CN104103585B - Band extension fixture - Google Patents
Band extension fixture Download PDFInfo
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- CN104103585B CN104103585B CN201410144272.9A CN201410144272A CN104103585B CN 104103585 B CN104103585 B CN 104103585B CN 201410144272 A CN201410144272 A CN 201410144272A CN 104103585 B CN104103585 B CN 104103585B
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- clamping
- clamping components
- components
- downside
- clamping device
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- 238000003825 pressing Methods 0.000 claims description 21
- 230000008093 supporting effect Effects 0.000 description 33
- 238000000034 method Methods 0.000 description 16
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 6
- 238000009434 installation Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 150000001540 azides Chemical class 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
- H01L2221/68336—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding involving stretching of the auxiliary support post dicing
Abstract
A kind of band extension fixture, even if opposed 2 of clamping splicing tape will not also reduce when stretching makes splicing tape expansion vertical 2, also splicing tape can made fully to expand in the state of 2 vertical sides have been clamped.It possesses：1st clamping components, the 1st side of clamping band；2nd clamping components, clamping is with the 1st at the opposed the 2nd；3rd clamping components, clamping is with the 1st at the vertical the 3rd；4th clamping components, clamping is with the 3rd at the opposed the 4th；And expansion, the the 1st to the 4th clamping components are made to be moved respectively in the direction vertical with clamped each side, 1st to the 4th clamping components possess downside clamping device and upside clamping device respectively, in downside, the top of clamping device is equipped with multiple rollers, in upside, the bottom of clamping device is equipped with multiple rollers, in 1st and the 2nd clamping components and/or the 3rd and the 4th clamping components, downside and upside clamping device are made up of central clamping zone and end clamping zone, and end clamping zone is each configured to more prominent to side opposite one another than central clamping zone.
Description
Technical field
The present invention relates to for making the splicing tape expansion for being pasted with chip to apply chip the band extension fixture of external force.
Background technology
In semiconductor devices manufacturing process, on the surface of the semiconductor wafer for substantially circular plate shape by being arranged in clathrate
The segmentation preset lines referred to as spacing track of row mark off multiple regions, and IC is formed in the region that this is marked off（Integrated
Circuit：Integrated circuit）、LSI（Large-scale Integration：Large scale integrated circuit）Deng device.Also, pass through
Semiconductor wafer is cut off along spacing track, thus split formed with device area, produces device one by one.In addition, for
In the optical device wafer that superficial layer Azide gallium based compound semiconductor of sapphire substrate etc. forms, also by along defined point
Preset lines cut-out is cut, and is divided into the optical devices such as light emitting diode one by one, laser diode, is widely used in electrically
Equipment.
As the method for splitting the machined objects such as above-mentioned semiconductor wafer or optical device wafer, following such method quilts
Practical application：Using the pulse laser light to the machined object with radioparent wavelength, focal point alignment should be split
The inside in region be irradiated, modified layer is continuously formed in the inside of machined object along spacing track, along because formed should
The spacing track of modified layer and intensity decreases applies external force, thus splits machined object.（For example, referring to patent document 1.）
Also, as along because forming the modified layer and the spacing track of intensity decreases applies the technology of external force, following
Such technology has been recorded in patent document 2：Make the splicing tape expansion for being pasted with chip, then, in the shape for expanding splicing tape
Under state, the framework of ring-type is pasted on splicing tape around the chip for being divided into device one by one.
Patent document 1：No. 3408805 publications of Japanese Patent Publication No.
Patent document 2：Japanese Unexamined Patent Publication 2006-229021 publications
Also, the technology of the splicing tape for making the to be pasted with chip expansion described in above-mentioned patent document 2 is asked as existing
Topic：Method due to being the opposed 2 side stretching for clipping splicing tape, therefore, 2 vertical sides reduce so that are pasted on viscous
The device being partitioned into one by one of tape splicing sustains damage.In addition, if the stretching pair in the state of 2 vertical sides are hold
, then splicing tape be present and do not expand the problem of so fully in two sides put.
The content of the invention
The present invention completes in view of the above circumstances, and its main technical task is to provide a kind of band extension fixture,
Splicing tape is expanded even if opposed 2 side that hold splicing tape carries out stretching, 2 vertical sides of splicing tape will not also contract
It is small, also, in the state of 2 vertical sides have been clamped, can also splicing tape is fully expanded.
In order to solve above-mentioned technical task, according to the present invention, there is provided a kind of band extension fixture, its band to rectangle are carried out
Expansion, it is described to be characterised by with extension fixture,
The band extension fixture possesses：
1st clamping components, the 1st side of its clamping band；2nd clamping components, 2nd opposed with the 1st side of its clamping band
Side；3rd clamping components, its clamping band with the 1st while and vertical the 3rd side when the 2nd；4th clamping components, its clamping band
With the 3rd at the opposed the 4th；And expansion, it makes the 1st clamping components, the 2nd clamping components, the 3rd clamping components
Moved up respectively in the side vertical with clamped each side with the 4th clamping components,
1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components possess downside respectively
Clamping device and upside clamping device, top of clamping device is equipped on the downside of this revolves on the direction along clamped side
Turn multiple rollers, bottom of clamping device on the upside of this, be equipped with rotated up in the side along clamped side it is multiple
Roller,
Either one in the downside clamping device and the upside clamping device is made up of following part：Rest pad, it makes 2
Roller has defined interval, and this 2 rollers are supported to and can rotated；And pressing member, it is pressed on the rest pad
By the active position of the decile of interval 2 of 2 rollers,
In both the 1st clamping components and the 2nd clamping components and/or the 3rd clamping components and the 4th clamping components two
In person, the downside clamping device and the upside clamping device are by central clamping zone and positioned at the both sides of the central clamping zone
End clamping zone is formed, and the end clamping zone is each configured to than the central clamping zone to a pleurapophysis opposite one another
Go out.
