CN103348238B - 具有提高的灵敏度的纳米线场效应晶体管生物传感器 - Google Patents

具有提高的灵敏度的纳米线场效应晶体管生物传感器 Download PDF

Info

Publication number
CN103348238B
CN103348238B CN201180066619.7A CN201180066619A CN103348238B CN 103348238 B CN103348238 B CN 103348238B CN 201180066619 A CN201180066619 A CN 201180066619A CN 103348238 B CN103348238 B CN 103348238B
Authority
CN
China
Prior art keywords
nanowire
nwfet
sensing
nwfet device
fet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180066619.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN103348238A (zh
Inventor
C·O·徐
K－S·沈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California San Diego UCSD
Original Assignee
University of California San Diego UCSD
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of California San Diego UCSD filed Critical University of California San Diego UCSD
Publication of CN103348238A publication Critical patent/CN103348238A/zh
Application granted granted Critical
Publication of CN103348238B publication Critical patent/CN103348238B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/14—Heterocyclic carbon compound [i.e., O, S, N, Se, Te, as only ring hetero atom]
    • Y10T436/142222—Hetero-O [e.g., ascorbic acid, etc.]
    • Y10T436/143333—Saccharide [e.g., DNA, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Nanotechnology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Urology & Nephrology (AREA)
  • Biomedical Technology (AREA)
  • Hematology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Microbiology (AREA)
  • Cell Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biotechnology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
CN201180066619.7A 2010-12-03 2011-12-02 具有提高的灵敏度的纳米线场效应晶体管生物传感器 Expired - Fee Related CN103348238B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US41943410P 2010-12-03 2010-12-03
US61/419,434 2010-12-03
US201161494373P 2011-06-07 2011-06-07
US61/494,373 2011-06-07
PCT/US2011/063157 WO2012075445A2 (en) 2010-12-03 2011-12-02 Nanowire field-effect transistor biosensor with improved sensitivity

Publications (2)

Publication Number Publication Date
CN103348238A CN103348238A (zh) 2013-10-09
CN103348238B true CN103348238B (zh) 2016-12-28

Family

ID=46172600

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180066619.7A Expired - Fee Related CN103348238B (zh) 2010-12-03 2011-12-02 具有提高的灵敏度的纳米线场效应晶体管生物传感器

Country Status (5)

