BR0300955A - Sensor de pressão do tipo capacitivo e sistema sensor de pressão - Google Patents

Sensor de pressão do tipo capacitivo e sistema sensor de pressão

Info

Publication number
BR0300955A
BR0300955A BR0300955-6A BR0300955A BR0300955A BR 0300955 A BR0300955 A BR 0300955A BR 0300955 A BR0300955 A BR 0300955A BR 0300955 A BR0300955 A BR 0300955A
Authority
BR
Brazil
Prior art keywords
pressure sensor
capacitive type
type pressure
sensor system
electrode
Prior art date
Application number
BR0300955-6A
Other languages
English (en)
Inventor
Henrik Jakobsen
Original Assignee
Sensonor Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensonor Asa filed Critical Sensonor Asa
Publication of BR0300955A publication Critical patent/BR0300955A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/069—Protection against electromagnetic or electrostatic interferences

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

"SENSOR DE PRESSãO DO TIPO CAPACITIVO E SISTEMA SENSOR DE PRESSãO". Um sensor de pressão do tipo capacitivo compreendendo uma placa de vidro tendo um eletrodo sobre ela formado. Um diafragma é formado de um material semicondutor e ligado com o substrato de vidro para definir uma cavidade fechada contendo pelo menos uma parte do eletrodo, para desse modo definir um elemento capacitivo, através do qual, em uso, um sinal elétrico pode ser passado para determinar uma capacitância do mesmo que é indicativa da pressão a ser determinada.
BR0300955-6A 2002-05-01 2003-04-11 Sensor de pressão do tipo capacitivo e sistema sensor de pressão BR0300955A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02253102.4A EP1359402B1 (en) 2002-05-01 2002-05-01 Pressure sensor

Publications (1)

Publication Number Publication Date
BR0300955A true BR0300955A (pt) 2004-08-10

Family

ID=28799736

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0300955-6A BR0300955A (pt) 2002-05-01 2003-04-11 Sensor de pressão do tipo capacitivo e sistema sensor de pressão

Country Status (6)

Country Link
US (1) US6874367B2 (pt)
EP (1) EP1359402B1 (pt)
JP (1) JP2004132947A (pt)
KR (1) KR20030086228A (pt)
CN (1) CN1279340C (pt)
BR (1) BR0300955A (pt)

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US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
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US9267857B2 (en) * 2014-01-07 2016-02-23 Honeywell International Inc. Pressure sensor having a bossed diaphragm
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Also Published As

Publication number Publication date
JP2004132947A (ja) 2004-04-30
US6874367B2 (en) 2005-04-05
CN1455234A (zh) 2003-11-12
KR20030086228A (ko) 2003-11-07
EP1359402B1 (en) 2014-10-01
US20030205090A1 (en) 2003-11-06
CN1279340C (zh) 2006-10-11
EP1359402A1 (en) 2003-11-05

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Legal Events

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B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]