CN103069269B - 可变电容传感器及其制造方法 - Google Patents

可变电容传感器及其制造方法 Download PDF

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Publication number
CN103069269B
CN103069269B CN201180039444.0A CN201180039444A CN103069269B CN 103069269 B CN103069269 B CN 103069269B CN 201180039444 A CN201180039444 A CN 201180039444A CN 103069269 B CN103069269 B CN 103069269B
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Prior art keywords
conductive
microporous
conductive sheet
variable capacitance
dielectric material
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Chinese (zh)
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CN103069269A (zh
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斯特凡·H·格里斯卡
迈克尔·C·帕拉佐托
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
CN201180039444.0A 2010-06-15 2011-06-02 可变电容传感器及其制造方法 Expired - Fee Related CN103069269B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35484310P 2010-06-15 2010-06-15
US61/354,843 2010-06-15
PCT/US2011/038844 WO2011159480A1 (en) 2010-06-15 2011-06-02 Variable capacitance sensors and methods of making the same

Publications (2)

Publication Number Publication Date
CN103069269A CN103069269A (zh) 2013-04-24
CN103069269B true CN103069269B (zh) 2016-08-03

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CN201180039444.0A Expired - Fee Related CN103069269B (zh) 2010-06-15 2011-06-02 可变电容传感器及其制造方法

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US (1) US9018060B2 (enExample)
EP (1) EP2583090B1 (enExample)
JP (1) JP5800897B2 (enExample)
CN (1) CN103069269B (enExample)
WO (1) WO2011159480A1 (enExample)

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US9279792B2 (en) 2011-04-13 2016-03-08 3M Innovative Properties Company Method of using an absorptive sensor element
JP2014510933A (ja) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
WO2012170248A1 (en) 2011-06-08 2012-12-13 3M Innovative Properties Company Humidity sensor and sensor element therefor
JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
US10267758B2 (en) 2012-06-25 2019-04-23 3M Innovative Properties, Company Sensor element, method of making, and method of using the same
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KR102238937B1 (ko) * 2014-07-22 2021-04-09 주식회사 키 파운드리 배선 사이의 중공에 형성된 습도 센서 및 그 제조 방법
EP3078964B1 (en) * 2015-04-09 2017-05-24 Honeywell International Inc. Relative humidity sensor and method
US9805875B2 (en) 2015-05-06 2017-10-31 Unimicron Technology Corp. Capacitor and manufacturing method thereof
CN107966165B (zh) * 2016-10-19 2020-12-22 华邦电子股份有限公司 电阻式环境传感器及电阻式环境传感器阵列

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Also Published As

Publication number Publication date
WO2011159480A1 (en) 2011-12-22
EP2583090A1 (en) 2013-04-24
JP2013528817A (ja) 2013-07-11
US20130088244A1 (en) 2013-04-11
US9018060B2 (en) 2015-04-28
JP5800897B2 (ja) 2015-10-28
CN103069269A (zh) 2013-04-24
EP2583090B1 (en) 2016-04-06

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