Country Link
US (1) US9645135B2 (enExample)
EP (1) EP2646812A4 (enExample)
JP (2) JP2014504854A (enExample)
CN (1) CN103348238B (enExample)
WO (1) WO2012075445A2 (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101263188B1 (ko) * 2011-04-14 2013-05-10 포항공과대학교 산학협력단 네트워크 구조의 나노선을 구비한 나노선 센서 및 그 제조방법
WO2013155116A1 (en) 2012-04-09 2013-10-17 Takulapalli Bharath Field effect transistor, device including the transistor, and methods of forming and using same
US10088477B2 (en) 2012-07-30 2018-10-02 The Regents Of The University Of California Biomolecular detection test strip design
WO2014146020A2 (en) * 2013-03-15 2014-09-18 Takulapalli Bharath Biomarker sensor array and circuit and methods of using and forming same
CN111187811B (zh) 2013-05-06 2024-03-08 加利福尼亚太平洋生物科学股份有限公司 实时电子测序
AU2014268417A1 (en) 2013-05-23 2015-11-26 Iphenotype Llc Methods and systems for assisting persons, product providers and/or service providers
US10378044B1 (en) * 2013-10-01 2019-08-13 FemtoDx Methods for increasing the molecular specificity of a nanosensor
CN103558279B (zh) * 2013-11-15 2017-01-04 中国科学院上海微系统与信息技术研究所 一种基于硅纳米线隧穿场效应晶体管的生物传感器及其制备方法
WO2015073878A1 (en) 2013-11-15 2015-05-21 Ur Diet, Llc Real-time satiety biofeedback
US9976913B2 (en) * 2013-11-26 2018-05-22 King Abdullah University Of Science And Technology Thermal history devices, systems for thermal history detection, and methods for thermal history detection
KR20170097712A (ko) * 2014-12-18 2017-08-28 라이프 테크놀로지스 코포레이션 대형 fet 어레이를 사용한 분석물 측정을 위한 방법과 장치
WO2016139566A1 (en) * 2015-03-03 2016-09-09 Abdolahad Mohammad Electrical cell-substrate impedance sensor (ecis)
CN104730136A (zh) * 2015-03-26 2015-06-24 中国科学院上海微系统与信息技术研究所 一种基于锗纳米线场效应晶体管的生物传感器、方法及应用
US9349860B1 (en) 2015-03-31 2016-05-24 Taiwan Semiconductor Manufacturing Company, Ltd. Field effect transistors and methods of forming same
WO2017024049A1 (en) 2015-08-06 2017-02-09 Pacific Biosciences Of California, Inc. Single-molecule nanofet sequencing systems and methods
WO2017070030A1 (en) * 2015-10-21 2017-04-27 Massachusetts Institute Of Technology Nanowire fet imaging system and related techniques
KR101872484B1 (ko) * 2016-03-31 2018-06-28 주식회사 엔디디 바이오 감지 장치
CN105742347A (zh) * 2016-04-14 2016-07-06 塔力哈尔·夏依木拉提 稳定的以气体为绝缘层的纳米线场效应晶体管及制备方法
CN105675692A (zh) * 2016-04-14 2016-06-15 塔力哈尔·夏依木拉提 一种提高场效应晶体管式气体传感器灵敏度的方法
EP3446113A4 (en) 2016-04-19 2020-01-08 Takulapalli, Bharath NANOPORE SENSOR, STRUCTURE AND DEVICE COMPRISING THE SENSOR, AND METHODS OF FORMING AND USING SAME
CN105969338B (zh) * 2016-05-16 2018-03-02 曲阜师范大学 一种SiO2–DNA纳米材料及其制备方法和应用
US10557814B2 (en) * 2016-06-24 2020-02-11 City University Of Hong Kong Electrochemical detector
CN106206296B (zh) * 2016-08-08 2019-06-07 北京大学 一种垂直沟道的纳米线生物传感器的集成方法
CN106442679B (zh) * 2016-09-20 2018-10-26 德州学院 一种检测分子之间结合能及结合动力学的传感装置及方法
US10890556B2 (en) * 2016-11-09 2021-01-12 Wayne State University Electrochemical deposition of nanowires on nanoparticles, lithographical patterns and electronic devices and their use as chemical sensors
GB201708339D0 (en) * 2017-05-24 2017-07-05 Univ Court Univ Of Glasgow Metabolite detection apparatus and method of detecting metabolites
JP6782218B2 (ja) 2017-11-17 2020-11-11 株式会社東芝 検出装置および検出方法
US11275050B2 (en) * 2017-12-05 2022-03-15 Femtodx, Inc. Semiconductor-based biosensor and detection methods
US10312326B1 (en) 2017-12-18 2019-06-04 International Business Machines Corporation Long channels for transistors
