CN103187315B - 柱形凸块的形成方法及其实施装置 - Google Patents

柱形凸块的形成方法及其实施装置 Download PDF

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Publication number
CN103187315B
CN103187315B CN201210413947.6A CN201210413947A CN103187315B CN 103187315 B CN103187315 B CN 103187315B CN 201210413947 A CN201210413947 A CN 201210413947A CN 103187315 B CN103187315 B CN 103187315B
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Prior art keywords
wire
stud bumps
capillary tube
groove
clamp
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CN103187315A (zh
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黄见翎
林勇志
萧义理
郑明达
蔡再宗
刘重希
李明机
余振华
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Abstract

一种装置，包括被配置成供应导线的线轴、被配置成在导线中形成凹槽的切割器件，和被配置成接合导线并形成柱形凸块的毛细管。装置进一步地被配置成拉动导线以在凹槽处断开，其中，尾部区附接至柱形凸块。本发明还提供了柱形凸块的形成方法及其实施装置。

Description

柱形凸块的形成方法及其实施装置
相关申请
本申请要求于2011年12月29日提交的名称为“ProcessandApparatusforAuorCuConnector”的申请序列号为61/581,327的美国临时专利申请的优先权，其全部内容结合于此作为参考。
技术领域
本发明一般地涉及半导体技术领域，更具体地来说，涉及柱形凸块的形成方法及其实施装置。
背景技术
随着集成电路器件密度的增加，对改进的封装方案的需求也在增加。例如，当集成电路器件的密度增加时，诸如接合焊盘、铜凸块、引线接合、焊料接合等的相应连接件的密度也在增加。增加的密度导致对接合工艺更高的要求。需要在不牺牲生成的含焊料接合的质量的情况下减小焊料凸块的尺寸。
发明内容
为了解决现有技术中所存在的缺陷，根据本发明的一方面，提供了一种装置，包括：线轴，被配置成供应导线；切割器件，被配置成在所述导线中形成凹槽；以及毛细管，被配置成接合所述导线以形成柱形凸块，其中，所述装置被配置成拉动所述导线以在所述凹槽处断开，其中尾部区附接到所述柱形凸块。
在该装置中，所述切割器件设置在所述线轴和所述毛细管之间。
该装置进一步包括两个相互邻近放置的辊子，所述导线被配置成在所述两个辊子之间穿过，并且所述切割器件被设置在所述两个辊子中的一个上。
该装置进一步包括设置在所述毛细管上方的夹钳，其中，所述夹钳被配置成与所述毛细管同步地相对于所述导线移动，并且所述切割器件附接至所述夹钳。
在该装置中，所述切割器件设置在所述导线的尖端和所述毛细管之间，并且被配置成在所述导线的所述尖端和所述毛细管之间形成所述凹槽。
在该装置中，所述切割器件包括弹性刀片，其中，所述弹性刀片包括到刀片，并且所述弹性刀片被配置成：响应于通过所述毛细管朝向所述刀片施加的推力，打开所述刀片以允许所述毛细管和所述导线穿过所述刀片；以及响应于所述毛细管远离所述柱形凸块的后退运动，迅速返回以使用所述刀片开槽于所述导线。
在该装置中，所述切割器件被配置成在所述切割器件和所述导线之间形成火花。
根据本发明的另一方面，提供了一种装置，包括：线轴，被配置成供应导线；毛细管，被配置成接合所述导线以形成柱形凸块；夹钳，位于所述线轴和所述毛细管之间，其中，所述夹钳被配置成与所述毛细管的上下移动同步地进行上下移动；以及切割器件，附接至所述夹钳，其中，所述切割器件被配置成响应于所述夹钳夹在所述导线上来在所述导线中形成凹槽。
