CN103512649B - 超声波探测器及超声波检查装置 - Google Patents
超声波探测器及超声波检查装置 Download PDFInfo
- Publication number
- CN103512649B CN103512649B CN201310234153.8A CN201310234153A CN103512649B CN 103512649 B CN103512649 B CN 103512649B CN 201310234153 A CN201310234153 A CN 201310234153A CN 103512649 B CN103512649 B CN 103512649B
- Authority
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- China
- Prior art keywords
- ultrasonic
- ultrasonic detector
- cavity
- barrier film
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000004891 communication Methods 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000012528 membrane Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 4
- 230000004888 barrier function Effects 0.000 claims 8
- 238000005452 bending Methods 0.000 claims 4
- 238000007689 inspection Methods 0.000 abstract description 18
- 239000010409 thin film Substances 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 40
- 239000000523 sample Substances 0.000 description 31
- 230000010354 integration Effects 0.000 description 13
- 239000010410 layer Substances 0.000 description 12
- 238000001514 detection method Methods 0.000 description 10
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 5
- 230000005484 gravity Effects 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000000470 constituent Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000004699 Ultra-high molecular weight polyethylene Substances 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 229920000785 ultra high molecular weight polyethylene Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0629—Square array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
- B06B1/0674—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface and a low impedance backing, e.g. air
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Heart & Thoracic Surgery (AREA)
- Surgery (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Pathology (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Physics & Mathematics (AREA)
- Medical Informatics (AREA)
- Molecular Biology (AREA)
- Biophysics (AREA)
- Animal Behavior & Ethology (AREA)
- General Health & Medical Sciences (AREA)
- Public Health (AREA)
- Veterinary Medicine (AREA)
- Gynecology & Obstetrics (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-135522 | 2012-06-15 | ||
| JP2012135522A JP6065421B2 (ja) | 2012-06-15 | 2012-06-15 | 超音波プローブおよび超音波検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103512649A CN103512649A (zh) | 2014-01-15 |
| CN103512649B true CN103512649B (zh) | 2018-01-12 |
Family
ID=49756529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310234153.8A Active CN103512649B (zh) | 2012-06-15 | 2013-06-13 | 超声波探测器及超声波检查装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US9168025B2 (enExample) |
| JP (1) | JP6065421B2 (enExample) |
| CN (1) | CN103512649B (enExample) |
Families Citing this family (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11540813B2 (en) * | 2014-06-10 | 2023-01-03 | Fujifilm Sonosite, Inc. | Handheld ultrasound imaging systems and methods for cooling transducers and electronics in the probe housing via air circulation through the housing |
