JP2021176175A - Expanding method and expanding device - Google Patents

Abstract

To prevent a sheet from being locally stretched.SOLUTION: An expanding method includes: a holding step 1001 of holding an expanding sheet between a first bar-shaped holding member and a second bar-shaped holding member that face each other with a workpiece held in a first direction, and holding the expanding sheet between a third bar-shaped holding member and a fourth bar-shaped holding member that face each other with the workpiece held in a second direction orthogonal to the first direction and each of which includes a plurality of rollers that rotate around a rotation axis parallel to the second direction; and an expanding step 1002 of expanding the expanding sheet in the first direction by moving the first bar-shaped holding member and the second bar-shaped holding member in a direction in which they are separated from each other in a state of holding the expanding sheet between the first bar-shaped holding member, the second bar-shaped holding member, the third bar-shaped holding member, and the fourth bar-shaped holding member.SELECTED DRAWING: Figure 7

Description

The present invention relates to an expanding method and an expanding device for expanding a sheet to which a work is attached.

A method of dividing a work by expanding a sheet after forming a modified layer by irradiating the work with a laser beam has been put into practical use (see, for example, Patent Document 1). For example, in wafers with different vertical and horizontal sizes of chips, if the same degree of space is to be formed between the chips, it is necessary to change the amount of expansion of the sheet depending on the direction. An expanding device for expanding is also proposed (see, for example, Patent Document 2).

Japanese Unexamined Patent Publication No. 2005-251986 Japanese Unexamined Patent Publication No. 2014-67749

The expanding device shown in Patent Document 2 sandwiches a sheet with a sandwiching member having a plurality of rollers on the upper and lower sides. By sandwiching the sheet with rollers, it is possible to expand the sheet without hindering the expansion of the sheet in the orthogonal direction.

By the way, although the sheet is generally manufactured in a strip shape, tension is applied in the extending direction of the sheet in the manufacturing process and it is easy to shrink, that is, it is difficult to expand. On the other hand, the sheet is relatively easy to expand in the direction orthogonal to the extending direction of the sheet. Depending on the type of sheet, when the expanding device shown in Patent Document 2 expands, the area in contact with the upper and lower rollers is locally stretched in the direction in which it is likely to expand, and the area not in contact with the rollers is sufficiently extended. There is a problem that it is not expanded. Further, when the expanding device shown in Patent Document 2 expands, when the expanding amount is further increased so as to expand the region not in contact with the roller, only the locally stretched region is further stretched. The tape may break.

An object of the present invention is to provide an expanding method and an expanding device capable of suppressing local stretching of a sheet.

In order to solve the above-mentioned problems and achieve the object, the expanding method of the present invention is an expanding method for expanding a sheet to which a work is attached, and is a first method in which the work is sandwiched in a first direction and faces each other. The sheet is sandwiched between the bar-shaped sandwiching member and the second bar-shaped sandwiching member, and the workpieces are sandwiched in the second direction orthogonal to the first direction so as to face each other, and the rotation axes are parallel to the second direction. A third roller holding member having a plurality of rollers rotating around the center, a holding step for holding the sheet between the fourth roller holding members, the first bar-shaped holding member, and the second bar-shaped holding member. In a state where the sheet is sandwiched between the third roller sandwiching member and the fourth roller sandwiching member, the first bar-shaped sandwiching member and the second bar-shaped sandwiching member are moved in directions in which they are separated from each other. It is characterized by including an expanding step for expanding the sheet in the first direction.

In the expanding method, the sheet is sandwiched between the third bar-shaped sandwiching member and the fourth bar-shaped sandwiching member that face each other with the workpiece sandwiched in the second direction, and the workpiece is sandwiched and opposed to each other in the first direction. The third bar shape, with the sheet sandwiched between the first roller sandwiching member having a plurality of rollers rotating about a rotation axis parallel to the first direction and the second roller sandwiching member, respectively. A second expanding step may be provided in which the sheet is expanded in the second direction by moving the sandwiching member and the fourth bar-shaped sandwiching member in directions in which they are separated from each other.

The expanding device of the present invention is an expanding device that expands a sheet to which a work is attached, and is a first bar-shaped holding member that is arranged so as to sandwich the work in the first direction and faces each other and holds the sheets, respectively. And the second bar-shaped holding member, and a plurality of rollers that are arranged so as to face each other with the workpiece sandwiched in the second direction orthogonal to the first direction and rotate about a rotation axis parallel to the second direction. A holding mechanism having a third roller holding member and a fourth roller holding member, respectively, and a direction in which the first bar-shaped holding member and the second bar-shaped holding member are separated from each other in the first direction. It is characterized by including a moving mechanism having a first-direction moving means for moving.

In the expanding device, the moving mechanism may further include a second-direction moving means for moving the third roller holding member and the fourth roller holding member in the directions away from each other in the second direction.

In the expanding device, the holding mechanism is arranged so as to face each other with the work sandwiched in the second direction, and the third bar-shaped holding member and the fourth bar-shaped holding member for holding the sheet, respectively, and the first bar-shaped holding member. A first roller holding member and a second roller holding member each having a plurality of rollers that are arranged so as to face each other with the work sandwiched in the direction and rotate about a rotation axis parallel to the first direction. The moving mechanism may further include a second-direction moving means for moving the third bar-shaped holding member and the fourth bar-shaped holding member in directions that are separated from each other in the second direction.

The present invention has the effect of suppressing the local stretching of the sheet.

