JP7224214B2 - expansion unit - Google Patents

Description

The present invention relates to an expansion device for expanding an expand sheet to divide a workpiece into chips or widen the gap between chips.

An object to be processed such as a wafer has devices formed in regions partitioned by grid-like dividing lines on its surface, and is divided into individual chips having devices by dividing along the dividing lines. be done. As a method for dividing the workpiece into individual chips, a laser beam having a wavelength that is transparent to the workpiece is irradiated to form a modified layer inside the workpiece, and then the workpiece is cut into chips. is thinned by grinding and polishing, and the workpiece is divided in this thinning process (see, for example, Patent Document 1).

A workpiece divided by the method disclosed in Patent Document 1 is in a state where there is no gap between the divided chips and is in close contact with each other. Therefore, when the workpiece is handled, the adjacent chips come into contact with each other and are damaged. There is a risk. Therefore, a workpiece divided into a plurality of chips is adhered to a sheet, and the sheet is expanded to form spaces between adjacent chips.

An expansion device is used to form the spacing between chips (see, for example, US Pat. When the expansion device disclosed in Patent Document 2 expands the sheet radially, the amount of expansion of the sheet is substantially the same in any direction. Therefore, if the expansion device disclosed in Patent Document 2 is used, for example, if the chip sizes are different in the vertical and horizontal directions, the number of division lines to be divided in the vertical and horizontal directions will be significantly different, so the intervals formed between the chips will be different in the vertical and horizontal directions. Even if a sufficient gap is formed in one direction (e.g., the vertical direction of the chips), the gap in the other direction (e.g., the lateral direction of the chips) is insufficient, and there is a risk that adjacent chips may come into contact with each other during handling. be. Therefore, in view of the above problem, the applicant of the present application has proposed an expansion device that pinches and expands the four sides of the sheet (see, for example, Patent Document 3).

Japanese Patent No. 6147982 Japanese Patent No. 5495511 Japanese Patent No. 6180120

However, the expansion apparatus disclosed in Patent Document 3 requires a large amount of expansion when expanding a circular wafer because the amount of expansion is uniform on each side. However, there is a problem that the amount of expansion cannot be adjusted, such as greatly expanding only the central portion, and there is a risk of a difference in the amount of expansion.

SUMMARY OF THE INVENTION The present invention has been made in view of such problems, and an object of the present invention is to provide an expansion device capable of suppressing the difference in the amount of expansion of a workpiece.

In order to solve the above-described problems and achieve the object, an expansion device according to the present invention expands a workpiece in which division starting points are formed along a plurality of intersecting division lines, or a plurality of intersecting division lines. an expansion device for expanding a sheet adhered to a work piece divided into individual chips along a line to form a space between adjacent chips, wherein the sheet to which the work piece is adhered a plurality of holding units for holding the outer circumference of the object; a moving unit for moving the holding units in the surface direction of the sheet to expand the sheet; and a partial expansion unit that partially expands the contact portion of the holding unit, the length of which is shorter than that of the holding portion of the holding unit, while moving the contact portion in a direction that intersects the surface direction of the sheet. It is characterized by pressing the sheet and partially stretching the sheet.

In the expansion device, the partial expansion unit includes a contact portion that presses the sheet from one surface to stretch the sheet, and a contact portion that stretches the sheet between the contact portion and the work piece to extend the sheet from the other surface. and a seat support portion that supports from.

ADVANTAGE OF THE INVENTION This invention is effective in the ability to suppress the difference of the expansion amount of a to-be-processed object.