Match somebody with somebody in the center surrounded by above-mentioned 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components
Provided with for circular table, both the 1st clamping components and the 2nd clamping components and/or the 3rd clamping components and the 4th clamping structure
The end clamping zone in the downside clamping device and upside clamping device of both parts is oriented to copy circular table
The mode of periphery protrude.
Above-mentioned pressing member is made up of following part：Briquetting, it is at the active position of 2 rest pads by 2 supportings
Block is supported to respectively to be rotated；And actuator, it presses decile of active position 2 by 2 rest pads in the briquetting
Pressing position.
In the band extension fixture formed according to the present invention, due to the 1st clamping components, the 2nd clamping components, the 3rd clamping structure
Part and the 4th clamping components possess downside clamping device and upside clamping device respectively, and in downside, the top of clamping device is equipped
The multiple rollers rotated up in the side along clamped side, in upside, the bottom of clamping device is equipped along clamped
Side multiple rollers for rotating up of side, thus, for example hold the 3rd of splicing tape while and when being expanded when the 4th, i.e.,
Make using clamping with the 3rd while and when the 4th the vertical 1st while and the 1st clamping components and the downside folder of the 2nd clamping components when the 2nd
Hold mechanism and upside clamping device is clamped, due to the multiple rollers arranged on downside clamping device and upside clamping device
Son rotation, therefore splicing tape can fully be expanded.In addition, hold the 1st of splicing tape while and expanded when the 2nd
When, even with clamping with the 1st while and when the 2nd the vertical 3rd while and the 3rd clamping components and the 4th clamping components when the 4th under
Side clamping device and upside clamping device are clamped, more due to being arranged on downside clamping device and upside clamping device
Individual roller rotation, therefore splicing tape can fully be expanded.
In addition, in the band extension fixture of the present invention, due to any one in downside clamping device and upside clamping device
Side possesses：Rest pad, it makes 2 rollers have defined interval, and this 2 rollers are supported to and can rotated；With pressing structure
Part, it presses the active position of the decile of interval 2 by 2 rollers on rest pad, therefore, is supported with multiple of 2 rollers
Supporting block is pressed by the active position of the decile of interval 2 of 2 rollers respectively, therefore, is configured to a pair of all 2 roller energy
It is enough to be clamped with multiple rollers that are being disposed on the downside hold assembly of upside clamping device or downside clamping device with uniform power
Each side of splicing tape 1.
In addition, in the band extension fixture of the present invention, pressed from both sides in both the 1st clamping components and the 2nd clamping components and/or the 3rd
Hold in both component and the 4th clamping components, downside clamping device and upside clamping device are by central clamping zone and centrally located
The end clamping zone of the both sides of clamping zone is formed, and end clamping zone is each configured to than central clamping zone to mutually relative
The side put protrudes, and therefore, in spreading belt, the tensile force of the band of corner can be overcome to be clamped securely.
Brief description of the drawings
Fig. 1 is the stereogram with extension fixture formed according to the present invention.
Fig. 2 is the major part stereogram of the upside clamping device with extension fixture shown in pie graph 1.
Fig. 3 is the stereogram shown in by the major part decomposition of the upside clamping device shown in Fig. 2.
Fig. 4 is by the downside clamping device and upside clamping device of the clamping components with extension fixture shown in pie graph 1
Major part amplification shown in front view.
Fig. 5 is the explanation figure using the band implemented with the extension fixture clamping process shown in Fig. 1.
Fig. 6 is using the 1st explanation figure with expansion process implemented with extension fixture shown in Fig. 1.
Fig. 7 is using the 2nd explanation figure with expansion process implemented with extension fixture shown in Fig. 1.
Fig. 8 be show implement the 1st with expansion process and the 2nd with expansion process after splicing tape on paste be divided
Into the explanation figure of the state of device one by one.
Fig. 9 is the explanation figure using the framework installation procedure implemented with extension fixture shown in Fig. 1.
Figure 10 is the sectional view for showing following states：The framework installation procedure shown in Fig. 9 is implemented, is being divided into one one
Formed with interval between individual device（s）Chip 10 framework of ring-type is supported in via splicing tape.
Figure 11 is the top view of the splicing tape by being expanded with extension fixture.
Label declaration
1：Splicing tape；
2：Band extension fixture；
20：Fixed pedestal；
3：Circular table；
4a：1st clamping components；
4b：2nd clamping components；
4c：3rd clamping components；
4d：4th clamping components；
41：Movable base；
42A、42B：Downside clamping device；
422A、422B：Downside hold assembly；
423：Roller；
43A、43B：Upside clamping device；
433：Roller；
434：Rest pad；
435：Pressing member；
436：Briquetting；
437：Actuator；
44：1st travel mechanism；
45：2nd travel mechanism；
5a：1st band expansion；
5b：2nd band expansion；
5c：3rd band expansion；
5d：4th band expansion；
7：The framework of ring-type；
10：Chip.
Embodiment
Hereinafter, referring to the drawings, the preferred embodiment with extension fixture formed according to the present invention is carried out in detail
Explanation.
Figure 11 illustrates the top view of the splicing tape by being expanded with extension fixture.The shape of splicing tape 1 of diagram
As square（Rectangle）, and possess：1st side 1a；2nd side 1b, it is opposed with the 1st side 1a；3rd side 1c, itself and the 1st side
1a is vertical with the 2nd side 1b；With the 4th side 1d, it is opposed with the 3rd side 1c.It is coated with the surface of the splicing tape 1 so formed
Adhesive linkage, the central portion on its surface are pasted with chip 10.Also, for chip 10, in the illustrated embodiment, on surface
10a is in clathrate formed with multiple spacing tracks 101, also, chip 10 is by the multiple areas marked off by the plurality of spacing track 101
The semiconductor wafer that device 102 is respectively formed with domain is formed, and chip 10 has been divided into device one by one along spacing track 101
102。
Next, illustrated for the band extension fixture for expanding splicing tape 1 referring to figs. 1 to Fig. 3, in the bonding
With being pasted with the chip 10 that is divided into above-mentioned device one by one 102 on 1.
