DK0475025T3 - Fremgangsmåde til fremstilling af en kapacitiv fugtføler - Google Patents

Fremgangsmåde til fremstilling af en kapacitiv fugtføler

Info

Publication number
DK0475025T3
DK0475025T3 DK91112098.8T DK91112098T DK0475025T3 DK 0475025 T3 DK0475025 T3 DK 0475025T3 DK 91112098 T DK91112098 T DK 91112098T DK 0475025 T3 DK0475025 T3 DK 0475025T3
Authority
DK
Denmark
Prior art keywords
producing
moisture sensor
capacitive moisture
capacitive
sensor
Prior art date
Application number
DK91112098.8T
Other languages
English (en)
Inventor
Frank Dr Hegner
Traugott Dr Ing Kallfass
Original Assignee
Endress Hauser Gmbh Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress Hauser Gmbh Co filed Critical Endress Hauser Gmbh Co
Application granted granted Critical
Publication of DK0475025T3 publication Critical patent/DK0475025T3/da

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DK91112098.8T 1990-09-12 1991-07-19 Fremgangsmåde til fremstilling af en kapacitiv fugtføler DK0475025T3 (da)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90810689 1990-09-12

Publications (1)

Publication Number Publication Date
DK0475025T3 true DK0475025T3 (da) 1995-06-19

Family

ID=8205952

Family Applications (1)

Application Number Title Priority Date Filing Date
DK91112098.8T DK0475025T3 (da) 1990-09-12 1991-07-19 Fremgangsmåde til fremstilling af en kapacitiv fugtføler

Country Status (7)

Country Link
US (1) US5254371A (da)
EP (1) EP0475025B1 (da)
JP (1) JP2509400B2 (da)
CA (1) CA2048904C (da)
DE (1) DE59105040D1 (da)
DK (1) DK0475025T3 (da)
ES (1) ES2069784T3 (da)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427627C2 (de) * 1994-08-04 1999-03-11 Leybold Ag Regensensor
DE19917717C2 (de) * 1999-04-20 2002-10-17 Joerg Mueller Kapazitiver Feuchtesensor
US6580600B2 (en) * 2001-02-20 2003-06-17 Nippon Soken, Inc. Capacitance type humidity sensor and manufacturing method of the same
JP3855950B2 (ja) * 2003-03-19 2006-12-13 株式会社デンソー 容量式湿度センサ
JP4609173B2 (ja) * 2005-04-22 2011-01-12 株式会社デンソー 容量式湿度センサおよびその製造方法
CN103069269B (zh) 2010-06-15 2016-08-03 3M创新有限公司 可变电容传感器及其制造方法
CN102967634A (zh) * 2012-12-04 2013-03-13 中国科学院合肥物质科学研究院 基于阳极氧化铝薄膜共平面电极结构的电容湿敏传感器及其制备方法
JP6515683B2 (ja) * 2015-05-29 2019-05-22 富士通株式会社 測定装置および測定システム
US11815504B2 (en) * 2016-07-11 2023-11-14 Quipip, Llc Sensor device, and systems and methods for obtaining measurements of selected characteristics of a concrete mixture
CN115266849A (zh) * 2016-09-30 2022-11-01 美蓓亚三美株式会社 湿度传感器

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3024297C2 (de) * 1980-06-27 1985-08-14 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht
FR2486656A1 (fr) * 1980-07-09 1982-01-15 Commissariat Energie Atomique Hygrometre capacitif
DE3151630C2 (de) * 1981-12-28 1986-07-03 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Feuchtigkeitsfühler und Verfahren zu seiner Herstellung
JPS5991355A (ja) * 1982-11-16 1984-05-26 Murata Mfg Co Ltd 湿度センサ
DE3313150C1 (de) * 1983-04-12 1984-10-04 Endress U. Hauser Gmbh U. Co, 7867 Maulburg Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung
US4761710A (en) * 1987-06-23 1988-08-02 Industrial Technology Research Institute Polyimide capacitive humidity sensing element

Also Published As

Publication number Publication date
EP0475025A1 (de) 1992-03-18
CA2048904C (en) 1994-09-13
CA2048904A1 (en) 1992-03-13
EP0475025B1 (de) 1995-03-29
DE59105040D1 (de) 1995-05-04
US5254371A (en) 1993-10-19
JPH04256849A (ja) 1992-09-11
ES2069784T3 (es) 1995-05-16
JP2509400B2 (ja) 1996-06-19

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