FIG. 1 is a perspective view showing a configuration example of an expansion device according to Embodiment 1. FIG. 2 is a perspective view of a workpiece to be processed by the expansion device shown in FIG. 1; FIG. FIG. 3 is a perspective view showing a workpiece, an expanded sheet with a DAF, etc. shown in FIG. 4 is a plan view showing a holding table, a holding unit and a partial expansion unit of the expansion device shown in FIG. 1; FIG. 5 is a perspective view showing a configuration example of a partial expansion unit of the expansion device shown in FIG. 1. FIG. 6 is a side view schematically showing a state in which the holding unit of the expansion device shown in FIG. 1 holds the expanded sheet to which the workpiece is adhered; FIG. 7 is a side view schematically showing a state in which the moving unit of the expansion device shown in FIG. 6 expands the expandable sheet; FIG. 8 is a side view schematically showing a state in which the expand sheet is partially expanded by the partial expansion unit of the expansion device shown in FIG. 7. FIG. 9 is a side view schematically showing a partial cross-section of a state in which the cutting unit of the expansion device shown in FIG. 8 cuts the expanded sheet to which the annular frame is adhered; FIG. 10 is a plan view showing a holding table, a holding unit, and a partial expansion unit of the expansion device according to the second embodiment; FIG. FIG. 11 is a perspective view showing a workpiece to be processed by an expansion device according to a modification, an expanded sheet with a DAF, and the like.

A form (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
An expansion device according to Embodiment 1 of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of an expansion device according to Embodiment 1. FIG. 2 is a perspective view of a workpiece to be processed by the expansion device shown in FIG. 1; FIG. FIG. 3 is a perspective view showing a workpiece, an expanded sheet with a DAF, etc. shown in FIG. 4 is a plan view showing a holding table, a holding unit and a partial expansion unit of the expansion device shown in FIG. 1; FIG. 5 is a perspective view showing a configuration example of a partial expansion unit of the expansion device shown in FIG. 1. FIG.

The expansion device 1 shown in FIG. 1 according to the first embodiment expands an expand sheet 201 (shown in FIG. 3), which is a sheet adhered to the workpiece 200 shown in FIG. A device for dividing into chips 220 . A workpiece 200 to be processed by the expansion device 1 according to the first embodiment is, as shown in FIG. and optical device wafers.

In Embodiment 1, as shown in FIG. 2, a workpiece 200 has devices 202 formed in respective regions partitioned by a plurality of dividing lines 205 crossing each other on a surface 204 of a substrate 203 . In the workpiece 200 , a modified layer 206 (indicated by broken lines in FIG. 2 ), which is a splitting starting point, is formed inside the substrate 203 along the planned splitting line 205 . The modified layer 206 means a region whose density, refractive index, mechanical strength and other physical properties are different from those of its surroundings, and includes melt processing regions, crack regions, dielectric breakdown regions, refractive index, and so on. A change area, an area in which these areas are mixed, and the like can be exemplified. In Embodiment 1, the modified layer 206 has lower mechanical strength than other portions of the substrate 203 .

In the first embodiment, as shown in FIG. 3, the workpiece 200 has a DAF (Die Attach Film) 208 attached to the expand sheet 201 on the back surface 207 side of the substrate 203, and the expansion device 1 along the modified layer 206 with the DAF 208 into individual chips 220 . Chip 220 includes a portion of substrate 203 and device 202 formed on front surface 204 of substrate 203 , and a portion of DAF 208 adhered to back surface 207 . The DAF 208 is for fixing the chips 220 individually divided from the workpiece 200 to a substrate or the like. In Embodiment 1, the DAF 208 is formed in a disc shape having a diameter larger than that of the workpiece 200 and attached to the expanded sheet 201 .

The expanded sheet 201 has stretchability, and for example, the heated synthetic resin is moved in the first direction 211 and in the second direction perpendicular to the first direction 211 . It is stretched and molded in the direction 212 . The expanded sheet 201 includes a base layer made of a stretchable synthetic resin, and an adhesive layer laminated on the base layer and made of a stretchable and adhesive synthetic resin. In the first embodiment, the first direction 211 is the so-called machine direction (MD), and the second direction 212 is the vertical direction (TD).

