CN103597606B - 太阳能电池及其制造方法 - Google Patents

太阳能电池及其制造方法 Download PDF

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CN103597606B
CN103597606B CN201280027444.3A CN201280027444A CN103597606B CN 103597606 B CN103597606 B CN 103597606B CN 201280027444 A CN201280027444 A CN 201280027444A CN 103597606 B CN103597606 B CN 103597606B
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CN103597606A (zh
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李真宇
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LG Innotek Co Ltd
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Abstract

提供了一种太阳能电池及其制造方法。所述太阳能电池包括：衬底；所述衬底上的背电极层；所述背电极层上的吸光层；所述吸光层上的窗口层；所述吸光层中的多个微珠；以及各所述多个微珠的表面上的陷阱层。

Description

太阳能电池及其制造方法
技术领域
本发明涉及一种太阳能电池及其制造方法。
背景技术
近来由于能源需求增加，将太阳能转换成电能的太阳能电池的研发不断进展。
尤其是最近正在广泛使用铜铟镓硒(CIGS)基太阳能电池，即，pn异质结器件，具有包括玻璃衬底的衬底结构、金属背电极层、p型CIGS基吸光层、高电阻缓冲层和n型透明电极层。
另外，人们进行各种研究来增加太阳能电池的效率。
发明内容
技术问题
实施例提供了一种具有改善的光电转换效率的太阳能电池及其制造方法。
技术方案
在一个实施例中，一种太阳能电池包括：衬底；所述衬底上的背电极层；所述背电极层上的吸光层；所述吸光层上的窗口层；所述吸光层中的多个微珠；以及各所述多个微珠的表面上的陷阱层(trap layer)。
在另一个实施例中，一种太阳能电池的制造方法包括：通过粉碎CIGS晶体来形成多个微珠；在各所述多个微珠的表面上形成陷阱层；在衬底上形成背电极层；在所述背电极层上喷洒所述多个微珠；在所述背电极层和所述多个微珠上形成吸光层；在所述吸光层上形成缓冲层；以及在所述缓冲层上形成窗口层。
有益效果
根据本发明，在吸光层中形成了多个微珠，并且在所述多个微珠的表面上形成了陷阱层，使得入射到所述多个微珠内的光由于陷阱层而不会出来，因此被其吸收。因此，提高了光电转换效率。
附图说明
图1是根据实施例的太阳能电池的平面图；
图2是沿着图1的A-A’线截取的剖视图；
图3至图7是示出根据实施例的太阳能电池的制造方法的剖视图。
具体实施方式
在实施例的描述中，应理解，当层(或膜)、区域、图案或结构被称为在另一层(或膜)、区域、图案或结构之“上”时，术语“上”和“下”包括“直接地”和“间接地”两种意思。另外，将在附图中给出在各层的“上”和“下”的位置关系。在附图中，为了方便描述和清晰起见，会夸大、省略或示意性图示各层的厚度或大小。另外，各元件的大小并不完全反应实际大小。
图1是根据实施例的太阳能电池的平面图。图2是沿着图1的A-A’线截取的剖视图。
参看图1和图2，根据实施例的太阳能电池包括支撑衬底100、背电极层200、吸光层300、缓冲层400、高电阻缓冲层500和窗口层600。
