JP2014504854A - 感度改良ナノワイヤ電界効果トランジスタバイオセンサ - Google Patents

感度改良ナノワイヤ電界効果トランジスタバイオセンサ Download PDF

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Publication number
JP2014504854A
JP2014504854A JP2013542224A JP2013542224A JP2014504854A JP 2014504854 A JP2014504854 A JP 2014504854A JP 2013542224 A JP2013542224 A JP 2013542224A JP 2013542224 A JP2013542224 A JP 2013542224A JP 2014504854 A JP2014504854 A JP 2014504854A
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Prior art keywords
nanowire
sensing
nwfet
sample
fet
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JP2013542224A
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Japanese (ja)
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JP2014504854A5 (enExample
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チ オン チュイ,
キョン−シク シン,
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University of California
University of California Berkeley
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University of California San Diego UCSD
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Publication of JP2014504854A publication Critical patent/JP2014504854A/ja
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/414Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
    • G01N27/4146Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS involving nanosized elements, e.g. nanotubes, nanowires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00Chemistry: analytical and immunological testing
    • Y10T436/14Heterocyclic carbon compound [i.e., O, S, N, Se, Te, as only ring hetero atom]
    • Y10T436/142222Hetero-O [e.g., ascorbic acid, etc.]
    • Y10T436/143333Saccharide [e.g., DNA, etc.]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Nanotechnology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Urology & Nephrology (AREA)
  • Hematology (AREA)
  • Biomedical Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electrochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Biotechnology (AREA)
  • Cell Biology (AREA)
  • Microbiology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
JP2013542224A 2010-12-03 2011-12-02 感度改良ナノワイヤ電界効果トランジスタバイオセンサ Pending JP2014504854A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US41943410P 2010-12-03 2010-12-03
US61/419,434 2010-12-03
US201161494373P 2011-06-07 2011-06-07
US61/494,373 2011-06-07
PCT/US2011/063157 WO2012075445A2 (en) 2010-12-03 2011-12-02 Nanowire field-effect transistor biosensor with improved sensitivity

Related Child Applications (1)

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JP2016115025A Division JP6310962B2 (ja) 2010-12-03 2016-06-09 感度改良ナノワイヤ電界効果トランジスタバイオセンサ

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JP2014504854A true JP2014504854A (ja) 2014-02-27
JP2014504854A5 JP2014504854A5 (enExample) 2014-06-05

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JP2016115025A Expired - Fee Related JP6310962B2 (ja) 2010-12-03 2016-06-09 感度改良ナノワイヤ電界効果トランジスタバイオセンサ

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Country Status (5)

Country Link
US (1) US9645135B2 (enExample)
EP (1) EP2646812A4 (enExample)
JP (2) JP2014504854A (enExample)
CN (1) CN103348238B (enExample)
WO (1) WO2012075445A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022513725A (ja) * 2017-12-05 2022-02-09 フェムトドクス 半導体ベースのバイオセンサとその検出方法

