JP2022191183A - カバー層を備えるセンサデバイス - Google Patents
カバー層を備えるセンサデバイス Download PDFInfo
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- JP2022191183A JP2022191183A JP2022094042A JP2022094042A JP2022191183A JP 2022191183 A JP2022191183 A JP 2022191183A JP 2022094042 A JP2022094042 A JP 2022094042A JP 2022094042 A JP2022094042 A JP 2022094042A JP 2022191183 A JP2022191183 A JP 2022191183A
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- 239000011148 porous material Substances 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000356 contaminant Substances 0.000 claims description 14
- 229910010293 ceramic material Inorganic materials 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- 239000006262 metallic foam Substances 0.000 claims description 4
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- 101000822695 Clostridium perfringens (strain 13 / Type A) Small, acid-soluble spore protein C1 Proteins 0.000 claims description 3
- 101000655262 Clostridium perfringens (strain 13 / Type A) Small, acid-soluble spore protein C2 Proteins 0.000 claims description 3
- 101000655256 Paraclostridium bifermentans Small, acid-soluble spore protein alpha Proteins 0.000 claims description 3
- 101000655264 Paraclostridium bifermentans Small, acid-soluble spore protein beta Proteins 0.000 claims description 3
- 239000003990 capacitor Substances 0.000 claims description 2
- 239000003344 environmental pollutant Substances 0.000 abstract 1
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- 239000010410 layer Substances 0.000 description 149
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
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- 230000015572 biosynthetic process Effects 0.000 description 5
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- 239000000428 dust Substances 0.000 description 4
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- -1 polls Substances 0.000 description 4
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
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- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
- B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
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- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
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- B01D71/0215—Silicon carbide; Silicon nitride; Silicon oxycarbide
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- F01N11/00—Monitoring or diagnostic devices for exhaust-gas treatment apparatus, e.g. for catalytic activity
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
- G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N27/226—Construction of measuring vessels; Electrodes therefor
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
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- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0283—Pore size
- B01D2325/02833—Pore size more than 10 and up to 100 nm
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01D2325/00—Details relating to properties of membranes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
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- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
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- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
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- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
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- F01N2530/00—Selection of materials for tubes, chambers or housings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/02—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being an exhaust gas sensor
- F01N2560/028—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being an exhaust gas sensor for measuring or detecting humidity or water
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/06—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being a temperature sensor
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
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- F01N2560/00—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics
- F01N2560/08—Exhaust systems with means for detecting or measuring exhaust gas components or characteristics the means being a pressure sensor
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- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measuring Fluid Pressure (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