FIG. 1 is a perspective view showing a configuration example of the expanding device according to the first embodiment. FIG. 2 is a perspective view showing a work to be processed by the expanding device shown in FIG. FIG. 3 is a perspective view showing the work, the expanding sheet, and the like shown in FIG. FIG. 4 is a plan view schematically showing the work of the expanding device shown in FIG. 1 and each holding unit. FIG. 5 is a front view schematically showing the first holding unit and the second holding unit shown in FIG. FIG. 6 is a perspective view showing a holding block of the first holding unit and the second holding unit shown in FIG. FIG. 7 is a flowchart showing the flow of the expanding method according to the first embodiment. FIG. 8 is a side view schematically showing a main part of the expanding device in a direction parallel to the first direction of the sandwiching step of the expanding method shown in FIG. 7. FIG. 9 is a side view schematically showing a main part of the expanding device in a direction parallel to the second direction of the sandwiching step of the expanding method shown in FIG. 7. FIG. 10 is a side view schematically showing a main part of an expanding device in a direction parallel to the first direction of the expanding step of the expanding method shown in FIG. 7. FIG. 11 is a plan view schematically showing an expanding sheet held by the first holding unit of the expanding step of the expanding method shown in FIG. 7. FIG. 12 is a plan view schematically showing an expanding sheet held by the first holding unit expanded by the expanding device of the comparative example. FIG. 13 is a plan view schematically showing the work of the expanding device according to the second embodiment and each holding unit. FIG. 14 is a flowchart showing the flow of the expanding method according to the second embodiment.

An embodiment (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Further, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions or changes of the configuration can be made without departing from the gist of the present invention.

[Embodiment 1]
The expanding device according to the first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a configuration example of the expanding device according to the first embodiment. FIG. 2 is a perspective view showing a work to be processed by the expanding device shown in FIG. FIG. 3 is a perspective view showing the work, the expanding sheet, and the like shown in FIG. FIG. 4 is a plan view schematically showing the work of the expanding device shown in FIG. 1 and each holding unit. FIG. 5 is a front view schematically showing the first holding unit and the second holding unit shown in FIG. FIG. 6 is a perspective view showing a holding block of the first holding unit and the second holding unit shown in FIG.

The expanding device 1 shown in FIG. 1 according to the first embodiment expands (also referred to as expansion) an expanding sheet 201 (also referred to as expansion), which is a sheet to which the work 200 shown in FIG. 2 is attached. It is a device that divides into individual chips 220. As shown in FIG. 2, the work 200 to be processed by the expanding device 1 according to the first embodiment is a disk-shaped semiconductor wafer or light having silicon, sapphire, gallium arsenide, SiC (silicon carbide) or the like as a substrate 203. Wafers such as device wafers.

In the first embodiment, as shown in FIG. 2, the work 200 has a device 202 formed in each region of the surface 204 of the substrate 203, which is partitioned by a plurality of scheduled division lines 205 that intersect with each other. In the work 200, a modified layer 206 (indicated by a broken line in FIG. 2), which is a division starting point, is formed inside the substrate 203 along the planned division line 205. The modified layer 206 means a region in which the density, refractive index, mechanical strength and other physical properties are different from those of the surroundings, and is a melt processing region, a crack region, a dielectric breakdown region, and a refractive index. Examples thereof include a change region and a region in which these regions are mixed. In the first embodiment, the modified layer 206 has a lower mechanical strength than the other parts of the substrate 203.

Further, in the first embodiment, as shown in FIG. 3, an expanding sheet 201 is attached to the back surface 207 side of the substrate 203, and the work 200 is divided into individual chips 220 along the modified layer 206 by the expanding device 1. Will be done. The chip 220 includes a part of the substrate 203 and a device 202 formed on the surface 204 of the substrate 203.

The expanding sheet 201 has elasticity, and is formed by, for example, stretching a heated synthetic resin along the second direction 212 and stretching it in the first direction 211 orthogonal to the second direction 212. .. That is, the second direction 212 is orthogonal to the first direction 211. The expanding sheet 201 includes a base material layer made of a synthetic resin having elasticity, and an adhesive layer made of a synthetic resin laminated on the base material layer and having elasticity and adhesiveness. In the first embodiment, the second direction 212 is the so-called flow direction (MD: Machine Direction direction), and the first direction 211 is the so-called vertical direction (TD: Transverse Direction direction). The surface of the adhesive layer is hereinafter referred to as an adhesive surface 201-1, and the surface of the base material layer is hereinafter referred to as a base material surface 201-2.

The expanding device 1 according to the first embodiment expands the expanding sheet 201 attached to the work 200 into the second direction 212 and the first direction 211, divides the work 200 into individual chips 220, and is adjacent to each other. It is a device that forms a gap between the chips 220. Further, the expanding device 1 expands the expanding sheet 201 to form a gap between the chips 220 adjacent to each other, and then attaches an annular frame 209 having an inner diameter larger than that of the work 200 to the expanding sheet 201. The work 200 is supported in the opening 210 of the annular frame 209.

Further, in the first embodiment, since the expanding sheet 201 is shaped while being extended in the second direction 212, tension is applied to the second direction 212, and the second direction 212 is more than the first direction 211. Is hard to expand. That is, in the first embodiment, the expanding sheet 201 is more likely to be expanded in the first direction 211 than in the second direction 212. In the present invention, the direction in which the expanding sheet 201 is difficult to expand and the direction in which it is easily expanded are not limited to the directions described in the first embodiment.

As shown in FIG. 1, the expanding device 1 includes a flat plate-shaped fixed base 2, a holding table 10 provided in the center of the fixed base 2, a work transfer unit (not shown), an expanding sheet holding unit 50, and the like. It includes a frame transfer unit (not shown), a sheet cutting unit 90, and a control unit 100.