Figure 1 illustrates the stereogram of with extension fixture the embodiment formed according to the present invention.
Band extension fixture 2 in embodiment shown in Fig. 1 possesses：Fixed pedestal 20；Circular table 3, it is disposed in
The central portion upper surface of the fixed pedestal 20, load above-mentioned splicing tape 1；1st clamping components 4a, the 2nd clamping components 4b, the 3rd folder
Component 4c and the 4th clamping components 4d are held, they are arranged around the circular table 3, to being placed on circular table 3
Above-mentioned splicing tape 1 is clamped；And the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c and the 4th
Band expansion 5d, they make the 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th respectively
Clamping components 4d moves radially along circular table 3.Also, in the illustrated embodiment, in the 1st clamping components 4a clampings
State the 1st side 1a of splicing tape 1, the 2nd clamping components 4b clampings with the 1st while 1a it is opposed the 2nd while 1b, the 3rd clamping components 4c clamps
With the 1st the 3rd side 1c that 1b is vertical in 1a and the 2nd, the 4th clamping components 4d clamping with the 3rd while 1c it is opposed the 4th while 1d.In addition,
1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c and the 4th band expansion 5d make the 1st clamping components
4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d hang down on each side with clamped splicing tape 1 respectively
Straight direction movement.
Above-mentioned fixed pedestal 20 is formed as rectangle, its upper surface formed with the 1st guiding groove 201a, the 2nd guiding groove 201b,
3rd guiding groove 201c and the 4th guiding groove 201d, these guiding grooves are with being mutually of 90 degree of angle towards above-mentioned circular table
3 center and formed.In addition, the formation of fixed pedestal 20 has above-mentioned 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding
Groove 201c and the 4th guiding groove 201d peripheral part are formed as prominent outward.
Above-mentioned circular table 3 is supported by the upper surface that component 30 is supported on fixed pedestal 20.The supporting member 30 is being schemed
It is configured to circular table 3 is moved in the vertical direction in the embodiment shown.
Above-mentioned 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c and the 4th clamping components 4d are arranged respectively
It is being formed at the 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c and the 4th guiding groove of above-mentioned fixed pedestal 20
Above 201d.That is, 4 clamping components 4a, 4b, 4c, 4d are arranged to be mutually of equal angle in the circumferential.Arrange like this
The 1st clamping components 4a and the 2nd clamping components 4b on fixed pedestal 20 are identical structure in the illustrated embodiment, and
Possess respectively：Movable base 41, it is formed as L-shaped；Downside clamping device 42A and upside clamping device 43A, they are with can
The mode moved in the vertical direction is installed on the movable base 41；And the 1st travel mechanism 44 and the 2nd travel mechanism 45, it
Downside clamping device 42A and upside clamping device 43A is moved in the vertical direction respectively.In addition, the 3rd clamping components 4c
It is in the illustrated embodiment identical structure, and possess respectively with the 4th clamping components 4d：Movable base 41, it is formed as L
Shape；Downside clamping device 42B and upside clamping device 43B, they are installed in a manner of it can move in the vertical direction
The movable base 41；And the 1st travel mechanism 44 and the 2nd travel mechanism 45, they press from both sides downside clamping device 42B and upside
Mechanism 43B is held to move in the vertical direction respectively.So, the 1st clamping components 4a and the 2nd clamping components 4b, same 3rd clamping components
4c and the 4th clamping components 4d is except downside clamping device 42A and upside clamping device 43A and downside clamping device 42B and upside
Beyond clamping device 43B, it is configured to identical structure.
Movable base 41 is made up of move portion 411 and support 412, and the support 412 is from the upper surface of the move portion 411
Erect setting and formed.It is provided with the lower surface of move portion 411 and is embedded in above-mentioned 1st guiding groove 201a, the 2nd guiding groove respectively
Track 411a is directed in 201b, the 3rd guiding groove 201c and the 4th guiding groove 201d, by the way that this is directed into 411a points of track
It is not embedded in above-mentioned 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d, movable base
Seat 41 is with can be respectively along above-mentioned 1st guiding groove 201a, the 2nd guiding groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d
Mobile mode is formed on fixed pedestal 20.In addition, internal thread 411b is formed through in move portion 411.In above-mentioned branch
The face of the inner side of bearing portion 412（The face of side opposite one another）On be provided with the guide rail 412a extended in the vertical direction, upper
State on the face in the outside of support 412 formed with the elongated slot 412b extended in the vertical direction.In addition, formed on guide rail 412a
There is elongated hole 412c, elongated hole 412c reaches above-mentioned elongated slot 412b from the face of inner side, and extends in the vertical direction.
Above-mentioned 1st clamping components 4a and the 2nd clamping components 4b downside clamping device 42A, 42A is respectively by following part structure
Into：Supporting arm 421, its guide rail 412a for being arranged to set along on the support 412 in above-mentioned movable base 41 are moved；
With downside hold assembly 422A, it is installed on the supporting arm 421.It is provided with and above-mentioned guide rail 412a in the cardinal extremity of supporting arm 421
Chimeric is directed groove 421a, and by the way that this is directed, groove 421a is chimeric with guide rail 412a, and thus, supporting arm 421 is configured to
It is enough to be moved in the vertical direction along the guide rail 412a of the support 412 of movable base 41.In addition, in the base portion of supporting arm 421
Internal thread block 421c is provided with, internal thread block 421c possesses internal thread 421b, and internal thread block 421c is arranged to insert in upper
State in elongated hole 412c.Above-mentioned downside hold assembly 422A is formed as rectangular-shape in the illustrated embodiment, and is arranged to
The length direction direction direction vertical with being directed track 411a.Downside clamping device 42A, 42A for so forming downside folder
Part 422A, 422A is held to possess central clamping zone 422a respectively and press from both sides positioned at the end of the both sides of the central clamping zone 422a
Region 422b, 422b are held, the end clamping zone 422b, 422b are arranged to respectively than central clamping zone 422a to opposite one another
Side protrude.In downside hold assembly 422A, the 422A so formed clamping surface side i.e. upper surface, it is equipped and is pressed from both sides in downside
Hold the multiple rollers 423 rotated on part 422A length direction.