The expansion device 1 according to the first embodiment expands the expand sheet 201 attached to the workpiece 200 in a first direction 211 and a second direction 212, and expands the workpiece 200 together with the DAF 208 into individual chips. 220 and forms spaces between adjacent chips 220 . Further, the expanding device 1 expands the expanding sheet 201 to form a space between the chips 220 adjacent to each other, and then attaches the annular frame 209 having an inner diameter larger than that of the workpiece 200 and the DAF 208 to the expanding sheet 201 . and supports the workpiece 200 within the opening 210 of the annular frame 209 .

As shown in FIG. 1, the expansion device 1 includes a flat plate-shaped fixed base 2, a holding table 10 provided in the center of the fixed base 2, a workpiece conveying unit (not shown), and an expanded sheet fixing unit 50. , a frame conveying unit (not shown), a sheet cutting unit 70 , a partial extension unit 80 , and a control unit 100 .

The holding table 10 is formed in a disk shape, and the expanded sheet 201 to which the DAF 208 is adhered is placed on the holding surface 11 . The holding table 10 is vertically movable by a moving mechanism. The holding surface 11 is flat in the horizontal direction and has a diameter that allows the workpiece 200 to be placed thereon through the expanded sheet 201 . A workpiece 200 is placed on the holding surface 11 with an expanded sheet 201 interposed therebetween.

The workpiece conveying unit is arranged above the expanded sheet fixing unit 50 and holds the workpiece 200 on its lower surface. The workpiece conveying unit is vertically movable by the elevating unit and horizontally movable by the horizontal movement unit. The workpiece conveying unit is arranged such that the workpiece 200 held on the lower surface is coaxial with the holding table 10 by the horizontal movement unit, and the workpiece 200 is placed at a position facing the holding table 10 in the vertical direction. position. Further, the workpiece conveying unit is lowered by the elevating unit to attach the workpiece 200 to the DAF 208 attached to the expanded sheet 201 .

The expanded sheet fixing unit 50 holds the expanded sheet 201 to which the workpiece 200 is stuck via the DAF 208 . The expanded sheet fixing unit 50 includes a first holding unit 51-1, a second holding unit 51-2, a third holding unit 51-3, and a fourth holding unit 51-4. The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 hold the expanded sheet 201 to which the workpiece 200 is adhered. It is a holding unit that holds on the outer circumference of the

The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 sandwich the position of the expanded sheet 201 on the outer peripheral side of the workpiece 200. to hold. Since the first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 have substantially the same configuration, the same parts are denoted by the same reference numerals. do.

The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 are arranged vertically on the columnar movable base 52 provided on the fixed base 2. A holding member 53, which is a pair of holding portions provided movably in the direction, and a member moving unit 54 for moving the pair of holding members 53 in directions toward and away from each other. The pair of holding members 53 are arranged with a gap in the vertical direction from each other, are brought closer to each other by the member moving unit 54, and hold the expanded sheet 201 therebetween.

The pair of holding members 53 of the first holding unit 51-1 and the pair of holding members 53 of the second holding unit 51-2 face each other along the first direction 211, and the holding table 10 is placed between them. positioned. The pair of holding members 53 of the third holding unit 51-3 and the pair of holding members 53 of the fourth holding unit 51-4 face each other along the second direction 212, and the holding table 10 is placed between them. positioned. The member moving unit 54 is provided on the moving base 52 .

The member moving unit 54 includes a motor 55 that allows the pair of holding members 53 to move vertically, a ball screw 56 that is rotated around the axis by the motor 55, and a holding member 53 that is screwed onto the ball screw 56. and a nut 58 connected via an arm member 57 . The member moving unit 54 moves the nut 58 , the arm member 57 and the clamping member 53 in the vertical direction by rotating the ball screw 56 around the axis with the motor 55 .

The member moving unit 54 can also move the pair of holding members 53 vertically in the same direction by rotating the ball screw 56 around the axis with the motor 55 .