The holding table 10 is formed in a disk shape, and the expanding sheet 201 is placed on the holding surface 11. The holding table 10 is provided so as to be movable in the vertical direction by a moving mechanism. The holding surface 11 is formed flat along the horizontal direction and has a diameter on which the work 200 can be placed via the expanding sheet 201. The work 200 is placed on the holding surface 11 via the expanding sheet 201.

The work transfer unit is arranged above the expanding sheet holding unit 50 and holds the work 200 on the lower surface. The work transfer unit is provided so as to be movable in the vertical direction by the elevating unit, and is provided so as to be movable in the horizontal direction by the horizontal movement unit. The work transfer unit is arranged at a position where the work 200 held on the lower surface is coaxial with the holding table 10 by the horizontal moving unit, and the work 200 is positioned at a position facing the holding table 10 in the vertical direction. Further, the work transfer unit is lowered by the elevating unit to attach the work 200 to the expanding sheet 201.

The expanding sheet holding unit 50 holds the expanding sheet 201. The expanding sheet holding unit 50 includes a first holding unit 51-1, a second holding unit 51-2, a third holding unit 51-3, and a fourth holding unit 51-4. The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 attach the expanding sheet 201 to which the work 200 is attached on the outer periphery of the work 200. It is a holding unit to hold.

The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 each sandwich the position on the outer peripheral side of the work 200 of the expanding sheet 201. Hold. Since the first holding unit 51-1 and the second holding unit 51-2 have substantially the same configurations, the same parts will be described with the same reference numerals, and the third holding unit 51-3 and the fourth holding unit 51- will be described. Since the configurations of No. 4 are substantially the same as each other, the same parts will be described with the same reference numerals. Further, the same parts of the first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 will be described with the same reference numerals.

The first holding unit 51-1, the second holding unit 51-2, the third holding unit 51-3, and the fourth holding unit 51-4 include a columnar moving base 52 provided on the fixed base 2. ..

The first holding unit 51-1 and the second holding unit 51-2 each include a holding unit 60. As shown in FIG. 4, the sandwiching unit 60 of the first holding unit 51-1 and the sandwiching unit 60 of the second holding unit 51-2 sandwich the work 200 held by the holding table 10 in the first direction 211. The holding tables 10 are positioned so as to face each other. Note that FIG. 4 omits the device 202 of the work 200.

Since the configurations of the holding unit 60 of the first holding unit 51-1 and the second holding unit 51-2 are the same, the holding unit 60 of the first holding unit 51-1 will be described below as a representative. As shown in FIG. 5, the holding unit 60 includes an upper holding portion 61 and a lower holding portion 62 facing each other in the vertical direction. The upper holding portion 61 and the lower holding portion 62 are formed in a straight line parallel to the second direction 212. The upper holding portion 61 is supported by the tip of the support arm 63 extending horizontally from the upper end portion of the moving base 52, and the lower holding portion 62 is supported by the support arm 63 extending horizontally from the upper end portion of the moving base 52. It is supported by the tip of.

The upper holding portion 61 and the lower holding portion 62 each include a holding portion main body member 64 fixed to the tip of the support arm 63, a roller holding member 65, and a bar-shaped holding member 66, respectively. The sandwiching portion main body member 64 is formed in a linear columnar shape parallel to the second direction 212.

The roller holding member 65 is formed in a columnar shape parallel to the longitudinal direction of the holding portion main body member 64 of each of the upper holding portion 61 and the lower holding portion 62 and having the same overall length as the holding portion main body member 64, and the holding portion main body member. It is attached to the tip of the telescopic rod of the cylinder 67 fixed to 64. The roller holding member 65 of the upper holding portion 61 and the roller holding member 65 of the lower holding portion 62 are arranged so as to face each other in the vertical direction, and are centered on a rotation axis 68 parallel to the first direction 211 on the surfaces facing each other. A plurality of rotating columnar rollers 69 are rotatably supported, and each has a plurality of rollers 69.

Further, when the telescopic rod of the cylinder 67 is extended, the roller holding member 65 of the upper holding portion 61 and the roller holding member 65 of the lower holding portion 62 approach each other and hold the expanding sheet 201 between the rollers 69. At the same time, when the telescopic rods of the cylinder 67 shrink, they separate from each other. The roller holding member 65 of the holding unit 60 of the first holding unit 51-1 is hereinafter referred to as the first roller holding member 65 (hereinafter referred to as reference numeral 65-1), and the second holding unit 51-1 is held. The roller holding member 65 of the unit 60 is hereinafter referred to as a second roller holding member 65 (hereinafter referred to as reference numeral 65-2). For this purpose, the first roller holding member 65-1 and the second roller holding member 65-2 are arranged so as to face each other with the work 200 held on the holding table 10 in the first direction 211 interposed therebetween. There is.

As shown in FIG. 5, the bar-shaped holding member 66 includes holding blocks 70 arranged side by side along the longitudinal direction of the holding portion main body members 64 of the upper holding portion 61 and the lower holding portion 62, respectively, and sandwiching the members 66. The block 70 is attached to the tip of the telescopic rod of the cylinder 71 fixed to the holding portion main body member 64. The holding block 70 of the bar-shaped holding member 66 of the upper holding portion 61 and the holding block 70 of the bar-shaped holding member 66 of the lower holding portion 62 are arranged so as to face each other in the vertical direction, and the roller holding members 65-1, 65. It is located next to the first direction 211 of -2. The surfaces 72 of the bar-shaped holding member 66 of the upper holding portion 61 and the holding block 70 of the bar-shaped holding member 66 of the lower holding portion 62 facing each other are formed flat along the horizontal direction. ..