Above-mentioned 3rd clamping components 4c and the 4th clamping components 4d downside clamping device 42B, 42B is respectively by following part structure
Into：Supporting arm 421, its guide rail 412a for being arranged to set along on the support 412 in above-mentioned movable base 41 are moved；
With downside hold assembly 422B, it is installed on the supporting arm 421.It is provided with and above-mentioned guide rail 412a in the cardinal extremity of supporting arm 421
Chimeric is directed groove 421a, and by the way that this is directed, groove 421a is chimeric with guide rail 412a, and thus, supporting arm 421 is configured to
It is enough to be moved in the vertical direction along the guide rail 412a of the support 412 of movable base 41.In addition, in the base portion of supporting arm 421
Internal thread block 421c is provided with, internal thread block 421c possesses internal thread 421b, and internal thread block 421c is arranged to insert upper
State in elongated hole 412c.Above-mentioned downside hold assembly 422 is formed as rectangular-shape in the illustrated embodiment, and arranges growth
Direction is spent towards the direction vertical with being directed track 411a.Downside clamping device 42B, 42B for so forming downside clamping
Part 422B, 422B are formed as linear, and are that upper surface is equipped with length in downside hold assembly 422B in clamping surface side
The multiple rollers 423 just rotated up.
Above-mentioned 1st clamping components 4a and the 2nd clamping components 4b upside clamping device 43A, 43A possesses：Supporting arm 431,
Its guide rail 412a for being arranged to set along on the support 412 in above-mentioned movable base 41 is moved；With supporting cover 432A,
432A, they are installed on the supporting arm 431.The cardinal extremity of supporting arm 431 is provided with drawn chimeric with above-mentioned guide rail 412a
Guide groove 431a, by the way that this is directed, groove 431a is chimeric with guide rail 412a, and thus, supporting arm 431 is configured in movable base 41
Support 412 on can be moved in the vertical direction along guide rail 412a.In addition, in the base portion of supporting arm 431 is provided with
Threaded block 431c, internal thread block 431c possess internal thread 431b, and internal thread block 421c is arranged to insert in above-mentioned elongated hole
In 412c.
Above-mentioned supporting cover 432A, 432A possess central clamping zone 432a and positioned at the central clamping zone 432a's respectively
End clamping zone 432b, 432b of both sides, the end clamping zone 432b, 432b are arranged to respectively than central clamping zone
432a is prominent to side opposite one another.The supporting cover formed like this is disposed in for upside clamping device 43A, 43A
Component parts in 432A, 432A, reference picture 2 and Fig. 3 are illustrated.Upside clamping device 43A, 43A shown in Fig. 2 and Fig. 3
Possess respectively：Rest pad 434, it makes 2 rollers 433 have defined interval and they is supported to and can rotated；And pressing
Component 435, it presses the active position of the decile of interval 2 by 2 rollers on the rest pad.Rest pad 434 possesses roller branch
Bearing portion 434a and pressing service portion 434b, the pressing service portion 434b are horizontal-extending from upper end on roller support 434a.
Compartment of terrain as defined in being separated on roller support 434a is equipped with 2 support shaft 433a, and roller 433 is respectively can rotate
Mode is supported on 2 support shaft 433a.Also, on the pressing service portion 434b for forming rest pad 434 by 2 support shafts
433a（2 rollers 433）The active position of the decile of interval 2 insert hole 434c provided with axle.The rest pad 434 so formed is with 2
Individual is to be pressed component 435 a pair to press.
Pressing member 435 is made up of following part：Briquetting 436, it is at the active position of 2 rest pads 434 by 2
Rest pad 434 is supported to respectively to be rotated；With actuator 437, its press in the briquetting 436 by 2 rest pads 434
The pressing position of the decile of active position 2.Briquetting 436 is by upper wall 436a, side wall 436b and 436c and end wall 436d and 436e structure
Into briquetting 436 is formed as the unlimited box-like in downside.2 installed on the side wall 436b of the briquetting 436 formed like this
Support shaft（It is not shown）It is embedded in respectively in a manner of it can rotate and above-mentioned is being formed the pressing service portion 434b of rest pad 434
The axle of upper setting is inserted in the 434c of hole.On the upper wall 436a of the briquetting 436 formed like this, it is provided with for linking actuating
A pair of connecting members 438a, 438b of device 437.Formed with hole 438c is inserted on a connecting member 438a, in another company
Formed with screwed hole 438d on knot part 438b.Actuator 437 is made up of cylinder mechanism in the illustrated embodiment, in its work
Stopper rod 437a terminal part is formed with connecting hole 437b.The piston rod 437a of the actuator 437 so formed terminal part is determined
Binder bolt 439 is run through to be inserted into being formed on a connecting member 438a by position between a pair of connecting members 438a, 438b
Insert hole 438c and in the piston rod 437a connecting hole 437b that is formed of terminal part, and be screwed together in another connecting member
In the screwed hole 438d formed on 438b, thus, the piston rod 437a of actuator 437 will be formed with being arranged on briquetting 436
Upper wall 436a upper a pair of connecting members 438a, 438b is linked up.The actuator 437 so formed is installed in above-mentioned supporting
Cover 432A upper wall.
Upside clamping device 43A, the 43A formed as above is arranged to and above-mentioned downside clamping device 42A, 42A couple
Put.That is, supporting cover 432A, 432A for forming upside clamping device 43A, 43A central clamping zone 432a and end are clamped
The center that region 432b, 432b are positioned to downside clamping device 42A, 42A with forming downside clamping device 42A, 42A respectively presss from both sides
Hold region 422a and end clamping zone 422b, 422b are opposed.Also, on upside clamping device 43A multiple rest pads 434
Multiple rollers 433 of 2 are supported with respectively to be adapted to and on above-mentioned downside clamping device 42A downside hold assembly 422A
The multiple rollers 423 arranged are opposed.Also, end clamping zone 422b, 422b and upside in downside clamping device 42A, 42A
End clamping zone 432b, 432b in clamping device 43A, 43A are oriented in a manner of copying the periphery of circular table 3
It is prominent.