Also, the movable base 52 provided with the pair of clamping members 53 of the first holding unit 51-1 and the member moving unit 54 is movable in the first direction 211 to the fixed base 2 by the first moving unit 58-1. is provided in The moving base 52 provided with the pair of clamping members 53 of the second holding unit 51-2 and the member moving unit 54 is provided movably in the first direction 211 on the fixed base 2 by the second moving unit 58-2. It is The movable base 52 provided with the pair of clamping members 53 of the third holding unit 51-3 and the member moving unit 54 is provided movably in the second direction 212 on the fixed base 2 by the third moving unit 58-3. It is The moving base 52 provided with the pair of clamping members 53 of the fourth holding unit 51-4 and the member moving unit 54 is provided movably in the second direction 212 on the fixed base 2 by the fourth moving unit 58-4. It is

The first moving unit 58-1, the second moving unit 58-2, the third moving unit 58-3 and the fourth moving unit 58-4 are respectively the first holding unit 51-1 and the second holding unit 51-2. , the third holding unit 51-3 and the fourth holding unit 51-4 are moved in the surface direction of the expanded sheet 201 to expand the expanded sheet 201. As shown in FIG. The first moving unit 58-1, the second moving unit 58-2, the third moving unit 58-3, and the fourth moving unit 58-4 have substantially the same configuration, so the same parts are denoted by the same reference numerals. do.

The first moving unit 58-1, the second moving unit 58-2, the third moving unit 58-3 and the fourth moving unit 58-4 are connected to holding units 51-1, 51-2, 51-3 and 51-4. in the first direction 211 or the second direction 212; 212 and a ball screw 59-2.

The first moving unit 58-1, the second moving unit 58-2, the third moving unit 58-3 and the fourth moving unit 58-4 are connected to holding units 51-1, 51-2, 51-3 and 51-4. are moved in the first direction 211 or the second direction 212 so as to separate from each other, the expand sheet 201 held by the holding units 51-1, 51-2, 51-3, 51-4 is expanded.

The frame conveying unit is arranged above the expanded sheet fixing unit 50 and holds the annular frame 209 on the bottom surface. The frame transport unit is vertically movable by an elevating unit and horizontally movable by a horizontal movement unit (not shown). The frame transport unit was placed on the opening 210 of the annular frame 209 and the holding table 10 by the horizontal movement unit so that the opening 210 of the annular frame 209 held on the lower surface was coaxial with the holding table 10 . The annular frame 209 is positioned so that the workpiece 200 adhered to the expanded sheet 201 faces the vertical direction. Further, the frame conveying unit is lowered by the lifting unit to attach the annular frame 209 to the expanded sheet 201 .

The sheet cutting unit 70 cuts the expanded sheet 201 attached to the annular frame 209 along the annular frame 209 . The sheet cutting unit 70 includes a cutter 71 for cutting the expanded sheet 201, as shown in FIG. After the annular frame 209 is adhered to the expanded sheet 201, the sheet cutting unit 70 cuts the cutter 71 between the inner edge and the outer edge of the annular frame 209 of the expanded sheet 201 from the back surface 207 side. Rotate along the annular frame 209 to cut between the inner and outer edges of the annular frame 209 of the expanded sheet 201 .

The control unit 100 controls each component of the expansion device 1 to cause the expansion device 1 to adhere the workpiece 200 to the expanded sheet 201, expand the expanded sheet, and adhere the annular frame 209 to the expanded sheet 201. It is for executing an action or the like. Note that the control unit 100 includes an arithmetic processing unit having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as ROM (read only memory) or RAM (random access memory), and an input/output unit. A computer having an interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the expansion device 1 to each of the expansion devices 1 via the input/output interface device. Output to a component.

Further, the control unit 100 is connected to a display unit 101 configured by a liquid crystal display device for displaying various information and images, and an input unit 102 used by an operator to register processing content information. . The input unit 102 is composed of at least one of a touch panel provided on the display unit 101 and an external input device such as a keyboard.

