US20030148024A1 - Low viscosity precursor compositons and methods for the depositon of conductive electronic features - Google Patents

Low viscosity precursor compositons and methods for the depositon of conductive electronic features Download PDF

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Publication number
US20030148024A1
US20030148024A1 US10/265,351 US26535102A US2003148024A1 US 20030148024 A1 US20030148024 A1 US 20030148024A1 US 26535102 A US26535102 A US 26535102A US 2003148024 A1 US2003148024 A1 US 2003148024A1
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US
United States
Prior art keywords
recited
precursor composition
greater
method
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/265,351
Inventor
Toivo Kodas
Mark Hampden-Smith
Karel Vanheusden
Hugh Denham
Aaron Stump
Allen Schult
Paolina Atanassova
Klaus Kunze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cabot Corp
Original Assignee
Cabot Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US32762001P priority Critical
Application filed by Cabot Corp filed Critical Cabot Corp
Priority to US10/265,351 priority patent/US20030148024A1/en
Assigned to SUPERIOR MICROPOWDERS LLC reassignment SUPERIOR MICROPOWDERS LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KUNZE, KLAUS
Assigned to SUPERIOR MICROPOWDERS LLC reassignment SUPERIOR MICROPOWDERS LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HAMPDEN-SMITH, MARK J., KODAS, TOIVO T., DENHAM, HUGH, ATANASSOVA, PAOLINA, SCHULT, ALLEN B., STUMP, AARON D., VANHEUSDEN, KAREL
Priority claimed from US10/417,417 external-priority patent/US7098163B2/en
Publication of US20030148024A1 publication Critical patent/US20030148024A1/en
Priority claimed from US11/176,640 external-priority patent/US20060001726A1/en
Assigned to CABOT CORPORATION reassignment CABOT CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUPERIOR MICROPOWDERS LLC
Application status is Abandoned legal-status Critical

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