Return to Fig. 1 to go on to say, above-mentioned 3rd clamping components 4c and the 4th clamping components 4d upside clamping device 43B, 43B
Have respectively：Supporting arm 431, it is arranged to the guide rail that can be set along on the support 412 in above-mentioned movable base 41
412a is moved；With supporting cover 432,432, they are installed on the supporting arm 431.The cardinal extremity of supporting arm 431 be provided with it is upper
State guide rail 412a it is chimeric be directed groove 431a, by the way that by this, to be directed groove 431a chimeric with guide rail 412a, thus, supporting arm
431 are configured to move in the vertical direction along guide rail 412a on the support 412 of movable base 41.In addition, propping up
The base portion of bearing arm 431 is provided with internal thread block 431c, and internal thread block 431c possesses internal thread 431b, and internal thread block 421c matches somebody with somebody
It is set as inserting in above-mentioned elongated hole 412c.
Above-mentioned supporting cover 432,432 and downside clamping device 42B, 42B downside hold assembly 422B, 422B are accordingly
Be formed as linear, and be oriented to opposed with downside hold assembly 422B, 422B.The supporting cover 432 so formed,
In 432, it is supported with multiple rollers 433 of 2 respectively on above-mentioned multiple rest pads 434 and is arranged to and in downside hold assembly
The multiple rollers 423 arranged on 422B are opposed.
Reference picture 1 is gone on to say, and above-mentioned downside clamping device 42A, 42A and downside clamping device 42B, 42B is existed respectively
The 1st travel mechanism 44 that upper and lower moves up is made up of following part：External thread rod 441, it abreast matches somebody with somebody with guide rail 412a
In the elongated slot 412b formed on the support 412 in above-mentioned movable base 41, and with the base portion in above-mentioned supporting arm 421
The internal thread 421b for the internal thread block 421c for locating to set is screwed togather；Bearing 442, it is disposed in the support 412 of movable base 41, will
The one end of external thread rod 441, which is supported to, to be rotated；And impulse motor 443, the other end of itself and external thread rod 441 connect
Knot, for driving external thread rod 441 to rotate.The driving pulse motor 443 of the 1st travel mechanism 44 so formed makes external thread rod
441 rotate to a direction or another direction, thus make respectively downside clamping device 42A, 42A and downside clamping device 42B,
42B is moved in the vertical direction along guide rail 412a.
Make above-mentioned upside clamping device 43A, 43A and upside clamping device 43B, 43B move in the vertical direction respectively
2nd travel mechanism 45 be with the above-mentioned identical structure of 1st travel mechanism 44, and be disposed in the upside of the 1st travel mechanism 44.That is,
2nd travel mechanism 45 is made up of following part：External thread rod 451, it is abreast disposed in above-mentioned movable base with guide rail 412a
In the elongated slot 412b formed on the support 412 of seat 41, and the internal thread block with being set at the base portion of above-mentioned supporting arm 431
431c internal thread 431b is screwed togather；Bearing 452, it is disposed in the support 412 of movable base 41, by the one of external thread rod 451
Overhang bracket is into can rotate；And impulse motor 453, the other end of itself and external thread rod 451 links, for driving external screw thread
Bar 451 rotates.The driving pulse motor 453 of the 2nd travel mechanism 45 so formed makes external thread rod 451 to a direction or another
Individual direction rotates, and thus makes upside clamping device 43A, 43A and upside clamping device 43B, 43B along guide rail 412a upper respectively
Lower section moves up.
Make respectively above-mentioned 1st clamping components 4a, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d along
The move radially the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band of circular table 3
Expansion 5d, respectively along formed on above-mentioned fixed pedestal 20 above-mentioned 1st guiding groove 201a, the 2nd guiding groove 201b,
3 guiding groove 201c, the 4th guiding groove 201d are arranged.1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion
5c, the 4th band expansion 5d are made up of following part respectively：External thread rod 51, it is arranged to draw with the 1st guiding groove 201a, the 2nd
Guide groove 201b, the 3rd guiding groove 201c, the 4th guiding groove 201d are parallel, and with the shape in the move portion 411 of above-mentioned movable base 41
Into internal thread 411b screw togather；Bearing 52, it is disposed in above-mentioned fixed pedestal 20, and the one end of external thread rod 51 is supported
Into can rotate；And impulse motor 53, the other end of itself and external thread rod 51 links, for driving external thread rod 51 to rotate.
The 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band expansion 5d so formed distinguishes
Driving pulse motor 53 makes external thread rod 51 be rotated to a direction or another direction, thus makes the 1st clamping components 4a, the 2nd
Clamping components 4b, the 3rd clamping components 4c, the 4th clamping components 4d moving radially respectively along circular table 3.
Band extension fixture 2 in embodiment shown in Fig. 1 to Fig. 3 is formed as above, acts on it progress below
Explanation.
Shown in above-mentioned Figure 11 chip 10 is pasted with face center portion（It is divided into device 102 one by one）Bonding
Band 1 is placed on circular table 3 by carrying device (not shown).Now, splicing tape 1, which is loaded into, makes the 1st side 1a
Towards the 1st clamping components 4a, the 2nd side 1b is set the 3rd side 1c is made the 4th towards the 3rd clamping components 4c towards the 2nd clamping components 4b
The 4th clamping components 4d of side 1d directions.Also, now the upper surface of circular table 3 be positioned in above-mentioned 1st clamping components 4a and
2nd clamping components 4b downside clamping device 42A, 42A and the 3rd clamping components 4c and the 4th clamping components 4d downside clamping
Mechanism 42B, 42B and the 1st clamping components 4a and the 2nd clamping components 4b upside clamping device 43A, 43A and the 3rd clamping structure
The height in part 4c and the 4th clamping components 4d upside clamping device 43B, 43B centre position.