| JP6212000B2 (ja) * | 2014-07-02 | 2017-10-11 | 株式会社東芝 | 圧力センサ、並びに圧力センサを用いたマイクロフォン、血圧センサ、及びタッチパネル |
| RU2654949C1 (ru) * | 2014-07-11 | 2018-05-23 | Микротек Медикал Текнолоджиз Лтд. | Многоэлементный преобразователь |
| KR102316475B1 (ko) * | 2015-03-23 | 2021-10-21 | 삼성전자주식회사 | 배터리 팩 냉각 제어 장치 및 방법 |
| JP2017029209A (ja) * | 2015-07-29 | 2017-02-09 | セイコーエプソン株式会社 | 超音波プローブ、及び超音波装置 |
| DE102015216163A1 (de) * | 2015-08-25 | 2017-03-02 | Robert Bosch Gmbh | Akustischer Sensor zum Aussenden und/oder Empfangen akustischer Signale |
| WO2017031679A1 (zh) * | 2015-08-25 | 2017-03-02 | 深圳迈瑞生物医疗电子股份有限公司 | 超声换能器 |
| JP6776074B2 (ja) * | 2016-09-16 | 2020-10-28 | 株式会社東芝 | 圧電デバイスおよび超音波装置 |
| US11039814B2 (en) * | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
| JP6753293B2 (ja) * | 2016-12-09 | 2020-09-09 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| KR101915255B1 (ko) * | 2017-01-11 | 2018-11-05 | 삼성메디슨 주식회사 | 초음파 프로브의 제조 방법 및 그 초음파 프로브 |
| JP6834538B2 (ja) * | 2017-01-30 | 2021-02-24 | セイコーエプソン株式会社 | 超音波デバイス、超音波探触子、及び超音波装置 |
| US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
| US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
| WO2019226547A1 (en) | 2018-05-21 | 2019-11-28 | Exo Imaging, Inc. | Ultrasonic transducers with q spoiling |
| EP3830877A4 (en) | 2018-08-01 | 2021-10-20 | Exo Imaging Inc. | SYSTEMS AND PROCEDURES FOR THE INTEGRATION OF ULTRASONIC CONVERTERS WITH HYBRID CONTACTS |
| CN109269626B (zh) * | 2018-11-26 | 2024-12-13 | 苏州中科速衡电子有限公司 | 一种压电式振动传感器 |
| EP4176978B1 (en) * | 2019-03-14 | 2023-11-22 | Imec VZW | Flexible ultrasound array |
| TW202519098A (zh) | 2019-09-12 | 2025-05-01 | 美商艾克索影像股份有限公司 | 經由邊緣溝槽、虛擬樞軸及自由邊界而增強的微加工超音波傳感器(mut)耦合效率及頻寬 |
| EP4025132A4 (en) | 2019-09-20 | 2023-10-04 | Bard Access Systems, Inc. | AUTOMATIC VESSEL DETECTION TOOLS AND METHODS |
| CN114145772B (zh) | 2020-09-08 | 2025-08-12 | 巴德阿克塞斯系统股份有限公司 | 动态调整超声成像系统及其方法 |
| CN114159098A (zh) * | 2020-09-10 | 2022-03-11 | 巴德阿克塞斯系统股份有限公司 | 具有压力测量能力的超声探测器 |
| EP4247267A1 (en) | 2020-11-24 | 2023-09-27 | Bard Access Systems, Inc. | Ultrasound system with target and medical instrument awareness |
| EP4251062A1 (en) | 2020-12-01 | 2023-10-04 | Bard Access Systems, Inc. | Ultrasound system with pressure and flow determination capability |
| WO2022119853A1 (en) | 2020-12-01 | 2022-06-09 | Bard Access Systems, Inc. | Ultrasound probe with target tracking capability |
| US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
| US12287403B2 (en) | 2021-04-15 | 2025-04-29 | Bard Access Systems, Inc. | Ultrasound imaging system having near-infrared/infrared detection |
| US12486159B2 (en) | 2021-06-30 | 2025-12-02 | Exo Imaging, Inc. | Micro-machined ultrasound transducers with insulation layer and methods of manufacture |
| JP7761423B2 (ja) | 2021-08-20 | 2025-10-28 | 日本特殊陶業株式会社 | 超音波トランスデューサ |
| WO2023081223A1 (en) | 2021-11-03 | 2023-05-11 | Bard Access Systems, Inc. | Optimized functionality through interoperation of doppler and image based vessel differentiation |
