DE69127277D1 - Analoger abweichungssensor - Google Patents
Analoger abweichungssensorInfo
- Publication number
- DE69127277D1 DE69127277D1 DE69127277T DE69127277T DE69127277D1 DE 69127277 D1 DE69127277 D1 DE 69127277D1 DE 69127277 T DE69127277 T DE 69127277T DE 69127277 T DE69127277 T DE 69127277T DE 69127277 D1 DE69127277 D1 DE 69127277D1
- Authority
- DE
- Germany
- Prior art keywords
- analogue
- deviation sensor
- deviation
- sensor
- analogue deviation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/004—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points
- G01B7/008—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring coordinates of points using coordinate measuring machines
- G01B7/012—Contact-making feeler heads therefor
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9001064A SE465981B (sv) | 1990-03-23 | 1990-03-23 | Analog foerskjutningssensor |
SE9001066A SE465845B (sv) | 1990-03-23 | 1990-03-23 | Maetarrangemang foer optisk och mekanisk uppmaetning av ett maetobjekt |
SE9001065A SE465844B (sv) | 1990-03-23 | 1990-03-23 | Tillbehoer till en foerskjutningssensor |
PCT/SE1991/000224 WO1991014923A1 (en) | 1990-03-23 | 1991-03-22 | Analogue displacement sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69127277D1 true DE69127277D1 (de) | 1997-09-18 |
DE69127277T2 DE69127277T2 (de) | 1998-01-29 |
Family
ID=27355562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69127277T Expired - Fee Related DE69127277T2 (de) | 1990-03-23 | 1991-03-22 | Analoger abweichungssensor |
Country Status (5)
Country | Link |
---|---|
US (1) | US5326982A (de) |
EP (1) | EP0521092B1 (de) |
JP (1) | JPH05505240A (de) |
DE (1) | DE69127277T2 (de) |
WO (1) | WO1991014923A1 (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1258132B (it) * | 1992-12-24 | 1996-02-20 | Dispositivo tastatore, particolarmente per macchine a copiare. | |
DE4325744C1 (de) * | 1993-07-31 | 1994-12-15 | Heidenhain Gmbh Dr Johannes | Mehrkoordinaten-Tastkopf |
DE4325743C1 (de) * | 1993-07-31 | 1994-09-08 | Heidenhain Gmbh Dr Johannes | Mehrkoordinaten-Tastkopf |
US5786698A (en) * | 1996-03-07 | 1998-07-28 | Ade Corporation | Transducer Bootstrapping apparatus |
DE10009168A1 (de) * | 2000-02-26 | 2001-09-13 | Bosch Gmbh Robert | Messvorrichtung und Verfahren zur Erfassung einer Kraft |
DE10028671B4 (de) * | 2000-03-29 | 2006-02-02 | Datron-Electronic Gmbh | Werkzeugmaschine |
US6476621B1 (en) | 2001-06-29 | 2002-11-05 | Ade Corporation | Self-bootstrapping transducer interface |
DE10348887A1 (de) * | 2002-10-23 | 2004-05-13 | Carl Zeiss | Tastkopf für ein Koordinatenmessgerät |
JP2006504953A (ja) * | 2002-10-29 | 2006-02-09 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 振動減衰システムを備えた座標測定装置 |
DE502006008214D1 (de) * | 2005-07-08 | 2010-12-16 | Heidenhain Gmbh Dr Johannes | Tastkopf |
DE102005054593B4 (de) * | 2005-11-14 | 2018-04-26 | Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg | Messonde zur Messung der Dicke dünner Schichten |
JP5162257B2 (ja) * | 2008-01-09 | 2013-03-13 | 株式会社ミツトヨ | 接触式一軸変位センサ |
JP5270384B2 (ja) * | 2009-01-15 | 2013-08-21 | 株式会社ミツトヨ | 直線案内機構および測定装置 |
US9671257B2 (en) * | 2011-07-08 | 2017-06-06 | Carl Zeiss Industrielle Messtechnik Gmbh | Correcting and/or preventing errors during the measurement of coordinates of a workpiece |
US9019511B2 (en) * | 2012-02-27 | 2015-04-28 | Quality Vision International, Inc. | Optical probe for vision measurements |
