CN102683298B - 无承载板的封装件及其制法 - Google Patents

无承载板的封装件及其制法 Download PDF

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CN102683298B
CN102683298B CN201110075806.3A CN201110075806A CN102683298B CN 102683298 B CN102683298 B CN 102683298B CN 201110075806 A CN201110075806 A CN 201110075806A CN 102683298 B CN102683298 B CN 102683298B
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insulating barrier
layer
support plate
ground plane
line
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CN102683298A (zh
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陈庆桦
朱恒正
钟兴隆
邱志贤
陈嘉扬
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Siliconware Precision Industries Co Ltd
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Abstract

一种无承载板的封装件及其制法。该无承载板的封装件包括:具有绝缘层、及嵌设于绝缘层中且具有多条导电线路及射频线路的线路层的线路结构、接置于该线路结构上的具有多个电极垫的芯片、覆盖该芯片及线路层的封装胶体、形成于该线路结构下的接地层、植接于该线路结构下的焊球,且部分焊球电性连接该接地层,俾以降低射频的设计困难度。

Description

无承载板的封装件及其制法
技术领域
本发明有关于一种封装件及其制法,尤指一种无承载板的封装件及其制法。
背景技术
随着科技的快速发展,各种新的产品不断推陈出新,为了满足消费着方便使用及携带容易的需求,现今各式电子产品无不朝向轻、薄、短、小发展,且除此之外,也希望电子产品能兼具高效能、低耗电、多功能等产品特性,因而业界遂发展出于一封装基板上接置半导体芯片并进行封装,藉以增加电性功能,惟在封装基板上接置半导体芯片虽得以增加电性功能,但因使用封装基板,而无法降低封装高度,因而难以达到薄小的目的。
例如美国公开专利第20080145967号即揭露一种无承载板的封装件及其制法。
请参阅图1A至图1H,为现有技术中无承载板的封装件的制法剖视图。
如图1A所示,首先,提供一载板10。
如图1B所示,接着,于该载板10上形成一阻层11,且该阻层11中形成多个阻层开孔110,以外露出部份的载板10。
如图1C所示,之后,由该载板10作为电镀的电流传导路径,以于该阻层11的各该阻层开孔110中的载板10上电镀形成导电线路12。
如图1D所示,移除该阻层11,以外露出该载板10及其上的该些导电线路12。
如图1E所示,于该载板10上盖设一成型模13,且该成型模13中具有模穴130及多个模柱131,各该模柱131对应靠在各该导电线路12上。
如图1F所示,于该成型模13的模穴130中注入绝缘材料,以于该模穴130中形成绝缘层14,而在该模柱131的部位则保留形成绝缘开孔140。
如图1G所示,然后,移除该成型模13及载板10,以令该导电线路12嵌埋于该绝缘层14中,使该导电线路12的底面外露于该绝缘层14的底面,又于该绝缘层14中形成绝缘开孔140,使各该导电线路12的顶面对应外露于各该绝缘开孔140中。