在该装置中，所述切割器件被配置成在不断开所述导线的情况下在所述导线中形成凹槽，所述导线中位于所述凹槽相对侧上的部分连接。
在该装置中，所述毛细管被配置成在接合工艺中，将位于所述导线的尖端处的球接合到电连接件上，其中，所述接合球形成所述柱形凸块，并且所述夹钳被配置成拉动所述导线以在所述凹槽处断开所述导线。
该装置进一步包括被配置成在所述导线的所述尖端处产生火花以形成所述球的器件。
在该装置中，所述夹钳被配置成：在所述毛细管使用所述导线实施接合之前夹住所述导线；在所述毛细管实施所述接合之后以及在所述夹钳移动远离在所述接合中形成的所述柱形凸块之前释放所述夹钳；以及在所述毛细管移动远离所述柱形凸块之后夹住所述导线以在所述导线中形成其他凹槽。
在该装置中，所述夹钳包括位于所述导线的相对侧上的第一部件和第二部件，所述切割器件是安装在所述第一部件上并且面对所述第二部件的刀片，其中，所述刀片突出到所述第一部件的表面外，并且所述第一部件的表面面对所述第二部件。
根据本发明的又一方面，提供了一种方法，包括：在导线中形成凹槽；将所述导线接合到电连接件并且在所述电连接件上形成柱形凸块；以及拉动所述导线以在所述凹槽处从所述柱形凸块断开所述导线。
该方法进一步包括从线轴供应所述导线，其中，在所述导线被供应离开所述线轴之后实施在所述导线中形成所述凹槽的步骤。
该方法进一步包括从线轴供应所述导线，其中，在从所述线轴供应所述导线之前实施在所述导线中形成所述凹槽的步骤。
在该方法中，在接合所述导线并形成所述柱形凸块的步骤之后形成所述凹槽。
在该方法中，在接合所述导线并形成所述柱形凸块的步骤之前形成所述凹槽。
在该方法中，使用弹性刀片形成所述凹槽，并且形成所述凹槽的步骤包括：朝向所述弹性刀片的刀片推动毛细管以打开所述弹性刀片，其中，所述导线穿过所述毛细管和所述弹性刀片的刀片；以及在接合步骤之后，拉回所述毛细管以允许所述弹性刀片迅速返回，其中，所述弹性刀片的刀片彼此相对运动以在所述导线中形成所述凹槽。
在该方法中，当夹钳夹住所述导线时实施形成所述凹槽的步骤，其中，所述夹钳被配置成与毛细管的上下移动同步地进行上下移动，并且通过所述毛细管实施接合所述导线的步骤。
附图说明
为了更好地理解实施例及其优点，现在将结合附图所进行的以下描述作为参考，其中：
图1示意性地示出了根据实施例形成的说明性的柱形凸块，其中，导线的尾部附接至柱形凸块；
图2A至图2C示意性地示出了用于预开槽(prenotch)于导线的工艺的第一实施例；
图3示意性地示出了用于原位开槽于导线的工艺的第二实施例；
图4A至图4D示意性地示出了在接合之后用于通过机械卷绕导线形成柱形凸块的工艺的第三实施例；
图5A至5C示意性地示出了用于通过削弱导线形成柱形凸块的工艺的第四实施例；
图6A至图6E示意性地示出了使用弹性刀片形成柱形凸块的工艺的第五实施例；
图7A至图7C示意性地示出了具有不同形状的另外的弹性刀片；
图8A和8B示意性地示出了使用另外的弹性刀片开槽于导线；以及
图9A至图9F示意性地示出了当夹钳夹住导线时用于通过开槽于导线形成柱形凸块的工艺的第六实施例。
具体实施方式
以下详细讨论了本发明的实施例的制造和使用。然而，应该理解，实施例提供了许多可以在各种具体环境中实现的可应用的发明理念。所讨论的具体实施例是说明性的，并没有限定本公开内容的范围。
根据各种示例性实施例提供高引线接合柱形凸块及其形成方法。示出了形成柱形凸块的中间阶段。讨论了实施例的变型例和操作。在各个附图和所有说明性实施例中，相同的参考数字用于指定相同的元件。提供了用于更有效的集成到各种各样的封装工艺中的高柱形凸块，本文中有时也称为凸块。
图1示出了具有凸块区6和尾部区8的示例性柱形凸块2。柱形凸块2形成在电连接件4上方，该电连接件可以是接合焊盘、金属线、其他柱形凸块等。此外，电连接件4可以是位于集成电路部件(未示出)的表面处的表面部件，其可以是器件管芯、封装衬底、中介板等。凸块区6具有指示为BH的高度，尾部区8具有指示为TH的高度，并且柱形凸块2具有指示为OH的总高度。尾部区8处于直立位置。在一些说明性实施例中，尾部区高度TH可以在约15μm至约30μm的范围内。在其他说明性实施例中，TH可以在约30μm至约100μm的范围内。在又一些实施例中，TH可以大于约100μm，其中，上限接近重力倾斜的长度(即，尾部8不再克服重力的引力而支撑其本身的点，其高度变化取决于尾部区的直径)。在一些示例性实施例中，高度OH可以大于约200μm或者大于约300μm。在说明性实施例中，柱形凸块2可以由铜或者金形成，但是诸如铝、银、铂、钯、锡等的其他导电材料在本实施例的预期范围内。