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101263188B1 (ko) * 2011-04-14 2013-05-10 포항공과대학교 산학협력단 네트워크 구조의 나노선을 구비한 나노선 센서 및 그 제조방법
EP2836828B1 (en) 2012-04-09 2022-12-14 Takulapalli, Bharath Field effect transistor, device including the transistor, and methods of forming and using same
KR20150039819A (ko) 2012-07-30 2015-04-13 더 리전트 오브 더 유니버시티 오브 캘리포니아 생체 분자 검출 테스트 스트립 설계
US20160041155A1 (en) * 2013-03-15 2016-02-11 Bharath Takulapalli Biomarker sensor array and circuit and methods of using and forming same
CN111187811B (zh) 2013-05-06 2024-03-08 加利福尼亚太平洋生物科学股份有限公司 实时电子测序
HK1223174A1 (zh) 2013-05-23 2017-07-21 Iphenotype Llc 表型整合社交搜索数据库及方法
US10378044B1 (en) * 2013-10-01 2019-08-13 FemtoDx Methods for increasing the molecular specificity of a nanosensor
CN103558279B (zh) * 2013-11-15 2017-01-04 中国科学院上海微系统与信息技术研究所 一种基于硅纳米线隧穿场效应晶体管的生物传感器及其制备方法
WO2015073878A1 (en) 2013-11-15 2015-05-21 Ur Diet, Llc Real-time satiety biofeedback
US9976913B2 (en) * 2013-11-26 2018-05-22 King Abdullah University Of Science And Technology Thermal history devices, systems for thermal history detection, and methods for thermal history detection
TW202024628A (zh) * 2014-12-18 2020-07-01 美商生命技術公司 用於使用大規模fet陣列量測分析物之方法及設備
WO2016139567A2 (en) * 2015-03-03 2016-09-09 Abdolahad Mohammad Electrical cell-substrate impedance sensor (ecis)
CN104730136A (zh) * 2015-03-26 2015-06-24 中国科学院上海微系统与信息技术研究所 一种基于锗纳米线场效应晶体管的生物传感器、方法及应用
US9349860B1 (en) 2015-03-31 2016-05-24 Taiwan Semiconductor Manufacturing Company, Ltd. Field effect transistors and methods of forming same
US10190158B2 (en) 2015-08-06 2019-01-29 Pacific Biosciences Of California, Inc. Systems and methods for selectively addressing sparsely arranged electronic measurement devices
US9972649B2 (en) * 2015-10-21 2018-05-15 Massachusetts Institute Of Technology Nanowire FET imaging system and related techniques
KR101872484B1 (ko) * 2016-03-31 2018-06-28 주식회사 엔디디 바이오 감지 장치
CN105742347A (zh) * 2016-04-14 2016-07-06 塔力哈尔·夏依木拉提 稳定的以气体为绝缘层的纳米线场效应晶体管及制备方法
CN105675692A (zh) * 2016-04-14 2016-06-15 塔力哈尔·夏依木拉提 一种提高场效应晶体管式气体传感器灵敏度的方法
CN109313157B (zh) 2016-04-19 2024-03-29 巴拉什·塔库拉帕里 纳米孔传感器、包括传感器的结构和装置、以及形成和使用它的方法
CN105969338B (zh) * 2016-05-16 2018-03-02 曲阜师范大学 一种SiO2–DNA纳米材料及其制备方法和应用
US10557814B2 (en) * 2016-06-24 2020-02-11 City University Of Hong Kong Electrochemical detector
CN106206296B (zh) * 2016-08-08 2019-06-07 北京大学 一种垂直沟道的纳米线生物传感器的集成方法
CN106442679B (zh) * 2016-09-20 2018-10-26 德州学院 一种检测分子之间结合能及结合动力学的传感装置及方法
US10890556B2 (en) * 2016-11-09 2021-01-12 Wayne State University Electrochemical deposition of nanowires on nanoparticles, lithographical patterns and electronic devices and their use as chemical sensors
GB201708339D0 (en) * 2017-05-24 2017-07-05 Univ Court Univ Of Glasgow Metabolite detection apparatus and method of detecting metabolites
JP6782218B2 (ja) 2017-11-17 2020-11-11 株式会社東芝 検出装置および検出方法
US10312326B1 (en) 2017-12-18 2019-06-04 International Business Machines Corporation Long channels for transistors
US10968098B2 (en) 2018-10-02 2021-04-06 International Business Machines Corporation Selective functionalization of sensing surface with nanoscale spatial resolution
US11143584B2 (en) 2018-10-02 2021-10-12 International Business Machines Corporation Selective functionalization of sensing surface
TWI765209B (zh) * 2019-01-18 2022-05-21 國立陽明交通大學 用來偵測全細胞細菌之以場效電晶體為主的生物感測器以及包含生物感測器的生物感測器組
US11768262B2 (en) 2019-03-14 2023-09-26 Massachusetts Institute Of Technology Interface responsive to two or more sensor modalities
KR102218984B1 (ko) * 2019-07-16 2021-02-23 한국과학기술원 공중 부유형 나노와이어 및 이의 제조 방법
KR102455443B1 (ko) * 2021-02-22 2022-10-18 제일기술(주) 트랜지스터 기반 비효소 당센서 및 이의 제조방법
AU2022267355A1 (en) 2021-04-30 2023-10-19 Root Applied Sciences Inc. Device for collecting material from air
CN113333042B (zh) * 2021-06-21 2022-04-22 太原理工大学 一种用于核酸检测的微流控芯片及其制作方法
US20240353408A1 (en) * 2021-08-30 2024-10-24 The Curators Of The University Of Missouri Mxene-graphene field effect transistor virus sensor
US12382665B2 (en) 2021-09-21 2025-08-05 International Business Machines Corporation Increased gate length at given footprint for nanosheet device