如图1H所示,最后,于各该绝缘开孔140中的导电线路12顶面上形成焊球15,且于该绝缘层14底面外露的该些导电线路12底面电性连接芯片16,以成为无承载板的封装件。
只是,前述封装件应用于射频(RF)领域中,由于射频的微带线(microstrip line)设计除了导电连接外,尚需用于特性阻抗(characteristic impendance)的接地设计,以及介于射频线路与接地之间的载体,如介电层;而上述的现有技术中构造为无载体的单层的封装件,导致射频的设计困难度提高。
因此,鉴于上述的问题,如何提供一种无承载板的封装件及其制法,能具备射频功能,实已成为目前亟欲解决的课题。
发明内容
鉴于上述现有技术中的种种缺失,本发明揭露一种无承载板的封装件,以降低射频的设计困难度。
为达上述目的及其他目的,本发明揭露一种无承载板的封装件,包括:线路结构,包括具有相对应的第一表面及第二表面的绝缘层、嵌设于该绝缘层中并外露于该第一表面的具有多条导电线路及射频线路的线路层、及形成于该绝缘层中并连通至第二表面,以分别外露出各该导电线路的绝缘开孔;接置于该线路结构的第一表面上且电性连接该线路层的芯片;形成于该绝缘层的第一表面上,并覆盖该线路层及芯片的封装胶体;以及形成于该绝缘层的第二表面上的接地层,且该接地层具有接地层开孔,以令该些绝缘开孔及部份第二表面外露于该接地层开孔。
依上所述的无承载板的封装件,还可以包括多个焊球,各别植设于该绝缘开孔中,其中,部份焊球电性连接该接地层;又该线路结构还可以包括形成于各该绝缘开孔中的导电线路上的端部(terminal),其中,该焊球植接于各该端部上。
此外,该封装件还可以包括形成于该接地层及绝缘层第二表面上的具有多个保护层开孔的保护层,以令各该端部对应外露于各该保护层开孔,并使外露该用以接地的端部的保护层开孔外露该接地层侧面;又该端部可与该绝缘层的第二表面齐平。
依上所述,形成该保护层的材料为防焊层(solder mask)或聚醯亚胺。
为得到本发明的封装件,本发明还提供了一种无承载板的封装件的制法,包括:于一载板上形成具有多条导电线路及射频线路的线路层;于该载板及线路层上形成具有多个绝缘开孔的绝缘层,以对应外露出各该导电线路,其中,该绝缘层具有相对的第一表面及第二表面,且该第一表面该绝缘层与载板的接触面;移除该载板,以外露出该绝缘层的第一表面及线路层;于该绝缘层的第一表面上接置芯片,并令该芯片电性连接该线路层;于该绝缘层的第一表面上形成封装胶体,以覆盖该线路层及芯片;于该绝缘层的第二表面上形成接地层;以及于各该绝缘开孔中植设焊球,其中,部份焊球电性连接该接地层。
前述的制法还可以包括于移除该载板前,于各该绝缘开孔中的导电线路上形成端部,其中,该焊球植接于各该端部上。
所述的载板的线路层制法,包括:于如材质为金属的载板上形成一具有多个第一阻层开孔的第一阻层,以外露出该载板的部份表面;于该些第一阻层开孔中的载板上形成该线路层;以及移除该第一阻层,以外露出该载板及其上的线路层。
所述的绝缘层及其绝缘开孔的制法,包括:于该载板上覆盖一成型模,且该成型模中具有模穴及多个模柱,且各该模柱对应靠在该线路层的各该导电线路上;于该成型模的模穴中灌注绝缘材料,以于该模穴中形成该绝缘层;以及移除该成型模,以外露出该绝缘层,且该绝缘层相对应该些模柱的部位形成该些绝缘开孔,以令各该导电线路对应外露于各该绝缘开孔。
所述的该接地层的制法包括:于该绝缘层的第二表面上形成金属层;以及图案化该金属层,以形成具有接地层开孔的接地层,使外露出该些绝缘开孔、及部份第二表面。
如上所述,还可以包括于形成该接地层后,于该接地层及绝缘层第二表面上形成保护层,且该保护层形成有多个保护层开孔,以令各该绝缘开孔对应外露于各该保护层开孔。
本发明还提供了另一种无承载板的封装件的制法,其与前述制法的差异在于在形成该绝缘层前,于各该导电线路上形成端部。