DE102012205599A1 (de) * | 2012-04-04 | 2013-10-10 | Carl Zeiss Industrielle Messtechnik Gmbh | Reduzieren von Fehlern einer Drehvorrichtung bei der Bestimmung von Koordinaten eines Werkstücks oder bei der Bearbeitung eines Werkstücks |
DE102013219389A1 (de) * | 2013-09-26 | 2015-03-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Reduzierung von Fehlern einer Drehvorrichtung, die bei der Bestimmung von Koordinaten eines Werkstücks oder bei der Bearbeitung eines Werkstücks verwendet wird |
JP6480169B2 (ja) * | 2014-12-04 | 2019-03-06 | 株式会社ミツトヨ | 三次元座標測定機用プローブヘッド |
EP3034991B2 (de) | 2014-12-19 | 2022-08-24 | Hexagon Technology Center GmbH | Verfahren und Vorrichtung zum aktiven Entgegenwirken gegen Verlagerungskräfte mit einer Tasteinheit |
US10866080B2 (en) | 2018-11-01 | 2020-12-15 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
US11740064B2 (en) | 2018-11-01 | 2023-08-29 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
US11543899B2 (en) | 2018-11-01 | 2023-01-03 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position and including coil misalignment compensation |
US11644298B2 (en) | 2018-11-01 | 2023-05-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
US10914570B2 (en) | 2018-11-01 | 2021-02-09 | Mitutoyo Corporation | Inductive position detection configuration for indicating a measurement device stylus position |
US11644299B2 (en) | 2020-12-31 | 2023-05-09 | Mitutoyo Corporation | Inductive position sensor signal gain control for coordinate measuring machine probe |
US11733021B2 (en) | 2021-12-22 | 2023-08-22 | Mitutoyo Corporation | Modular configuration for coordinate measuring machine probe |
US11713956B2 (en) | 2021-12-22 | 2023-08-01 | Mitutoyo Corporation | Shielding for sensor configuration and alignment of coordinate measuring machine probe |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU6536480A (en) * | 1979-12-20 | 1981-06-25 | Rca Corp. | Video disc stylus position sensor system |
DE3249101T1 (de) * | 1981-10-02 | 1983-12-01 | Pharos AB, 18181 Lidingö | Elektronische nivelliervorrichtung |
CA1276710C (en) * | 1983-11-30 | 1990-11-20 | Kazuo Asakawa | Robot force controlling system |
GB8625054D0 (en) * | 1986-10-20 | 1986-11-26 | Renishaw Plc | Optical measuring probe |
JPH057526Y2 (de) * | 1987-08-05 | 1993-02-25 | ||
GB8729632D0 (en) * | 1987-12-18 | 1988-02-03 | Renishaw Plc | Workpiece inspection |
DE3806686A1 (de) * | 1988-03-02 | 1989-09-14 | Wegu Messtechnik | Mehrkoordinatenmess- und -pruefeinrichtung |
EP0362336A4 (en) * | 1988-03-10 | 1991-07-24 | Nawsir Inc. | Contact sensing system |
GB8815984D0 (en) * | 1988-07-05 | 1988-08-10 | Univ Brunel | Probes |
JPH0789045B2 (ja) * | 1988-12-15 | 1995-09-27 | 富山県 | 三次元変位量測定器 |
-
1991
- 1991-03-22 EP EP91907121A patent/EP0521092B1/de not_active Expired - Lifetime
- 1991-03-22 WO PCT/SE1991/000224 patent/WO1991014923A1/en active IP Right Grant
- 1991-03-22 US US07/924,008 patent/US5326982A/en not_active Expired - Fee Related
- 1991-03-22 JP JP3506528A patent/JPH05505240A/ja active Pending
- 1991-03-22 DE DE69127277T patent/DE69127277T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5326982A (en) | 1994-07-05 |
EP0521092B1 (de) | 1997-08-13 |
WO1991014923A1 (en) | 1991-10-03 |
DE69127277T2 (de) | 1998-01-29 |
EP0521092A1 (de) | 1993-01-07 |
JPH05505240A (ja) | 1993-08-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |