CN1029802C - 制造包括滤色器的器件的方法 - Google Patents

制造包括滤色器的器件的方法 Download PDF

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CN1029802C
CN1029802C CN91101089A CN91101089A CN1029802C CN 1029802 C CN1029802 C CN 1029802C CN 91101089 A CN91101089 A CN 91101089A CN 91101089 A CN91101089 A CN 91101089A CN 1029802 C CN1029802 C CN 1029802C
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杰拉达斯·C·M·迪凯泽
安东尼厄斯·H·M·拉伊梅卡斯
皮特勒斯·E·M·巴尔图森
亨利卡斯·G·J·A·M·卢宾
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133345Insulating layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133519Overcoatings

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)

Abstract

滤色器(3)用的一种顶部被覆层,硬得足以承受隔片(13)的压力,其边缘(6)倾斜成一定的角度,从而使间隔范围能达到令人满意的程度,这种顶部被覆层可用柔性版压制法制取。

Description

本发明涉及一种制造衬底包括滤色器的器件的方法,该滤色器至少部分地覆有顶部被覆层。
上述滤色器可用于诸如液晶显示器之类的电光显示器件,但也可用于例如说电荷耦合器件中,供拾取图象等之用。这种滤色器通常包括彩色象素图形,但也可以包括所谓“黑阵列”。
本文开端所述的那种器件应用于例如美国专利4,744,637中所述的液晶显示器中。该专利描述了这样一种顶部被覆层,该顶部被覆层对紫外线不象迄今有的一般顶部被覆层那样敏感,而且其热膨胀系数达到这样的程度,使其在以后配备诸电极时几乎不会变得粗糙或呈波浪形。顶部被覆层包括SiO时能取得令人满意的效果,而采用自动排版用的丙烯酸类树脂时会变得非常粗糙。
特别是用在液晶显示器中时,这类顶部被覆层必须满足一系列要求。
例如,顶部被覆层应能经得起以后的一系列制造工序。举例说,如果下一步工序是形成象铟锡氧化物之类的透明导电通路,则这时顶部被覆层就既要能耐受所使用的蚀刻材料,又要使顶部被覆层和/或滤色器能在所采用的温度下不致形成波浪形。淀积铟锡氧化物的温度最好选取较高的温度(180℃-200℃),因为这使导电通路的最终电阻率最小。
此外,顶部被覆层最好不越出实际显示部分之外,因为衬底上的那个部位可能已有其它接线通路,例如芯片在玻璃上的接线。因此如 果能将顶部被覆层构成一定的图形有好处。但顶部被覆层不应突然中断,因为这样可能会使越出边缘的导电通路中的边缘区裂开。
此外,该顶部被覆层还应能经得起确定液晶层厚度的隔片在其上施加的印压。
本发明的目的之一是提供一种能尽可能令人满意地满足上述要求的顶部被覆层。
为达到此目的,本发明的器件具有这样的特征:顶部被覆层包括经固化的丙烯酸类树脂,并且它的至少一个边缘的厚度逐渐减小。
本发明是以这样的认识为基础的,即应用柔性版压制技术或例如模印技术可以形成一种可聚合树脂制成的硬质耐刮的顶部被覆层。
在这方面应该指出的是,从欧洲专利EP-A-0,266,218就可以了解到应用包括丙烯酸类树脂的顶部被覆层的情况。但在该专利中只提到热固性树脂,并没有谈到倾斜边缘。
顶部被覆层为例如环氧树脂和聚酰胺树脂时其图形能取得令人满意的效果,但由此形成的薄层软到这样的程度,以致它们可能会因隔片的压力而损伤,或者可能会受到一定程度的印压(这与所在的位置有关)从而使液晶层的厚度发生变化。此外,这种涂层对经受后面各工序,例如各电极形成时(温度,蚀刻液等)的能力往往差一些。
顶部被覆层的边缘最好以小于30度的坡度减小;在实际应用中,可以采用1至2度的坡度。
从整个制造过程来看,滤色器外的顶部被覆层,其倾斜角可局部变化,甚至可略反向延伸,这视衬底和工艺参数而定,但这个反向变化的坡度基本上总是在2度或2度以下的范围。
所述顶部被覆层是通过丙烯酸树脂的聚合制取的,其硬度最好至少为4H铅笔硬度。丙烯酸类树脂如:三羟甲基丙烷三丙烯酸酯、N-乙烯基吡咯烷酮、季戊四醇三丙烯酸脂或季戊四醇四丙烯酸脂的丙烯酸 类树脂可供此种用途。
设有顶部被覆层的衬底还可用于液晶显示器以外的电光显示器中。
本发明制造这种器件的方法具有这样的特征:将衬底清理干净之后,在滤色器的部位加顶部被覆层材料,在顶部被覆层上构图,然后用紫外线固化该顶部被覆层材料。
清理工序可以是用氧等离子体进行的处理,也可以是用紫外臭氧进行的处理。
被覆层材料可用柔性版压制法或模印技术进行构图。
材料经构图之后,搁置5至10分钟,然后进行固化;固化最好是在惰性气氛中进行。
现在参照实施例和附图更详细地说明本发明的上述和其它方面的内容。
图1示意示出了本发明的显示器的一部分。
从图1的示意图中可以看到,显示器1的一部分具有玻璃、石英或其它合适材料制成的第一支撑板2。用液晶技术中常用的方法在支撑板2上覆有滤色器3;在本实例中,滤色器3包括对应于各象素的色组4[红(r)、绿(g)、蓝(b)]。此外,滤色器也可包括所谓“黑阵列”。
滤色器3设有顶部被覆层5,按照本发明,顶部被覆层5由经聚合的丙烯酸类树脂构成,且其边缘区(区6)的厚度逐渐减小,例如取1至2度的坡度。后面将更详细地说明这种顶部被覆层的制造过程。
顶部被覆层5配备有金属化图形7,该图形由例如透明的铟锡氧化物(ITO)电极构成。在配备金属化图形之前先淀积一薄SiO层。在本发明的器件中,铟锡氧化物可以在较高的温度下淀积(且必要时退火处理)而不致使顶部被覆层5起波纹或粗糙。如此高的淀积温度使ITO电极电阻非常小。ITO层构图时可能采用的腐蚀液不侵蚀顶部被覆层5。
显示器还包括第二支撑板8,支撑板8上设有电极9;电极9是这样形成象素的:由电极9和金属化图形7构成纵横交叉的系统,系统中的各交叉口即形成象素(无源激励);或者由电极9构成图象电极,各图象电极则由开关元件、激励和数据线组成的系统(图中未示出)激励(有源激励);在后一种情况下,电极7可以取单个扁平结构。
必要时可设保护/定向层10的两个支撑板2与8之间有一液晶材料层11。两支撑板借助于密封边12和隔片13彼此以基本上不变的距离固定住。显示器1还可以按一般方式进而配备以偏振器-反射器等。
顶部被覆层在边缘区域(区域6)处厚度逐渐减小,从而可以在该区设金属化层7而不致冒因间隔范围不好而断裂的风险。
由于本发明的顶部被覆层5、6硬(因而耐刮),因而不怕隔片13区域处的该层印压。
顶部被覆层5、6可按下法制造。基底材料为例如玻璃板,玻璃板上设有滤色器4,且必要时还可在实际显示部分外设置所有其它金属化通路,例如在玻璃上的芯片组合件。为确保这些其它的金属化通路令人满意地接触,最好在顶部被覆层5、6上构图。
为使顶部被覆层令人满意地粘结,事先应通过例如短时的氧等离子体处理(10-20秒)将衬底2和滤色器3清理干净,但也可以通过紫外/臭氧处理(0.5-10分钟)进行。
然用柔性版压制法构制顶部被覆层的图形5。待压制的材料(在本实施例中为丙烯酸类树脂)经由具有待构制图形的橡皮版覆到玻璃板上。该丙烯酸类树脂(例如三羟基丙烷三丙烯酸酯)中单体和二聚物的比例应达到使材料具有适宜压制的正确粘度。为了可以采用柔性版压制法,不采用溶剂。但可以加入进一步压制处理用的可能有的辅助材料(表面活化剂,紫外引发剂等)。
也可以用印模代替橡皮版。
刚压制后的被覆层最大厚度为0.5-3微米。
接着将被覆层短时间(5至10分钟)放置,令其小幅度自由流动,于是就形成倾斜部分6。最后在无氧的情况下用紫外线固化顶部被覆层5、6。有氧存在会使被覆层5、6因聚合物聚合和交联的程度减小而变软,于是产生上述缺陷。如此得出的丙烯酸树脂在耐受以后的制造显示器工序方面(高温,压制,各种腐蚀液)令人满意。
当然,本发明并不局限于上述实例,对上述实例可以进行各种修改。举例说,在这种衬底上还可设置不是以液晶效应为基础的其它显示器,同时这种顶部被覆层也可用于其它滤色器中,例如电荷耦合器件。