1, the expansion device 1 is provided above the holding table 10, and the surface of the workpiece 200 adhered to the expanding sheet 201 placed on the holding surface 11 of the holding table 10. is provided with an imaging unit 60 for imaging. The imaging unit 60 has a CCD (Charge Coupled Device) camera that images the workpiece 200 attached to the expandable sheet 201 . The CCD camera captures an image of the workpiece 200 attached to the expandable sheet 201 and outputs the captured image to the control unit 100 .

The expansion device 1 also includes a partial expansion unit 80 as shown in FIG. The partial expansion unit 80 partially expands the expanded sheet 201 between the outer periphery of the workpiece 200 and each of the holding units 51-1, 51-2, 51-3, 51-4. In Embodiment 1, the partial expansion unit 80 partially expands the expanded sheet 201 already expanded by the moving units 58-1, 58-2, 58-3, 58-4.

In the first embodiment, the partial expansion unit 80 corresponds to each holding unit 51-1, 51-2, 51-3, 51-4 on a one-to-one basis, and as shown in FIG. It is provided between the clamping member 53 of the units 51-1, 51-2, 51-3, 51-4 and the holding table 10. As shown in FIG. 1 shows only the partial expansion unit 80 corresponding to the first holding unit 51-1, and the other partial expansion units 80 are omitted. Also, FIG. 4 omits the device 202 of the workpiece 200 .

The partial expansion unit 80 includes a contact portion 81 and a sheet support portion 90, as shown in FIGS. The contact portion 81 has a columnar appearance, and has an axis parallel to the moving direction 211 or 212 in which the holding members 53 of the corresponding holding units 51-1, 51-2, 51-3, and 51-4 move. are placed. The length of the contact portion 81 is shorter than the total length of the holding members 53 of the holding units 51-1, 51-2, 51-3, 51-4. Alternatively, it is shorter than the length of the workpiece 200 . The contact portion 81 is supported at both ends by support members 82, and is provided so as to be vertically movable by a lifting unit (not shown) along a vertical direction that intersects the surface direction of the expanded sheet 201, and by a horizontally moving unit (not shown). They are provided movably along the holding members 53 of the corresponding holding units 51-1, 51-2, 51-3, 51-4.

The contact portion 81 is lowered in the vertical direction by the elevating unit, and is pressed downward in the vertical direction from the upper surface 201-1, which is one surface of the expanded sheet 201, thereby partially stretching the expanded sheet 201. . In addition, the position of the contact portion 81 is changed by the horizontal movement unit, so that the position at which the expandable sheet 201 is partially stretched is changed.

The seat support portion 90 includes a pair of support columns 91 parallel to each other and support members 92 that support both ends of each support column 91, as shown in FIG. The support column 91 has a columnar appearance and is arranged parallel to the clamping members 53 of the corresponding holding units 51-1, 51-2, 51-3, and 51-4. The length of the support column 91 is equivalent to the total length of the holding members 53 of the holding units 51-1, 51-2, 51-3, 51-4. The sheet support portion 90 is vertically movable by a lifting unit (not shown).

The sheet supporting portion 90 is vertically lifted by the lifting unit, and is one of the pair of holding members 53 of the holding units 51-1, 51-2, 51-3, 51-4 holding the expanded sheet 201. Positioned on the same plane as the upper surface of the lower holding member 53 , the support pillars 91 particularly close to the holding table 10 support the expanded sheet 201 between the contact portion 81 and the workpiece 200 , the lower surface 201 being the other surface. Support from -2. The contact portion 81 that presses the expanded sheet 201 downward enters between the pair of support columns 91 of the sheet support portion 90 .

In the present invention, in addition to the configuration described above, the expansion device 1 includes a sheet holding unit that holds the expanded sheet 201 wound around the roll, and holding units 51-1 and 51-2 that hold the expanded sheet 201 from the sheet holding unit. , 51-3 and 51-4, and a cutting unit for cutting the expanded sheet 201 fed by the feeding unit.