Further, in the bar-shaped holding member 66 of the upper holding portion 61, as shown in FIGS. 5 and 6, two holding blocks 70 are attached to the tip of the telescopic rod of one cylinder 71 via the rotation support member 73. ing. The rotation support member 73 rotatably supports the two sandwiching blocks 70 about a rotation shaft 74 parallel to the first direction 211. In the first embodiment, in the bar-shaped holding member 66 of the lower holding portion 62, all the holding blocks 70 are fixed to each other.

Further, the bar-shaped holding member 66 of the upper holding portion 61 and the bar-shaped holding member 66 of the lower holding portion 62 approach each other when the telescopic rod of the cylinder 71 is extended, and the expanding sheet 201 is between the holding blocks 70 of each other. When the telescopic rod of the cylinder 71 shrinks while sandwiching the two, the sandwiching blocks 70 are separated from each other. Since the holding block 70 of the bar-shaped holding member 66 of the upper holding portion 61 is rotatably supported by the rotation support member 73 around the rotation shaft 74, it is placed between the bar-shaped holding member 66 of the lower holding portion 62. When sandwiching the expanding sheet 201, the sandwiching block 70 of the upper sandwiching portion 61 rotates according to the direction of the expanding sheet 201, and the bar-shaped sandwiching member 66 may sandwich the expanding sheet 201 between the sandwiching blocks 70. can.

When the expanding sheet 201 is sandwiched between the sandwiching blocks 70, the bar-shaped sandwiching member 66 comes into contact with the surface 72 of the sandwiching block 70 of the upper sandwiching portion 61 with the adhesive surface 201-1 of the expanding sheet 201, and the lower sandwiching portion 62. The base material surface 201-2 of the expanding sheet 201 comes into contact with the surface 72 of the sandwiching block 70. The bar-shaped holding member 66 of the first holding unit 51-1 is hereinafter referred to as the first bar-shaped holding member 66 (hereinafter referred to as reference numeral 66-1), and the bar-shaped holding member 66 of the second holding unit 51-2 is held. The member 66 is hereinafter referred to as a second bar-shaped sandwiching member 66 (hereinafter, designated by reference numeral 66-2).

Further, as shown in FIG. 6, each of the holding blocks 70 of the bar-shaped holding members 66-1 and 66-2 is provided with a plurality of grooves 75 parallel to the second direction on the surface 72, and is closer to the holding table 10 on the surface 72. A plurality of outlets 76 capable of ejecting cooled air are arranged side by side in parallel with the second direction 212 at the outer edge portion. In the first embodiment, a plurality of grooves 75 are provided on the surface 72 of both the upper holding portion 61 and the lower holding portion 62, but in the present invention, the surface 72 of the holding block 70 of the lower holding portion 62 is provided. It is not necessary to provide the groove 75 in the groove 75. In the present invention, since the groove 75 is provided on the surface 72 of the holding block 70 of at least the upper holding portion 61 of the bar-shaped holding members 66-1, 66-2, the contact area of the holding block 70 with the adhesive surface 211-1 is suppressed. Therefore, it is possible to prevent the sandwiching block 70 from sticking to the adhesive surface 2011-1.

The third holding unit 51-3 and the fourth holding unit 51-4 are paired with a roller holding member 65 provided vertically movable on a columnar moving base 52 provided on the fixed base 2. It includes a member moving unit 54 that moves the roller sandwiching member 65 in a direction toward each other and a direction away from each other. The pair of roller holding members 65 are arranged at intervals in the vertical direction from each other, are brought close to each other by the member moving unit 54, and the expanding sheet 201 is sandwiched and held between them.

The pair of roller holding members 65 of the third holding unit 51-3 and the pair of roller holding members 65 of the fourth holding unit 51-4 face each other with the work 200 held on the holding table 10 in the second direction 212. The member moving unit 54 is provided on the moving base 52.

The pair of roller holding members 65 of the third holding unit 51-3 and the fourth holding unit 51-4 are formed in a columnar shape parallel to the first direction 211. The pair of roller holding members 65 of the third holding unit 51-3 and the fourth holding unit 51-4 are arranged so as to face each other in the vertical direction, and are centered on a rotation shaft 78 parallel to the second direction 212 on the surfaces facing each other. It rotatably supports a plurality of columnar rollers 79 that rotate in parallel, and each has a plurality of rollers 79. The roller holding member 65 of the third holding unit 51-3 is hereinafter referred to as the third roller holding member 65 (hereinafter referred to as reference numeral 65-3), and the roller holding member 65 of the fourth holding unit 51-4 is referred to as the third holding unit 65-3. , Hereinafter, it is referred to as a fourth roller holding member 65 (hereinafter, represented by reference numeral 65-4).

The member moving unit 54 includes a motor 55 that makes the pair of roller holding members 65-3 and 65-4 movable in the vertical direction, a ball screw 56 that is rotated around the axis by the motor 55, and a ball screw 56 that is screwed into the ball screw 56. It also includes a roller sandwiching member 65-3, 65-4 and a nut 58 connected via an arm member 57. In the member moving unit 54, the motor 55 rotates the ball screw 56 around the axis to move the nut 58, the arm member 57, and the roller holding members 65-3, 65-4 in the vertical direction.

Further, the member moving unit 54 can move the pair of roller holding members 65-3 and 65-4 in the same direction in the vertical direction by rotating the ball screw 56 around the axis by the motor 55.

The first bar-shaped holding member 66-1, the second bar-shaped holding member 66-2, the first roller holding member 65-1, the second roller holding member 65-2, the third roller holding member 65-3, and the first. The four-roller holding member 65-4 constitutes a holding mechanism 80 that holds the outer periphery of the work 200 of the expanding sheet 201.

Further, the expanding device 1 includes a moving mechanism 30. The moving mechanism 30 includes a first direction moving mechanism 31 which is a first direction moving means and a second direction moving mechanism 32 which is a second direction moving means.