依第二种封装件的制法,该线路层及端部的制法,包括:于该载板上形成一具有多个第一阻层开孔的第一阻层,以外露出该载板的部份表面;于该第一阻层开孔中的载板上形成该线路层;移除该第一阻层,以外露出该载板及其上的线路层;于该载板及其上的线路层形成具有多个第二阻层开孔的第二阻层,以外露出该线路层的导电线路的部份表面;于各该第二阻层开孔中的导电线路上形成该端部;以及移除该第二阻层。
由上可知,本发明无承载板的封装件及其制法,先制成该线路结构,再于该线路结构的绝缘层的第一表面上接置芯片、覆盖封装胶体,然后于该线路结构的绝缘层的第二表面上形成接地层,再植设焊球,俾使该焊球电性连接至该接地层,此单层架构的无承载板封装件,其成本较低,且可降低射频的设计困难度。
附图说明
图1A至图1H为第20080145967号美国专利的制法剖视图。
图2A至图2M为本发明的无承载板的封装件的第一实施例示意图,其中,图2G’显示为导电线路表面形成可焊接金属的实施方式;图2M’显示为焊球植接于该绝缘开孔中的导电线路上的实施方式。
图3A至图3I为本发明的无承载板的封装件的第二实施例示意图。
主要元件符号说明
10    载板
11    阻层
110   阻层开孔
12    导电线路
13    成型模
130     模穴
131     模柱
14      绝缘层
140     绝缘开孔
15      焊球
16      芯片
2       线路结构
20      载板
21a     第一阻层
210a    第一阻层开孔
21b     第二阻层
210b    第二阻层开孔
22      线路层
221     导电线路
222     射频线路
23      成型模
230     模穴
231     模柱
24      绝缘层
24a     第一表面
24b     第二表面
240     绝缘开孔
25、25’端部
26      芯片
261     电极垫
262     焊线
27      封装胶体
28      金属层
28’    接地层
280     接地层开孔
28a     侧面
29    保护层
290   保护层开孔
30    焊球
31    铜层
32    可焊接金属层。
具体实施方式
以下由特定的具体实施例说明本发明的实施方式,熟悉此技术的人士可由本说明书所揭示的内容轻易地了解本发明的其他优点及功效。
须知,本说明书所附图式所绘示的结构、比例、大小等,均仅用以配合说明书所揭示的内容,以供熟悉此技艺的人士了解与阅读,并非用以限定本发明可实施的限定条件,故不具技术上的实质意义,任何结构的修饰、比例关系的改变或大小的调整,在不影响本发明所能产生的功效及所能达成的目的下,均应仍落在本发明所揭示的技术内容得能涵盖的范围内。同时,本说明书中所引用的如“顶面”、“底面”、“一”、“上”及“下”等的用语,亦仅为便于叙述的明了,而非用以限定本发明可实施的范围,其相对关系的改变或调整,在无实质变更技术内容下,当亦视为本发明可实施的范畴。
第一实施例
请参阅图2A至图2M,为本发明所揭露的本发明无承载板的封装件的制法的第一实施例示意图。
如图2A所示,提供一材质为金属的载板20,于该载板20上形成一第一阻层21a,且经图案化制程使该第一阻层21a中形成多个第一阻层开孔210a,以令该载板20的部份表面外露于该些第一阻层开孔210a中。
如图2B所示,接着,进行电镀制程,以于该些第一阻层开孔210a中的载板20上电镀形成具有多条导电线路221及射频线路222的线路层22。
如图2C所示,之后移除该第一阻层21a,以外露出该载板20及其上的线路层22。
如图2D所示,再于该载板20上覆盖一具有模穴230及多个模柱231的成型模23,且各该模柱231对应靠在该线路层22的各该导电线路221上。
