CN102646644A - 具有传感器的集成电路和制造这种集成电路的方法 - Google Patents
具有传感器的集成电路和制造这种集成电路的方法 Download PDFInfo
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- CN102646644A CN102646644A CN2012100375338A CN201210037533A CN102646644A CN 102646644 A CN102646644 A CN 102646644A CN 2012100375338 A CN2012100375338 A CN 2012100375338A CN 201210037533 A CN201210037533 A CN 201210037533A CN 102646644 A CN102646644 A CN 102646644A
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Images
Classifications
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/564—Details not otherwise provided for, e.g. protection against moisture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00222—Integrating an electronic processing unit with a micromechanical structure
- B81C1/00246—Monolithic integration, i.e. micromechanical structure and electronic processing unit are integrated on the same substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4853—Connection or disconnection of other leads to or from a metallisation, e.g. pins, wires, bumps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
- H01L22/34—Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line
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- H—ELECTRICITY
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B81C2203/07—Integrating an electronic processing unit with a micromechanical structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Automation & Control Theory (AREA)
- Ceramic Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Pressure Sensors (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
Claims (15)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP11155468.9A EP2492239B1 (en) | 2011-02-22 | 2011-02-22 | Integrated circuit with sensor and method of manufacturing such an integrated circuit |
EP11155468.9 | 2011-02-22 |
Publications (2)
Publication Number | Publication Date |
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CN102646644A true CN102646644A (zh) | 2012-08-22 |
CN102646644B CN102646644B (zh) | 2015-06-24 |
Family
ID=44243126
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Application Number | Title | Priority Date | Filing Date |
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CN201210037533.8A Active CN102646644B (zh) | 2011-02-22 | 2012-02-17 | 具有传感器的集成电路和制造这种集成电路的方法 |
Country Status (3)
Country | Link |
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US (2) | US9284187B2 (zh) |
EP (1) | EP2492239B1 (zh) |
CN (1) | CN102646644B (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104183569A (zh) * | 2013-05-22 | 2014-12-03 | 国际商业机器公司 | 集成突触元件的结构和方法 |
CN104849325A (zh) * | 2014-02-18 | 2015-08-19 | 无锡华润上华半导体有限公司 | 与cmos工艺兼容的mems湿度传感器及其制造方法 |
CN105181764A (zh) * | 2015-09-25 | 2015-12-23 | 上海集成电路研发中心有限公司 | 一种湿度传感器及制造方法 |
CN105502282A (zh) * | 2015-11-30 | 2016-04-20 | 上海集成电路研发中心有限公司 | 一种mems湿度传感器的制造方法 |
CN110312930A (zh) * | 2017-02-21 | 2019-10-08 | 益加义电子有限公司 | 湿度传感器装置 |
CN113167662A (zh) * | 2018-09-17 | 2021-07-23 | 哈钦森技术股份有限公司 | 集成传感器和电路 |
CN114487039A (zh) * | 2020-10-23 | 2022-05-13 | 世界先进积体电路股份有限公司 | 电容式生物感测器 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2492239B1 (en) * | 2011-02-22 | 2020-08-26 | Sciosense B.V. | Integrated circuit with sensor and method of manufacturing such an integrated circuit |
EP2554980B1 (en) | 2011-08-03 | 2014-06-25 | Nxp B.V. | Integrated circuit with sensor and method of manufacturing such an integrated circuit |
EP2573804A1 (en) | 2011-09-21 | 2013-03-27 | Nxp B.V. | Integrated circuit with sensor and manufacturing method thereof |
EP2623969B1 (en) | 2012-01-31 | 2014-05-14 | Nxp B.V. | Integrated circuit and manufacturing method |
DE102012107440A1 (de) * | 2012-08-14 | 2014-05-15 | Hella Kgaa Hueck & Co. | Verfahren zur Erzeugung einer nicht-vollkeramischen Oberfläche . |
EP2752660B1 (en) * | 2013-01-07 | 2016-08-31 | Nxp B.V. | Integrated circuit comprising an optical CO2 sensor and manufacturing method |
US9505609B2 (en) * | 2015-04-29 | 2016-11-29 | Invensense, Inc. | CMOS-MEMS integrated device with selective bond pad protection |
US9891183B2 (en) | 2015-07-07 | 2018-02-13 | Nxp B.V. | Breach sensor |
