CN103560211B - 有机电致发光器件的制作方法及制作的有机电致发光器件 - Google Patents

有机电致发光器件的制作方法及制作的有机电致发光器件 Download PDF

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CN103560211B
CN103560211B CN201310566264.9A CN201310566264A CN103560211B CN 103560211 B CN103560211 B CN 103560211B CN 201310566264 A CN201310566264 A CN 201310566264A CN 103560211 B CN103560211 B CN 103560211B
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CN103560211A (zh
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韩佰祥
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to PCT/CN2013/087881 priority patent/WO2015070484A1/zh
Priority to US14/235,727 priority patent/US20150129842A1/en
Priority to GB1600110.9A priority patent/GB2534691B/en
Priority to JP2016528816A priority patent/JP6208868B2/ja
Priority to KR1020167008560A priority patent/KR20160052625A/ko
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Abstract

本发明提供一种有机电致发光器件的制作方法及制作的有机电致发光器件，所述方法包括：步骤1、提供基板（20）；步骤2、在基板（20）上形成第一电极（21）；步骤3、在第一电极（21）与基板（20）上形成栅极绝缘层（22）；步骤4、在栅极绝缘层（22）上形成第二电极（23），该第二电极（23）包括第二金属层（224）及透明导电层（222）；步骤5、在第二电极（23）与栅极绝缘层（22）上形成氧化物半导体层（24）；步骤6、在氧化物半导体层（24）与第二电极（23）上形成有机平坦化层（25）；步骤7、以有机平坦化层（25）作为掩膜，蚀刻第二电极（23）的第二金属层（224），露出透明导电层（222），以形成透明电极（26）。