US11143584B2 (en) 2018-10-02 2021-10-12 International Business Machines Corporation Selective functionalization of sensing surface
US10968098B2 (en) 2018-10-02 2021-04-06 International Business Machines Corporation Selective functionalization of sensing surface with nanoscale spatial resolution
TWI765209B (zh) * 2019-01-18 2022-05-21 國立陽明交通大學 用來偵測全細胞細菌之以場效電晶體為主的生物感測器以及包含生物感測器的生物感測器組
US11768262B2 (en) 2019-03-14 2023-09-26 Massachusetts Institute Of Technology Interface responsive to two or more sensor modalities
KR102218984B1 (ko) * 2019-07-16 2021-02-23 한국과학기술원 공중 부유형 나노와이어 및 이의 제조 방법
KR102455443B1 (ko) * 2021-02-22 2022-10-18 제일기술(주) 트랜지스터 기반 비효소 당센서 및 이의 제조방법
CA3215011A1 (en) 2021-04-30 2022-11-03 Sarah PLACELLA Device for collecting material from air
CN113333042B (zh) * 2021-06-21 2022-04-22 太原理工大学 一种用于核酸检测的微流控芯片及其制作方法
WO2023034113A2 (en) * 2021-08-30 2023-03-09 The Curators Of The University Of Missouri Mxene-graphene field effect transistor virus sensor
US12382665B2 (en) 2021-09-21 2025-08-05 International Business Machines Corporation Increased gate length at given footprint for nanosheet device
WO2023102062A1 (en) * 2021-12-01 2023-06-08 Board Of Regents, The University Of Texas System Multi-targeted, modular virus sensing platform
KR102438798B1 (ko) * 2021-12-22 2022-09-01 제일기술(주) 연속혈당측정장치
CN114674897B (zh) * 2022-03-28 2023-06-06 深圳大学 一种用于检测单细胞外pH值的探针型有机电化学晶体管传感器及其制备方法、检测方法
CN115078472B (zh) * 2022-07-08 2025-03-21 中国科学院上海微系统与信息技术研究所 一种调控德拜长度实现复杂环境高灵敏生化检测的方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002001647A1 (en) * 2000-06-23 2002-01-03 The United States Of America, As Represented By The Secretary Of The Navy Microelectronic device and method for label-free detection and quantification of biological and chemical molecules
CN100345280C (zh) * 2003-03-04 2007-10-24 台湾积体电路制造股份有限公司 具有晶格不相称区的变形沟道晶体管结构及其制造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7301199B2 (en) * 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
EP1342075B1 (en) * 2000-12-11 2008-09-10 President And Fellows Of Harvard College Device contaning nanosensors for detecting an analyte and its method of manufacture
US7345296B2 (en) * 2004-09-16 2008-03-18 Atomate Corporation Nanotube transistor and rectifying devices
EP1902143A1 (en) * 2005-03-29 2008-03-26 Applera Corporation Nanowire-based system for analysis of nucleic acids
TWI287041B (en) * 2005-04-27 2007-09-21 Jung-Tang Huang An ultra-rapid DNA sequencing method with nano-transistors array based devices
KR100738081B1 (ko) * 2005-11-22 2007-07-12 삼성전자주식회사 무기막을 구비하는 ｆｅｔ 기반 바이오 센서, 그의 제조방법 및 그를 이용한 생분자 검출 방법
US7795677B2 (en) * 2007-09-05 2010-09-14 International Business Machines Corporation Nanowire field-effect transistors
US8568871B2 (en) * 2007-10-29 2013-10-29 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Mono-layer and multi-layer nanowire networks
JP4731544B2 (ja) * 2007-12-17 2011-07-27 株式会社日立製作所 生体分子検出装置及びそれを用いた生体分子検出方法
US7963148B2 (en) * 2008-09-03 2011-06-21 National Formosa Univeristy Gas sensor made of field effect transistor based on ZnO nanowires
EP2161754A3 (en) * 2008-09-03 2010-06-16 Kabushiki Kaisha Toshiba A semiconductor device and fabrication method for the same
US20100204062A1 (en) * 2008-11-07 2010-08-12 University Of Southern California Calibration methods for multiplexed sensor arrays
JP2012511156A (ja) * 2008-12-05 2012-05-17 ナノアイヴイディー，インコーポレイテッド ポイント・オブ・ケア分析器用マイクロ流体ベースのラボオンテストカード
JP5483150B2 (ja) * 2009-01-30 2014-05-07 学校法人早稲田大学 Ｄｎａセンシング方法
JP5426661B2 (ja) * 2009-03-31 2014-02-26 デンカ生研株式会社 免疫分析方法及びそのための試薬