WO2023102062A1 (en) * 2021-12-01 2023-06-08 Board Of Regents, The University Of Texas System Multi-targeted, modular virus sensing platform
KR102438798B1 (ko) * 2021-12-22 2022-09-01 제일기술(주) 연속혈당측정장치
CN114674897B (zh) * 2022-03-28 2023-06-06 深圳大学 一种用于检测单细胞外pH值的探针型有机电化学晶体管传感器及其制备方法、检测方法
CN115078472B (zh) * 2022-07-08 2025-03-21 中国科学院上海微系统与信息技术研究所 一种调控德拜长度实现复杂环境高灵敏生化检测的方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6482639B2 (en) * 2000-06-23 2002-11-19 The United States Of America As Represented By The Secretary Of The Navy Microelectronic device and method for label-free detection and quantification of biological and chemical molecules
JP2007139762A (ja) * 2005-11-22 2007-06-07 Samsung Electronics Co Ltd バイオセンサー、その製造方法及びそれを利用した生体分子の検出方法
JP2008134255A (ja) * 2007-12-17 2008-06-12 Hitachi Ltd 生体分子検出装置及びそれを用いた生体分子検出方法
US20100050745A1 (en) * 2008-09-03 2010-03-04 National Formosa University Gas sensor made of field effect transistor based on ZnO nanowires
WO2010065967A2 (en) * 2008-12-05 2010-06-10 Nanoivd, Inc. Microfluidic-based lab-on-a-test card for a point-of-care analyzer
JP2010172290A (ja) * 2009-01-30 2010-08-12 Waseda Univ Dnaセンシング方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7301199B2 (en) * 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
JP4583710B2 (ja) 2000-12-11 2010-11-17 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ ナノセンサ
US6921913B2 (en) 2003-03-04 2005-07-26 Taiwan Semiconductor Manufacturing Co., Ltd. Strained-channel transistor structure with lattice-mismatched zone
US7345296B2 (en) * 2004-09-16 2008-03-18 Atomate Corporation Nanotube transistor and rectifying devices
US20070238186A1 (en) * 2005-03-29 2007-10-11 Hongye Sun Nanowire-based system for analysis of nucleic acids
TWI287041B (en) * 2005-04-27 2007-09-21 Jung-Tang Huang An ultra-rapid DNA sequencing method with nano-transistors array based devices
US7795677B2 (en) * 2007-09-05 2010-09-14 International Business Machines Corporation Nanowire field-effect transistors
US8568871B2 (en) * 2007-10-29 2013-10-29 State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Portland State University Mono-layer and multi-layer nanowire networks
EP2161754A3 (en) * 2008-09-03 2010-06-16 Kabushiki Kaisha Toshiba A semiconductor device and fabrication method for the same
US20100204062A1 (en) * 2008-11-07 2010-08-12 University Of Southern California Calibration methods for multiplexed sensor arrays
US9075049B2 (en) * 2009-03-31 2015-07-07 Denka Seiken Co., Ltd. Immunoassay method and reagent therefor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6482639B2 (en) * 2000-06-23 2002-11-19 The United States Of America As Represented By The Secretary Of The Navy Microelectronic device and method for label-free detection and quantification of biological and chemical molecules
JP2007139762A (ja) * 2005-11-22 2007-06-07 Samsung Electronics Co Ltd バイオセンサー、その製造方法及びそれを利用した生体分子の検出方法
JP2008134255A (ja) * 2007-12-17 2008-06-12 Hitachi Ltd 生体分子検出装置及びそれを用いた生体分子検出方法
US20100050745A1 (en) * 2008-09-03 2010-03-04 National Formosa University Gas sensor made of field effect transistor based on ZnO nanowires
WO2010065967A2 (en) * 2008-12-05 2010-06-10 Nanoivd, Inc. Microfluidic-based lab-on-a-test card for a point-of-care analyzer
JP2010172290A (ja) * 2009-01-30 2010-08-12 Waseda Univ Dnaセンシング方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JPN6015033541; Kyeong-Sik SHIN: 'Novel T-Channel Nanowire FET with Built-in Signal Amplification for pH Sensing' Electron Devices Meeting (IEDM) IEEE International Pages 1-4, 2009 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022513725A (ja) * 2017-12-05 2022-02-09 フェムトドクス 半導体ベースのバイオセンサとその検出方法

Also Published As

Publication number Publication date
JP2016166900A (ja) 2016-09-15
EP2646812A2 (en) 2013-10-09
CN103348238A (zh) 2013-10-09
US20130337567A1 (en) 2013-12-19
CN103348238B (zh) 2016-12-28
WO2012075445A3 (en) 2012-09-20
JP6310962B2 (ja) 2018-04-11
EP2646812A4 (en) 2015-01-21
WO2012075445A2 (en) 2012-06-07
US9645135B2 (en) 2017-05-09

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