| CN116763338A (zh) | 2022-03-16 | 2023-09-19 | 巴德阿克塞斯系统股份有限公司 | 超声成像系统 |
| US20240197292A1 (en) * | 2022-12-20 | 2024-06-20 | Wuhan United Imaging Healthcare Co., Ltd. | Systems and methods for ultrasound examination |
| US20250255584A1 (en) * | 2024-02-08 | 2025-08-14 | Fujifilm Sonosite, Inc. | Enhancement of local features in ultrasound |
| US20250318807A1 (en) * | 2024-04-11 | 2025-10-16 | GE Precision Healthcare LLC | Preset optimization quick guide for improved image quality |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1682663A (zh) * | 2004-04-16 | 2005-10-19 | 株式会社东芝 | 超声波探头和超声波诊断装置 |
| CN1740814A (zh) * | 2004-08-25 | 2006-03-01 | 株式会社电装 | 超声波传感器 |
| CN102440005A (zh) * | 2009-05-25 | 2012-05-02 | 株式会社日立医疗器械 | 超声波换能器及利用该超声波换能器的超声波诊断装置 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2000126184A (ja) * | 1998-10-21 | 2000-05-09 | Aloka Co Ltd | 超音波探触子及び注水方法 |
| JP4632728B2 (ja) | 2004-09-10 | 2011-02-16 | 株式会社東芝 | 超音波プローブおよび超音波画像診断装置 |
| JP2006319945A (ja) * | 2005-04-12 | 2006-11-24 | Osaka Industrial Promotion Organization | ダイアフラム型センサ素子とその製造方法 |
| JP2009071395A (ja) * | 2007-09-11 | 2009-04-02 | Ritsumeikan | 超音波受信素子及びこれを用いた超音波トランスデューサ |
| JP2009182838A (ja) * | 2008-01-31 | 2009-08-13 | Kyoto Univ | 弾性波トランスデューサ、弾性波トランスデューサアレイ、超音波探触子、超音波撮像装置 |
| JP2009055644A (ja) * | 2008-12-08 | 2009-03-12 | Seiko Epson Corp | 超音波トランスデューサ |
| JP5293557B2 (ja) | 2008-12-17 | 2013-09-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波トランスデューサーアレイ及び超音波デバイス |
| JP5434109B2 (ja) | 2009-02-06 | 2014-03-05 | セイコーエプソン株式会社 | 超音波センサーユニット |
| JP5310119B2 (ja) | 2009-03-06 | 2013-10-09 | セイコーエプソン株式会社 | 超音波センサーユニット |
| JP2011082624A (ja) * | 2009-10-02 | 2011-04-21 | Asahi Kasei Electronics Co Ltd | 近接超音波センサ |
| JP5671876B2 (ja) | 2009-11-16 | 2015-02-18 | セイコーエプソン株式会社 | 超音波トランスデューサー、超音波センサー、超音波トランスデューサーの製造方法、および超音波センサーの製造方法 |
| JP5589826B2 (ja) * | 2010-03-19 | 2014-09-17 | セイコーエプソン株式会社 | 超音波センサー |
| WO2012050172A1 (ja) * | 2010-10-15 | 2012-04-19 | 株式会社日立メディコ | 超音波トランスデューサおよびそれを用いた超音波診断装置 |
| JP5751026B2 (ja) | 2011-05-31 | 2015-07-22 | セイコーエプソン株式会社 | 超音波トランスデューサー、生体センサー、及び超音波トランスデューサーの製造方法 |
-
2012
- 2012-06-15 JP JP2012135522A patent/JP6065421B2/ja active Active
-
2013
- 2013-06-13 US US13/917,118 patent/US9168025B2/en active Active
- 2013-06-13 CN CN201310234153.8A patent/CN103512649B/zh active Active
-
2015
- 2015-09-21 US US14/859,901 patent/US9456803B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1682663A (zh) * | 2004-04-16 | 2005-10-19 | 株式会社东芝 | 超声波探头和超声波诊断装置 |
| CN1740814A (zh) * | 2004-08-25 | 2006-03-01 | 株式会社电装 | 超声波传感器 |
| CN102440005A (zh) * | 2009-05-25 | 2012-05-02 | 株式会社日立医疗器械 | 超声波换能器及利用该超声波换能器的超声波诊断装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20160007963A1 (en) | 2016-01-14 |
| US9168025B2 (en) | 2015-10-27 |
| CN103512649A (zh) | 2014-01-15 |
| US20130338508A1 (en) | 2013-12-19 |
| JP2014000122A (ja) | 2014-01-09 |
| JP6065421B2 (ja) | 2017-01-25 |
| US9456803B2 (en) | 2016-10-04 |
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