on to say, upside fixture 43B, the 43B of above-mentioned the 3rd clamping components 4c and the 4th clamping components 4d have respectively: supporting arm 431, and it is arranged to and can moves along the guide rail 412a of setting on the support 412 in above-mentioned movable base 41; With supporting cover 432,432, they are installed on this supporting arm 431.Be provided with the directed groove 431a chimeric with above-mentioned guide rail 412a at the cardinal extremity of supporting arm 431, by by chimeric to this directed groove 431a and guide rail 412a, thus, supporting arm 431 is configured on the support 412 of movable base 41 and can moves up at upper and lower along guide rail 412a.In addition, be provided with internal thread piece 431c at the base portion of supporting arm 431, this internal thread piece 431c possesses internal thread 431b, and this internal thread piece 421c is arranged to pass through and is inserted in above-mentioned slotted hole 412c.
Downside hold assembly 422B, the 422B of above-mentioned supporting cover 432,432 and downside fixture 42B, 42B are formed as linearity accordingly, and are oriented to downside hold assembly 422B, 422B opposed.In the supporting cover 432,432 forming like this, the multiple rollers 433 that are supported with respectively 2 on above-mentioned multiple rest pads 434 are arranged to the multiple rollers 423 that arrange on downside hold assembly 422B opposed.
Go on to say with reference to Fig. 1, the 1st travel mechanism 44 that above-mentioned downside fixture 42A, 42A and downside fixture 42B, 42B are moved up at upper and lower is respectively made up of following part: external thread rod 441, itself and guide rail 412a are disposed on the support 412 of above-mentioned movable base 41 in the elongated slot 412b forming abreast, and the internal thread 421b of the internal thread piece 421c arranging with the base portion place at above-mentioned supporting arm 421 screws togather; Bearing 442, it is disposed in the support 412 of movable base 41, and an end of external thread rod 441 is supported to and can be rotated; And impulse motor 443, the other end of itself and external thread rod 441 links, for driving external thread rod 441 to rotate.The 1st travel mechanism's 44 driving pulse motors 443 that form like this make external thread rod 441 rotate to a direction or another direction, make respectively thus downside fixture 42A, 42A and downside fixture 42B, 42B move up at upper and lower along guide rail 412a.
The 2nd travel mechanism 45 that above-mentioned upside fixture 43A, 43A and upside fixture 43B, 43B are moved up at upper and lower is respectively structures identical with above-mentioned the 1st travel mechanism 44, and is disposed in the upside of the 1st travel mechanism 44.; the 2nd travel mechanism 45 is made up of following part: external thread rod 451; itself and guide rail 412a are disposed on the support 412 of above-mentioned movable base 41 in the elongated slot 412b forming abreast, and the internal thread 431b of the internal thread piece 431c arranging with the base portion place at above-mentioned supporting arm 431 screws togather; Bearing 452, it is disposed in the support 412 of movable base 41, and an end of external thread rod 451 is supported to and can be rotated; And impulse motor 453, the other end of itself and external thread rod 451 links, for driving external thread rod 451 to rotate.The 2nd travel mechanism's 45 driving pulse motors 453 that form like this make external thread rod 451 rotate to a direction or another direction, make respectively thus upside fixture 43A, 43A and upside fixture 43B, 43B move up at upper and lower along guide rail 412a.
Make respectively above-mentioned the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d be with expansion 5d along the 1st band expansion 5a moving radially, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th of circular table 3, arrange along above-mentioned the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d that form on above-mentioned fixed pedestal 20 respectively.The 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band expansion 5d are made up of following part respectively: external thread rod 51, it is arranged to parallel with the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d, and with moving part 411 in above-mentioned movable base 41 on the internal thread 411b that forms screw togather; Bearing 52, it is disposed in above-mentioned fixed pedestal 20, and an end of external thread rod 51 is supported to and can be rotated; And impulse motor 53, the other end of itself and external thread rod 51 links, for driving external thread rod 51 to rotate.The 1st band expansion 5a, the 2nd band expansion 5b that form like this, the 3rd band expansion 5c, the 4th band expansion 5d respectively driving pulse motor 53 make external thread rod 51 rotate to a direction or another direction, make thus the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d moving radially along circular table 3 respectively.
Band extension fixture 2 in execution mode shown in Fig. 1 to Fig. 3 forms as above, below its effect is described.