Next, this specification describes the expansion operation of the expand sheet 201 of the expansion device 1 . 6 is a side view schematically showing a state in which the holding unit of the expansion device shown in FIG. 1 holds the expanded sheet to which the workpiece is adhered; FIG. 7 is a side view schematically showing a state in which the moving unit of the expansion device shown in FIG. 6 expands the expandable sheet; FIG. 8 is a side view schematically showing a state in which the expand sheet is partially expanded by the partial expansion unit of the expansion device shown in FIG. 7. FIG. 9 is a side view schematically showing a partial cross-section of a state in which the cutting unit of the expansion device shown in FIG. 8 cuts the expanded sheet to which the annular frame is adhered; FIG.

The expansion device 1 holds the expanded sheet 201 with the DAF 208 adhered to the center thereof in the holding units 51-1 and 51-2 in a state in which the contact portions 81 of the partial expansion units 80 are raised and the sheet support portions 90 are lowered. , 51-3 and 51-4. After the rear surface 207 of the workpiece 200 on which the modified layer 206 is formed, which is held by the workpiece conveying unit, is opposed to the DAF 208, the expansion device lowers the workpiece conveying unit, as shown in FIG. Then, the back surface 207 of the workpiece 200 is adhered to the DAF 208 .

In the first embodiment, the expansion device 1 adheres the back surface 207 of the workpiece 200 to the DAF 208 adhered to the expanding sheet 201, but in the present invention, the DAF 208 and the expanded The sheet 201 may be adhered in order. That is, according to the present invention, the workpiece 200 to which the DAF 208 has been attached to the back surface 207 in advance may be held by the workpiece conveying unit and attached to the expanded sheet 201 held by the clamping member 53 .

In the first embodiment, the expansion device 1 moves the holding units 51-1, 51-2, 51-3, 51-4 to the moving units 58-1, 58-2, 58-3, 58-4 in the first direction. 211 or the second direction 212. Then, the expand sheet 201 is expanded in both the first direction 211 and the second direction 212 as the holding units 51-1, 51-2, 51-3 and 51-4 are moved. As a result of expansion of expanded sheet 201 , tensile forces in first direction 211 and second direction 212 act on expanded sheet 201 .

When tensile forces in the first direction 211 and the second direction 212 act on the expanded sheet 201 to which the workpiece 200 is adhered in this way, the workpiece 200 is split along the split line as shown in FIG. Since the modified layer 206 is formed along the line 205 , the DAF 208 is divided into individual chips 220 along the dividing line 205 with the modified layer 206 as a base point.

The expansion device 1 captures an image of the entire workpiece 200 divided for each chip 220 by the imaging unit 60 or a desired dividing line 205 , and displays the workpiece 200 captured by the imaging unit 60 on the display unit 101 . The operator of the expansion device 1 checks the image of the workpiece 200 displayed on the display unit 101 and determines whether or not partial expansion is necessary. When the operator determines that partial expansion is necessary, the operator operates the input unit 102 to position the contact part 81 of at least one partial expansion unit 80 at a position where the partial expansion is required. .

As shown in FIG. 8, the expansion device 1 raises the sheet support portion 90 of the partial expansion unit 80 to position the sheet support portion 90 on the same plane as the upper surface of the lower holding member 53, thereby partially expanding the sheet support portion 90. The contact portion 81 of the partial expansion unit 80 is lowered toward the required position. The expanding device 1 causes the lowered contact portion 81 to enter between the pair of supporting columns 91 of the sheet supporting portion 90 to partially expand the expanding sheet 201 . In FIG. 8, the contact portions 81 of the partial expansion units 80 located at both ends in the first direction 211 are inserted between the pair of support columns 91 of the sheet support portion 90, and the expanded sheet 201 is moved to any position in the first direction. Although an example of expansion in one direction 211 is shown, the position where the partial expansion unit 80 partially expands is not limited to the example shown in FIG. 8, and may be set arbitrarily. is of course.