カバー層は、機械的攻撃からの保護を提供することもできる。本発明によれば、カバー層は多孔質材料を含むか、もしくはそれから構成され、かつ/または、カバー層は複数の開口部(ビア)を含む。開口部は、カバー層の厚さ方向にカバー層を完全に貫通している。例えば、開口部は厚さ方向に平行に、または厚さ方向に対してある有限角(有限の角度、finite angle)で延びている。開口部は、カバー層の形成後にカバー層に形成されてよい。
多孔質カバー層のための他の適切な材料には、上記の多孔率および/または細孔の直径サイズを呈する固体発泡材料、例えば金属発泡体が含まれる。このような発泡材料は、耐久性および軽量性の両方に関して有利であり得る。
(半導体)ウエハを設けるステップと、
(例えば、連続検知層を形成し、これをパターニングすることによって)複数の検知層を、設けられたウエハ上に(over the provided wafer)形成するステップと、
(例えば、連続電極層を形成し、これをパターニングすることによって)検知電極をウエハ上におよび/またはウエハ内に(over and/or in the wafer)形成するステップと、
連続カバー層を複数の検知層の各々の上に形成するステップであって、連続カバー層は多孔質材料を含むか、もしくはそれから構成され、かつ/または、連続カバー層は複数の開口部を含む、ステップと、
ウエハをダイシングして、複数の中間センサデバイスを得るステップであって、中間センサデバイスの各々は、複数の検知層のうちの1つと、ダイシングによって連続カバー層から形成された個々のカバー層とを含む、ステップと
を含む方法を提供することによって対処される。
1、31、41 基板
2、32、42 検知層
3、33、43 検知電極
4、44 カバー層
5、45 電子機器/回路
6、46 はんだバンプ
30 ダイシング前ウエハ構成
34 連続カバー層
O 開口部
Claims (15)
- センサデバイス(10、40)であって、
基板(1、31、41)と、
前記基板(1、31、41)上に形成された検知層(2、32、42)と、
検知電極(3、33、43)と、
前記検知層(2、32、42)を汚染物質から保護するために前記検知層(2、32、42)を少なくとも部分的に被覆するカバー層(4、44)とを備え、
前記カバー層(4、44)は、多孔質材料を含むか、もしくはそれから構成され、かつ/または、前記カバー層(4、44)は複数の開口部(O)を含む、センサデバイス(10、40)。
- 前記カバー層(4、44)は、5%超または50%超、特に60%または70%超の多孔率を有する多孔質材料を含むか、またはそれから構成される、請求項1に記載のセンサデバイス(10、40)。
- 前記多孔質材料は、平均直径が5nm~200μm、特に100nm~300nmの細孔を含む、請求項2に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、多孔質セラミック材料、特に炭化ケイ素を含むか、またはそれから構成される、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、多孔質固体発泡材料、特に金属発泡体を含むか、またはそれから構成される、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、非多孔質材料を含むか、またはそれから構成され、かつ平均直径が5nm~200μm、特に100nm~300nmの複数の開口部(O)を含む、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、側壁が金属材料で被覆された複数の開口部(O)を含む、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)の厚さは、100nm~1000μmまたは10000μm、特に200μm~600μmである、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、前記検知層(2、32、42)の周りに少なくとも部分的にキャビティを形成する、請求項1に記載のセンサデバイス(10、40)。
- 前記カバー層(4、44)は、前記基板(1、31、41)に部分的に取り付けられまたは形成されている、請求項1に記載のセンサデバイス(10、40)。
- 前記検知層(2、32、42)は、特に窒化物材料、特にSi3N4から形成されるか、またはそれを含む無機誘電体層である、請求項1に記載のセンサデバイス(10、40)。
- 前記基板(1、31、41)は、半導体バルク基板または半導体マイクロ回路、特にASICまたはASSPである、請求項1に記載のセンサデバイス(10、40)。
- 前記センサデバイス(10、40)は、温度、圧力、相対湿度もしくは絶対湿度、またはそれらの組合せを検知するように構成されている、請求項1に記載のセンサデバイス(10、40)。
- 前記検知層(2、32、42)の電気抵抗、前記検知層(2、32、42)の電気伝導率、前記検知層(2、32、42)のインピーダンス、前記検知電極(3、33、43)および前記検知層(2、32、42)によって形成されるキャパシタの容量、ならびに前記検知層(2、32、42)を流れる電流のうちの少なくとも1つを測定するように構成されている検知回路をさらに備える、請求項1に記載のセンサデバイス(10、40)。
- 複数のセンサデバイス(10、40)を製造する方法であって、
ウエハを設けるステップと、
複数の検知層(2、32、42)を、設けられた前記ウエハ上に形成するステップと、
検知電極(3、33、43)を前記ウエハ上におよび/または前記ウエハ内に形成するステップと、
連続カバー層(34)を前記複数の検知層(2、32、42)の各々の上に形成するステップであって、前記連続カバー層(34)は多孔質材料を含むか、もしくはそれから構成され、かつ/または、前記連続カバー層(34)は複数の開口部を含む、ステップと、
前記ウエハをダイシングして、複数の中間センサデバイス(10、40)を得るステップであって、前記中間センサデバイス(10、40)の各々は、前記複数の検知層(2、32、42)のうちの1つと、前記ダイシングによって前記連続カバー層(34)から形成された個々のカバー層(4、44)とを含む、ステップと
を含む、方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP21305817.5 | 2021-06-15 | ||
EP21305817.5A EP4105650A1 (en) | 2021-06-15 | 2021-06-15 | Sensor device with cover layer |
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JP2012083210A (ja) * | 2010-10-12 | 2012-04-26 | Denso Corp | 粒子状物質検出センサ |
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US10473615B2 (en) * | 2014-10-24 | 2019-11-12 | Amotech Co., Ltd. | Porous protective layer for gas sensor, method for producing same, and gas sensor comprising same |
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- 2021-06-15 EP EP21305817.5A patent/EP4105650A1/en active Pending
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- 2022-06-10 JP JP2022094042A patent/JP2022191183A/ja active Pending
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- 2022-06-15 US US17/840,955 patent/US20220396473A1/en active Pending
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JP2005017285A (ja) * | 2003-05-30 | 2005-01-20 | Ngk Spark Plug Co Ltd | 湿度センサ及び湿度センサの使用方法 |
JP2005069719A (ja) * | 2003-08-27 | 2005-03-17 | Ngk Spark Plug Co Ltd | 湿度センサ |
JP2015045546A (ja) * | 2013-08-28 | 2015-03-12 | 富士電機株式会社 | ガス検知装置及びガス検知方法 |
JP2015102372A (ja) * | 2013-11-22 | 2015-06-04 | 株式会社デンソー | 湿度センサおよびその製造方法 |
JP2015161600A (ja) * | 2014-02-27 | 2015-09-07 | 株式会社デンソー | 湿度センサ |
JP2016061593A (ja) * | 2014-09-16 | 2016-04-25 | ヤマハファインテック株式会社 | 接触燃焼式ガスセンサ |
JP2017219441A (ja) * | 2016-06-08 | 2017-12-14 | Nissha株式会社 | Memsガスセンサ、memsガスセンサ実装体、memsガスセンサ・パッケージ、memsガスセンサ組立体、及びmemsガスセンサの製造方法 |
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US20220396473A1 (en) | 2022-12-15 |
EP4105650A1 (en) | 2022-12-21 |
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