CN102655160B - 放射线检测装置、闪烁体板、制造方法和放射线检测系统 - Google Patents

放射线检测装置、闪烁体板、制造方法和放射线检测系统 Download PDF

Info

Publication number
CN102655160B
CN102655160B CN201210051338.0A CN201210051338A CN102655160B CN 102655160 B CN102655160 B CN 102655160B CN 201210051338 A CN201210051338 A CN 201210051338A CN 102655160 B CN102655160 B CN 102655160B
Authority
CN
China
Prior art keywords
scintillator
protective layer
organic
radiation detection
inorganic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201210051338.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102655160A (zh
Inventor
市村知昭
冈田聪
长野和美
野村庆一
石田阳平
佐佐木庆人
中山明哉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN102655160A publication Critical patent/CN102655160A/zh
Application granted granted Critical
Publication of CN102655160B publication Critical patent/CN102655160B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—HANDLING OF PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K4/00—Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2002—Optical details, e.g. reflecting or diffusing layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/202—Measuring radiation intensity with scintillation detectors the detector being a crystal
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/805—Coatings

Landscapes

  • Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measurement Of Radiation (AREA)
CN201210051338.0A 2011-03-01 2012-03-01 放射线检测装置、闪烁体板、制造方法和放射线检测系统 Expired - Fee Related CN102655160B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-044298 2011-03-01
JP2011044298A JP5728250B2 (ja) 2011-03-01 2011-03-01 放射線検出装置、シンチレータパネル、それらの製造方法、および放射線検出システム

Publications (2)

Publication Number Publication Date
CN102655160A CN102655160A (zh) 2012-09-05
CN102655160B true CN102655160B (zh) 2015-08-05

Family

ID=46730757

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210051338.0A Expired - Fee Related CN102655160B (zh) 2011-03-01 2012-03-01 放射线检测装置、闪烁体板、制造方法和放射线检测系统

Country Status (3)

Country Link
US (1) US8779369B2 (https=)
JP (1) JP5728250B2 (https=)
CN (1) CN102655160B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI708958B (zh) 2016-03-30 2020-11-01 日商濱松赫德尼古斯股份有限公司 放射線檢測器之製造方法