The first direction moving mechanism 31 moves the moving base 52 of the first holding unit 51-1 and the moving base 52 of the second holding unit 51-2 along the first direction 211 to form a first bar shape. The sandwiching member 66-1 and the second bar-shaped sandwiching member 66-2 are moved in the directions away from each other in the first direction 211, and the first roller sandwiching member 65-1 and the second roller sandwiching member 65-2 are moved. It is moved in the direction away from each other in the first direction 211. The first-direction moving mechanism 31 moves the first moving unit 33-1 that moves the moving base 52 of the first holding unit 51-1 to the first direction 211, and the moving base 52 of the second holding unit 51-2. It includes a second moving unit 33-2 that moves in the first direction 211.

The second direction moving mechanism 32 moves the moving base 52 of the third holding unit 51-3 and the moving base 52 of the fourth holding unit 51-4 along the second direction 212 to sandwich the third roller. The member 65-3 and the fourth roller holding member 65-4 are moved in a direction in which they are separated from each other in the second direction 212. The second direction moving mechanism 32 moves the moving base 52 of the third holding unit 51-3 to the second direction 212, and the moving base 52 of the fourth holding unit 51-4. It includes a fourth moving unit 33-4 that moves in the second direction 212.

Since the first mobile unit 33-1, the second mobile unit 33-2, the third mobile unit 33-3, and the fourth mobile unit 33-4 have substantially the same configuration, the same parts are designated by the same reference numerals. do.

The first mobile unit 33-1, the second mobile unit 33-2, the third mobile unit 33-3, and the fourth mobile unit 33-4 are the holding units 51-1, 51-2, 51-3, 51-4. The motor 34 that makes the moving base 52 movable in the first direction 211 or the second direction 212, and the moving base 52 that is rotated around the axis by the motor 34 to move in the first direction 211 or the second direction 212. It has a ball screw 35 for making the ball screw 35.

The first moving unit 33-1, the second moving unit 33-2, the third moving unit 33-3, and the fourth moving unit 33-4 are the holding units 51-1, 51-2, 51-3, 51-4. Expands the expanding sheet 201 held by the holding units 51-1, 51-2, 51-3, 51-4 by moving the two in the first direction 211 or the second direction 212 in a direction away from each other.

The frame transport unit is arranged above the expanding sheet holding unit 50, and holds the annular frame 209 on the lower surface. The frame transport unit is provided so as to be movable in the vertical direction by an elevating unit, and is provided so as to be movable in the horizontal direction by a horizontal movement unit (not shown). The frame transport unit was placed at a position where the opening 210 of the annular frame 209 held on the lower surface was coaxial with the holding table 10 by the horizontal moving unit, and was placed on the opening 210 of the annular frame 209 and the holding table 10. The annular frame 209 is positioned at a position where the work 200 attached to the expanding sheet 201 faces in the vertical direction. Further, the frame transport unit is lowered by the elevating unit, so that the annular frame 209 is attached to the expanding sheet 201 held and expanded by the holding units 51-1, 51-2, 53-1 and 51-4. do.

The sheet cutting unit 90 cuts the expanded sheet 201 attached to the annular frame 209 along the annular frame 209. As shown in FIG. 1, the sheet cutting unit 90 includes a cutter 91 that cuts the expanded sheet 201. After the annular frame 209 is attached to the expanding sheet 201, the sheet cutting unit 90 cuts the cutter 91 from the back surface 207 side between the inner edge and the outer edge of the annular frame 209 of the expanding sheet 201 to cut the cutter 91. Rotate along the annular frame 209 to cut between the inner and outer edges of the annular frame 209 of the expanding sheet 201.

The control unit 100 controls each component of the expanding device 1, and attaches the work 200 to the expanding sheet 201, the expanding operation of the expanding sheet, the attaching operation of the annular frame 209 to the expanding sheet 201, and the like. Is to be carried out. The control unit 100 is an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and input / output. It is a computer having an interface device. The arithmetic processing unit of the control unit 100 executes arithmetic processing according to a computer program stored in the storage device, and outputs a control signal for controlling the expanding apparatus 1 to each of the expanding apparatus 1 via the input / output interface apparatus. Output to the component.

Further, the control unit 100 is connected to a display unit composed of a liquid crystal display device for displaying various information, images, and the like, and an input unit used by an operator to register processing content information and the like. The input unit is composed of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

In the present invention, in addition to the above-described configuration, the expanding device 1 has a sheet holding unit for holding the expanding sheet 201 wound on a roll, and an expanding sheet 201 from the sheet holding unit with the adhesive surface 201-1 facing upward. A delivery unit that sends out to the holding units 51-1, 51-2, 51-3, 51-4 and a cutting unit that cuts the expanding sheet 201 sent out by the delivery unit may be provided.

Next, the present specification describes the expanding method according to the first embodiment based on the drawings. FIG. 7 is a flowchart showing the flow of the expanding method according to the first embodiment. FIG. 8 is a side view schematically showing a main part of the expanding device in a direction parallel to the first direction of the sandwiching step of the expanding method shown in FIG. 7. FIG. 9 is a side view schematically showing a main part of the expanding device in a direction parallel to the second direction of the sandwiching step of the expanding method shown in FIG. 7. FIG. 10 is a side view schematically showing a main part of an expanding device in a direction parallel to the first direction of the expanding step of the expanding method shown in FIG. 7. FIG. 11 is a plan view schematically showing an expanding sheet held by the first holding unit of the expanding step of the expanding method shown in FIG. 7. FIG. 12 is a plan view schematically showing an expanding sheet held by the first holding unit expanded by the expanding device of the comparative example.