Description

有机电致发光器件的制作方法及制作的有机电致发光器件
技术领域
本发明涉及平面显示领域，尤其涉及一种有机电致发光器件的制作方法及制作的有机电致发光器件。
背景技术
平面显示装置具有机身薄、省电、无辐射等众多优点，得到了广泛的应用。现有的平面显示装置主要包括液晶显示器（Liquid Crystal Display，LCD）及有机电致发光器件（Organic Electroluminescence Device，OELD），也称为有机发光二极管（Organic LightEmitting Diode，OLED）。
现有的液晶显示器一般为背光型液晶显示器，其包括：壳体、设于壳体内的液晶显示面板及设于壳体内的背光模组（Backlight Module）。液晶显示面板的工作原理是在两片平行的玻璃基板当中放置液晶分子，并在两玻璃基板上施加驱动电压来控制液晶分子的旋转，从而将背光模组的光线折射出来产生画面。
请参阅图1，现有的液晶显示面板一般包括：薄膜晶体管（Thin Film Transistor，TFT）基板302，与薄膜晶体管基板302相对贴合设置的彩色滤光片（Color Filter，CF）基板304，以及设于薄膜晶体管基板302与彩色滤光片基板304之间的液晶层306，薄膜晶体管基板302驱动液晶层306内的液晶分子转动，以显示相应的画面。
有机电致发光器件具备自发光、高亮度、宽视角、高对比度、可挠曲、低能耗等特性，因此受到广泛的关注，并作为新一代的显示方式，已开始逐渐取代传统液晶显示装置，被广泛应用在手机屏幕、电脑显示器、全彩电视机等领域。有机电致发光器件与传统的液晶显示器不同，其无需背光源，直接在玻璃基板上设置非常薄的有机材料涂层，当有电流通过时，这些有机材料涂层就会发光。
现有的有机电致发光器件按驱动方式分类，包括：无源矩阵式有机发光二极管（Passive-matrix organic light emitting diode，PMOLED）与有源矩阵式有机发光二极管（Active-matrix organic light emitting diode，AMOLED），其中，请参阅图2，为现有的一种有源矩阵式有机发光二极管的剖面结构示意图，其包括：基板100、形成于基板100上的栅极101、形成于栅极101上的栅极绝缘层102、形成于栅极绝缘层102上的源/漏极103、形成于源/漏极103上的氧化物半导体层104、形成于氧化物半导体层104上的第一有机平坦化层105、形成于第一有机平坦化层105上的透明电极106及形成于第一有机平坦化层105与透明电极106上的第二有机平坦化层107，其中，所述透明电极106作为有机发光二极管的阳极，通过通道电性连接于所述源/漏极103上，在该透明电极106上蒸镀有机发光层（未图示）及阴极（未图示），并通过封装盖板（未图示）封装制得有源矩阵式有机发光二极管，其生产制程一般需要8～9道光罩，制程较为复杂，成本相对较高。
发明内容
本发明的目的在于提供一种有机电致发光器件的制作方法，其制程简单，能有效降低生产成本。
本发明的另一目的在于提供一种有机电致发光器件，其制程简单，厚度薄，生产成本较低。
为实现上述目的，本发明提供一种有机电致发光器件的制作方法，包括以下步骤：
步骤1、提供基板；
步骤2、在基板上形成第一金属层，并图案化该第一金属层，以形成第一电极；
步骤3、在第一电极与基板上形成栅极绝缘层；
步骤4、在栅极绝缘层上依次形成透明导电层与第二金属层，并图案化该第二金属层与透明导电层，以形成第二电极，该第二电极包括第二金属层及位于第二金属层下方的透明导电层；
步骤5、在第二电极与栅极绝缘层上形成氧化物半导体层，图案化该氧化物半导体层；
步骤6、在氧化物半导体层与第二电极上形成有机平坦化层，并图案化该有机平坦化层；
步骤7、以有机平坦化层作为掩膜，蚀刻第二电极的第二金属层，露出透明导电层，以形成透明电极。
还包括：
步骤8、在有机平坦化层上形成间隔层；
步骤9、在透明电极上蒸镀有机功能层与阴极；
步骤10、提供封装盖板，并进行封装。
所述步骤1包括：提供基板，进行清洗后，在基板上形成缓冲层。
所述步骤2中，所述第一金属层形成于所述缓冲层上。
所述第一金属层与第二金属层包含铝或钼中至少一种；所述透明导电层包含氧化铟锡或银中至少一种；所述基板与封装盖板均为玻璃基板。
所述有机功能层包括形成于透明电极上的空穴传输层、形成于空穴传输层上的有机发光层、及形成于有机发光层上的电子传输层。
本发明还提供一种有机电致发光器件，包括：基板、形成于基板上的第一电极、形成于第一电极与基板上的栅极绝缘层、形成于栅极绝缘层上的第二电极、形成于第二电极与栅极绝缘层上的氧化物半导体层、形成于氧化物半导体层与第二电极上的有机平坦化层及位于栅极绝缘层上的透明电极，所述第二电极包括第二金属层及位于第二金属层下方的透明导电层，所述透明电极由透明导电层形成。
还包括形成于基板与第一电极之间的缓冲层、形成于有机平坦化层上的间隔层、形成于透明电极上的有机功能层、形成于有机功能层上的阴极及与基板贴合设置的封装盖板。
所述有机功能层包括形成于透明电极上的空穴传输层、形成于空穴传输层上的有机发光层、及形成于有机发光层上的电子传输层。
所述第一电极与第二金属层包含铝或钼中至少一种；所述透明电极包含氧化铟锡或银中至少一种；所述基板与封装盖板均为玻璃基板。
本发明的有益效果：本发明的有机电致发光器件的制作方法及制作的有机电致发光器件，通过第二金属层与透明导电层形成第二电极，有效降低了第二电极走线的阻抗，提升了有机电致发光器件的品质；并以有机平坦化层作为掩膜蚀刻第二电极的第二金属层，露出透明导电层，以形成透明电极，相比现有的制程，本发明的生产方法有效地简化了生产制程，降低了生产成本，且不需要形成第二平坦化层，有效降低了有机电致发光器件的厚度，利于实现薄型化。
为了能更进一步了解本发明的特征以及技术内容，请参阅以下有关本发明的详细说明与附图，然而附图仅提供参考与说明用，并非用来对本发明加以限制。
附图说明
下面结合附图，通过对本发明的具体实施方式详细描述，将使本发明的技术方案及其它有益效果显而易见。