图2A、图2B和图2C示出了根据一些示例性实施例的用于实现柱形凸块2(在图1中所示的)的说明性工艺。柱形凸块2可以由诸如铜或金导线的导线10形成。在图2A的实施例中，例如，在与用于在其上形成柱形凸块2的电连接件4(参见图1)接触之前，导线10在线轴12之间运行。当导线10在线轴12之间通过时，导线10穿过开槽器(notcher)14。图2B进一步详细地示出了开槽器14。如图所示，开槽器14包括导线10在其间穿过两个辊子15。辊子15中的一个或者可选地两个都具有形成在其中的空腔(参考图2B)。在空腔内包含切割但不切断导线10的剃刀或者其他切割器件17，因此，在导线10上形成开槽(图2C)。随着辊子15的每次旋转，切割器件17与导线接触并开槽于导线。虽然图2B示出了一个切割器件17，但是可以有多于一个的切割器件形成在辊子15中的一个或者两个上以减小导线10上的凹槽11的间距。本领域的技术人员应该意识到辊子15的直径、切割器件17(如果多于一个)之间的间隔以及导线10上生成的凹槽11(图2C)的间距P1之间的关系。图2C更详细地示出了经过辊子15并被开槽之后的导线10。如图所示，凹槽11周期性地形成在导线10上，而每个凹槽11都可以用于形成1个柱形凸块2(图1)。
在图2A至图2C所示的实施例中，在用于形成柱形凸块的工艺之前预开槽于导线10。然后，预开槽的导线10用于实施引线接合。除了没有使用图3中的开槽器14之外，使用预开槽的导线10形成柱形凸块2的装置类似于图3所示的装置，因为在线轴12上的导线已经被预开槽。
图3示出了可选实施例，其中，原位开槽于导线10，作为柱形凸块形成工艺的部分。在该说明性实施例中，导线10从线轴12到达滑轮16。开槽器14可以类似于图2B所示的开槽器，位于线轴12和滑轮16之间，并且当导线10从线轴12到达滑轮16时，实时开槽于导线10。生成的开槽的导线10基本上与图2C示意性地示出的导线相同。滑轮16接纳开槽的导线10并将它提供给毛细管18。毛细管18有时也被称为毛细管18。毛细管18将导线10定位在适当的位置(例如，在集成电路管芯、印刷电路板(PCB)、中介板等的电连接件4的上方)，并且例如，使用热、压力、声振、热压缩等中的一种或多种将导线10接合到电连接件4。
本领域的技术人员应该理解，开槽的导线10在开槽处相对于未被开槽的区域比较薄弱。因此，夹紧并举起导线10(相对于电连接件4，也如图1所示)，导线10将在开槽区域处断开。通过控制开槽区之间的距离(如上所述)，可以仔细地控制生成的柱形凸块2的尾部区8(图1)的高度TH。这也反过来允许精确控制柱形凸块2的总高度OH。在导线断开之后，尾部区8可以直立。
图4A至图4D示出了用于形成柱形凸块2的工艺的可选实施例。在该实施例中，当导线10经过毛细管18的时以及在导线10供应给毛细管18之前，导线10未被开槽。在图4A所示的步骤中，未开槽的导线10被供应给毛细管18并且与电连接件4接触以形成柱形凸块2。在柱形凸块2形成之后，通过夹钳20开槽或者夹压导线10。夹钳20在它的夹臂之间凹陷导线10以夹压或者开槽于导线10，并且可能不切断导线10。
图4B示出了夹钳20开槽于导线10然后去除或者没有夹钳20之后的导线10。这时，如图4C所示，毛细管18开始向上移动(相对于柱形凸块2)，将导线10拉伸并产生应变。如图4D所示，导线10在通过夹钳20开槽于导线10的位置处断开。本领域的技术人员应该意识到通过在夹压工艺过程中适当放置夹钳20位置，可以精确控制生成的柱形凸块2的高度TH。