The expanding method according to the first embodiment is also an expanding operation of the expanding sheet 201 of the expanding device 1 described above. The expanding device 1 starts the expanding operation when it receives the processing content information input by the operator by operating the input unit or the like and receives the start instruction of the processing operation input by the operator by operating the input unit or the like. As shown in FIG. 7, the expanding method includes a sandwiching step 1001, an expanding step 1002, and a frame attaching step 1003.

(Pinch step)
In the sandwiching step 1001, the expanding sheet 201 is sandwiched between the first bar-shaped sandwiching member 66-1 and the second bar-shaped sandwiching member 66-2 facing each other with the work 200 sandwiched in the first direction 211, and the second bar-shaped sandwiching member 66-2. This is a step of sandwiching the expanding sheet 201 between the third roller sandwiching member 65-3 and the fourth roller sandwiching member 65-4 facing each other with the workpiece sandwiched in the direction 212.

In the sandwiching step 1001, as shown in FIG. 8, the expanding device 1 sandwiches the expanding sheet 201 between the first bar-shaped sandwiching members 66-1 of the first holding unit 51-1 and the second holding unit 51-2. The expanded sheet 201 is sandwiched between the third roller sandwiching members 65-3 of the third holding unit 51-3, and the fourth holding member is sandwiched between the second bar-shaped sandwiching members 66-2. It is sandwiched between the fourth roller sandwiching members 65-4 of the unit 51-4. In the holding step 1001, the first roller holding member 65-1 of the first holding unit 51-1 is separated from the expanding sheet 201, and the second roller holding member 65-2 of the second holding unit 51-2 is expanded. It is away from the seat 201.

In the sandwiching step 1001, the expanding device 1 holds the modified layer 206 held by the work transfer unit on the back surface 207 of the work 200 formed by the first bar-shaped sandwiching member 66-1 and the second bar-shaped sandwiching member of the expanding sheet 201. After facing the area surrounded by 66-2, the third roller holding member 65-3, and the fourth roller holding member 65-4, the work transfer unit is lowered as shown in FIGS. 8 and 9. , The back surface 207 of the work 200 is attached to the expanding sheet 201.

(Expanding step)
In a state where the expanding sheet 201 is sandwiched between the first bar-shaped sandwiching member 66-1, the second bar-shaped sandwiching member 66-2, the third roller sandwiching member 65-3, and the fourth roller sandwiching member 65-4, the first This is a step of expanding the expanding sheet 201 in the first direction 211 by moving the bar-shaped holding member 66-1 and the second bar-shaped holding member 66-2 in the directions in which they are separated from each other.

In the expanding step 1002, the expanding sheet 201 was sandwiched between the first bar-shaped sandwiching member 66-1, the second bar-shaped sandwiching member 66-2, the third roller sandwiching member 65-3, and the fourth roller sandwiching member 65-4. In this state, the expanding device 1 is connected to the moving units 33-1, 33-2, 33-3, 33-4 and the holding units 51-1, 51-2, 53-1 as shown by the arrow 300 in FIG. , 51-4 are moved away from the first direction 211 or the second direction 212 at the same time. Then, the expanding device 1 moves the moving base 52 of the holding units 51-1, 51-2, 53-1, 51-4, and the first bar-shaped holding member 66-1 and the second bar-shaped holding member 66. -2 is moved in a direction away from each other along the first direction 211, and the third roller holding member 65-3 and the fourth roller holding member 65-4 are separated from each other along the second direction 212. Expands the expanding sheet 201 in both the first direction 211 and the second direction 212. As a result of the expansion of the expanding sheet 201, a tensile force acts on the expanding sheet 201 along both the first direction 211 and the second direction 212.

When a tensile force along both the first direction 211 and the second direction 212 acts on the expanding sheet 201 to which the work 200 is attached, the work 200 is subjected to the modified layer 206 along the planned division line 205. Is formed, the chips are divided into individual chips 220 along the planned division line 205 with the modified layer 206 as a base point. In the first embodiment, in the expanding step 1002, the holding units 51-1, 51-2, 51-3, 51-4 are moved in the same direction as they are separated from the first direction 211 or the second direction 212. In the present invention, without being limited to this, after moving the holding units 51-1 and 51-2 in the direction away from the first direction 211, the orientation of the expanding sheet 201 with respect to the expanding device 1 is 90 degrees. The expanding sheet 201 may be held by the holding units 51-1, 51-2, 51-3, 51-4 by rotating, and the holding units 51-1 and 51-2 may be separated from each other in the second direction 212.

(Frame attachment step)
The frame attachment step 1003 is a step of attaching the annular frame 209 to the expanded expanding sheet 201. In the frame attaching step 1003, the expanding device 1 positions the annular frame 209 held by the frame transport unit at a position where the opening 210 and the work 200 attached to the expanding sheet 201 face each other. The expanding device 1 lowers the frame transport unit and attaches the annular frame 209 held by the frame transport unit to the expanding sheet 201. In the frame attaching step 1003, the expanding device 1 causes the cutter 91 of the sheet cutting unit 90 to cut between the inner edge and the outer edge of the annular frame 209 of the expanding sheet 201 along the annular frame 209, and the expanding operation of the expanding device 1 That is, the expanding method according to the first embodiment is completed.