Being pasted with wafer 10(at surperficial central portion and being divided into device 102 one by one shown in above-mentioned Figure 11) splicing tape 1 loaded on circular table 3 by not shown carrying device.Now, splicing tape 1 is loaded into makes the 1st limit 1a towards the 1st clamping components 4a, makes the 2nd limit 1b towards the 2nd clamping components 4b, makes the 3rd limit 1c towards the 3rd clamping components 4c, makes the 4th limit 1d towards the 4th clamping components 4d.And now the upper surface of circular table 3 is positioned in downside fixture 42A, the 42A of above-mentioned the 1st clamping components 4a and the 2nd clamping components 4b and downside fixture 42B, the 42B of the 3rd clamping components 4c and the 4th clamping components 4d, height with the centre position of the 1st clamping components 4a and upside fixture 43A, the 43A of the 2nd clamping components 4b and upside fixture 43B, the 43B of the 3rd clamping components 4c and the 4th clamping components 4d.
Next, make the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band expansion 5d work, by downside fixture 42B, the 42B of downside fixture 42A, the 42A of the 1st clamping components 4a and the 2nd clamping components 4b and the 3rd clamping components 4c and the 4th clamping components 4d, be positioned at the position that can clamp splicing tape 1 with the 1st clamping components 4a and upside fixture 43A, the 43A of the 2nd clamping components 4b and upside fixture 43B, the 43B of the 3rd clamping components 4c and the 4th clamping components 4d.Then, the 1st travel mechanism 44 and the 2nd travel mechanism 45 that form the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d are worked, and, make to form upside fixture 43(A, B) actuator 437 work, through briquetting 436, rest pad 434 is pressed downwards.Consequently, as shown in Figure 4 and Figure 5, utilize at downside fixture 42(A, B) downside hold assembly 422(A, B) on the multiple rollers 423 and upside fixture 43(A, the B that arrange) at rest pad 434(with reference to Fig. 3) multiple briquettings 436 of (respectively by upside fixture 43(A, B) press) be respectively supported with the roller 433 of 2, each limit (band clamping operation) of clamping splicing tape 1.Now, each multiple rest pads 434 that 2 rollers 433 are supported are being pressed the active position of the interval of 2 rollers 433 2 deciles respectively, therefore, be configured to a pair of all 2 rollers 433 can be disposed in downside fixture 42(A, B) downside hold assembly 422(A, B) on multiple rollers 423 with each limit of uniform power clamping splicing tape 1.Under the state on each limit that is clamping like this splicing tape 1, as shown in Figure 5, the briquetting 436 of end clamping zone 432b, the 432b in upside fixture 43A, the 43A with expansion 5b is oriented to give prominence to a side (center side) opposite one another than the briquetting of central clamping zone 432a 436 with expansion 5a and the 2nd to form the 1st.And, although do not illustrate in Fig. 5, but, end clamping zone 422b, the 422b in downside fixture 42A, the 42A with expansion 5b is also oriented to than central clamping zone 422a by a side (center side) opposite one another with expansion 5a and the 2nd to form the 1st, and be positioned in upside fixture 43A, 43A in end clamping zone 432b, the opposed position of 432b.