附图中，
图1为现有的液晶显示面板的结构示意图；
图2为现有的有源矩阵式有机发光二极管的剖面结构示意图；
图3为本发明有机电致发光器件的制作方法的流程图；
图4至图9为本发明有机电致发光器件的制作方法的制程图；
图10为本发明有机电致发光器件的像素布局图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果，以下结合本发明的优选实施例及其附图进行详细描述。
请参阅图3至图9，本发明提供一种有机电致发光器件的制作方法，包括以下步骤：
步骤1、提供基板20。
所述基板20为透明基板，其可为玻璃基板、塑料基板等，在本实施例中，所述基板20为玻璃基板。
步骤2、在基板20上形成第一金属层，并图案化该第一金属层，以形成第一电极21。
在本实施例中，所述第一金属层包含铝或钼中至少一种；所述第一电极21为栅极。其具体形成工艺可为：在基板20上以溅镀的方式形成第一金属层，在第一金属层上形成一层感光（photo-sensitive）材料，该层感光材料即为所谓的光阻，然后使得光线通过光罩照射于光阻上以将该光阻曝光。由于光罩上具有第一电极21的图案，将使光线得以穿过光罩而照射于光阻上，使得光阻的曝光具有选择性，同时借此将光罩上的图案完整的复印至光阻上。然后，利用合适的显影液剂（developer）除去部分光阻，使得光阻显现所需要的图案。
步骤3、在第一电极21与基板20上形成栅极绝缘层22。
所述栅极绝缘层22可为单层或多层结构，其包括氧化硅层、氮化硅层之一或其组合。
步骤4、在栅极绝缘层22上依次形成透明导电层222与第二金属层224，并图案化该第二金属层224与透明导电层222，以形成第二电极23，该第二电极23包括第二金属层224及位于第二金属层224下方的透明导电层222。
在本实施例中，所述透明导电层222包含有氧化铟锡或银中至少一种或其组合；所述第二金属层224包含铝或钼中至少一种。所述第二电极23为源/漏极，由于该第二电极23由第二金属层224与透明导电层222共同形成，与现有的完全由第二金属层形成的源/漏极相比，其走线的阻抗相对较小，能有效提升本发明有机电致发光器件的品质。
步骤5、在第二电极23与栅极绝缘层22上形成氧化物半导体层24，图案化该氧化物半导体层24。
所述氧化物半导体层24的形成方式与上述第一电极21的形成方式相似，在此不作赘述。
步骤6、在氧化物半导体层24与第二电极23上形成有机平坦化层25，并图案化该有机平坦化层25。
所述有机平坦化层25用于平坦化整个有源薄膜晶体管像素阵列的结构，以便于实现后续制程。
步骤7、以有机平坦化层25作为掩膜，蚀刻第二电极23的第二金属层224，露出透明导电层222，以形成透明电极26。
在本实施例中，所述透明电极26作为本发明有机电致发光器件的阳极，用于激发有机功能层发出所需要的光线，进而实现画面显示。
与现有技术相比，本发明不需要单独制作透明电极26，节省至少一道光罩制程，且不需要形成第二有机平坦化层，进一步简化了生产制程，有效降低了生产成本。
进一步地，本发明的有机电致发光器件的制作方法还包括：
步骤8、在有机平坦化层25上形成间隔（PS）层（未图示）。
步骤9、在透明电极26上蒸镀有机功能层（未图示）与阴极（未图示）。
所述有机功能层包括形成于透明电极26上的空穴传输层（Hole TransportLayer，HTL）、形成于空穴传输层上的有机发光层（Emissive Layer，EML）、及形成于有机发光层上的电子传输层（Electron Transport Layer，ETL）。
步骤10、提供封装盖板（未图示），并进行封装。
在本实施例中，所述封装盖板为玻璃基板，其通过UV胶、或玻璃胶与基板20贴合在一起，并通过UV固化以实现有机电致发光器件的封装。
值得一提的是，在所述步骤1中还可以包括：提供基板20，进行清洗后，在基板20上形成缓冲层（未图示）。所述步骤2中，所述第一金属层形成于所述缓冲层上。
进一步地，还可以在氧化物半导体层24上形成保护层（未图示），该保护层可为氧化硅层、氮化硅层之一或其组合层。
请参阅图9及图10，本发明还提供一种有机电致发光器件，包括：基板20、形成于基板20上的第一电极21、形成于第一电极21与基板20上的栅极绝缘层22、形成于栅极绝缘层22上的第二电极23、形成于第二电极23与栅极绝缘层22上的氧化物半导体层24、形成于氧化物半导体层24与第二电极23上的有机平坦化层25及位于栅极绝缘层22上的透明电极26，所述第二电极23包括第二金属层224及位于第二金属层224下方的透明导电层222，所述透明电极26由透明导电层222形成。其中，所述第一电极21为栅极、第二电极23为源/漏极，所述栅极、栅极绝缘层22、源/漏极及氧化物半导体层24形成薄膜晶体管，用于驱动有机电致发光器件。
进一步地，本发明的有机电致发光器件还包括：形成于基板20与第一电极21之间的缓冲层、形成于有机平坦化层25上的间隔层、形成于透明电极26上的有机功能层、形成于有机功能层上的阴极及与基板20贴合设置的封装盖板。
具体地，所述有机功能层包括形成于透明电极上的空穴传输层、形成于空穴传输层上的有机发光层、及形成于有机发光层上的电子传输层。
在本实施例中，所述第一电极21与第二金属层224包含铝或钼中至少一种；所述透明电极26包含氧化铟锡或银中至少一种；所述基板20与封装盖板均为玻璃基板。
综上所述，本发明的有机电致发光器件的制作方法及制作的有机电致发光器件，通过第二金属层与透明导电层形成第二电极，有效降低了第二电极走线的阻抗，提升了有机电致发光器件的品质；并以有机平坦化层作为掩膜蚀刻第二电极的第二金属层，露出透明导电层，以形成透明电极，相比现有的制程，本发明的生产方法有效地简化了生产制程，降低了生产成本，且不需要形成第二平坦化层，有效降低了有机电致发光器件的厚度，利于实现薄型化。
以上所述，对于本领域的普通技术人员来说，可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形，而所有这些改变和变形都应属于本发明权利要求的保护范围。