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012242355A (ja) * 2011-05-24 2012-12-10 Fujifilm Corp 放射線検出装置
DE102012210487B3 (de) * 2012-06-21 2013-12-24 Siemens Aktiengesellschaft Szintillatorplatte und Verfahren zur Herstellung einer Szintillatorplatte
JP6092568B2 (ja) * 2012-10-11 2017-03-08 キヤノン株式会社 放射線検出装置及び放射線検出システム
KR101405537B1 (ko) * 2012-10-19 2014-06-11 주식회사 아비즈알 간접방식 신틸레이터 패널 및 그 제조방법
KR101405536B1 (ko) 2012-10-19 2014-06-11 주식회사 아비즈알 직접 방식의 신틸레이터 패널 및 그 제조 방법
JP6298264B2 (ja) * 2012-10-31 2018-03-20 キヤノン株式会社 シンチレータ、放射線検出装置、および、それらの製造方法
KR101368480B1 (ko) 2012-11-21 2014-03-03 주식회사 아비즈알 엑스선 검지 소자
JP6079284B2 (ja) * 2013-02-08 2017-02-15 株式会社島津製作所 放射線検出器および放射線検出器の製造方法
JP6241066B2 (ja) * 2013-05-15 2017-12-06 コニカミノルタ株式会社 放射線画像撮影装置
JP6114635B2 (ja) * 2013-06-06 2017-04-12 東芝電子管デバイス株式会社 放射線検出器およびその製造方法
CN105814455B (zh) * 2013-12-17 2019-04-23 爱克发医疗保健公司 低重量x射线屏蔽件的照相平板检测器及制造方法
JP6005092B2 (ja) * 2014-03-25 2016-10-12 富士フイルム株式会社 放射線検出装置および放射線検出装置の製造方法
JP6301207B2 (ja) * 2014-06-10 2018-03-28 アンリツインフィビス株式会社 Ｘ線検査装置
US9513380B2 (en) 2014-07-25 2016-12-06 General Electric Company X-ray detectors supported on a substrate having a surrounding metal barrier
US10712454B2 (en) 2014-07-25 2020-07-14 General Electric Company X-ray detectors supported on a substrate having a metal barrier
US9520437B2 (en) * 2014-08-14 2016-12-13 Cbrite Inc. Flexible APS X-ray imager with MOTFT pixel readout and a pin diode sensing element
JP6512830B2 (ja) 2015-01-09 2019-05-15 キヤノン株式会社 放射線撮像装置、その製造方法及び放射線検査装置
WO2016153335A1 (en) 2015-03-20 2016-09-29 Perkinelmer Health Sciences B.V. Scintillator
JP6487263B2 (ja) * 2015-04-20 2019-03-20 浜松ホトニクス株式会社 放射線検出器及びその製造方法
JP6524811B2 (ja) * 2015-06-16 2019-06-05 コニカミノルタ株式会社 放射線画像検出器
JP6611511B2 (ja) 2015-08-06 2019-11-27 キヤノン株式会社 シンチレータの製造方法
EP3417317A4 (en) * 2016-02-19 2019-11-13 Karim S. Karim SYSTEM AND METHOD FOR AN X-RAY DETECTOR
EP3226038B1 (en) 2016-03-28 2020-05-06 Canon Kabushiki Kaisha Radiation detection apparatus and radiation imaging system
US10871581B2 (en) 2017-02-17 2020-12-22 Yasu Medical Imaging Technology Co., Ltd. Scintillator module, scintillator sensor unit, and scintillator module production method
JP6646002B2 (ja) * 2017-03-22 2020-02-14 富士フイルム株式会社 放射線検出器及び放射線画像撮影装置
KR102466811B1 (ko) * 2017-12-12 2022-11-11 엘지디스플레이 주식회사 플렉서블 디지털 엑스레이 검출기용 패널 및 그 제조 방법
EP3505969A1 (en) * 2018-01-02 2019-07-03 Koninklijke Philips N.V. Detector for x-ray imaging
CN110323235A (zh) * 2018-03-29 2019-10-11 夏普株式会社 摄像面板
JP2019174365A (ja) * 2018-03-29 2019-10-10 シャープ株式会社 撮像パネル
JP6701288B2 (ja) 2018-09-06 2020-05-27 キヤノン株式会社 シンチレータプレート、放射線検出装置および放射線検出システム
JP7240998B2 (ja) * 2018-11-13 2023-03-16 キヤノン電子管デバイス株式会社 放射線検出モジュール、放射線検出器、及び放射線検出モジュールの製造方法
JP7199332B2 (ja) * 2019-10-07 2023-01-05 キヤノン電子管デバイス株式会社 放射線検出モジュールの製造方法
JP7325295B2 (ja) * 2019-10-24 2023-08-14 浜松ホトニクス株式会社 シンチレータパネル、放射線検出器、シンチレータパネルの製造方法、及び、放射線検出器の製造方法
CN111430391A (zh) * 2020-03-24 2020-07-17 上海奕瑞光电子科技股份有限公司 柔性x射线探测器及其制备方法
JP7564655B2 (ja) 2020-07-14 2024-10-09 キヤノン株式会社 放射線撮像パネル、放射線撮像装置、放射線撮像システム、および、シンチレータプレート
US11656370B2 (en) 2020-07-27 2023-05-23 Canon Kabushiki Kaisha Radiation imaging panel, radiation imaging apparatus, radiation imaging system, method of manufacturing radiation imaging panel, and scintillator plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1305595A (zh) * 1998-06-18 2001-07-25 浜松光子学株式会社 闪烁体面板、放射线图象传感器及其制造方法
CN101002110A (zh) * 2004-08-10 2007-07-18 佳能株式会社 放射线探测装置、闪烁体板及其制造方法和放射线探测系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3077941B2 (ja) * 1997-02-14 2000-08-21 浜松ホトニクス株式会社 放射線検出素子及びその製造方法
US7034306B2 (en) * 1998-06-18 2006-04-25 Hamamatsu Photonics K.K. Scintillator panel and radiation image sensor
AU4167999A (en) * 1998-06-18 2000-01-05 Hamamatsu Photonics K.K. Scintillator plate, radiation image sensor, and method for manufacturing the same
FR2782388B1 (fr) * 1998-08-11 2000-11-03 Trixell Sas Detecteur de rayonnement a l'etat solide a duree de vie accrue
JP4587431B2 (ja) * 2001-08-30 2010-11-24 キヤノン株式会社 蛍光板の製造方法および放射線検出装置の製造方法
US6847041B2 (en) 2001-02-09 2005-01-25 Canon Kabushiki Kaisha Scintillator panel, radiation detector and manufacture methods thereof
US7355184B2 (en) * 2003-04-07 2008-04-08 Canon Kabushiki Kaisha Radiation detecting apparatus and method for manufacturing the same
JP4612876B2 (ja) * 2004-08-10 2011-01-12 キヤノン株式会社 放射線検出装置、シンチレータパネル、これらの製造方法及び放射線検出システム
US7910892B2 (en) * 2005-12-22 2011-03-22 Kabushiki Kaisha Toshiba Method for manufacturing X-ray detector and X-ray detector
EP1860463A1 (en) * 2006-05-23 2007-11-28 Agfa HealthCare NV Radiation image phosphor or scintillator panel
WO2008029610A1 (fr) * 2006-09-05 2008-03-13 Konica Minolta Medical & Graphic, Inc. Écran scintillateur
JP2008261651A (ja) * 2007-04-10 2008-10-30 Toshiba Corp シンチレータパネル、シンチレータパネルの製造方法および放射線検出器
WO2010029779A1 (ja) * 2008-09-12 2010-03-18 コニカミノルタエムジー株式会社 シンチレータパネルとその製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1305595A (zh) * 1998-06-18 2001-07-25 浜松光子学株式会社 闪烁体面板、放射线图象传感器及其制造方法
CN101002110A (zh) * 2004-08-10 2007-07-18 佳能株式会社 放射线探测装置、闪烁体板及其制造方法和放射线探测系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI708958B (zh) 2016-03-30 2020-11-01 日商濱松赫德尼古斯股份有限公司 放射線檢測器之製造方法
US10983225B2 (en) 2016-03-30 2021-04-20 Hamamatsu Photonics K.K. Radiation detector manufacturing method