In the expanding method and the expanding device 1 according to the first embodiment described above, in the expanding step 1002, the expanding sheet 201 is sandwiched between the bar-shaped sandwiching members 66-1, 66-2, and the expanding sheet 201 is expanded in the first direction 211. do. As described above, in the expanding method and the expanding device 1, both sides of the work 200 in the first direction 211, which is the direction in which the expanding sheet 201 is easily stretched, are sandwiched by the bar-shaped sandwiching members 66-1, 66-2, and the expanding sheet 201 is sandwiched in the first direction 211. In order to expand the expanding sheet 201, the entire expanding sheet 201 can be expanded in the first direction 211 as shown in FIG. In a comparative example in which both sides of the work 200 in the first direction 211, which is the direction in which the expanding sheet 201 is easily stretched, are sandwiched between a plurality of columnar rollers 400 and expanded, as shown in FIG. 12, the expanding sheet 201 The vicinity of the rotating shaft 401 of the roller 400 is extended, and the expanding sheet 201 is locally stretched without extending the portion of the expanding sheet 201 away from the rotating shaft 401 of the roller 400. As a result, in the expanding method and the expanding device 1 according to the first embodiment, the expanding sheet 201 is locally stretched in the comparative example, whereas the expanding sheet 201 is locally stretched as shown in FIG. It has the effect of being able to prevent it from being lost.

Further, in the expanding step 1002, the expanding method and the expanding device 1 sandwich the work 200 in the second direction 212 orthogonal to the first direction 211 while sandwiching and expanding the bar-shaped sandwiching members 66-1 and 66-2. Since both sides of the roller are sandwiched by the rollers 79 of the roller sandwiching members 65-3 and 65-4, the rollers 79 rotate with the expansion of the first direction 211, and the bar-shaped sandwiching members 66-1 and 66-2 are expanded. The roller sandwiching members 65-3 and 65-4 do not interfere with the expansion of the sheet 201 in the first direction 211.

[Embodiment 2]
The expanding apparatus and expanding method according to the second embodiment of the present invention will be described with reference to the drawings. FIG. 13 is a plan view schematically showing the work of the expanding device according to the second embodiment and each holding unit. FIG. 14 is a flowchart showing the flow of the expanding method according to the second embodiment. Note that FIG. 13 omits the device 202 of the work 200. In FIGS. 13 and 14, the same parts as those in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

In the expanding device 1-2 according to the second embodiment, as shown in FIG. 13, the third holding unit 51-3 and the fourth holding unit 51-4 have the first holding unit 51-1 and the second holding unit 51-. It is the same as the first embodiment except that it has the same configuration as the second embodiment. The bar-shaped holding member 66 having the same configuration as the bar-shaped holding members 66-1 and 66-2 of the third holding unit 51-3 is hereinafter referred to by the third bar-shaped holding member 66 (hereinafter, reference numeral 66-3). ), The bar-shaped holding member 66 having the same configuration as the bar-shaped holding members 66-1 and 66-2 of the fourth holding unit 51-4 is hereinafter referred to as the fourth bar-shaped holding member 66 (hereinafter referred to as reference numeral 66-4). (Indicated by).

The third bar-shaped holding member 66-3 and the fourth bar-shaped holding member 66-4 are arranged so as to face each other with the work 200 held on the holding table 10 in the second direction 212. It is formed parallel to the direction 211. The holding mechanism 80 of the expanding device 1-2 according to the second embodiment has a first bar-shaped holding member 66-1, a second bar-shaped holding member 66-2, a first roller holding member 65-1, and a second roller holding member. In addition to 65-2, the third roller holding member 65-3 and the fourth roller holding member 65-4, the third bar-shaped holding member 66-3 and the fourth bar-shaped holding member 66-4 are provided.

The expanding method according to the second embodiment is the same as that of the first embodiment except that the expanding step 1002 includes the first expanding step 1002-1 and the second expanding step 1002-2, as shown in FIG. ..

The first expanding step 1002-1 is an expanding sheet composed of a first bar-shaped holding member 66-1, a second bar-shaped holding member 66-2, a third roller holding member 65-3, and a fourth roller holding member 65-4. A step of expanding the expanding sheet 201 in the first direction 211 by moving the first bar-shaped holding member 66-1 and the second bar-shaped holding member 66-2 in the directions in which the 201 is sandwiched. Is. In the first expanding step 1002-1 of the expanding method according to the second embodiment, the expanding device 1 includes the first bar-shaped holding member 66-1, the second bar-shaped holding member 66-2, and the third roller holding member 65-3. With the expanding sheet 201 sandwiched between the and the fourth roller holding member 65-4, the first moving unit 33-1 and the second moving unit 33-2 have the first bar-shaped holding member 66-1 and the second bar-shaped. The sandwiching member 66-2 is moved along the first direction 211 in a direction away from each other.

In the second expanding step 1002-2, the expanding sheet 201 is sandwiched between the third bar-shaped sandwiching member 66-3 and the fourth bar-shaped sandwiching member 66-4, and the first roller sandwiching member 65-1 and the first roller-shaped sandwiching member 65-1 are sandwiched. With the expanding sheet 201 sandwiched between the two roller sandwiching members 65-2, the expanding sheet is moved in the directions in which the third bar-shaped sandwiching member 66-3 and the fourth bar-shaped sandwiching member 66-4 are separated from each other. This is a step of expanding 201 in the second direction 212.

In the second expanding step 1002-2, the expanding device 1 includes the first bar-shaped holding member 66-1, the second bar-shaped holding member 66-2, the third roller holding member 65-3, and the fourth roller holding member 65-. With the expanding sheet 201 sandwiched between 4 and 4, the first roller sandwiching member 65-1, the second roller sandwiching member 65-2, the third bar-shaped sandwiching member 66-3, and the fourth bar-shaped sandwiching member 66-4. The expanding sheet 201 is sandwiched between the two. In the second expanding step 1002-2, the expanding device 1 includes the first bar-shaped holding member 66-1, the second bar-shaped holding member 66-2, the third roller holding member 65-3, and the fourth roller holding member 65-. 4 is separated from the expanding sheet 201, and the third bar-shaped holding member 66-3 and the fourth bar-shaped holding member 66-4 are placed in the third moving unit 33-3 and the fourth moving unit 33-4 in the second direction 212. Move in the direction away from each other along.