吸光层300中可以形成多个微珠320以及涂布在多个微珠320的表面上的陷阱层。
支撑衬底100为板状，支撑着背电极层200、吸光层300、缓冲层400、高电阻缓冲层500和窗口层600。
支撑衬底100可以是绝缘体。支撑衬底100可以是玻璃衬底、塑料衬底或金属衬底。更具体地讲，支撑衬底100可以是钙钠玻璃衬底。支撑衬底100可以是透明的。支撑衬底100可以是刚性的或柔性的。
背电极层200被布置在支撑衬底100上。背电极层200是导电层。用于背电极层200的材料的实例是例如钼的金属。
另外，背电极层200可以包括至少两层。此时，各层可以是由相同或不同的金属形成的。
背电极层200中形成有第一通孔TH1。第一通孔TH1是暴露支撑衬底100的顶部表面的开放区域。从顶部看，第一通孔TH1具有在一个方向上延伸的形状。
第一通孔TH1的各宽度可以是约80μm至约200μm。
第一通孔TH1将背电极层200分成多个背电极。也就是说，第一通孔TH1限定出了这些背电极。
第一通孔TH1使这些背电极彼此分隔开。这些背电极被布置成条状。
绝缘层310可以形成为填充第一通孔TH1。绝缘层310可以形成为包括SiO2。当多个微珠320形成在第一通孔TH1中时，第一电池C1可以通过涂布在多个微珠320表面上的陷阱层330电性连接到第二电池C2。为了防止这种现象，可以形成绝缘层310。
这些背电极被布置成矩阵。此时，从顶部看，第一通孔TH1可以形成为格子状。
吸光层300被布置在背电极层200上。
吸光层300包含I-III-VI族化合物。例如，吸光层300可以具有Cu(In,Ga)Se2(CIGS)基晶体结构、铜-铟-硒基晶体结构或铜-镓-硒基晶体结构。
吸光层300的能带隙可以是约1eV至约1.8eV。
另外，吸光层300通过第二通孔TH2限定出多个吸光部分。也就是说，第二通孔TH2将吸光层300分成多个吸光部分。
多个微珠320可以形成在吸光层300中。多个微珠320包含与吸光层300相同的I-III-VI族化合物。例如，吸光层320可以具有Cu(In,Ga)Se2(CIGS)基晶体结构、铜-铟-硒基晶体结构或铜-镓-硒基晶体结构。
各多个微珠320的直径可以形成为约0.8μm至约1.2μm。多个微珠320可以全部形成为球形状，但不限于此。
陷阱层330可以形成在多个微珠320的表面上。陷阱层330可以包括金属，例如银。
陷阱层330的厚度可以形成为约3nm至约7nm。陷阱层330防止入射到多个微珠320的光被再次反射到外面，使得陷阱层能使光被多个微珠320吸收。
如果陷阱层330厚，则光被陷阱层330吸收，而如果陷阱层330薄，则光阱效应(light trap effect)很小，因而多个微珠320的各直径与陷阱层330的厚度的比值可以是200:1。
吸光层300的厚度可以形成为比多个微珠320的各直径大2至3倍。
缓冲层400被布置在吸光层300上。缓冲层400包含CdS，并且其能带隙是约2.2eV至约2.4eV。
高电阻缓冲层500被布置在缓冲层400上。高电阻缓冲层500包括无掺杂的i-ZnO。高电阻缓冲层500的能带隙为约3.1eV至约3.3eV。
多个第二通孔TH2形成在吸光层300、缓冲层400和高电阻缓冲层500中。第二通孔TH2是开放区域，暴露了背电极层200的顶部表面。
第二通孔TH2形成为与第一通孔TH1相邻。也就是说，从顶部看，第二通孔TH2的一部分形成在第一通孔TH1附近。
第二通孔TH2的各宽度可以是约80μm至约200μm。
窗口层600被布置在高电阻缓冲层500上。窗口层600是透明的导电层。另外，窗口层600的电阻高于背电极层200的电阻。例如，窗口层600的电阻可以为背电极层200的电阻的约10倍至约200倍。