US10336606B2 (en) * | 2016-02-25 | 2019-07-02 | Nxp Usa, Inc. | Integrated capacitive humidity sensor |
EP3239681B1 (en) * | 2016-04-25 | 2019-12-04 | Sensirion AG | Sensor device including a pressure sensor and a humidity sensor |
US10083883B2 (en) * | 2016-06-20 | 2018-09-25 | Applied Materials, Inc. | Wafer processing equipment having capacitive micro sensors |
US10535590B2 (en) * | 2017-12-29 | 2020-01-14 | Intel Corporation | Multi-layer solder resists for semiconductor device package surfaces and methods of assembling same |
EP3540422B1 (en) | 2018-03-14 | 2024-01-03 | Sciosense B.V. | Monolithic gas sensor arrangement, manufacturing method and measurement method |
US11855019B2 (en) * | 2021-02-11 | 2023-12-26 | Globalfoundries Singapore Pte. Ltd. | Method of forming a sensor device |
CN113555293B (zh) * | 2021-07-21 | 2023-06-27 | 中国电子科技集团公司第三十八研究所 | 硅基片式收发组件温度应力场测试方法 |
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CN1373902A (zh) * | 1999-09-13 | 2002-10-09 | 阿克里奥股份公司 | 半导体器件用的保护层 |
WO2007036922A1 (en) * | 2005-09-30 | 2007-04-05 | Timothy Cummins | An integrated electronic sensor |
US20080237469A1 (en) * | 2007-03-27 | 2008-10-02 | Nec Corporation | BOLOMETER-TYPE THz-WAVE DETECTOR |
US7514760B1 (en) * | 2007-03-09 | 2009-04-07 | Silicon Clocks, Inc. | IC-compatible MEMS structure |
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EP2345069B1 (en) * | 2008-10-27 | 2016-02-17 | Nxp B.V. | Method of manufacturing a biocompatible electrode |
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EP2282333B1 (en) * | 2009-07-27 | 2013-03-20 | Nxp B.V. | Integrated circuit comprising moisture sensor |
EP2302327B1 (en) * | 2009-09-25 | 2020-02-26 | Nxp B.V. | Sensor |
EP2336757B1 (en) * | 2009-12-07 | 2018-09-19 | ams international AG | Integrated circuit with water presence detection arrangement and manufacturing method therefor |
EP2336758B1 (en) | 2009-12-16 | 2012-08-29 | Nxp B.V. | Capacitive sensor |
EP2492239B1 (en) * | 2011-02-22 | 2020-08-26 | Sciosense B.V. | Integrated circuit with sensor and method of manufacturing such an integrated circuit |
-
2011
- 2011-02-22 EP EP11155468.9A patent/EP2492239B1/en active Active
-
2012
- 2012-02-16 US US13/398,158 patent/US9284187B2/en active Active
- 2012-02-17 CN CN201210037533.8A patent/CN102646644B/zh active Active
-
2016
- 2016-03-14 US US15/069,898 patent/US9941222B2/en active Active
Patent Citations (4)
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CN1373902A (zh) * | 1999-09-13 | 2002-10-09 | 阿克里奥股份公司 | 半导体器件用的保护层 |
WO2007036922A1 (en) * | 2005-09-30 | 2007-04-05 | Timothy Cummins | An integrated electronic sensor |
US7514760B1 (en) * | 2007-03-09 | 2009-04-07 | Silicon Clocks, Inc. | IC-compatible MEMS structure |
US20080237469A1 (en) * | 2007-03-27 | 2008-10-02 | Nec Corporation | BOLOMETER-TYPE THz-WAVE DETECTOR |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104183569A (zh) * | 2013-05-22 | 2014-12-03 | 国际商业机器公司 | 集成突触元件的结构和方法 |
CN104183569B (zh) * | 2013-05-22 | 2017-04-12 | 国际商业机器公司 | 集成突触元件的结构和方法 |
CN104849325A (zh) * | 2014-02-18 | 2015-08-19 | 无锡华润上华半导体有限公司 | 与cmos工艺兼容的mems湿度传感器及其制造方法 |
CN105181764A (zh) * | 2015-09-25 | 2015-12-23 | 上海集成电路研发中心有限公司 | 一种湿度传感器及制造方法 |
CN105502282A (zh) * | 2015-11-30 | 2016-04-20 | 上海集成电路研发中心有限公司 | 一种mems湿度传感器的制造方法 |
CN110312930A (zh) * | 2017-02-21 | 2019-10-08 | 益加义电子有限公司 | 湿度传感器装置 |
CN113167662A (zh) * | 2018-09-17 | 2021-07-23 | 哈钦森技术股份有限公司 | 集成传感器和电路 |
CN114487039A (zh) * | 2020-10-23 | 2022-05-13 | 世界先进积体电路股份有限公司 | 电容式生物感测器 |
Also Published As
Publication number | Publication date |
---|---|
EP2492239A1 (en) | 2012-08-29 |
US20120211845A1 (en) | 2012-08-23 |
US9284187B2 (en) | 2016-03-15 |
US9941222B2 (en) | 2018-04-10 |
US20160197047A1 (en) | 2016-07-07 |
EP2492239B1 (en) | 2020-08-26 |
CN102646644B (zh) | 2015-06-24 |
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Effective date of registration: 20201203 Address after: Eindhoven Patentee after: Theo Testing Co.,Ltd. Address before: La Ville de Perth Patentee before: AMS INTERNATIONAL AG |
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