CN103081056A - 阴极体、荧光管、以及阴极体的制造方法 - Google Patents

阴极体、荧光管、以及阴极体的制造方法 Download PDF

Info

Publication number
CN103081056A
CN103081056A CN201180042487.4A CN201180042487A CN103081056A CN 103081056 A CN103081056 A CN 103081056A CN 201180042487 A CN201180042487 A CN 201180042487A CN 103081056 A CN103081056 A CN 103081056A
Authority
CN
China
Prior art keywords
cathode body
lab
film
cathode
tungsten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201180042487.4A
Other languages
English (en)
Chinese (zh)
Inventor
大见忠弘
后藤哲也
石井秀和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku University
Original Assignee
Tohoku University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku University filed Critical Tohoku University
Publication of CN103081056A publication Critical patent/CN103081056A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps
    • H01J61/0675—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Discharge Lamp (AREA)
CN201180042487.4A 2010-09-01 2011-08-30 阴极体、荧光管、以及阴极体的制造方法 Pending CN103081056A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010-195878 2010-09-01
JP2010195878A JP2012054102A (ja) 2010-09-01 2010-09-01 陰極体、蛍光管、および陰極体の製造方法
PCT/JP2011/069521 WO2012029739A1 (ja) 2010-09-01 2011-08-30 陰極体、蛍光管、および陰極体の製造方法

Publications (1)

Publication Number Publication Date
CN103081056A true CN103081056A (zh) 2013-05-01

Family

ID=45772825

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180042487.4A Pending CN103081056A (zh) 2010-09-01 2011-08-30 阴极体、荧光管、以及阴极体的制造方法

Country Status (4)

Country Link
US (1) US20130154469A1 (cg-RX-API-DMAC7.html)
JP (1) JP2012054102A (cg-RX-API-DMAC7.html)
CN (1) CN103081056A (cg-RX-API-DMAC7.html)
WO (1) WO2012029739A1 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103601207A (zh) * 2013-11-12 2014-02-26 北京工业大学 高纯高致密YbB6多晶块体阴极材料的制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1015840A (en) * 1964-09-08 1966-01-05 Standard Telephones Cables Ltd Thermionic valves
JP2001210271A (ja) * 2000-01-31 2001-08-03 Harison Toshiba Lighting Corp 冷陰極形電極、蛍光ランプおよび照明装置
JP2001338607A (ja) * 2000-05-30 2001-12-07 Stanley Electric Co Ltd 電子放出用電極及び冷陰極蛍光管
JP4428610B2 (ja) * 2002-09-04 2010-03-10 株式会社渡辺商行 放電管およびそれを有する装置
CN101802967B (zh) * 2007-09-14 2013-08-28 国立大学法人东北大学 阴极体以及采用该阴极体的荧光管
JP2010192212A (ja) * 2009-02-17 2010-09-02 Kochi Fel Kk 発光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103601207A (zh) * 2013-11-12 2014-02-26 北京工业大学 高纯高致密YbB6多晶块体阴极材料的制备方法

Also Published As

Publication number Publication date
JP2012054102A (ja) 2012-03-15
WO2012029739A1 (ja) 2012-03-08
US20130154469A1 (en) 2013-06-20

Similar Documents

Publication Publication Date Title
CN101802967B (zh) 阴极体以及采用该阴极体的荧光管
CN102047379B (zh) 荧光灯
US7948735B2 (en) Electrostatic chuck and method for manufacturing the same
CN104411860A (zh) C12a7电子化合物的薄膜的制造方法及c12a7电子化合物的薄膜
KR100345083B1 (ko) 질화 알루미늄 소결체, 전자 기능 재료 및 정전 척
TW200926300A (en) Krypton sputtering of thin tungsten layer for integrated circuits
Watanabe et al. Secondary electron emission and glow discharge properties of 12CaO· 7Al2O3 electride for fluorescent lamp applications
WO2010001796A1 (ja) 希土類元素ホウ化物部材およびその製造方法
Chang et al. Enhancing the stability of microplasma device utilizing diamond coated carbon nanotubes as cathode materials
TW201435127A (zh) 類鑽石薄膜及其製備方法
CN1282091A (zh) 一种制造显示基板的方法及利用该方法制造的显示基板
JP2014162998A (ja) 酸化亜鉛系スパッタリング・ターゲット、その製造方法、及びそれを用いて蒸着された遮断膜を有する薄膜トランジスタ
JP5665112B2 (ja) スパッタ成膜方法
JP2008044846A (ja) 窒化アルミニウム焼結体およびそれを用いた静電チャック
JPH11335824A (ja) ＭｇＯを主成分とするタ−ゲット材料およびその製造方法
JP2012054102A (ja) 陰極体、蛍光管、および陰極体の製造方法
JP2001058871A (ja) 導電性酸化チタン焼結体とその製造方法及びこれを用いたスパッタリングターゲット
JP4493902B2 (ja) 透明導電膜の製造方法
JP2004059965A (ja) スパッタリングターゲットおよびその製造方法
WO2011122526A1 (ja) 陰極体およびその製造方法
JP2001199742A (ja) ディスプレイ用基板
JP5376377B2 (ja) 陰極体
JP3965469B2 (ja) 静電チャック
KR20160093959A (ko) 인듐 아연 주석 산화물 제조 방법, 이를 포함하는 태양 전지 및 이의 제조 방법
JP4734864B2 (ja) スパッタリング方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20130501