As shown in Figure 4 and Figure 5, utilizing at downside fixture 42(A, B) downside hold assembly 422(A, B) the multiple rollers 423 that arrange on, with upside fixture 43(A, B) at rest pad 434(with reference to Fig. 3) (being pressed by multiple briquettings 436 respectively) be respectively supported with the roller 433 of 2 and clamp behind each limit of splicing tape 1, for example make the 3rd band expansion 5c and the 4th band expansion 5d work, as shown in Figure 6, make to form the downside fixture 42B of the 3rd clamping components 4c and the 4th clamping components 4d and upside fixture 43B mobile to the direction (being left and right directions) shown in arrow A 1 in Fig. 6 and A2 in Fig. 6.Consequently, splicing tape 1 is stretched to the direction shown in arrow A 1 and A2 (being left and right directions in Fig. 6) and is expanded (the 1st band expansion process).Now, the 3rd limit 1c of splicing tape 1 and the 4th limit 1d are configured downside fixture 42B and the upside fixture 43B clamping of the 3rd clamping components 4c and the 4th clamping components 4d, the 1st clamping components 4a and the 2nd clamping components 4b clamping 1st limit 1a and the 2nd limit 1b vertical with the 4th limit 1d with the 3rd limit 1c of splicing tape 1, the multiple rollers 423 that arrange on the downside hold assembly 422A of the formation downside fixture 42A of the 1st clamping components 4a and the 2nd clamping components 4b and be supported on respectively multiple briquettings 436 that rest pad 434(is configured respectively upside fixture 43A and press) 2 rollers 433 be arranged in the upper rotation of length direction (along the direction of the 1st limit 1a and the 2nd limit 1b), therefore, in the time that splicing tape 1 is expanded to the direction shown in arrow A 1 and A2 (being left and right directions in Fig. 6) stretching, press forming the multiple rollers 423 that arrange on the downside hold assembly 422A of downside fixture 42A and be supported on respectively multiple briquettings 436 that rest pad 434(is configured respectively upside fixture 43A) 2 rollers 433 rotate.Therefore, in the time clamping the 3rd limit 1c of splicing tape 1 and the 4th limit 1d and expanding, even if utilize the clamping 1st limit 1a vertical with the 4th limit 1d with the 3rd limit 1c and the 1st clamping components 4a of the 2nd limit 1b and the downside fixture 42A of the 2nd clamping components 4b and upside fixture 43A to clamp, owing to pressing forming the multiple rollers 423 that arrange on the downside hold assembly 422A of downside fixture 42A and be supported on respectively multiple briquettings 436 that rest pad 434(is configured respectively upside fixture 43A) 2 rollers 433 rotate, therefore splicing tape 1 can be expanded fully.In addition, form the 1st with expansion 5a and the 2nd end clamping zone 422b, the 422b in downside fixture 42A, the 42A with expansion 5b and form the 1st end clamping zone 432b, the 432b in upside fixture 43A, the 43A with expansion 5b is oriented to respectively more outstanding to a side (center side) opposite one another than central clamping zone 422a and 432a with expansion 5a and the 2nd, therefore, in the time having expanded splicing tape 1, the tensile force that can overcome the band of four jiaos clamps firmly.And, because the end clamping zone 432b in end clamping zone 422b, 422b and upside fixture 43A, 43A in above-mentioned downside fixture 42A, 42A, mode that 432b is oriented to the periphery of copying circular table 3 are outstanding, therefore, in the time having expanded splicing tape 1, the tensile force that can overcome the band of four jiaos clamps firmly.
Next, carry out under the state of expansion at the 3rd limit 1c that is clamping splicing tape 1 shown in the 6th above-mentioned figure and the 4th limit 1d, as shown in Figure 7, make to form the downside fixture 42A of the 1st clamping components 4a and the 2nd clamping components 4b and upside fixture 43A mobile to the direction (being above-below direction) shown in arrow B 1 in Fig. 7 and B2 in Fig. 7.Consequently, splicing tape 1 is stretched to the direction shown in arrow B 1 and B2 (being above-below direction in Fig. 7) and is expanded (the 2nd band expansion process).Now, the 1st limit 1a of splicing tape 1 and the 2nd limit 1b are configured downside fixture 42A and the upside fixture 43A clamping of the 1st clamping components 4a and the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d clamping 3rd limit 1c and the 4th limit 1d vertical with the 2nd limit 1b with the 1st limit 1a of splicing tape 1, the multiple rollers 423 that arrange on the downside hold assembly 422B of the downside fixture 42B of the 3rd clamping components 4c and the 4th clamping components 4d and the rest pad 434(that is supported on respectively of upside fixture 43B are pressed by multiple briquettings 436 of upside fixture 43B respectively) 2 rollers 433 be adapted in the upper rotation of length direction (along the direction of the 3rd limit 1c and the 4th limit 1d), therefore, in the time that splicing tape 1 is expanded to the direction shown in arrow B 1 and B2 (being above-below direction in Fig. 7) stretching, press forming the multiple rollers 423 that arrange on the downside hold assembly 422B of downside fixture 42B and be supported on respectively multiple briquettings 436 that rest pad 434(is configured respectively upside fixture 43B) 2 rollers 433 rotate.Therefore, in the time that clamping the 1st limit 1a of splicing tape 1 and the 2nd limit 1b expand, even if utilize the clamping 3rd limit 1c vertical with the 2nd limit 1b with the 1st limit 1a and the 3rd clamping components 4c of the 4th limit 1d and the downside fixture 42B of the 4th clamping components 4d and upside fixture 43B to clamp, owing to pressing forming the multiple rollers 423 that arrange on the downside hold assembly 422B of downside fixture 42B and be supported on respectively multiple briquettings 436 that rest pad 434(is configured respectively upside fixture 43B) 2 rollers 433 rotate, therefore splicing tape 1 can be expanded fully.