如图2E所示,然后,以绝缘材料(图式中未标号)注入于该成型模23的模穴230中,使于该模穴230中形成绝缘层24。于该绝缘层24硬化后,再移除该成型模23,使该绝缘层24形成于该载板20上,且于该绝缘层24中相对应该成型模23的模柱231的部位形成绝缘开孔240,使各该导电线路221对应外露于各该绝缘开孔240,且令该绝缘层24与载板20之间的接触面为第一表面24a,而该绝缘层24未接触该载板20的外露表面为第二表面24b。
如图2F所示,完成上述制程后,再于各该绝缘开孔240中的导电线路221上电镀形成端部25。于另一实施方式中,也可选择不形成端部25,从而后续植接的焊球30则形成于该绝缘开孔240中的导电线路221上;或可于该端部25上进行OSP(Organic SolderablityPreservative)处理。
如图2G所示,然后移除该载板20,使该绝缘层24的第一表面24a及线路层22外露出,而成为一线路结构2。或如图2G’所示,可先于该些端部25及绝缘层24的第二表面24b上形成铜层31,接着移除该载板20,再进行电镀,以于该导电线路221表面形成可焊接金属层32(wire bondable metal),该可焊接金属的材料可为Ni/Pd/Au,之后再移除铜层31。
如图2H所示,接着,翻转该线路结构2,使该绝缘层24的第一表面24a朝上,再于该第一表面24a上接置具有电极垫261的芯片26,再以打线方式将焊线262电性连接外露于该第一表面24a上的该些导电线路221及芯片26的电极垫261,当然,该芯片26亦可以覆晶方式电性连接该线路层22。
如图2I所示,于该绝缘层24的第一表面24a、线路层22、芯片26、及焊线262上覆盖封装胶体27,以保护该线路层22、芯片26、及焊线262。
如图2J所示,之后于该绝缘层24的第二表面24b、绝缘开孔240、及端部25上利用物理气相沉积(PVD)或化学气相沉积(CVD)形成金属层28。
如图2K所示,该金属层28经图案化制程以成为设于第二表面24b上的接地层28’,且该金属层28于图案化制程中并形成接地层开孔280,以令该些端部25、该些绝缘开孔240、及部份第二表面24b外露于该接地层开孔280。
如图2L所示,再以如防焊层(solder mask)或聚醯亚胺的保护层29形成于该接地层28’及绝缘层24的第二表面24b上,且该保护层29中经曝光显影制程或镭射开孔制程以形成多个保护层开孔290,以令各该绝缘开孔240对应外露于各该保护层开孔290,并使外露该端部25的保护层开孔290外露部份的接地层28’侧面28a。
如图2M所示,最后,于各该保护层开孔290中的各该端部25上植接焊球30,且令部分该焊球30电性连接至接地层28’,以令该射频线路222与该接地层28’构成具有射频功能的微带线。
于另一实施方式中,如图2M’所示,导电线路221上未形成有端部25,焊球30植接于该绝缘开孔240中的导电线路221上。
第二实施例
请参阅图3A至图3I,为本发明所揭露的本发明的无承载板的封装件的制法的第二实施例示意图。
如图3A所示,首先,提供一载板20;接着,于该载板20上形成第一阻层21a,然后进行图案化制程以于该第一阻层21a中形成多个第一阻层开孔210a,使该载板20的部份表面外露于该第一阻层开孔210a中。
如图3B所示,之后,以该载板20作为电镀的电流传导路径,以在该些第一阻层开孔210a中的载板20上电镀形成具有多条导电线路221及射频线路222的线路层22。
如图3C所示,然后,移除该载板20上的第一阻层21a,以令该载板20及其上的线路层22外露出。
如图3D所示,继之,于该外露的载板20及其上的线路层22形成第二阻层21b,且经图案化制程以令该第二阻层21b中形成多个第二阻层开孔210b,使该线路层22的各该导电线路221对应外露于各该第二阻层开孔210b中。
如图3E所示,再以该载板20作为电镀的电流传导路径,以于各该第二阻层开孔210b中的导电线路221上电镀形成端部25’。