Next, make the 1st band expansion 5a, the 2nd band expansion 5b, the 3rd band expansion 5c, the 4th band expansion structure
Part 5d works, by the 1st clamping components 4a and the 2nd clamping components 4b downside clamping device 42A, 42A and the 3rd clamping components 4c
Downside clamping device 42B, 42B with the 4th clamping components 4d, the upside clamping with the 1st clamping components 4a and the 2nd clamping components 4b
Mechanism 43A, 43A and the 3rd clamping components 4c and the 4th clamping components 4d upside clamping device 43B, 43B are positioned at and can pressed from both sides
Hold the position of splicing tape 1.Then, the clamping components 4a of composition the 1st, the 2nd clamping components 4b, the 3rd clamping components 4c, the 4th clamping are made
Component 4d the 1st travel mechanism 44 and the 2nd travel mechanism 45 work, also, make clamping device 43 on the upside of composition（A、B）Actuating
Device 437 works, and presses rest pad 434 downwards through briquetting 436.As a result, as shown in Figure 4 and Figure 5, using in downside
Clamping device 42（A、B）Downside hold assembly 422（A、B）The multiple rollers 423 and upside clamping device 43 of upper arranging（A、
B）In rest pad 434（Reference picture 3）（Respectively by upside clamping device 43（A、B）Multiple briquettings 436 press）Each supporting
There is the roller 433 of 2, clamp each side of splicing tape 1（Band clamping process）.Now, it is each 2 rollers 433 are supported it is more
Individual rest pad 434 is pressed by the active position of the decile of interval 2 of 2 rollers 433 respectively, therefore, is configured to a pair of institute
There are 2 rollers 433 can be with being disposed in downside clamping device 42（A、B）Downside hold assembly 422（A、B）On multiple rollers
423 clamp each side of splicing tape 1 with uniform power.In the state of each side of splicing tape 1 is hold like this, as shown in figure 5,
The 1st is formed with the end clamping zone in expansion 5a and the 2nd upside clamping device 43A, 43A with expansion 5b
432b, 432b briquetting 436 are oriented to briquetting 436 than central clamping zone 432a to side opposite one another（In
Entreat side）It is prominent.Although also, be not shown in Figure 5, form the 1st band expansion 5a and the 2nd band expansion 5b
Downside clamping device 42A, 42A in end clamping zone 422b, 422b be also positioned to lean on than central clamping zone 422a
Side opposite one another（Center side）, and be positioned in the end clamping zone 432b in upside clamping device 43A, 43A,
Position opposed 432b.
As shown in Figure 4 and Figure 5, using in downside clamping device 42（A、B）Downside hold assembly 422（A、B）On match somebody with somebody
If multiple rollers 423 and upside clamping device 43（A、B）In rest pad 434（Reference picture 3）（Respectively by multiple briquettings
436 pressings）After being respectively supported with each side of the clamping splicing tape 1 of roller 433 of 2, such as make the 3rd band expansion 5c and the 4th band
Expansion 5d works, as shown in fig. 6, making the clamping components 4c of composition the 3rd and the 4th clamping components 4d downside clamping device 42B
With directions of the upside clamping device 43B into Fig. 6 shown in arrow A1 and A2（It is left and right directions in figure 6）It is mobile.As a result,
Splicing tape 1 is by the direction shown in arrow A1 and A2（It is left and right directions in figure 6）Stretch and expand（1st band expansion process）.
Now, the 1d in 1c and the 4th of the 3rd of splicing tape 1 is configured the 3rd clamping components 4c and the 4th clamping components 4d downside clamping machine
Structure 42B and upside clamping device 43B clampings, the 1st clamping components 4a and the 2nd clamping components 4b clampings and the 3rd side 1c of splicing tape 1
With the 4th while 1d it is vertical the 1st while 1a and the 2nd side 1b, clamped on the downside of the 1st clamping components 4a and the 2nd clamping components 4b composition
Multiple rollers 423 for being arranged on mechanism 42A downside hold assembly 422A and rest pad 434 is supported on respectively（It is configured respectively
Upside clamping device 43A multiple briquettings 436 press）2 rollers 433 be arranged in length direction（Along the 1st side 1a and
2nd side 1b direction）Upper rotation, therefore, when splicing tape 1 is by the direction shown in arrow A1 and A2（It is right and left in figure 6
To）When stretching and expanding, the He of multiple rollers 423 that is arranged on clamping device 42A downside hold assembly 422A on the downside of the composition
Rest pad 434 is supported on respectively（The multiple briquettings 436 for being configured upside clamping device 43A respectively press）2 rollers 433
Rotation.Therefore, when when hold the 3rd of splicing tape 1 in 1c and the 4th, 1d is expanded, even with clamping and the 3rd side 1c and
4th while 1d it is vertical the 1st while 1a and the 2nd side 1b the 1st clamping components 4a and the 2nd clamping components 4b downside clamping device 42A
Clamped with upside clamping device 43A, due to being arranged on the downside of composition on clamping device 42A downside hold assembly 422A
Multiple rollers 423 and be supported on rest pad 434 respectively（Be configured respectively upside clamping device 43A multiple briquettings 436 by
Pressure）2 rollers 433 rotate, therefore splicing tape 1 can fully be expanded.In addition, form the 1st band expansion 5a and the 2nd
End clamping zone 422b, 422b and the band expansion structure of composition the 1st in downside clamping device 42A, 42A with expansion 5b
End clamping zone 432b, 432b in part 5a and the 2nd upside clamping device 43A, 43A with expansion 5b are positioned respectively
Into than central clamping zone 422a and 432a to side opposite one another（Center side）It is prominent, therefore, expanding splicing tape 1
When, the tensile force of the band of corner can be overcome firmly to be clamped.Also, due in above-mentioned downside clamping device 42A, 42A
End clamping zone 422b, 422b and upside clamping device 43A, 43A in end clamping zone 432b, 432b be oriented to
To be protruded in a manner of copying the periphery of circular table 3, therefore, when having expanded splicing tape 1, the drawing of the band of corner can be overcome
Stretch is firmly clamped.