And, in the above-described embodiment, show such example: clamping under the 1st limit 1a of splicing tape 1 and the state of the 2nd limit 1b and the 3rd limit 1c and the 4th limit 1d, separately implement to make the 3rd limit 1c of splicing tape 1 and the 4th limit 1d expansion the 1st with expansion process with make the 1st limit 1a of splicing tape 1 and the 2nd band expansion process of the 2nd limit 1b expansion, but, also can implement the 1st band expansion process and the 2nd band expansion process simultaneously.
By expanding as above the 3rd limit 1c and the 4th limit 1d and the 1st limit 1a and the 2nd limit 1b of splicing tape 1, thus, as shown in Figure 8, be divided between the device 102 forming one by one and formed gap S sticking on wafer 10 on splicing tape 1.
And, even in the case of the size difference of the vertical and horizontal of device and be disposed in the file of device of wafer different with the number of line, adjust the amount of expansion of the 1st limit 1a of splicing tape 1 and the amount of expansion of the 2nd limit 1b and the 3rd limit 1c and the 4th limit 1d by the quantity corresponding to the device arranging, can make to be divided into gap S between device one by one constant, and can make gap form point-blank.
Next, be divided between the device 102 forming one by one and be formed with under the state of gap S being pasted on wafer 10 on above-mentioned splicing tape 1, as shown in Figure 9, the framework of ring-type 7 is installed on to the surface that is coated with adhesive linkage of splicing tape 1, this framework 7 has the big or small peristome 70(frame installation operation of storage wafer 10).Consequently, as shown in figure 10, the wafer 10 that is formed with interval (s) between the device 102 being divided into is one by one incorporated in the peristome 70 of the framework 7 of ring-type, and this wafer 10 is supported by the framework 7 of ring-type via splicing tape 1.Like this, the framework of ring-type 7 is being installed on behind the surface of splicing tape 1, is cutting off splicing tape 1 along the periphery of the framework 7 of ring-type.Then the wafer 10(that, is supported in the framework 7 of ring-type via splicing tape 1 is formed with interval (s) between device 102) operation of picking up by conveyance to pickup device.
Above, describe the present invention based on illustrated execution mode, but the present invention is not merely defined in execution mode, can in the scope of aim of the present invention, carries out various distortion.In the above-described embodiment, show such example: formation the 1st is the downside fixture 42A with expansion 5b with expansion 5a and the 2nd, end clamping zone 422b in 42A, 422b, with form the 1st with expansion 5a and the 2nd the upside fixture 43A with expansion 5b, end clamping zone 432b in 43A, 432b is oriented to respectively more outstanding to a side (center side) opposite one another than central clamping zone 422a and 432a, still, and also can be by the downside fixture 42B of the 3rd clamping components 4c and the 4th clamping components 4d, 42B and upside fixture 43B, it is more outstanding to a side (center side) opposite one another than central clamping zone that the end clamping zone location of 43B becomes, also can by form the 1st with expansion 5a and the 2nd the downside fixture 42A with expansion 5b, 42A, downside fixture 42B with the 3rd clamping components 4c and the 4th clamping components 4d, 42B and upside fixture 43B, 43B both sides' end clamping zone location becomes more outstanding to a side (center side) opposite one another than central clamping zone.
In addition, in the above-described embodiment, show such example: 2 rollers 433 are supported to multiple rest pads 434 that can rotate and multiple pressing members 435 of pressing multiple rest pads 434 and are disposed in upside fixture 43A, 43B, but, also multiple rest pads 434 and multiple pressing member 435 can be disposed in to downside fixture 42A, 42B.
And, in the above-described embodiment, show and make to be pasted with the example of expanding along the splicing tape 1 of the divided wafer of opening 10 of spacing track 101, but, of the present invention also can be for such situation with extension fixture: make pasting the splicing tape expansion of the wafer that is formed with modified layer along spacing track 101 in inside, cut apart wafer along the spacing track that is formed with modified layer.