The operator confirms the image of the workpiece 200 displayed on the display unit 101, and the expansion device 1 allows the partial expansion unit 80 to expand the expanded sheet until it becomes unnecessary to partially expand the expanded sheet 201 by the operator's operation. 201 is partially extended. When the operator determines that it is not necessary to partially expand the expanding sheet 201, the expanding device 1 moves the opening 210 of the annular frame 209 held by the frame conveying unit and the workpiece 200 adhered to the expanding sheet 201 to each other. The annular frame 209 is positioned at a position facing the expanded sheet 201 and away from it. The expanding device 1 lowers the frame conveying unit to attach the annular frame 209 held by the frame conveying unit to the expanded sheet 201, and as shown in FIG. A cut is made along the annular frame 209 between the inner edge and the outer edge of the annular frame 209 . The expansion device 1 ends the expansion operation of the expand sheet 201 .

Since the expansion device 1 according to the first embodiment described above includes the partial expansion unit 80, it is possible to expand only a partial necessary portion more than the other portions. It is possible to adjust the expansion amount of the workpiece 200, such as expanding the central dividing line 205, which is likely to occur in . As a result, the expansion device 1 has the effect of suppressing the difference in the amount of expansion of all the lines to be divided 205 .

[Embodiment 2]
An expansion device according to Embodiment 2 of the present invention will be described with reference to the drawings. 10 is a plan view showing a holding table, a holding unit, and a partial expansion unit of the expansion device according to the second embodiment; FIG. In FIG. 10, the same reference numerals are given to the same parts as in the first embodiment, and the description thereof is omitted.

In the expansion device 1-2 according to the second embodiment, as shown in FIG. 10, each partial expansion unit 80 has a plurality of contact portions 81, and the plurality of contact portions 81 are arranged in the longitudinal direction of the support column 91 of the seat support portion 90. The configuration is the same as that of the expansion device 1 of the first embodiment, except that they are arranged at regular intervals and that each partial expansion unit 80 has a plurality of contact portions 81 that can be moved up and down independently of each other. Note that FIG. 10 omits the device 202 of the workpiece 200 .

The expansion device 1-2 according to the second embodiment expands the expandable sheet 201 by the moving units 58-1, 58-2, 58-3, and 58-4, and then the operator displays the workpiece displayed on the display unit 101. After confirming the image of 200 and determining that it is necessary to partially expand, the input unit 102 is operated to touch at least one partial expanding unit 80 capable of expanding the position where partial expansion is required. The portion 81 is lowered to partially expand the expandable sheet 201 .

Since the expansion device 1-2 according to the first embodiment includes the partial expansion unit 80, only the partial necessary part can be expanded more than the other parts, and as in the first embodiment, the workpiece 200 can be expanded. Amount can be adjusted. As a result, the expansion device 1-2 has the effect of suppressing the difference in the expansion amounts of all the planned division lines 205. FIG.

[Modification]
Modifications of Embodiments 1 and 2 of the present invention will be described with reference to the drawings. FIG. 11 is a perspective view showing a workpiece to be processed by an expansion device according to a modification, an expanded sheet with a DAF, and the like. In addition, FIG. 11 attaches|subjects the same code|symbol to the same part as Embodiment 1, and abbreviate|omits description.

In the modified example, before the workpiece 200 is adhered to the expandable sheet 201, the modified layer 206 is formed inside the substrate 203 along the dividing line 205, and the protective tape 230 is adhered to the surface 204 side. The back surface 207 is ground and thinned. The workpiece 200 is divided into individual chips 220 along the modified layer 206 during the grinding process. In a modification, the expansion devices 1 and 1-2 attach the workpiece 200 divided into individual chips 220 along a plurality of intersecting dividing lines 205 to the expanded sheet 201 via the DAF 208 to protect the workpiece. After peeling off the tape 230 , the expand sheet 201 is expanded to form a space between adjacent chips 220 .

