CN102667433B - 磁性的力传感器 - Google Patents

磁性的力传感器 Download PDF

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Publication number
CN102667433B
CN102667433B CN201080052676.5A CN201080052676A CN102667433B CN 102667433 B CN102667433 B CN 102667433B CN 201080052676 A CN201080052676 A CN 201080052676A CN 102667433 B CN102667433 B CN 102667433B
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CN
China
Prior art keywords
magnetoelectric transducer
magnetic
magnetic flux
output
magnetic field
Prior art date
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Active
Application number
CN201080052676.5A
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English (en)
Chinese (zh)
Other versions
CN102667433A (zh
Inventor
佐藤修一
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Canon Inc
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Canon Inc
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Publication of CN102667433A publication Critical patent/CN102667433A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G01L5/0076—Force sensors associated with manufacturing machines
    • G01L5/009—Force sensors associated with material gripping devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Magnetic Variables (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN201080052676.5A 2009-11-26 2010-11-11 磁性的力传感器 Active CN102667433B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2009269186A JP5500957B2 (ja) 2009-11-26 2009-11-26 磁気式力覚センサ
JP2009-269186 2009-11-26
PCT/JP2010/070522 WO2011065267A2 (en) 2009-11-26 2010-11-11 Magnetic force sensor

Publications (2)

Publication Number Publication Date
CN102667433A CN102667433A (zh) 2012-09-12
CN102667433B true CN102667433B (zh) 2015-04-29

Family

ID=44067022

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080052676.5A Active CN102667433B (zh) 2009-11-26 2010-11-11 磁性的力传感器

Country Status (5)

Country Link
US (2) US8978488B2 (enExample)
JP (1) JP5500957B2 (enExample)
KR (1) KR101325542B1 (enExample)
CN (1) CN102667433B (enExample)
WO (1) WO2011065267A2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5735882B2 (ja) 2011-08-02 2015-06-17 Ntn株式会社 磁気式荷重センサ
JP6168868B2 (ja) * 2012-06-29 2017-07-26 キヤノン株式会社 力覚センサ及び力覚センサを備えたロボットアーム
US9245551B2 (en) * 2014-03-18 2016-01-26 Seagate Technology Llc Nitrogen-vacancy nanocrystal magnetic source sensor
CN104729768A (zh) * 2015-03-09 2015-06-24 苏州森特克测控技术有限公司 一种压力传感器
US9857245B2 (en) * 2015-03-09 2018-01-02 Worcester Polytechnic Institute Soft-body deformation and force sensing
JP6443256B2 (ja) * 2015-07-31 2018-12-26 株式会社デンソー センサ装置
CN108344531A (zh) * 2017-01-23 2018-07-31 中国科学院沈阳自动化研究所 一种基于电磁感应的三维测力传感器
JP6843726B2 (ja) * 2017-10-17 2021-03-17 キヤノン株式会社 力覚センサ及びロボット
KR102002814B1 (ko) 2018-06-29 2019-10-17 (주)이디에스 변위 익스텐소미터
JP7224684B2 (ja) * 2019-02-18 2023-02-20 ＸＥＬＡ・Ｒｏｂｏｔｉｃｓ株式会社 磁気センシングシステム、検出装置、及び磁気干渉のオフセット方法
US12031816B2 (en) 2019-07-16 2024-07-09 Eds Co., Ltd. Displacement extensometer
DE102019212091A1 (de) * 2019-08-13 2021-02-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrosystem und verfahren zum herstellen desselben
CN111693185A (zh) * 2020-07-27 2020-09-22 广州特种机电设备检测研究院 一种基于矫顽力的起重机轮压测试装置及测试方法
EP4113085B1 (en) * 2021-06-28 2025-03-26 Melexis Technologies SA Force sensor with target on semiconductor package

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3286528A (en) * 1963-05-10 1966-11-22 Crouzet Sa Device for measuring forces by application of the hall effect
CN2241875Y (zh) * 1995-11-20 1996-12-04 上海铁道大学 霍尔型土壤压力传感器
JP2004325328A (ja) * 2003-04-25 2004-11-18 Asahi Kasei Electronics Co Ltd 多分力検出器
DE102007009389A1 (de) * 2007-02-20 2008-08-21 Bizerba Gmbh & Co. Kg Kraftmessvorrichtung und Verfahren zur Signalauswertung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB804849A (en) * 1950-04-12 1958-11-26 Sperry Gyroscope Co Ltd Improvements in or relating to accelerometers and to control systems employing accelerometers
US2983211A (en) * 1957-03-19 1961-05-09 Kollsman Instr Corp Cabin pressurization-pressure monitor system
US3274826A (en) * 1962-09-28 1966-09-27 Ingram Maxwell Direct reading shaft horsepower meter systems
DE3110107A1 (de) * 1981-03-16 1982-09-23 Mannesmann Rexroth GmbH, 8770 Lohr Kraftmessverfahren und kraftmessvorrichtung zur steuerung des krafthebers eines ackerschleppers
CN85103183A (zh) 1985-04-26 1987-04-08 株式会社岛津制作所 电磁力发生装置
JPS63149569A (ja) * 1986-12-12 1988-06-22 Canon Inc 加速度計
DE3843869A1 (de) 1988-12-24 1990-06-28 Deere & Co Kraftsensor zur bestimmung von zug- und druckkraeften
JP3577420B2 (ja) 1999-01-21 2004-10-13 株式会社フジユニバンス 荷重センサ
WO2002086694A1 (fr) * 2001-04-19 2002-10-31 Asahi Kasei Emd Corporation Dispositif pointeur
US7460979B2 (en) * 2003-11-20 2008-12-02 University Of Virginia Patent Foundation Method and system for enhanced resolution, automatically-calibrated position sensor
JP4201140B2 (ja) 2004-05-10 2008-12-24 株式会社コルグ 操作子
JP5376859B2 (ja) 2007-08-28 2013-12-25 キヤノン株式会社 磁気式力センサ及び磁気式力センサを有するロボットアーム
JP5113613B2 (ja) 2008-04-30 2013-01-09 理想科学工業株式会社 画像形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3286528A (en) * 1963-05-10 1966-11-22 Crouzet Sa Device for measuring forces by application of the hall effect
CN2241875Y (zh) * 1995-11-20 1996-12-04 上海铁道大学 霍尔型土壤压力传感器
JP2004325328A (ja) * 2003-04-25 2004-11-18 Asahi Kasei Electronics Co Ltd 多分力検出器
DE102007009389A1 (de) * 2007-02-20 2008-08-21 Bizerba Gmbh & Co. Kg Kraftmessvorrichtung und Verfahren zur Signalauswertung

Also Published As

Publication number Publication date
US20150068326A1 (en) 2015-03-12
CN102667433A (zh) 2012-09-12
KR20120093382A (ko) 2012-08-22
JP2011112511A (ja) 2011-06-09
JP5500957B2 (ja) 2014-05-21
KR101325542B1 (ko) 2013-11-07
WO2011065267A3 (en) 2011-11-17
US8978488B2 (en) 2015-03-17
WO2011065267A2 (en) 2011-06-03
US20120227513A1 (en) 2012-09-13
US9574953B2 (en) 2017-02-21

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