CN103245302B - 三维形状测量装置 - Google Patents

三维形状测量装置 Download PDF

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Publication number
CN103245302B
CN103245302B CN201210487146.4A CN201210487146A CN103245302B CN 103245302 B CN103245302 B CN 103245302B CN 201210487146 A CN201210487146 A CN 201210487146A CN 103245302 B CN103245302 B CN 103245302B
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China
Prior art keywords
orifice plate
optical axis
axis direction
photodetector
displacement
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Chinese (zh)
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CN103245302A (zh
Inventor
石原满宏
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Takaoka Toko Co Ltd
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Takaoka Toko Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036Scanning details, e.g. scanning stages
    • G02B21/0044Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052Optical details of the image generation
    • G02B21/006Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • G02B21/002Scanning microscopes
    • G02B21/0024Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008Details of detection or image processing, including general computer control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Health & Medical Sciences (AREA)
  • Surgery (AREA)
  • Radiology & Medical Imaging (AREA)
  • Ophthalmology & Optometry (AREA)
  • Health & Medical Sciences (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
CN201210487146.4A 2012-02-03 2012-11-26 三维形状测量装置 Active CN103245302B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012022189A JP5955574B2 (ja) 2012-02-03 2012-02-03 立体形状計測装置
JP2012-022189 2012-02-03

Publications (2)

Publication Number Publication Date
CN103245302A CN103245302A (zh) 2013-08-14
CN103245302B true CN103245302B (zh) 2015-11-25

Family

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Family Applications (1)

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CN201210487146.4A Active CN103245302B (zh) 2012-02-03 2012-11-26 三维形状测量装置

Country Status (5)

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US (1) US9041940B2 (enExample)
JP (1) JP5955574B2 (enExample)
KR (1) KR101409644B1 (enExample)
CN (1) CN103245302B (enExample)
TW (1) TWI507659B (enExample)

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WO2019005808A1 (en) 2017-06-26 2019-01-03 Align Technology, Inc. BIOCAPTOR PERFORMANCE INDICATOR FOR INTRABUCCAL DEVICES
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Also Published As

Publication number Publication date
KR20130090313A (ko) 2013-08-13
JP5955574B2 (ja) 2016-07-20
US9041940B2 (en) 2015-05-26
TWI507659B (zh) 2015-11-11
US20130201488A1 (en) 2013-08-08
TW201333420A (zh) 2013-08-16
JP2013160612A (ja) 2013-08-19
KR101409644B1 (ko) 2014-06-18
CN103245302A (zh) 2013-08-14

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