图5A至图5C示出了用于形成柱形凸块2的工艺的又一个实施例。在该所示的实施例中，使用加热元件22形成导线10中的薄弱点。仍然在该实施例中，无需预开槽于导线10(虽然在一些实施例中，期望采用图1和/或图2的开槽技术和图4A至图5C的额外的技术)。图5A示出了使用毛细管18将导线10接合到电连接件4以形成柱形凸块2的工艺要点。加热元件22在期望形成导线10的薄弱点(类似于上述实施例中形成的凹槽)的位置处与导线10邻近或者接触。加热元件22可以是电阻式加热元件、电感式加热元件、发射高度集中RF或者诸如火花的其他能量的器件等。在一些实施例中，加热元件22被施以高电压，该高电压可以低于形成导线10熔点的电压(参见图9B)，使得加热导线10并且该导线10变软。
在说明性的实施例中，如图5B所示，加热元件22加热高度局部化区域的导线10，导致导线10的部分变软、变弱，并且可能轻微变形，但无需完全熔化或者切断。随着毛细管18向上移动，如图5C所示，导线10在通过加热元件22所导致的薄弱点处分离。虽然在所示的实施例中，加热元件22被示出为在整个工艺过程中保持接近或者接触导线10，但是在一些实施例中，可以在毛细管18远离电连接件4的运动之前从导线10去除加热元件。
图6A至图6E示出了又一些的实施例。在这些实施例中，通过毛细管18的作用迫使导线10通过弹性刀片24来自切割导线10，然后，通过夹钳拉动导线10以收回弹性刀片24。图6A示出了毛细管18向弹性刀片24移动。在图6A中还示出了包围毛细管18的管26。管26可以是陶瓷管，例如，管26允许惰性气体(如氮气(N2))、还原气体(如氢气(H2))，和/或其他气体通过。在将球形成在导线10的尖端处(参见图9B和9C)的点火花的步骤中，气体反过来吹在导线10上。
图6B示出了毛细管18迫使导线10进入弹性刀片24。如图6C所示，毛细管18进一步地向下移动，导致弹性刀片24打开。弹性刀片24的相对刀片分离，允许导线10以及或许毛细管18的尖端通过。接下来，在用于形成柱形凸块2的接合(图1)之后，当毛细管18向上移动时，弹性刀片24的刀片迅速回到适当位置，相互闭合并切断导线10。在图6D中示出这种情况。图6E示出了切割导线10。可以重复使导线10通过弹性刀片24并切断导线10的过程。然而，在说明性的实施例中，如图1所示，单次通过弹性刀片24足以形成柱形凸块2。
图7A至图8B示出了可以使用的弹性刀片的不同形状。在图7A至8B中所示的实施例的有利特征是切断导线10无需外部致动器。导线10通过弹性刀片24的刀片并从刀片之间拉回的操作来自动切割导线10。本领域的技术人员应该意识到可以通过弹性刀片24的适当形状和位置很容易地获得期望的尾部区高度TH(参见图1)。图8A和8B也示出了毛细管18迫使弹性刀片24打开，然后拉回以允许自切割导线10。
图9A至图9F示出了又一些实施例。除了切割器件17安装在夹钳30中以外，这些实施例与图3中的实施例类似。夹钳30可以位于毛细管18上方，并且可以被配置成与毛细管18的上下移动同步地进行上下移动。在一些实施例中，如图9A所示，夹钳30包括位于导线10相对侧上的两个元件，其中，切割器件17(例如，刀片)安装在第一部件上，并且其中，刀片面对第二部件。切割器件17的刀片进一步地突出超过第一部件的表面30A，此表面也面对第二部件。
参考图9A，夹钳30夹住导线10，使得当夹钳30和毛细管18向下移动时，导线10随同毛细管18一起向下移动。例如，如图9A所示的夹钳30的夹紧可以出现在之前接合柱形凸块之后。因此，当夹钳30夹住导线10时切割器件17在导线10上形成凹槽。接下来，在图9B中，对着导线10的尖端产生火花，使得如图9C所示，球2’形成在导线10的尖端处。可以通过携带高电压的电子点火(EFO)器件34产生火花。在图9D中，夹钳30和毛细管18一起上下移动，并且进行接合，使得球2’落在电连接件4上以形成柱形凸块2。然后，夹钳30释放导线10，并在导线10上留下新形成的凹槽11。然后，毛细管18可以向上移动，没有上拉导线10。在毛细管18向上移动到期望位置之后，如图9E所示，夹钳30再次夹住导线10，此工艺进一步地继续至图9A，并且可以进行接下来的接合工艺。
具有高尾部8(图1)的柱形凸块2可以用于焊料接合，其中，可以围绕尾部8形成焊料区。因此，高尾部8用作相对高但不粗的焊料区的支撑件。因此减小了焊料区的尺寸，并且可以增加基于柱形凸块2形成的基于焊料的连接件的密度。
根据实施例，装置包括被配置成供应导线的线轴、被配置成在导线中形成凹槽的切割器件，和被配置成接合导线并形成柱形凸块的毛细管。装置被配置成在凹槽处断开导线。
