BR0300955A - Sensor de pressão do tipo capacitivo e sistema sensor de pressão - Google Patents

Sensor de pressão do tipo capacitivo e sistema sensor de pressão

Info

Publication number
BR0300955A
BR0300955A BR0300955-6A BR0300955A BR0300955A BR 0300955 A BR0300955 A BR 0300955A BR 0300955 A BR0300955 A BR 0300955A BR 0300955 A BR0300955 A BR 0300955A
Authority
BR
Brazil
Prior art keywords
pressure sensor
capacitive type
type pressure
sensor system
electrode
Prior art date
Application number
BR0300955-6A
Other languages
English (en)
Inventor
Henrik Jakobsen
Original Assignee
Sensonor Asa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sensonor Asa filed Critical Sensonor Asa
Publication of BR0300955A publication Critical patent/BR0300955A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/069—Protection against electromagnetic or electrostatic interferences

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

"SENSOR DE PRESSãO DO TIPO CAPACITIVO E SISTEMA SENSOR DE PRESSãO". Um sensor de pressão do tipo capacitivo compreendendo uma placa de vidro tendo um eletrodo sobre ela formado. Um diafragma é formado de um material semicondutor e ligado com o substrato de vidro para definir uma cavidade fechada contendo pelo menos uma parte do eletrodo, para desse modo definir um elemento capacitivo, através do qual, em uso, um sinal elétrico pode ser passado para determinar uma capacitância do mesmo que é indicativa da pressão a ser determinada.
BR0300955-6A 2002-05-01 2003-04-11 Sensor de pressão do tipo capacitivo e sistema sensor de pressão BR0300955A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP02253102.4A EP1359402B1 (en) 2002-05-01 2002-05-01 Pressure sensor

Publications (1)

Publication Number Publication Date
BR0300955A true BR0300955A (pt) 2004-08-10

Family

ID=28799736

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0300955-6A BR0300955A (pt) 2002-05-01 2003-04-11 Sensor de pressão do tipo capacitivo e sistema sensor de pressão

Country Status (6)

Country Link
US (1) US6874367B2 (pt)
EP (1) EP1359402B1 (pt)
JP (1) JP2004132947A (pt)
KR (1) KR20030086228A (pt)
CN (1) CN1279340C (pt)
BR (1) BR0300955A (pt)

