JP5800897B2 - 可変静電容量センサ及びその作製方法 - Google Patents

可変静電容量センサ及びその作製方法 Download PDF

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Publication number
JP5800897B2
JP5800897B2 JP2013515369A JP2013515369A JP5800897B2 JP 5800897 B2 JP5800897 B2 JP 5800897B2 JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013515369 A JP2013515369 A JP 2013515369A JP 5800897 B2 JP5800897 B2 JP 5800897B2
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conductive
conductive sheet
electrode
variable capacitance
capacitance sensor
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JP2013515369A
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Japanese (ja)
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JP2013528817A (ja
JP2013528817A5 (enExample
Inventor
ステファン エイチ． グリスカ，
ステファン エイチ． グリスカ，
マイケル シー． パラゾット，
マイケル シー． パラゾット，
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3M Innovative Properties Co
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3M Innovative Properties Co
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity

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  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2013515369A 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法 Expired - Fee Related JP5800897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35484310P 2010-06-15 2010-06-15
US61/354,843 2010-06-15
PCT/US2011/038844 WO2011159480A1 (en) 2010-06-15 2011-06-02 Variable capacitance sensors and methods of making the same

Publications (3)

Publication Number Publication Date
JP2013528817A JP2013528817A (ja) 2013-07-11
JP2013528817A5 JP2013528817A5 (enExample) 2014-07-17
JP5800897B2 true JP5800897B2 (ja) 2015-10-28

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JP2013515369A Expired - Fee Related JP5800897B2 (ja) 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法

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US (1) US9018060B2 (enExample)
EP (1) EP2583090B1 (enExample)
JP (1) JP5800897B2 (enExample)
CN (1) CN103069269B (enExample)
WO (1) WO2011159480A1 (enExample)

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US9279792B2 (en) 2011-04-13 2016-03-08 3M Innovative Properties Company Method of using an absorptive sensor element
JP2014510933A (ja) 2011-04-13 2014-05-01 スリーエム イノベイティブ プロパティズ カンパニー センサ素子を含み一体型加熱機構を備えた蒸気センサ
WO2012141925A1 (en) 2011-04-13 2012-10-18 3M Innovative Properties Company Method of detecting volatile organic compounds
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JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
US10267758B2 (en) 2012-06-25 2019-04-23 3M Innovative Properties, Company Sensor element, method of making, and method of using the same
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Also Published As

Publication number Publication date
CN103069269B (zh) 2016-08-03
WO2011159480A1 (en) 2011-12-22
EP2583090A1 (en) 2013-04-24
JP2013528817A (ja) 2013-07-11
US20130088244A1 (en) 2013-04-11
US9018060B2 (en) 2015-04-28
CN103069269A (zh) 2013-04-24
EP2583090B1 (en) 2016-04-06

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