如图3F所示,之后,移除该第二阻层21b,以外露出该载板20、线路层22、及端部25’。
如图3G所示,于该外露的载板20、线路层22、及端部25’上形成绝缘层24,使该绝缘层24与载板20之间的接触面为第一表面24a,而该绝缘层24未接触该载板20的外露表面为第二表面24b,且该些端部25’的顶面外露于该绝缘层24的第二表面24b,在本实施例中,该端部25’可与绝缘层24的第二表面24b齐平。
如图3H所示,完成上述制程后,移除该载板20,使该绝缘层24的第一表面24a及线路层22外露出,而成为一线路结构2。
如图3I所示,之后则接续前述第一实施例的第2H至2M的制程,以于该线路结构2上接置该芯片26、焊线262、封装胶体27、接地层28’、保护层29及焊球30,以令该接地层28’由焊球30电性连接外部电路板的大地,而与射频线路222形成射频的微带线。
依上述制程,本发明还提供了一种无承载板的封装件,包括:线路结构2、芯片26、封装胶体27、接地层28’及焊球30。
所述的线路结构2,包括具有相对应的第一表面24a及第二表面24b的绝缘层24、嵌设于该绝缘层24中并外露于该第一表面24a的具有多条导电线路221及射频线路222的线路层22、形成于该绝缘层24中并连通至第二表面24b,以分别外露出各该导电线路221的绝缘开孔240、及形成于各该绝缘开孔240中的导电线路221上的端部25。
所述的芯片26,接置于该绝缘层24的第一表面24a上,且该芯片26具有多个电极垫261,且该芯片26以打线或覆晶方式电性连接该线路层22。
所述的封装胶体27,覆盖该绝缘层24的第一表面24a、线路层22、芯片26、及焊线262。
所述的接地层28’,形成于该绝缘层24的第二表面24b,且该接地层28’具有接地层开孔280,以令该些端部25及部份第二表面24b外露于该接地层开孔280。
所述的焊球30,植接于各该端部25上,且该端部25上的焊球30电性连接至接地层28’。
依上所述,本发明的无承载板封装件还可以包括保护层29,形成于该接地层28’及绝缘层24的第二表面24b上,且该保护层29形成有多个保护层开孔290,以令各该绝缘开孔240对应外露于各该保护层开孔290,并使外露该端部25的保护层开孔290外露该接地层28’侧面28a;而形成该保护层29为防焊层(solder mask)或聚醯亚胺。
如上所述,该端部25’可与该绝缘层24第二表面24b齐平。
本发明无承载板的封装件及其制法,于该载板上形成具有线路的线路层及绝缘层,且于该线路层的导电线路上形成端部,之后移除该载板,以成为一线路结构,再于该线路结构的绝缘层的第一表面上接置芯片、电性连接导电元件、覆盖封装胶体,然后于该绝缘层的第二表面、绝缘开孔、及端部上形成金属层,之后图案化该金属层以成为接地层,再以保护层形成于该接地层及绝缘层的第二表面上,且该保护层中形成多个保护层开孔,以令各该端部对应外露于各该保护层开孔,并使部份的接地层侧面外露于该至少一保护层开孔中,再于各该保护层开孔中接置焊球,使该用以接地的终端上的焊球电性连接至侧面外露于该保护层开孔中的接地层,此单层架构的无承载板封装件,其成本较低,且可降低射频的设计困难度。
上述实施例用以例示性说明本发明的原理及其功效,而非用于限制本发明。任何熟习此项技术的人士均可在不违背本发明的精神及范畴下,对上述实施例进行修改。因此本发明的权利保护范围,本发明的权利要求所列。

Claims (16)

1.一种无承载板的封装件,其特征在于,包括:
线路结构,包括具有相对应的第一表面及第二表面的绝缘层、嵌设于该绝缘层中并外露于该第一表面的具有多条导电线路及射频线路的线路层、及形成于该绝缘层中并连通至第二表面,以分别外露出各该导电线路的绝缘开孔;
芯片,接置于该绝缘层的第一表面上,且该芯片电性连接该线路层;
封装胶体,形成于该绝缘层的第一表面上,并覆盖该线路层及芯片;以及