Claims (3)

1.一种有机电致发光器件的制作方法，其特征在于，包括以下步骤：
步骤1、提供基板(20)；
步骤2、在基板(20)上形成第一金属层，并图案化该第一金属层，以形成第一电极(21)；
步骤3、在第一电极(21)与基板(20)上形成栅极绝缘层(22)；
步骤4、在栅极绝缘层(22)上依次形成透明导电层(222)与第二金属层(224)，并图案化该第二金属层(224)与透明导电层(222)，以形成第二电极(23)，该第二电极(23)包括第二金属层(224)及位于第二金属层(224)下方的透明导电层(222)；
步骤5、在第二电极(23)与栅极绝缘层(22)上形成氧化物半导体层(24)，图案化该氧化物半导体层(24)；
步骤6、在氧化物半导体层(24)与第二电极(23)上形成有机平坦化层(25)，并图案化该有机平坦化层(25)；
步骤7、以有机平坦化层(25)作为掩膜，蚀刻第二电极(23)的第二金属层(224)，露出透明导电层(222)，以形成透明电极(26)；
还包括：
步骤8、在有机平坦化层(25)上形成间隔层；
步骤9、在透明电极(26)上蒸镀有机功能层与阴极；
步骤10、提供封装盖板，并进行封装；
所述有机功能层包括形成于透明电极(26)上的空穴传输层、形成于空穴传输层上的有机发光层、及形成于有机发光层上的电子传输层；
所述第一金属层与第二金属层(224)包含铝或钼中至少一种；所述透明导电层(222)包含氧化铟锡或银中至少一种；所述基板(20)与封装盖板均为玻璃基板。
2.如权利要求1所述的有机电致发光器件的制作方法，其特征在于，所述步骤1包括：提供基板(20)，进行清洗后，在基板(20)上形成缓冲层。
3.如权利要求2所述的有机电致发光器件的制作方法，其特征在于，所述步骤2中，所述第一金属层形成于所述缓冲层上。
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