CN103038593B - 多室型热处理装置 - Google Patents

多室型热处理装置 Download PDF

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Publication number
CN103038593B
CN103038593B CN201180031206.5A CN201180031206A CN103038593B CN 103038593 B CN103038593 B CN 103038593B CN 201180031206 A CN201180031206 A CN 201180031206A CN 103038593 B CN103038593 B CN 103038593B
Authority
CN
China
Prior art keywords
chamber
cooling
heat treatment
processed
treatment apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180031206.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN103038593A (zh
Inventor
胜俣和彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
IHI Machinery and Furnace Co Ltd
Original Assignee
IHI Corp
IHI Machinery and Furnace Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IHI Corp, IHI Machinery and Furnace Co Ltd filed Critical IHI Corp
Publication of CN103038593A publication Critical patent/CN103038593A/zh
Application granted granted Critical
Publication of CN103038593B publication Critical patent/CN103038593B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K10/00—Welding or cutting by means of a plasma
    • B23K10/02—Plasma welding
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • C21D1/773—Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material under reduced pressure or vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any of groups F27B1/00 - F27B15/00
    • F27B17/0016—Chamber type furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B19/00—Combinations of different kinds of furnaces that are not all covered by any single one of main groups F27B1/00 - F27B17/00
    • F27B19/04—Combinations of different kinds of furnaces that are not all covered by any single one of main groups F27B1/00 - F27B17/00 arranged for associated working
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
    • F27B9/10—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated heated by hot air or gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases or liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00—Cooling of furnaces or of charges therein

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Combustion & Propulsion (AREA)
  • Tunnel Furnaces (AREA)
  • Heat Treatments In General, Especially Conveying And Cooling (AREA)
  • Furnace Details (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Solid Materials (AREA)
CN201180031206.5A 2010-07-02 2011-07-01 多室型热处理装置 Expired - Fee Related CN103038593B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010151563A JP5658928B2 (ja) 2010-07-02 2010-07-02 多室型熱処理装置
JP2010-151563 2010-07-02
PCT/JP2011/065179 WO2012002532A1 (ja) 2010-07-02 2011-07-01 多室型熱処理装置

Publications (2)

Publication Number Publication Date
CN103038593A CN103038593A (zh) 2013-04-10
CN103038593B true CN103038593B (zh) 2015-09-16

Family

ID=45402234

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180031206.5A Expired - Fee Related CN103038593B (zh) 2010-07-02 2011-07-01 多室型热处理装置

Country Status (6)

Country Link
US (1) US20130153547A1 (enExample)
EP (1) EP2589910A4 (enExample)
JP (1) JP5658928B2 (enExample)
KR (1) KR20130045343A (enExample)
CN (1) CN103038593B (enExample)
WO (1) WO2012002532A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014193388A1 (en) * 2013-05-30 2014-12-04 Johns Manville Submerged combustion glass melting systems and methods of use
JP6515370B2 (ja) * 2014-05-29 2019-05-22 株式会社Ihi 冷却装置及び多室型熱処理装置
JP6418830B2 (ja) 2014-07-25 2018-11-07 株式会社Ihi 冷却装置及び多室型熱処理装置
JP6418832B2 (ja) 2014-07-28 2018-11-07 株式会社Ihi 熱処理装置用の搬送装置及び熱処理装置
JP6297471B2 (ja) * 2014-11-10 2018-03-20 中外炉工業株式会社 熱処理設備
DE112015005248B4 (de) 2014-11-20 2019-07-11 Ihi Corporation Wärmebehandlungsvorrichtung und kühlvorrichtung
JP6596703B2 (ja) * 2015-03-04 2019-10-30 株式会社Ｉｈｉ 多室型熱処理装置
DE112016002361T5 (de) 2015-05-26 2018-02-22 Ihi Corporation Wärmebehandlungsvorrichtung
JP6552972B2 (ja) * 2016-01-06 2019-07-31 日本エア・リキード株式会社 熱処理装置、熱処理装置を備える熱処理システムおよびワークの製造方法
JP6721466B2 (ja) * 2016-09-12 2020-07-15 株式会社Ihi 熱処理装置
FR3073937B1 (fr) * 2017-11-21 2020-08-14 Ceritherm Installation de traitement thermique pour la fabrication de produits industriels.
CN115096076B (zh) * 2021-04-07 2025-03-11 江苏天海特种装备有限公司 乙炔瓶填料蒸养固化用隧道式推杆加热炉的连续固化工艺
CN114197056B (zh) * 2022-01-14 2024-07-09 浙江大学杭州国际科创中心 一种半导体材料退火装置及退火方法
PL448051A1 (pl) * 2024-03-20 2025-09-22 Seco/Warwick Spółka Akcyjna Piec próżniowy z chłodzeniem w wodzie

Citations (3)

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CN1193809A (zh) * 1993-11-05 1998-09-23 株式会社半导体能源研究所 一种制造薄膜晶体管和电子器件的方法
JP2003114091A (ja) * 2001-10-03 2003-04-18 Daido Steel Co Ltd 雰囲気熱処理炉とそのシーズニング方法
CN101619927A (zh) * 2008-07-01 2010-01-06 株式会社Ihi 多室型热处理炉

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US3886760A (en) * 1970-09-03 1975-06-03 Stephen Wyden Method of indirect heat exchange
NO135672C (enExample) * 1972-11-21 1977-05-11 Prolizenz Ag
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JP3310997B2 (ja) * 1991-11-28 2002-08-05 株式会社日立製作所 連続処理装置
JP3490791B2 (ja) * 1994-12-20 2004-01-26 光洋サーモシステム株式会社 多室熱処理炉
US6059507A (en) * 1997-04-21 2000-05-09 Brooks Automation, Inc. Substrate processing apparatus with small batch load lock
JPH11153386A (ja) * 1997-11-25 1999-06-08 Ishikawajima Harima Heavy Ind Co Ltd 多室式マルチ冷却真空炉
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JP2010038531A (ja) * 2008-07-10 2010-02-18 Ihi Corp 熱処理装置
US20100024847A1 (en) * 2008-08-01 2010-02-04 Breese Ronald G Semiconductor wafer cleaning with dilute acids
JP5203986B2 (ja) * 2009-01-19 2013-06-05 東京エレクトロン株式会社 フォーカスリングの加熱方法、プラズマエッチング方法、プラズマエッチング装置及びコンピュータ記憶媒体

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CN1193809A (zh) * 1993-11-05 1998-09-23 株式会社半导体能源研究所 一种制造薄膜晶体管和电子器件的方法
JP2003114091A (ja) * 2001-10-03 2003-04-18 Daido Steel Co Ltd 雰囲気熱処理炉とそのシーズニング方法
CN101619927A (zh) * 2008-07-01 2010-01-06 株式会社Ihi 多室型热处理炉

Also Published As

Publication number Publication date
US20130153547A1 (en) 2013-06-20
JP5658928B2 (ja) 2015-01-28
KR20130045343A (ko) 2013-05-03
CN103038593A (zh) 2013-04-10
EP2589910A4 (en) 2016-08-24
JP2012013341A (ja) 2012-01-19
EP2589910A1 (en) 2013-05-08
WO2012002532A1 (ja) 2012-01-05

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20150916