Claims (3)
1. a band extension fixture, its band to rectangle is expanded,
Describedly be characterised in that with extension fixture,
Described band extension fixture possesses: the 1st clamping components, the 1st limit of its clamping band; The 2nd clamping components, its clamping band with opposed the 2nd limit, the 1st limit; The 3rd clamping components, 3rd limit vertical with the 2nd limit with the 1st limit of its clamping band; The 4th clamping components, its clamping band with opposed the 4th limit, the 3rd limit; And expansion, it moves up respectively the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components in the side vertical with each limit of clamping,
The 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components possess respectively downside fixture and upside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping on the top of this downside fixture, in the bottom of this upside fixture, be equipped with the multiple rollers that rotate up in the side on the limit along clamping
Either party in this downside fixture and this upside fixture is made up of following part: rest pad, and it makes 2 rollers have the interval of regulation, and these 2 rollers are supported to and can be rotated; And pressing member, its press on this rest pad by the active position of the interval of 2 rollers 2 deciles,
At the 1st clamping components and the 2nd clamping components both and/or the 3rd clamping components and the 4th clamping components in both, this downside fixture and this upside fixture are made up of central clamping zone and the end clamping zone that is positioned at the both sides of this central authorities' clamping zone, and this end clamping zone is configured to respectively than this central authorities' clamping zone one side-prominent to opposite one another.
2. band extension fixture according to claim 1, is characterized in that,
Be equipped with the circular table of the band for loading this rectangle in the central authorities that surrounded by the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components, the mode that this end clamping zone in the 1st clamping components and the 2nd clamping components both and/or the 3rd clamping components and both this downside fixtures of the 4th clamping components and this upside fixture is oriented to the periphery of copying circular table is outstanding.
3. band extension fixture according to claim 1 and 2, is characterized in that,
Above-mentioned pressing member is made up of following part: briquetting, and its active position place at 2 rest pads is supported to 2 rest pads respectively and can rotates; And actuator, its press in this briquetting by the pressing position of the active position of 2 rest pads 2 deciles.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-084783 | 2013-04-15 | ||
| JP2013084783A JP6087707B2 (en) | 2013-04-15 | 2013-04-15 | Tape expansion unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104103585A true CN104103585A (en) | 2014-10-15 |
| CN104103585B CN104103585B (en) | 2018-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410144272.9A Active CN104103585B (en) | 2013-04-15 | 2014-04-11 | Band extension fixture |
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| Country | Link |
|---|---|
| JP (1) | JP6087707B2 (en) |
| CN (1) | CN104103585B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109637948A (en) * | 2017-10-06 | 2019-04-16 | 株式会社迪思科 | Extended method and expanding unit |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6408366B2 (en) * | 2014-12-05 | 2018-10-17 | リンテック株式会社 | Separation device and separation method |
| JP6363947B2 (en) * | 2014-12-26 | 2018-07-25 | リンテック株式会社 | Separation device and separation method |
| JP7224214B2 (en) * | 2019-03-13 | 2023-02-17 | 株式会社ディスコ | expansion unit |
| JP7377671B2 (en) * | 2019-10-18 | 2023-11-10 | 株式会社ディスコ | How to expand the sheet |
| JP7312666B2 (en) * | 2019-10-18 | 2023-07-21 | 株式会社ディスコ | seat extender |
| JP7316729B2 (en) * | 2019-10-18 | 2023-07-28 | 株式会社ディスコ | seat extender |
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| JPS5984438A (en) * | 1982-11-04 | 1984-05-16 | Nec Corp | Sheet expansion device |
| JP5496692B2 (en) * | 2010-01-22 | 2014-05-21 | 三洋電機株式会社 | Manufacturing method of semiconductor module |
| JP6009885B2 (en) * | 2012-09-24 | 2016-10-19 | 株式会社ディスコ | Tape expansion unit |
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| JPH0212944A (en) * | 1988-06-30 | 1990-01-17 | Nec Corp | Sheet enlarging apparatus for manufacture of semiconductor device |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2014207358A (en) | 2014-10-30 |
| JP6087707B2 (en) | 2017-03-01 |
| CN104103585B (en) | 2018-01-23 |
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