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002001647A1 (en) * 2000-06-23 2002-01-03 The United States Of America, As Represented By The Secretary Of The Navy Microelectronic device and method for label-free detection and quantification of biological and chemical molecules
CN100345280C (zh) * 2003-03-04 2007-10-24 台湾积体电路制造股份有限公司 具有晶格不相称区的变形沟道晶体管结构及其制造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Novel T-Channel Nanowire FET with Built-in Signal Amplification for pH Sensing;KYEONG-SIK SHIN等;《Electron Devices Meeting(IEDM),2009 IEEE International》;20091231;第26.3.1-26.3.2页 *

Also Published As

Publication number Publication date
CN103348238A (zh) 2013-10-09
JP6310962B2 (ja) 2018-04-11
JP2016166900A (ja) 2016-09-15
US9645135B2 (en) 2017-05-09
US20130337567A1 (en) 2013-12-19
WO2012075445A2 (en) 2012-06-07
EP2646812A4 (en) 2015-01-21
WO2012075445A3 (en) 2012-09-20
JP2014504854A (ja) 2014-02-27
EP2646812A2 (en) 2013-10-09

Similar Documents

Publication Publication Date Title
CN103348238B (zh) 具有提高的灵敏度的纳米线场效应晶体管生物传感器
Goldsmith et al. Digital biosensing by foundry-fabricated graphene sensors
Mu et al. Silicon nanowire field-effect transistors—A versatile class of potentiometric nanobiosensors
JP4225475B2 (ja) 半導体バイオセンサ
US12469324B2 (en) Semiconductor device with biofet and biometric sensors
JP4768226B2 (ja) 検体の高感度検出のために特別に構成されたゲート電極を有するｆｅｔセンサー
US9841416B2 (en) Systems and methods for single-molecule nucleic-acid assay platforms
US20150102283A1 (en) Field-effect transistor, single-electron transistor and sensor using the same
US20080280776A1 (en) Method and apparatus for detection of molecules using a sensor array
CN102016570A (zh) 使用和构建纳米传感器平台的方法
US20210109059A1 (en) On-chip heater
KR20020082357A (ko) 물질 유로의 측벽에 형성된 ｍｏｓｆｅｔ으로 이루어진물질 검출용 칩, 이를 포함하는 물질 검출 장치, 이의제조 방법 및 물질 검출 장치를 이용한 물질 검출 방법
JP2010133948A (ja) バイオセンサ及びこれを利用したバイオ分子検出方法
Tran et al. Complementary metal oxide semiconductor compatible silicon nanowires-on-a-chip: Fabrication and preclinical validation for the detection of a cancer prognostic protein marker in serum
CN110954585A (zh) 生物场效应晶体管传感器的差动式感测
Zhang et al. Estimation of the depletion layer thickness in silicon nanowire-based biosensors from attomolar-level biomolecular detection
Kumar et al. Time-dependent pH sensing phenomena using CdSe/ZnS quantum dots in EIS structure
Kim et al. A dual-gate field-effect transistor for label-free electrical detection of avian influenza
US12025581B2 (en) Devices and methods for detecting/discriminating complementary and mismatched nucleic acids using ultrathin film field-effect transistors
Vacic et al. Quantitative nanoscale field effect sensors
Meyyappan et al. Nanowire BioFETs: an overview
Thomas et al. Integration of silicon and printed electronics for rapid diagnostic disease biosensing
Coffer Commercialization of silicon nanowire-based biotechnologies
da Silva Immuno-field-effect transistor platforms based on 2D materials for early detection of biomarkers of ischemic stroke
Lin et al. The effect of varied functional biointerfaces on the sensitivity of silicon nanowire MOSFET

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161228

Termination date: 20191202

CF01 Termination of patent right due to non-payment of annual fee