窗口层600可以包括氧化物。例如，窗口层600可以包括氧化锌、铟锡氧化物(ITO)或铟锌氧化物(IZO)。
另外，氧化物可以包括导电杂质，例如Al、Al2O3、Mg或Ga。更具体地讲，窗口层600可以包括掺铝的氧化锌(AZO)或掺镓的氧化锌(GZO)。
连接部分650被布置在第二通孔TH2中。连接部分650从窗口层600向下延伸，并且与背电极层200接触。例如，连接部分650从第一电池的窗口延伸到与第二电池的背电极接触。
因此，连接部分650将相应的相邻电池连接。更具体地讲，连接部分650将相应的相邻电池C1、C2…中的窗口与背电极连接。
连接部分650与窗口层600形成为一体。也就是说，连接部分650是由与窗口层600的材料相同的材料形成的。
多个第三通孔TH3形成在缓冲层400、高电阻缓冲层500和窗口层600中。第三通孔TH3是开放区域，暴露了背电极层200的顶部表面。例如，第三通孔TH3的各宽度可以是约80μm至约200μm。
第三通孔TH3形成为与第二通孔TH2相邻。更具体地讲，第三通孔TH3被布置在第二通孔TH2附近。也就是说，从顶部看，第三通孔TH3沿着第二通孔TH2布置。
第三通孔TH3将缓冲层400分成多个缓冲器。
按照同样的方式，第三通孔TH3将高电阻缓冲层500分成多个高电阻缓冲器。
另外，第三通孔TH3将窗口层600划分成多个窗口。也就是说，第三通孔TH3限定出这些窗口。
这些窗口具有与背电极相对应的形状。也就是说，窗口被布置成条状。与此不同的是，窗口还可以布置成矩阵。
另外，通孔TH3限定出多个电池C1、C2…。更具体地讲，第二通孔TH2和第三通孔TH3限定出电池C1、C2…。也就是说，根据实施例的太阳能电池包括由第二通孔TH2和第三通孔TH3所划分出的电池C1、C2…。
如上所述，吸光层300中形成有多个微珠320，陷阱层330形成在多个微珠320的表面上，使得入射到多个微珠320中的光借助陷阱层330而不会流失到外面，而是被多个微珠320吸收。因此，提高了光电转换效率。
图3至图7是示出根据实施例的太阳能电池的制造方法的剖视图。制造方法的描述指的是上述太阳能电池的制造方法。
参看图3，背电极层200形成在支撑衬底100上，并且背电极层200被图案化以形成第一通孔TH1。因此，多个背电极形成在支撑衬底100上。使用激光将背电极层200图案化。
第一通孔TH1暴露了支撑衬底100的顶部表面，并且其宽度可以是约80μm至约200μm。
另外，例如防扩散层的额外层可以插设在支撑衬底100与背电极层200之间，并且同时，第一通孔TH1暴露该额外层的顶部表面。
参见图4，绝缘层310可以形成为填充第一通孔TH1。绝缘层310可以形成为包括SiO2。当多个微珠320形成在第一通孔TH1中时，第一电池C1通过被涂布在多个微珠320的表面上的陷阱层330电性连接到第二电池C2。为了防止这种现象，可以形成绝缘层310。
参见图5，在多个微珠320的表面上形成陷阱层330之后，通过喷洒方法在背电极层200上形成多个微珠320。
通过同时或分别地蒸镀铜、铟、镓和硒形成CIGS基晶体并将其粉碎之后，就分离出多个微珠320。多个微珠320可以全部形成为球形，但不限于此。
通过将多个微珠320浸渍在包含金属材料的水溶液(例如AgCl水溶液)中，可以形成陷阱层330。通过上述方法，包含银的陷阱层330可以形成在多个微珠320的表面上。多个微珠320和陷阱层330可以是由具有互不相同的折射率的材料形成的。
在将具有陷阱层330的多个微珠320散布在背电极层200上之后，吸光层300可以通过溅镀方法或蒸镀方法来形成。
例如，通过同时或分别地蒸镀铜、铟、镓和硒来形成CIGS基吸光层300，或者在形成金属前体层之后执行硒化方法来形成CIGS基吸光层300的方法，目前被广为使用。