接地层,形成于该绝缘层的第二表面上,且该接地层具有接地层开孔,以令该些绝缘开孔、及部份第二表面外露于该接地层开孔;以及
多个焊球,各别植设于该绝缘开孔中,其中,部份该焊球电性连接该接地层,以令该射频线路与该接地层构成具有射频功能的微带线。
2.如权利要求1所述的无承载板的封装件,其特征在于,该线路结构还包括形成于各该绝缘开孔中的导电线路上的端部。
3.如权利要求2所述的无承载板的封装件,其特征在于,该多个焊球植接于各该端部上。
4.如权利要求2所述的无承载板的封装件,其特征在于,该端部与该绝缘层的第二表面齐平。
5.如权利要求1所述的无承载板的封装件,其特征在于,还包括保护层,形成于该接地层及绝缘层第二表面上,且该保护层形成有多个保护层开孔,以令各该绝缘开孔对应外露于各该保护层开孔。
6.如权利要求5所述的无承载板的封装件,其特征在于,形成该保护层的材料为防焊层或聚醯亚胺。
7.一种无承载板的封装件的制法,其特征在于,包括:
于一载板上形成线路层,且该线路层具有多条导电线路及射频线路;
于该载板及线路层上形成具有多个绝缘开孔的绝缘层,以对应外露出各该导电线路,其中,该绝缘层具有相对的第一表面及第二表面,且该第一表面是该绝缘层与该载板的接触面;
移除该载板,以外露出该绝缘层的第一表面及线路层;
于该绝缘层的第一表面上接置芯片,并令该芯片电性连接该线路层;
于该绝缘层的第一表面上形成封装胶体,以覆盖该线路层及芯片;
于该绝缘层的第二表面上形成接地层;以及
于各该绝缘开孔中植设焊球,其中,部份该焊球电性连接该接地层,以令该射频线路与该接地层构成具有射频功能的微带线。
8.如权利要求7所述的无承载板的封装件的制法,其特征在于,还包括于移除该载板前,于各该绝缘开孔中的导电线路上形成端部。
9.如权利要求8所述的无承载板的封装件的制法,其特征在于,于各该端部上植设该焊球。
10.如权利要求7所述的无承载板的封装件的制法,其特征在于,该载板的线路层制法包括:
于该载板上形成一具有多个第一阻层开孔的第一阻层,以外露出该载板的部份表面;
于该些第一阻层开孔中的载板上形成该线路层;以及
移除该第一阻层,以外露出该载板及其上的线路层。
11.如权利要求7所述的无承载板的封装件的制法,其特征在于,该绝缘层及其绝缘开孔的制法包括:
于该载板上覆盖一成型模,且该成型模中具有模穴及多个模柱,且各该模柱对应靠在该线路层的各该导电线路上;
于该成型模的模穴中灌注绝缘材料,以于该模穴中形成该绝缘层;以及
移除该成型模,以外露出该绝缘层,且该绝缘层相对应该些模柱的部位形成该些绝缘开孔,以令各该导电线路对应外露于各该绝缘开孔。
12.如权利要求7所述的无承载板的封装件的制法,其特征在于,该接地层的制法包括:
于该绝缘层的第二表面上形成金属层;以及
图案化该金属层,以形成具有接地层开孔的接地层,俾外露出该些绝缘开孔、及部份第二表面。
13.如权利要求7所述的无承载板的封装件的制法,其特征在于,还包括于形成该接地层后,于该接地层及绝缘层第二表面上形成保护层,且该保护层形成有多个保护层开孔,以令各该绝缘开孔对应外露于各该保护层开孔。
14.如权利要求7所述的无承载板的封装件的制法,其特征在于,还包括于形成该绝缘层前,于各该导电线路上形成端部。
15.如权利要求14所述的无承载板的封装件的制法,其特征在于,于各该端部上植设该焊球。
16.如权利要求14所述的无承载板的封装件的制法,其特征在于,该线路层及端部的制法,包括:
于该载板上形成一具有多个第一阻层开孔的第一阻层,以外露出该载板的部份表面;
于该第一阻层开孔中的载板上形成该线路层;
移除该第一阻层,以外露出该载板及其上的线路层;
于该载板及其上的线路层形成具有多个第二阻层开孔的第二阻层,以外露出该线路层的导电线路的部份表面;
于各该第二阻层开孔中的导电线路上形成该端部;以及
移除该第二阻层。
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