CN102643613B - 一种用于蓝宝石衬底的研磨液及其制备方法 - Google Patents
一种用于蓝宝石衬底的研磨液及其制备方法 Download PDFInfo
- Publication number
- CN102643613B CN102643613B CN201210101944.9A CN201210101944A CN102643613B CN 102643613 B CN102643613 B CN 102643613B CN 201210101944 A CN201210101944 A CN 201210101944A CN 102643613 B CN102643613 B CN 102643613B
- Authority
- CN
- China
- Prior art keywords
- powder
- mixed
- grinding
- deionized water
- diadust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000227 grinding Methods 0.000 title claims abstract description 42
- 239000007788 liquid Substances 0.000 title claims abstract description 40
- 239000010980 sapphire Substances 0.000 title claims abstract description 23
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 title claims abstract description 16
- 238000002360 preparation method Methods 0.000 title claims description 6
- 239000000843 powder Substances 0.000 claims abstract description 46
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000000654 additive Substances 0.000 claims abstract description 22
- 230000000996 additive effect Effects 0.000 claims abstract description 21
- 239000008367 deionised water Substances 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 21
- 229910021641 deionized water Inorganic materials 0.000 claims description 17
- 235000011187 glycerol Nutrition 0.000 claims description 15
- 238000003801 milling Methods 0.000 claims description 14
- 238000003756 stirring Methods 0.000 claims description 11
- 239000012046 mixed solvent Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- RCEAADKTGXTDOA-UHFFFAOYSA-N OS(O)(=O)=O.CCCCCCCCCCCC[Na] Chemical compound OS(O)(=O)=O.CCCCCCCCCCCC[Na] RCEAADKTGXTDOA-UHFFFAOYSA-N 0.000 claims description 7
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 7
- 229920001577 copolymer Polymers 0.000 claims description 7
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 7
- 229910052593 corundum Inorganic materials 0.000 claims description 6
- 239000010431 corundum Substances 0.000 claims description 6
- 229910052580 B4C Inorganic materials 0.000 claims description 5
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims description 5
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 9
- 239000013078 crystal Substances 0.000 abstract description 8
- 239000000126 substance Substances 0.000 abstract description 5
- 239000010432 diamond Substances 0.000 abstract description 4
- 229910003460 diamond Inorganic materials 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 4
- 239000006185 dispersion Substances 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 230000003746 surface roughness Effects 0.000 abstract description 2
- 238000009776 industrial production Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210101944.9A CN102643613B (zh) | 2012-03-31 | 2012-03-31 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210101944.9A CN102643613B (zh) | 2012-03-31 | 2012-03-31 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102643613A CN102643613A (zh) | 2012-08-22 |
CN102643613B true CN102643613B (zh) | 2014-03-12 |
Family
ID=46656697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210101944.9A Expired - Fee Related CN102643613B (zh) | 2012-03-31 | 2012-03-31 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN102643613B (zh) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6408236B2 (ja) * | 2014-04-03 | 2018-10-17 | 昭和電工株式会社 | 研磨組成物、及び該研磨組成物を用いた基板の研磨方法 |
