CN102738383B - 机电变换器和光声装置 - Google Patents

机电变换器和光声装置 Download PDF

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Publication number
CN102738383B
CN102738383B CN201210102975.6A CN201210102975A CN102738383B CN 102738383 B CN102738383 B CN 102738383B CN 201210102975 A CN201210102975 A CN 201210102975A CN 102738383 B CN102738383 B CN 102738383B
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China
Prior art keywords
layer
stress relaxation
light reflection
electromechanical transducer
reflection layer
Prior art date
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CN201210102975.6A
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English (en)
Chinese (zh)
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CN102738383A (zh
Inventor
虎岛和敏
笠贯有二
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Canon Inc
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Canon Inc
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Application filed by Canon Inc filed Critical Canon Inc
Priority to CN201510245395.6A priority Critical patent/CN104977360B/zh
Publication of CN102738383A publication Critical patent/CN102738383A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
CN201210102975.6A 2011-04-14 2012-04-10 机电变换器和光声装置 Active CN102738383B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510245395.6A CN104977360B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011090123A JP5787586B2 (ja) 2011-04-14 2011-04-14 電気機械変換装置
JP2011-090123 2011-04-14

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201510245395.6A Division CN104977360B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置

Publications (2)

Publication Number Publication Date
CN102738383A CN102738383A (zh) 2012-10-17
CN102738383B true CN102738383B (zh) 2015-06-03

Family

ID=46084747

Family Applications (2)

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CN201510245395.6A Expired - Fee Related CN104977360B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置
CN201210102975.6A Active CN102738383B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置

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CN201510245395.6A Expired - Fee Related CN104977360B (zh) 2011-04-14 2012-04-10 机电变换器和光声装置

Country Status (4)

Country Link
US (1) US8767278B2 (enExample)
EP (1) EP2511702A3 (enExample)
JP (1) JP5787586B2 (enExample)
CN (2) CN104977360B (enExample)

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JP5511260B2 (ja) * 2009-08-19 2014-06-04 キヤノン株式会社 容量型電気機械変換装置、及びその感度調整方法
JP5812660B2 (ja) * 2011-04-19 2015-11-17 キヤノン株式会社 電気機械変換装置及びその製造方法
JP5943677B2 (ja) * 2012-03-31 2016-07-05 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
JP5986441B2 (ja) 2012-07-06 2016-09-06 キヤノン株式会社 静電容量型トランスデューサ
JP6029413B2 (ja) * 2012-10-12 2016-11-24 キヤノン株式会社 プローブ及び被検体情報取得装置
JP6359280B2 (ja) * 2013-02-28 2018-07-18 キヤノンメディカルシステムズ株式会社 医用音響カプラ
US9502023B2 (en) * 2013-03-15 2016-11-22 Fujifilm Sonosite, Inc. Acoustic lens for micromachined ultrasound transducers
JP6234073B2 (ja) * 2013-06-07 2017-11-22 キヤノン株式会社 静電容量型トランスデューサの駆動装置、及び被検体情報取得装置
JP6381195B2 (ja) 2013-10-22 2018-08-29 キヤノン株式会社 静電容量型トランスデューサ及びその作製方法
JP2015100472A (ja) 2013-11-22 2015-06-04 キヤノン株式会社 静電容量型トランスデューサの駆動方法および駆動装置
JP2015112326A (ja) * 2013-12-12 2015-06-22 キヤノン株式会社 プローブ、被検体情報取得装置
JP6278770B2 (ja) * 2014-03-19 2018-02-14 キヤノン株式会社 被検体情報取得装置
JP6399803B2 (ja) * 2014-05-14 2018-10-03 キヤノン株式会社 力覚センサおよび把持装置
CN103976743A (zh) * 2014-05-27 2014-08-13 江西科技师范大学 基于cMUT环形阵列的微型光声传感器
JP2016122759A (ja) * 2014-12-25 2016-07-07 キヤノン株式会社 貫通配線を有する電子デバイスの作製方法
JP6429711B2 (ja) 2015-03-31 2018-11-28 キヤノン株式会社 探触子、及びそれを用いた被検体情報取得装置
CN109171660A (zh) * 2018-10-09 2019-01-11 深圳先进技术研究院 光声成像探头及应用

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100038993A1 (en) * 2008-08-13 2010-02-18 Seiko Epson Corporation Surface acoustic wave element
CN102015127A (zh) * 2008-05-02 2011-04-13 佳能株式会社 电容型机电变换器的制造方法和电容型机电变换器

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DE69127379T2 (de) 1990-01-11 1998-03-19 Canon K.K., Tokio/Tokyo Mikrosonde, Herstellungsverfahren zur Herstellung derselben und Informations-Eingabe- und/oder Ausgabe-Gerät welches dieselbe verwendet
JP2884447B2 (ja) 1991-04-22 1999-04-19 キヤノン株式会社 カンチレバー型プローブ、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JP2923813B2 (ja) 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
JPH05282717A (ja) 1992-03-31 1993-10-29 Canon Inc 記録媒体の製造方法、及び記録媒体、及び情報処理装置
EP0658916B1 (en) 1993-11-09 1998-04-15 Canon Kabushiki Kaisha Image display apparatus
US20070127164A1 (en) * 2005-11-21 2007-06-07 Physical Logic Ag Nanoscale Sensor
CN101636112B (zh) 2007-03-20 2011-10-26 株式会社日立医药 超声波探头及其制造方法及超声波诊断装置
CN101969856B (zh) * 2007-09-17 2013-06-05 皇家飞利浦电子股份有限公司 预塌陷的电容微机械超声传感器的制造及其应用
US20090252977A1 (en) * 2008-04-07 2009-10-08 Canon Kabushiki Kaisha Multilayer film reflector
JP4900979B2 (ja) * 2008-08-27 2012-03-21 キヤノン株式会社 光音響装置および光音響波を受信するための探触子
JP5409251B2 (ja) * 2008-11-19 2014-02-05 キヤノン株式会社 電気機械変換装置およびその製造方法
JP5317826B2 (ja) * 2009-05-19 2013-10-16 キヤノン株式会社 容量型機械電気変換素子の製造方法
JP2011004790A (ja) 2009-06-23 2011-01-13 Canon Inc 光音響計測装置
JP5709368B2 (ja) 2009-11-04 2015-04-30 キヤノン株式会社 生体情報取得装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102015127A (zh) * 2008-05-02 2011-04-13 佳能株式会社 电容型机电变换器的制造方法和电容型机电变换器
US20100038993A1 (en) * 2008-08-13 2010-02-18 Seiko Epson Corporation Surface acoustic wave element

Also Published As

Publication number Publication date
CN104977360A (zh) 2015-10-14
US20120262770A1 (en) 2012-10-18
JP2012222785A (ja) 2012-11-12
JP5787586B2 (ja) 2015-09-30
EP2511702A3 (en) 2016-03-23
US8767278B2 (en) 2014-07-01
CN104977360B (zh) 2018-09-28
CN102738383A (zh) 2012-10-17
EP2511702A2 (en) 2012-10-17

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