如果要对形成并硒化金属前体层的方法进行详细描述，那就是通过使用铜靶、铟靶和镓靶的溅镀方法，将金属前体层形成在背电极200上。
然后，金属前体层通过硒化方法成为CIGS基吸光层300。
与此不同的是，可以同时进行使用铜靶、铟靶和镓靶的溅镀方法和硒化方法。
与此不同的是，可以通过仅使用铜靶和铟靶或仅使用铜靶和镓靶的溅镀方法和硒化方法来形成CIS基或CIG基吸光层300。
参见图6，缓冲层400和高电阻缓冲层500形成在吸光层300上。
当通过溅镀方法或化学浴沉积(CBD)将硫化镉沉积在吸光层300上时，形成缓冲层400。
然后，通过溅镀方法将氧化锌沉积在缓冲层400上，形成高电阻缓冲层500。
缓冲层400和高电阻缓冲层500被沉积为较薄的厚度。例如，缓冲层400和高电阻缓冲层500均具有约1nm至约80nm的厚度。
然后，部分地去除吸光层300、缓冲层400和高电阻缓冲层500以形成第二通孔TH2。
可以通过例如刀片或激光器的机械设备来形成第二通孔TH2。
例如，吸光层300和缓冲层400可以通过宽度为约40μm至约180μm的刀片而被图案化。另外，可以通过波长为约200nm至约600nm的激光来形成第二通孔TH2。
此时，第二通孔TH2的各宽度可以是约100μm至约200μm。此外，第二通孔TH2形成为暴露背电极层200的顶部表面的一部分。
参看图7，窗口层600形成在吸光层300上并且形成在第二通孔TH2中。也就是说，在将透明导电材料沉积在高电阻缓冲层500上并且沉积在第二通孔TH2中之后，就形成了窗口层600。
此时，第二通孔TH2内填满了透明导电材料，并且窗口层600直接与背电极层200接触。
此时，当在无氧氛围下沉积透明导电材料时，可以形成窗口层600。更具体地讲，当在无氧的惰性气体氛围下沉积掺铝的氧化锌时，形成窗口层600。
对于根据实施例的太阳能电池的制造方法来说，在吸光层中形成多个微珠，并且在该多个微珠的表面上形成陷阱层，使得入射到该多个微珠内部的光由于陷阱层而不会出来，因此被其吸收。因此，可以提高光电转换效率。
另外，上述实施例中所描述的特征、结构和效果等被包括在至少一个实施例中，但是本发明不限于此。此外，本领域的技术人员可以在其他实施例中组合或修改各实施例中的特征、结构和效果。因此，关于组合和修改的内容应当被理解为包括在本发明的范围内。
虽然参照多个说明性实施例描述了本发明，但是应当理解，本领域的技术人员可以在本发明原理的精神和范围内设计多种其他修改和实施例。更具体地讲，在说明书、附图和所附权利要求书的范围内可以对本发明的组成部件和/或布置进行多种变化和修改。除了对组成部件和/或布置的变化和修改之外，替代使用对本领域的技术人员也是显然的。

Claims (3)

1.一种太阳能电池，包括：
衬底；
所述衬底上的背电极层，所述背电极层形成有用于分隔开该背电极层的通孔，并且所述通孔被绝缘层填充；
形成有被绝缘层填充的所述通孔的所述背电极层上的吸光层；
所述吸光层上的窗口层；
所述吸光层中的多个微珠；以及
各所述多个微珠的表面上的陷阱层，并且所述陷阱层包括银，
其中，所述绝缘层防止所述微珠和所述陷阱层形成在所述通孔中，
其中，各所述多个微珠的直径与所述陷阱层的厚度的比值为200:1，所述吸光层的厚度被形成为比各所述多个微珠的直径大2倍至3倍，
其中，所述多个微珠和所述陷阱层是由具有各不相同的折射率的材料形成的。
2.根据权利要求1所述的太阳能电池，其中各所述多个微珠的直径是0.8μm至1.2μm，
其中，所述陷阱层具有3nm至7nm的厚度。
3.根据权利要求1所述的太阳能电池，其中所述多个微珠包括铜铟镓硒基、铜铟硒基和铜铟镓基的至少一种。
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