Since the expansion devices 1 and 1-2 according to the modifications include the partial expansion unit 80, only the partial necessary portion can be expanded more than the other portions, and the workpiece 200 can be expanded as in the first embodiment. You can adjust the amount of expansion. As a result, the expansion apparatuses 1 and 1-2 have the effect of suppressing the difference in the amount of expansion of all the lines to be divided 205. FIG.

It should be noted that the present invention is not limited to the above-described embodiments and the like. That is, various modifications can be made without departing from the gist of the present invention. For example, in the above-described embodiment, the operator checks the image displayed by the display unit 101 to determine the position where the expandable sheet 201 needs to be partially expanded. The control unit 100 detects the interval between the adjacent chips 220 from the image of the workpiece 200 obtained by the above process, extracts the position where the expanded sheet 201 needs to be partially expanded, and partially expands the extracted position. The expandable sheet 201 may be partially expanded with an expandable partial expansion unit 80 .

Further, in the above-described embodiment, the partial expansion units 80 are provided in one-to-one correspondence with the holding units 51-1, 51-2, 51-3, 51-4. It is not necessary to provide the 80 corresponding to all the holding units 51-1, 51-2, 51-3, 51-4. Further, in the present invention, at least one partial expansion unit 80 is provided, and the partial expansion unit 80 is arranged between positions parallel to the clamping member 53 of each of the holding units 51-1, 51-2, 51-3, 51-4. It may be freely movable.

Further, in the above-described embodiment, the modified layer 206 is shown as the splitting starting point, but in the present invention, the splitting starting point is not limited to the modified layer 206. A cutting groove formed by cutting a cutting blade into the surface 204 along the dividing line 205. But it's okay. Furthermore, in the present invention, the formation of the modified layer 206 and the formation of the laser-processed grooves may be performed by applying a laser beam from either the front surface 204 or the rear surface 207 of the substrate 203 .

In the present invention, since the DAF 208 is easily broken by cooling, a cool air supply unit for supplying cooling air for cooling the DAF 208 and a table cooling unit for cooling the holding table 10 are provided by the expansion devices 1 and 1-2. can be Further, in the above-described embodiment, an example in which the holding table 10 is installed below the expanding sheet 201 is shown. There may be

1, 1-2 expansion device 51-1 first holding unit (holding unit)
51-2 Second holding unit (holding unit)
51-3 Third holding unit (holding unit)
51-4 Fourth holding unit (holding unit)
53 clamping member (holding part)
58-1 First Mobile Unit (Mobile Unit)
58-2 Second Mobile Unit (Mobile Unit)
58-3 Third Mobile Unit (Mobile Unit)
58-4 Fourth Mobile Unit (Mobile Unit)
80 partial expansion unit 81 contact portion 90 sheet support portion 200 workpiece 201 expanded sheet (sheet)
201-1 Upper surface (one side)
201-2 Lower surface (other surface)
205 Planned division line 206 Modified layer (starting point of division)
220 chips

Claims (2)

By expanding the sheet attached to the workpiece having the division starting points formed along a plurality of intersecting dividing lines, or divided into individual chips along a plurality of intersecting dividing lines. An expansion device for forming a gap between adjacent chips, comprising:
a plurality of holding units for holding the sheet to which the work piece is adhered on the outer periphery of the work piece;
a moving unit that moves the holding unit in the surface direction of the sheet to extend the sheet;
a partial expansion unit for partially expanding the sheet between the periphery of the workpiece and the holding unit;
The partial expansion unit is
An expansion device that partially stretches the sheet by pressing the sheet while moving a contact portion shorter than the holding portion of the holding unit in a direction that intersects the surface direction of the sheet. The partial expansion unit includes a contact portion that presses the sheet from one surface to stretch the sheet, and a sheet support that supports the sheet from the other surface between the contact portion and the workpiece. The expansion device of claim 1, comprising: a.

Images