Next, expansion is carried out in 1d when hold the 3rd of splicing tape 1 in 1c and the 4th shown in the 6th above-mentioned figure
Under state, as shown in fig. 7, pressing from both sides the clamping components 4a of composition the 1st and the 2nd clamping components 4b downside clamping device 42A and upside
Hold directions of the mechanism 43A into Fig. 7 shown in arrow B1 and B2（It is above-below direction in the figure 7）It is mobile.As a result, splicing tape 1
By to the direction shown in arrow B1 and B2（It is above-below direction in the figure 7）Stretch and expand（2nd band expansion process）.Now, glue
The 1b in 1a and the 2nd of the 1st of tape splicing 1 be configured the 1st clamping components 4a and the 2nd clamping components 4b downside clamping device 42A and
Upside clamping device 43A is clamped, and the 3rd clamping components 4c and the 4th clamping components 4d clampings are with the 1st of splicing tape 1 in 1a and the 2nd
1b it is vertical the 3rd in 1c and the 4th 1d, under the 3rd clamping components 4c and the 4th clamping components 4d downside clamping device 42B
Multiple rollers 423 for being arranged on lateral holding portion part 422B and upside clamping device 43B's is supported on rest pad 434 respectively（Respectively
Pressed by upside clamping device 43B multiple briquettings 436）2 rollers 433 be adapted in length direction（Along the 3rd side
1c and the 4th side 1d direction）Upper rotation, therefore, when splicing tape 1 is by the direction shown in arrow B1 and B2（It is upper and lower in the figure 7
Direction）When stretching and expanding, multiple rollers 423 for being arranged on clamping device 42B downside hold assembly 422B on the downside of the composition
Rest pad 434 is supported on respectively（The multiple briquettings 436 for being configured upside clamping device 43B respectively press）2 rollers
433 rotations.Therefore, clamp splicing tape 1 the 1st in 1a and the 2nd while 1b expanded when, even with clamping with the 1st side 1a
With the 2nd while 1b it is vertical the 3rd while 1c and the 4th side 1d the 3rd clamping components 4c and the 4th clamping components 4d downside clamping device
42B and upside clamping device 43B are clamped, due on the downside of composition on clamping device 42B downside hold assembly 422B
Arrange multiple rollers 423 and be supported on rest pad 434 respectively（Upside clamping device 43B multiple briquettings are configured respectively
436 pressings）2 rollers 433 rotate, therefore splicing tape 1 can fully be expanded.
Also, in the above-described embodiment, show such example：Hold the 1st side 1a of splicing tape 1 and
2 in 1b and the 3rd in the state of 1c and the 4th side 1d, and in 1c and the 4th, 1d expands for be performed separately making splicing tape 1 the 3rd the 1st
With expansion process and make the 1st of splicing tape 1 the 2nd band expansion process that 1b expands in 1a and the 2nd, but it is also possible to simultaneously real
Apply the 1st band expansion process and the 2nd band expansion process.
By expand splicing tape 1 as above the 3rd in 1c and the 4th, 1d and the 1st is in 1a and the 2nd while 1b, thus, such as
Shown in Fig. 8, gap S is formd between the chip 10 being pasted onto on splicing tape 1 is divided into the device 102 formed one by one.
It is also, different even in the size of the vertical and horizontal of device and be disposed in the file and row of the device of chip
Number difference in the case of, by the quantity of the device corresponding to arranging adjust the 1st of splicing tape 1 in 1a and the 2nd 1b
Amount of expansion and the 3rd in 1c and the 4th 1d amount of expansion, the gap S being divided between device one by one can be made constant, and
Gap can be made to be formed point-blank.
Next, between the chip 10 being pasted on above-mentioned splicing tape 1 is divided into the device 102 formed one by one
In the state of the S of gap, as shown in figure 9, the framework 7 of ring-type is installed on to the surface for being coated with adhesive linkage of splicing tape 1,
The framework 7 has the opening portion 70 of the size of storage chip 10（Framework installation procedure）.As a result, as shown in Figure 10, dividing
It is cut between device 102 one by one formed with interval（s）Chip 10 be incorporated in ring-type framework 7 opening portion 70, should
Chip 10 is supported via splicing tape 1 by the framework 7 of ring-type.So, after the framework 7 of ring-type is installed on into the surface of splicing tape 1,
Splicing tape 1 is cut off along the periphery of the framework 7 of ring-type.Then, it is supported in the chip of the framework 7 of ring-type via splicing tape 1
10（Formed with interval between device 102（s））It is transported to the pickup process of pickup device.
More than, based on embodiment illustrated, the present invention is described, but the present invention is not merely defined in implementation
Mode, various modifications can be carried out in the range of spirit of the invention.In the above-described embodiment, such example is shown
Son：The 1st is formed with the end clamping zone in expansion 5a and the 2nd downside clamping device 42A, 42A with expansion 5b
422b, 422b and composition the 1st are with the end in expansion 5a and the 2nd upside clamping device 43A, 43A with expansion 5b
Clamping zone 432b, 432b are oriented to than central clamping zone 422a and 432a to side opposite one another respectively（Center side）
It is prominent, but it is also possible to which the 3rd clamping components 4c and the 4th clamping components 4d downside clamping device 42B, 42B and upside are clamped
The end clamping zone of mechanism 43B, 43B is positioned to than central clamping zone to side opposite one another（Center side）It is prominent,
The 1st can will be formed with expansion 5a and the 2nd downside clamping device 42A, 42A and the 3rd clamping components with expansion 5b
4c and the 4th clamping components 4d downside clamping device 42B, 42B and the end clamping zone of upside clamping device 43B, 43B both sides
It is positioned to than central clamping zone to side opposite one another（Center side）It is prominent.