Families Citing this family (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7111518B1 (en) * 2003-09-19 2006-09-26 Silicon Microstructures, Inc. Extremely low cost pressure sensor realized using deep reactive ion etching
US7096738B2 (en) * 2004-03-18 2006-08-29 Rosemount Inc. In-line annular seal-based pressure device
US7028552B2 (en) * 2004-05-17 2006-04-18 Kavlico Corporation Reliable piezo-resistive pressure sensor
US6952955B1 (en) 2004-07-28 2005-10-11 Lear Corporation Adjustable mounting of tire monitoring assembly
US6904795B1 (en) 2004-09-14 2005-06-14 Lear Corporation Sealed mounting of tire monitoring assembly
US6923069B1 (en) 2004-10-18 2005-08-02 Honeywell International Inc. Top side reference cavity for absolute pressure sensor
US7346178B2 (en) * 2004-10-29 2008-03-18 Silicon Matrix Pte. Ltd. Backplateless silicon microphone
EP1707931B1 (en) * 2005-03-31 2013-03-27 STMicroelectronics Srl Analog data-input device provided with a microelectromechanical pressure sensor
US7622782B2 (en) 2005-08-24 2009-11-24 General Electric Company Pressure sensors and methods of making the same
EP1762925B1 (en) * 2005-09-09 2016-12-21 STMicroelectronics Srl Analog input device with integrated pressure sensor and electronic apparatus equipped with said input device.
EP1811666A1 (en) * 2006-01-19 2007-07-25 3M Innovative Properties Company Proximity sensor and method for manufacturing the same
US7487681B1 (en) * 2006-08-06 2009-02-10 Silicon Microstructures Inc. Pressure sensor adjustment using backside mask
KR101004574B1 (ko) 2006-09-06 2010-12-30 히타치 긴조쿠 가부시키가이샤 반도체 센서 장치 및 그 제조 방법
US7543604B2 (en) * 2006-09-11 2009-06-09 Honeywell International Inc. Control valve
US7644731B2 (en) 2006-11-30 2010-01-12 Honeywell International Inc. Gas valve with resilient seat
CN101620022B (zh) * 2008-07-01 2011-12-21 欣兴电子股份有限公司 压力感测元件封装及其制作方法
US7793550B2 (en) 2008-08-25 2010-09-14 Infineon Technologies Ag Sensor device including two sensors embedded in a mold material
US8358047B2 (en) * 2008-09-29 2013-01-22 Xerox Corporation Buried traces for sealed electrostatic membrane actuators or sensors
US7902851B2 (en) * 2009-06-10 2011-03-08 Medtronic, Inc. Hermeticity testing
US8172760B2 (en) 2009-06-18 2012-05-08 Medtronic, Inc. Medical device encapsulated within bonded dies
US11169010B2 (en) * 2009-07-27 2021-11-09 Integra Lifesciences Switzerland Sàrl Method for the calibration of an implantable sensor
CN101661012B (zh) * 2009-08-11 2013-03-13 南京理工大学 用于生化检测的微薄膜电容式表面应力传感器及其制作方法
US8393222B2 (en) 2010-02-27 2013-03-12 Codman Neuro Sciences Sárl Apparatus and method for minimizing drift of a piezo-resistive pressure sensor due to progressive release of mechanical stress over time
US8490495B2 (en) * 2010-05-05 2013-07-23 Consensic, Inc. Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
DE102010038534A1 (de) * 2010-07-28 2012-02-02 Robert Bosch Gmbh Sensorelement zur kapazitiven Differenzdruckmessung
US8666505B2 (en) 2010-10-26 2014-03-04 Medtronic, Inc. Wafer-scale package including power source
US8424388B2 (en) 2011-01-28 2013-04-23 Medtronic, Inc. Implantable capacitive pressure sensor apparatus and methods regarding same
US8590387B2 (en) 2011-03-31 2013-11-26 DePuy Synthes Products, LLC Absolute capacitive micro pressure sensor
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9219020B2 (en) * 2012-03-08 2015-12-22 Infineon Technologies Ag Semiconductor device, wafer assembly and methods of manufacturing wafer assemblies and semiconductor devices
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9366593B2 (en) * 2013-09-27 2016-06-14 Infineon Technologies Ag Pressure sensor package with integrated sealing
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
CN103606565B (zh) * 2013-11-27 2016-05-11 苏州科技学院 压力传感器敏感元件的制造工艺
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9267857B2 (en) * 2014-01-07 2016-02-23 Honeywell International Inc. Pressure sensor having a bossed diaphragm
JP6331447B2 (ja) * 2014-02-14 2018-05-30 オムロン株式会社 静電容量型圧力センサ及び入力装置
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
US10549982B2 (en) 2016-02-15 2020-02-04 Stmicroelectronics S.R.L. Pressure sensor encapsulated in elastomeric material, and system including the pressure sensor
US10221062B2 (en) * 2016-10-03 2019-03-05 Continental Automotive Systems, Inc. Cavity with silicon on insulator MEMS pressure sensing device with an extended shallow cross-shaped cavity
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
CN107290084B (zh) * 2017-06-28 2019-08-30 京东方科技集团股份有限公司 一种压力传感器及其制作方法、电子器件
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4426673A (en) * 1976-03-12 1984-01-17 Kavlico Corporation Capacitive pressure transducer and method of making same
US4388668A (en) * 1976-03-12 1983-06-14 Kaylico Corporation Capacitive pressure transducer
US4390925A (en) * 1981-08-26 1983-06-28 Leeds & Northrup Company Multiple-cavity variable capacitance pressure transducer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
US5113868A (en) * 1987-06-01 1992-05-19 The Regents Of The University Of Michigan Ultraminiature pressure sensor with addressable read-out circuit
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
US5174156A (en) * 1990-07-27 1992-12-29 Honeywell Inc. Pressure transducer with reduced offset signal
DE4207952C1 (en) * 1992-03-10 1993-04-15 Mannesmann Ag, 4000 Duesseldorf, De Capacitative differential pressure sensor for simple mfr. - comprises silicon diaphragm with edges having thinned areas, leaving central area, pressure input channels aligned with thickened edge region, and flat recesses
JPH0666658A (ja) * 1992-08-15 1994-03-11 Stec Kk 静電容量型圧力センサ
JPH07167725A (ja) * 1993-12-14 1995-07-04 Yazaki Corp 静電容量型圧力センサとその製造方法
WO1996013705A1 (de) * 1994-10-29 1996-05-09 Joshua Lanter Verfahren zum herstellen von durchführungen elektrischer leitungen durch gasdichte verbindungen zwischen glas und silizium o.dgl. und von gasdichten durchführungen durch solche verbindungen und von drucksensoren mit solchen durchführungen
FI100918B (fi) * 1995-02-17 1998-03-13 Vaisala Oy Pintamikromekaaninen, symmetrinen paine-eroanturi
JP3107516B2 (ja) * 1996-05-01 2000-11-13 株式会社日立製作所 複合センサ
US5792958A (en) * 1997-01-21 1998-08-11 Honeywell Inc. Pressure sensor with a compressible insert to prevent damage from freezing
JP3299715B2 (ja) * 1998-04-01 2002-07-08 長野計器株式会社 チップの電位取出構造および製造方法
US6109113A (en) * 1998-06-11 2000-08-29 Delco Electronics Corp. Silicon micromachined capacitive pressure sensor and method of manufacture
AU5489799A (en) * 1998-08-19 2000-03-14 Wisconsin Alumni Research Foundation Sealed capacitive pressure sensors
KR100300527B1 (ko) * 1998-09-03 2001-10-27 윤덕용 밀봉형무선압력측정소자및그제조방법
DE19931773C1 (de) * 1999-07-08 2000-11-30 Daimler Chrysler Ag Mikromechanisches Bauelement mit Kontaktdurchführungen, sowie Verfahren zur Herstellung eines mikromechanischen Bauelements

Also Published As

Publication number Publication date
EP1359402A1 (en) 2003-11-05
JP2004132947A (ja) 2004-04-30
EP1359402B1 (en) 2014-10-01
US20030205090A1 (en) 2003-11-06
US6874367B2 (en) 2005-04-05
CN1279340C (zh) 2006-10-11
CN1455234A (zh) 2003-11-12
KR20030086228A (ko) 2003-11-07

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Legal Events

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B11Y Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]