Claims (4)

1、一种制造包括滤色器的器件的方法,用该方法给衬底配置所述滤色器,所述滤色器至少部分地覆有顶部被覆层,该被覆层包括被固化了的丙烯酸类树脂,其特征在于:在顶部被覆层被固化前,在其上进行构图;在构图与固化处理工序之间至少有5分钟的等待时间;及顶部被覆层是利用紫外线辐射在惰性气氛中进行的。
2、如权利要求1所述的方法,其特征在于:构图采用柔性版压制法或模印法。
3、如权利要求2所述的方法,其特征在于:该顶部覆盖层的材料是从包括三羟甲基丙烷三丙烯酸酯,N-乙烯基吡咯烷酮,季戊四醇三丙烯酸酯,季戊四醇四烯酸酯一组中选取的。
4、如权利要求1所述的方法,其中所述的器件构成一个电-光显示器件的第一支撑板,其特征在于:第一支撑板与第二支撑板以一定间隔离开;间隙中则填充以电-光介质,具体地说,填充以液晶材料。
CN91101089A 1990-02-19 1991-02-18 制造包括滤色器的器件的方法 Expired - Fee Related CN1029802C (zh)

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JP3022612B2 (ja) 2000-03-21
NL9000389A (nl) 1991-09-16
DE69121267D1 (de) 1996-09-19
JPH04214531A (ja) 1992-08-05
EP0448139A1 (en) 1991-09-25
CN1054138A (zh) 1991-08-28
KR100286064B1 (ko) 2001-04-16
EP0448139B1 (en) 1996-08-14
US5157527A (en) 1992-10-20
KR910015877A (ko) 1991-09-30
DE69121267T2 (de) 1997-03-06

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