Also Published As

Publication number Publication date
US20120223240A1 (en) 2012-09-06
JP2012181108A (ja) 2012-09-20
CN102655160A (zh) 2012-09-05
JP5728250B2 (ja) 2015-06-03
US8779369B2 (en) 2014-07-15

Similar Documents

Publication Publication Date Title
CN102655160B (zh) 放射线检测装置、闪烁体板、制造方法和放射线检测系统
JP4266898B2 (ja) 放射線検出装置とその製造方法および放射線撮像システム
US8648312B2 (en) Radiation detection apparatus, manufacturing method thereof, and radiation detection system
US20110147602A1 (en) Radiographic imaging apparatus, radiographic imaging system, and method of producing radiographic imaging apparatus
JP5791281B2 (ja) 放射線検出装置及び放射線検出システム
JP6200173B2 (ja) 放射線検出装置及び放射線検出システム
US20130308755A1 (en) Radiation detection apparatus and radiation detection system
JP5607426B2 (ja) 放射線検出装置及び放射線撮像システム
US9177922B2 (en) Electric device, method for manufacturing the same, and radiation inspection apparatus
US20120318990A1 (en) Radiation detection panel and radiation imaging apparatus
JP2001074845A (ja) 半導体装置及びそれを用いた放射線撮像システム
JP2012154811A (ja) シンチレータパネルおよびその製造方法ならびに放射線検出装置
WO2015033506A1 (ja) 放射線検出装置及びその製造方法並びに放射線検出システム
WO2002061459A1 (en) Scintillator panel and radiation image sensor
WO2001088568A1 (fr) Detecteur de rayonnement et procede de fabrication de ce detecteur
JP2014071031A (ja) 検出装置の製造方法及び検出装置、並びに放射線検出システム
JP2014059246A (ja) 放射線検出器およびその製造方法
US6965409B1 (en) Image input apparatus having photoelectric conversion devices bonded to a light guide member
JP2006052979A (ja) 放射線検出装置及びシンチレータパネル
JP4234305B2 (ja) 放射線検出器
JP4234303B2 (ja) 放射線検出器
JP6643098B2 (ja) 放射線検出装置、放射線検出システム、及び、放射線検出装置の製造方法
JP2006184187A (ja) 放射線検出装置、シンチレータパネル、および放射線検出システム
JP4440979B2 (ja) Ｘ線像撮像装置
CN117607935A (zh) 辐射摄像设备的制造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150805