In the first expanding step 1002-1 and the second expanding step 1002-2, the expanding sheet 201 to which the work 200 is attached is subjected to a tensile force along both the first direction 211 and the second direction 212. The work 200 is divided into individual chips 220 along the planned division line 205 with the modified layer 206 as a base point.

In the first expanding step 1002-1, the expanding method and the expanding device 1-2 according to the second embodiment sandwich the expanding sheet 201 between the bar-shaped sandwiching members 66-1 and 66-2 and expand the sheet in the first direction 211. 201 is expanded, and in the second expanding step 1002-2, the expanding sheet 201 is sandwiched between the bar-shaped sandwiching members 66-3 and 66-4, and the expanding sheet 201 is expanded in the second direction 212. As a result, the expanding method and the expanding device 1-2 can expand the entire expanding sheet 201 in the first direction 211 and the second direction 212, and suppress that the expanding sheet 201 is locally stretched. It has the effect of being able to do it.

Further, the expanding method and the expanding device 1-2 according to the second embodiment move in the first direction 211 while being sandwiched and expanded by the bar-shaped sandwiching members 66-1 and 66-2 in the first expanding step 1002-1. Both sides of the work 200 in the second direction 212 orthogonal to the other are sandwiched by rollers 79 of the roller sandwiching members 65-3, 65-4, and in the second expanding step 1002-2, the bar-shaped sandwiching members 66-3, 66- While sandwiching and expanding with 4, both sides of the work 200 in the first direction 211 are sandwiched by rollers 69 of the roller sandwiching members 65-1 and 65-2. As a result, in the expanding method and the expanding device 1-2 according to the second embodiment, the rollers 69 and 79 rotate with the expansion of the first direction 211 and the second direction 212, and the bar-shaped holding members 66-1 and 66 The roller sandwiching members 65-1, 65-2, 65-3, 65-4 do not interfere with the expansion of the expanding sheet 201 of −2, 66-3, 66-4 in the first direction 211 and the second direction 212. ..

The present invention is not limited to the above-described embodiment and the like. That is, it can be modified in various ways without departing from the gist of the present invention.

1, 1-2 Expanding device 31 1st direction moving mechanism (1st direction moving means)
32 Second direction moving mechanism (second direction moving means)
65-1 1st roller holding member 65-2 2nd roller holding member 65-3 3rd roller holding member 65-4 4th roller holding member 66-1 1st bar-shaped holding member 66-2 2nd bar-shaped holding member 66-3 3rd bar-shaped holding member 66-4 4th bar-shaped holding member 68 Rotating shaft 69 Roller 78 Rotating shaft 79 Roller 80 Holding mechanism 200 Work 201 Expanding sheet (sheet)
211 1st direction 212 2nd direction 1001 Holding step 1002 Expanding step 1002-1 1st expanding step 1002-2 2nd expanding step

Claims (5)

It is an expanding method that expands the sheet to which the work is attached.
The sheet is sandwiched between the first bar-shaped sandwiching member and the second bar-shaped sandwiching member that oppose each other with the workpiece sandwiched in the first direction.
Further, a third roller holding member having a plurality of rollers facing each other with the workpieces sandwiched in the second direction orthogonal to the first direction and rotating around a rotation axis parallel to the second direction, and a second roller holding member. The sandwiching step of sandwiching the sheet with the 4-roller sandwiching member, and
In a state where the sheet is sandwiched between the first bar-shaped sandwiching member, the second bar-shaped sandwiching member, the third roller sandwiching member, and the fourth roller sandwiching member.
An expanding method comprising an expanding step of expanding the sheet in the first direction by moving the first bar-shaped holding member and the second bar-shaped holding member in directions in which they are separated from each other. The sheet is sandwiched between the third bar-shaped sandwiching member and the fourth bar-shaped sandwiching member that oppose each other with the workpiece sandwiched in the second direction.
A first roller holding member having a plurality of rollers that face each other with the workpiece sandwiched in the first direction and rotate about a rotation axis parallel to the first direction, and a second roller holding member. With the sheet sandwiched between
The expand according to claim 1, further comprising a second expanding step of expanding the sheet in the second direction by moving the third bar-shaped holding member and the fourth bar-shaped holding member in directions in which they are separated from each other. Method. It is an expanding device that expands the sheet to which the work is attached.
A first bar-shaped sandwiching member and a second bar-shaped sandwiching member, which are arranged so as to face each other with the workpiece sandwiched in the first direction and sandwich the sheet, respectively.
A third roller holding member each having a plurality of rollers that are arranged to face each other with the workpieces sandwiched in a second direction orthogonal to the first direction and rotate about a rotation axis parallel to the second direction. , A holding mechanism having a fourth roller holding member, and
An expanding device including a moving mechanism having a first bar-shaped holding member and a first-direction moving means for moving the second bar-shaped holding member in a direction away from each other in the first direction. The expanding device according to claim 3, wherein the moving mechanism further includes a second-direction moving means for moving the third roller holding member and the fourth roller holding member in directions that are separated from each other in the second direction. .. The sandwiching mechanism is arranged so as to face each other with the workpiece sandwiched in the second direction, and the third bar-shaped sandwiching member and the fourth bar-shaped sandwiching member that sandwich the sheet, respectively.
A first roller holding member and a second roller holding member each having a plurality of rollers that are arranged so as to face each other with the work sandwiched in the first direction and rotate about a rotation axis parallel to the first direction. And have
The expand according to claim 3, further comprising a second-direction moving means for moving the third bar-shaped holding member and the fourth bar-shaped holding member in a direction away from each other in the second direction. Device.

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