根据其他实施例，装置包括被配置成供应导线的线轴，和被配置成接合导线以形成柱形凸块的毛细管。装置进一步包括位于线轴和毛细管之间的夹钳，其中，夹钳被配置成与毛细管的上下移动同步地进行上下移动。切割器件附接至夹钳，其中，切割器件被配置成响应于通过夹钳夹住导线来在导线中形成凹槽。
根据又一些实施例，方法包括在导线中形成凹槽，将导线接合到电连接件并在电连接件上形成柱形凸块，以及拉动导线以在凹槽处从柱形凸块断开导线。
尽管已经详细地描述了本实施例及其优势，但应该理解，可以在不背离所附权利要求限定的本实施例主旨和范围的情况下，做各种不同的改变、替换和更改。而且，本申请的范围并不仅限于本说明书中描述的工艺、机器、制造、材料组分、装置、方法和步骤的特定实施例。作为本领域普通技术人员应该理解，通过本发明，现有的或今后开发的用于执行与根据本发明所采用的所述相应实施例基本相同的功能或获得基本相同结果的工艺、机器、制造、材料组分、装置、方法或步骤根据本发明可以被使用。因此，所附权利要求应该包括在这样的工艺、机器、制造、材料组分、装置、方法或步骤的范围内。此外，每条权利要求构成单独的实施例，并且多个权利要求和实施例的组合在本发明的范围内。

Claims (11)

1.一种形成柱形凸块的装置，包括：
线轴，被配置成供应导线；
切割器件，被配置成在所述导线中形成凹槽；
毛细管，被配置成接合所述导线以形成柱形凸块，其中，所述装置被配置成拉动所述导线以在所述凹槽处断开，其中尾部区附接到所述柱形凸块；以及
相互邻近放置的两个辊子，所述导线被配置成在所述两个辊子之间穿过，并且所述切割器件被设置在所述两个辊子中的一个或两个上。
2.根据权利要求1所述的装置，其中，所述切割器件设置在所述线轴和所述毛细管之间。
3.一种形成柱形凸块的装置，包括：
线轴，被配置成供应导线；
毛细管，被配置成接合所述导线以形成柱形凸块；
夹钳，位于所述线轴和所述毛细管之间，其中，所述夹钳被配置成与所述毛细管的上下移动同步地进行上下移动以控制开槽的距离，从而控制所述柱形凸块的高度；以及
切割器件，附接至所述夹钳，其中，所述切割器件被配置成响应于所述夹钳夹在所述导线上来在所述导线中形成凹槽。
4.根据权利要求3所述的装置，其中，所述切割器件被配置成在不断开所述导线的情况下在所述导线中形成凹槽，所述导线中位于所述凹槽相对侧上的部分连接。
5.根据权利要求3所述的装置，其中，所述毛细管被配置成在接合工艺中，将位于所述导线的尖端处的球接合到电连接件上，其中，所述接合球形成所述柱形凸块，并且所述夹钳被配置成拉动所述导线以在所述凹槽处断开所述导线。
6.根据权利要求5所述的装置，进一步包括被配置成在所述导线的所述尖端处产生火花以形成所述球的器件。
7.根据权利要求3所述的装置，其中，所述夹钳被配置成：
在所述毛细管使用所述导线实施接合之前夹住所述导线；
在所述毛细管实施所述接合之后以及在所述夹钳移动远离在所述接合中形成的所述柱形凸块之前释放所述夹钳；以及
在所述毛细管移动远离所述柱形凸块之后夹住所述导线以在所述导线中形成其他凹槽。
8.根据权利要求3所述的装置，其中，所述夹钳包括位于所述导线的相对侧上的第一部件和第二部件，所述切割器件是安装在所述第一部件上并且面对所述第二部件的刀片，其中，所述刀片突出到所述第一部件的表面外，并且所述第一部件的表面面对所述第二部件。
9.一种形成柱形凸块的方法，包括：
在导线中形成凹槽；
将所述导线接合到电连接件并且在所述电连接件上形成柱形凸块；以及
拉动所述导线以在所述凹槽处从所述柱形凸块断开所述导线；
其中，使用弹性刀片形成所述凹槽，并且形成所述凹槽的步骤包括：
朝向所述弹性刀片的刀片推动毛细管以打开所述弹性刀片，其中，所述导线穿过所述毛细管和所述弹性刀片的刀片；以及
在接合步骤之后，拉回所述毛细管以允许所述弹性刀片迅速返回，其中，所述弹性刀片的刀片彼此相对运动以在所述导线中形成所述凹槽。
10.根据权利要求9所述的方法，进一步包括从线轴供应所述导线，其中，在所述导线被供应离开所述线轴之后实施在所述导线中形成所述凹槽的步骤。
11.根据权利要求9所述的方法，其中，在接合所述导线并形成所述柱形凸块的步骤之后形成所述凹槽。
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