In addition, in the above-described embodiment, show such example：2 rollers 433 are supported to what can be rotated
Multiple pressing members 435 of multiple rest pads 434 and the multiple rest pads 434 of pressing are disposed in upside clamping device 43A, 43B, but
It is that multiple rest pads 434 and multiple pressing members 435 can also be disposed in downside clamping device 42A, 42B.
Moreover, in the above-described embodiment, showing makes to be pasted with the chip 10 that is partitioned from along spacing track 101
The example that splicing tape 1 is expanded, still, band extension fixture of the invention can be used for such situation：Make to paste along interval
Road 101 internally the chip formed with modified layer splicing tape expansion, along formed with modified layer spacing track split chip.
Claims (3)
1. a kind of band extension fixture, its band to rectangle are expanded,
It is described to be characterised by with extension fixture,
The band extension fixture possesses：1st clamping components, the 1st side of its clamping band；2nd clamping components, its clamping band with this
1st at the opposed the 2nd；3rd clamping components, its clamping band with the 1st while and vertical the 3rd side when the 2nd；4th clamping
Component, its clamping band with the 3rd at the opposed the 4th；And expansion, it makes the 1st clamping components, the 2nd clamping structure
Part, the 3rd clamping components and the 4th clamping components move up in the side vertical with clamped each side respectively,
1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components possess downside and clamped respectively
Mechanism and upside clamping device, top of clamping device is equipped with what is rotated up in the side along clamped side on the downside of this
Multiple rollers, bottom of clamping device on the upside of this, the multiple rollers rotated up in the side along clamped side are equipped with,
Either one in the downside clamping device and the upside clamping device is made up of following part：Rest pad, it makes 2 rollers
It is supported to and can rotates with defined interval, and by this 2 rollers；And pressing member, its press on the rest pad by 2
The active position of the decile of interval 2 of roller,
In both the 1st clamping components and the 2nd clamping components and/or both the 3rd clamping components and the 4th clamping components
In, the downside clamping device and the upside clamping device are by central clamping zone and positioned at the end of the both sides of the central clamping zone
Portion's clamping zone is formed, and the end clamping zone is each configured to more prominent to side opposite one another than the central clamping zone.
2. band extension fixture according to claim 1, it is characterised in that
Match somebody with somebody in the center surrounded by the 1st clamping components, the 2nd clamping components, the 3rd clamping components and the 4th clamping components
Circular table provided with the band for loading the rectangle, both the 1st clamping components and the 2nd clamping components and/or the 3rd
The end clamping zone in the downside clamping device and the upside clamping device of both clamping components and the 4th clamping components
It is oriented to protrude in a manner of the periphery for copying circular table.
3. band extension fixture according to claim 1 or 2, it is characterised in that
Above-mentioned pressing member is made up of following part：Briquetting, it is at the active position of 2 rest pads by 2 rest pads point
Not being supported to rotate；And actuator, it presses the pressing of the decile of active position 2 by 2 rest pads in the briquetting
Position.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013084783A JP6087707B2 (en) | 2013-04-15 | 2013-04-15 | Tape expansion unit |
| JP2013-084783 | 2013-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104103585A CN104103585A (en) | 2014-10-15 |
| CN104103585B true CN104103585B (en) | 2018-01-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410144272.9A Active CN104103585B (en) | 2013-04-15 | 2014-04-11 | Band extension fixture |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6087707B2 (en) |
| CN (1) | CN104103585B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6408366B2 (en) * | 2014-12-05 | 2018-10-17 | リンテック株式会社 | Separation device and separation method |
| JP6363947B2 (en) * | 2014-12-26 | 2018-07-25 | リンテック株式会社 | Separation device and separation method |
| JP6941022B2 (en) * | 2017-10-06 | 2021-09-29 | 株式会社ディスコ | Expansion method and expansion device |
| JP7224214B2 (en) * | 2019-03-13 | 2023-02-17 | 株式会社ディスコ | expansion unit |
| JP7312666B2 (en) | 2019-10-18 | 2023-07-21 | 株式会社ディスコ | seat extender |
| JP7377671B2 (en) | 2019-10-18 | 2023-11-10 | 株式会社ディスコ | How to expand the sheet |
| JP7316729B2 (en) | 2019-10-18 | 2023-07-28 | 株式会社ディスコ | seat extender |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1681082A (en) * | 2004-03-31 | 2005-10-12 | 株式会社迪斯科 | Band extending device |
| CN102054681A (en) * | 2009-10-02 | 2011-05-11 | 株式会社迪思科 | Band expanding device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5984438A (en) * | 1982-11-04 | 1984-05-16 | Nec Corp | Sheet expansion device |
| JPH0212944A (en) * | 1988-06-30 | 1990-01-17 | Nec Corp | Sheet enlarging apparatus for manufacture of semiconductor device |
| WO1996002362A1 (en) * | 1994-07-20 | 1996-02-01 | Loomis Industries, Inc. | Apparatus and method for dicing semiconductor wafers |
| JP2006173269A (en) * | 2004-12-14 | 2006-06-29 | Hamamatsu Photonics Kk | Method for machining substrate and device for extending film |
| JP2006229021A (en) * | 2005-02-18 | 2006-08-31 | Disco Abrasive Syst Ltd | Wafer dividing method |
| JP5496692B2 (en) * | 2010-01-22 | 2014-05-21 | 三洋電機株式会社 | Manufacturing method of semiconductor module |
| JP6009885B2 (en) * | 2012-09-24 | 2016-10-19 | 株式会社ディスコ | Tape expansion unit |
-
2013
- 2013-04-15 JP JP2013084783A patent/JP6087707B2/en active Active
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2014
- 2014-04-11 CN CN201410144272.9A patent/CN104103585B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1681082A (en) * | 2004-03-31 | 2005-10-12 | 株式会社迪斯科 | Band extending device |
| CN102054681A (en) * | 2009-10-02 | 2011-05-11 | 株式会社迪思科 | Band expanding device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104103585A (en) | 2014-10-15 |
| JP6087707B2 (en) | 2017-03-01 |
| JP2014207358A (en) | 2014-10-30 |
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