JP2013528817A5 - - Google Patents

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Publication number
JP2013528817A5
JP2013528817A5 JP2013515369A JP2013515369A JP2013528817A5 JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5 JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013515369 A JP2013515369 A JP 2013515369A JP 2013528817 A5 JP2013528817 A5 JP 2013528817A5
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JP
Japan
Prior art keywords
conductive sheet
conductive
electrode
sheet
partially
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JP2013515369A
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English (en)
Japanese (ja)
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JP2013528817A (ja
JP5800897B2 (ja
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Priority claimed from PCT/US2011/038844 external-priority patent/WO2011159480A1/en
Publication of JP2013528817A publication Critical patent/JP2013528817A/ja
Publication of JP2013528817A5 publication Critical patent/JP2013528817A5/ja
Application granted granted Critical
Publication of JP5800897B2 publication Critical patent/JP5800897B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013515369A 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法 Expired - Fee Related JP5800897B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35484310P 2010-06-15 2010-06-15
US61/354,843 2010-06-15
PCT/US2011/038844 WO2011159480A1 (en) 2010-06-15 2011-06-02 Variable capacitance sensors and methods of making the same

Publications (3)

Publication Number Publication Date
JP2013528817A JP2013528817A (ja) 2013-07-11
JP2013528817A5 true JP2013528817A5 (enExample) 2014-07-17
JP5800897B2 JP5800897B2 (ja) 2015-10-28

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ID=44395752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013515369A Expired - Fee Related JP5800897B2 (ja) 2010-06-15 2011-06-02 可変静電容量センサ及びその作製方法

Country Status (5)

Country Link
US (1) US9018060B2 (enExample)
EP (1) EP2583090B1 (enExample)
JP (1) JP5800897B2 (enExample)
CN (1) CN103069269B (enExample)
WO (1) WO2011159480A1 (enExample)

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EP2622333B1 (en) 2010-09-30 2020-06-17 3M Innovative Properties Company Sensor element, method of making the same, and sensor device including the same
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KR101968999B1 (ko) 2011-04-13 2019-04-15 쓰리엠 이노베이티브 프로퍼티즈 컴파니 흡수 센서 요소를 사용하는 방법
JP5955379B2 (ja) 2011-04-13 2016-07-20 スリーエム イノベイティブ プロパティズ カンパニー 揮発性有機化合物の検出方法
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CN103547915B (zh) 2011-06-08 2015-11-25 3M创新有限公司 湿度传感器及其传感器元件
JP6038950B2 (ja) 2011-12-13 2016-12-07 スリーエム イノベイティブ プロパティズ カンパニー 気体媒質内の未知の有機化合物の同定及び定量測定方法
EP2864770B1 (en) 2012-06-25 2017-09-27 3M Innovative Properties Company Sensor element, method of making, and method of using the same
CN104583764B (zh) 2012-08-02 2017-03-22 3M创新有限公司 便携式电子设备和蒸汽传感器卡
CN106062546A (zh) * 2014-02-27 2016-10-26 3M创新有限公司 柔性传感器贴片及其使用方法
KR102238937B1 (ko) * 2014-07-22 2021-04-09 주식회사 키 파운드리 배선 사이의 중공에 형성된 습도 센서 및 그 제조 방법
JP2017531163A (ja) 2014-07-22 2017-10-19 ブルーワー サイエンス アイ エヌ シー． 薄膜抵抗式センサ
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