ES2069784T3 - Procedimiento para fabricar un sensor capacitivo de humedad. - Google Patents
Procedimiento para fabricar un sensor capacitivo de humedad.Info
- Publication number
- ES2069784T3 ES2069784T3 ES91112098T ES91112098T ES2069784T3 ES 2069784 T3 ES2069784 T3 ES 2069784T3 ES 91112098 T ES91112098 T ES 91112098T ES 91112098 T ES91112098 T ES 91112098T ES 2069784 T3 ES2069784 T3 ES 2069784T3
- Authority
- ES
- Spain
- Prior art keywords
- polymer layer
- sub
- electrode
- procedure
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
ESTE SENSOR SE FABRICA SIGUIENDO LOS PASOS SIGUIENTES, MEDIANTE LA TECNICA DE CAPAS FINAS COMPATIBLES: PRODUCCION DE UN ELECTRODO BASE ESTRUCTURADO 2 SOBRE UN VEHICULO DE SUSTANCIA AISLANTE (1), APLICACION DE UNA CAPA DE POLIMEROS (5) SENSIBLE A LA UNIDAD SOBRE EL ELECTRODO BASE CON UN ESPESOR IGUAL, DEJANDO LIBRES CAMPOS DE CONTACTO (3A, 3B), ACTIVACION DE LAS CONDICIONES DE LA SUPERFICIE DE LA CAPA DE POLIMERO (5), APLICACION Y SECADO POSTERIOR DE UNA DISPERNSION COLOIDAL DE PARICULAS SIO SUB 2 O AL SUB 2 O SUB 3 (6) DE UN TAMAÑO GRANULADO EN UNA CAPA FINA SOBRE LA CAPA DE POLIMERO (5), APLICACION DE UN ELECTRODO DE CUBRIMIENTO (7) SOBRE LA PARTICULA (6) QUE ESTA REPARTIDA POR IGUAL SOBRE LA CAPA DE POLIMEROS (5) DESPUES DEL SECADO DE LA DISPERSION Y SEPARACION DE LA PARTICULA (6) JUNTO CON LAS PARTES DEL ELECTRODO DE CUBRIMIENTO (7) QUE SE ENCUENTRAN SOBRE ELLA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90810689 | 1990-09-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2069784T3 true ES2069784T3 (es) | 1995-05-16 |
Family
ID=8205952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES91112098T Expired - Lifetime ES2069784T3 (es) | 1990-09-12 | 1991-07-19 | Procedimiento para fabricar un sensor capacitivo de humedad. |
Country Status (7)
Country | Link |
---|---|
US (1) | US5254371A (es) |
EP (1) | EP0475025B1 (es) |
JP (1) | JP2509400B2 (es) |
CA (1) | CA2048904C (es) |
DE (1) | DE59105040D1 (es) |
DK (1) | DK0475025T3 (es) |
ES (1) | ES2069784T3 (es) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4427627C2 (de) * | 1994-08-04 | 1999-03-11 | Leybold Ag | Regensensor |
DE19917717C2 (de) * | 1999-04-20 | 2002-10-17 | Joerg Mueller | Kapazitiver Feuchtesensor |
US6580600B2 (en) * | 2001-02-20 | 2003-06-17 | Nippon Soken, Inc. | Capacitance type humidity sensor and manufacturing method of the same |
JP3855950B2 (ja) * | 2003-03-19 | 2006-12-13 | 株式会社デンソー | 容量式湿度センサ |
JP4609173B2 (ja) * | 2005-04-22 | 2011-01-12 | 株式会社デンソー | 容量式湿度センサおよびその製造方法 |
CN103069269B (zh) | 2010-06-15 | 2016-08-03 | 3M创新有限公司 | 可变电容传感器及其制造方法 |
CN102967634A (zh) * | 2012-12-04 | 2013-03-13 | 中国科学院合肥物质科学研究院 | 基于阳极氧化铝薄膜共平面电极结构的电容湿敏传感器及其制备方法 |
JP6515683B2 (ja) * | 2015-05-29 | 2019-05-22 | 富士通株式会社 | 測定装置および測定システム |
US11815504B2 (en) * | 2016-07-11 | 2023-11-14 | Quipip, Llc | Sensor device, and systems and methods for obtaining measurements of selected characteristics of a concrete mixture |
CN115266849A (zh) * | 2016-09-30 | 2022-11-01 | 美蓓亚三美株式会社 | 湿度传感器 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3024297C2 (de) * | 1980-06-27 | 1985-08-14 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Kapazitiver Feuchtigkeitsfühler und Verfahren zum Herstellen seiner feuchtigkeitsempfindlichen Schicht |
FR2486656A1 (fr) * | 1980-07-09 | 1982-01-15 | Commissariat Energie Atomique | Hygrometre capacitif |
DE3151630C2 (de) * | 1981-12-28 | 1986-07-03 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Feuchtigkeitsfühler und Verfahren zu seiner Herstellung |
JPS5991355A (ja) * | 1982-11-16 | 1984-05-26 | Murata Mfg Co Ltd | 湿度センサ |
DE3313150C1 (de) * | 1983-04-12 | 1984-10-04 | Endress U. Hauser Gmbh U. Co, 7867 Maulburg | Duennschicht-Feuchtsensor zur Messung der absoluten Feuchte und Verfahren zu seiner Herstellung |
US4761710A (en) * | 1987-06-23 | 1988-08-02 | Industrial Technology Research Institute | Polyimide capacitive humidity sensing element |
-
1991
- 1991-07-19 ES ES91112098T patent/ES2069784T3/es not_active Expired - Lifetime
- 1991-07-19 EP EP91112098A patent/EP0475025B1/de not_active Expired - Lifetime
- 1991-07-19 DE DE59105040T patent/DE59105040D1/de not_active Expired - Fee Related
- 1991-07-19 DK DK91112098.8T patent/DK0475025T3/da active
- 1991-08-09 CA CA002048904A patent/CA2048904C/en not_active Expired - Fee Related
- 1991-08-28 US US07/751,169 patent/US5254371A/en not_active Expired - Fee Related
- 1991-09-11 JP JP3231390A patent/JP2509400B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0475025A1 (de) | 1992-03-18 |
CA2048904C (en) | 1994-09-13 |
CA2048904A1 (en) | 1992-03-13 |
EP0475025B1 (de) | 1995-03-29 |
DK0475025T3 (da) | 1995-06-19 |
DE59105040D1 (de) | 1995-05-04 |
US5254371A (en) | 1993-10-19 |
JPH04256849A (ja) | 1992-09-11 |
JP2509400B2 (ja) | 1996-06-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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