CN104017499B (zh) * | 2014-05-19 | 2015-08-19 | 贵州荣清工具有限公司 | 一种金刚石研磨膏 |
EP3284101B1 (en) * | 2015-04-13 | 2022-09-07 | CMC Materials, Inc. | Diamond-based slurries with improved sapphire removal rate and surface roughness |
CN106281219A (zh) * | 2015-05-22 | 2017-01-04 | 江苏益林金刚石工具有限公司 | 一种水油双溶性金刚石复合研磨膏及其制备方法 |
CN105017969A (zh) * | 2015-06-30 | 2015-11-04 | 安徽德诺化工有限公司 | 一种用于蓝宝石衬底的研磨液组合物及其制备方法 |
CN109551304A (zh) * | 2018-10-30 | 2019-04-02 | 广东劲胜智能集团股份有限公司 | 一种超薄陶瓷指纹片研磨工艺 |
CN110398792A (zh) * | 2019-07-22 | 2019-11-01 | 北京理工大学 | 一种微透镜阵列研磨装置及方法 |
CN110484207B (zh) * | 2019-09-20 | 2020-05-29 | 江苏京晶光电科技有限公司 | 一种蓝宝石晶片细磨研磨液的制备方法 |
CN110744362A (zh) * | 2019-10-17 | 2020-02-04 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片研磨抛光方法 |
CN110643327A (zh) * | 2019-10-17 | 2020-01-03 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片研磨液的制备方法 |
CN112375498A (zh) * | 2020-11-13 | 2021-02-19 | 镇江丰成特种工具有限公司 | 一种蓝宝石晶片研磨液及其制备方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1394730A (zh) * | 2001-07-11 | 2003-02-05 | 上海泛联科技股份有限公司 | 陶瓷量块的加工工艺及其设备 |
CN1473094A (zh) * | 2000-10-24 | 2004-02-04 | ��������ŵά�桤˹���� | 抛光工具及制造所述工具的组合物 |
CN101175607A (zh) * | 2005-04-08 | 2008-05-07 | 圣戈本磨料股份有限公司 | 具有反应活性生色团的研磨制品 |
CN102250585A (zh) * | 2011-08-19 | 2011-11-23 | 永州皓志稀土材料有限公司 | 一种氧化锆研磨液的制备方法 |
CN102311718A (zh) * | 2011-04-26 | 2012-01-11 | 东莞市安美润滑科技有限公司 | 用于硬脆性材料超精研磨的水性研磨液及其使用方法 |
CN102337084A (zh) * | 2011-07-25 | 2012-02-01 | 郑州磨料磨具磨削研究所 | Led衬底加工用研磨液及其制备方法 |
-
2012
- 2012-03-31 CN CN201210101944.9A patent/CN102643613B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1473094A (zh) * | 2000-10-24 | 2004-02-04 | ��������ŵά�桤˹���� | 抛光工具及制造所述工具的组合物 |
CN1394730A (zh) * | 2001-07-11 | 2003-02-05 | 上海泛联科技股份有限公司 | 陶瓷量块的加工工艺及其设备 |
CN101175607A (zh) * | 2005-04-08 | 2008-05-07 | 圣戈本磨料股份有限公司 | 具有反应活性生色团的研磨制品 |
CN102311718A (zh) * | 2011-04-26 | 2012-01-11 | 东莞市安美润滑科技有限公司 | 用于硬脆性材料超精研磨的水性研磨液及其使用方法 |
CN102337084A (zh) * | 2011-07-25 | 2012-02-01 | 郑州磨料磨具磨削研究所 | Led衬底加工用研磨液及其制备方法 |
CN102250585A (zh) * | 2011-08-19 | 2011-11-23 | 永州皓志稀土材料有限公司 | 一种氧化锆研磨液的制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN102643613A (zh) | 2012-08-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102643613B (zh) | 一种用于蓝宝石衬底的研磨液及其制备方法 | |
WO2019119816A1 (zh) | 一种cmp抛光液及其制备方法和应用 | |
CN102311706B (zh) | 一种纳米级抛光液及其调配方法 | |
CN102311717B (zh) | 一种高硬度微米研磨液及其配制方法 | |
CN107189693B (zh) | 一种a向蓝宝石化学机械抛光用抛光液及其制备方法 | |
CN105153943B (zh) | 氧化镓晶片抗解理抛光液及其制备方法 | |
CN106112831B (zh) | 一种石墨烯改性陶瓷磨具材料及其制备方法 | |
CN102268225B (zh) | 永悬浮钻石研磨液 | |
CN105647475A (zh) | 一种水油两溶金刚石研磨液及其制备方法 | |
CN103571333A (zh) | 一种混合磨料碱性蓝宝石衬底材料cmp抛光液及其制备方法 | |
CN104449403B (zh) | 蓝宝石衬底材料的复合碱抛光液及其循环使用方法 | |
CN104835731A (zh) | 一种大尺寸4H、6H-SiC单晶片的快速抛光方法 | |
CN111303981A (zh) | 一种金刚线切割液及其制备方法 | |
CN101979450B (zh) | 研磨液、研磨液的制备方法和使用该研磨液的研磨方法 | |
CN105014520B (zh) | 一种蓝宝石衬底片浸没式化学机械抛光方法 | |
CN108034360A (zh) | 一种CMP抛光液及其在GaAs晶片抛光中的应用 | |
CN106112837A (zh) | 树脂金刚石线锯用金刚石微粉的表面处理方法 | |
CN103880296B (zh) | 一种软材质光学玻璃锆基抛光液的制备方法 | |
CN108017998A (zh) | 一种cmp抛光液的制备方法 | |
CN103286672A (zh) | 快速获得具有原子台阶表面的SiC晶片抛光方法 | |
CN106349945B (zh) | 一种抛光组合物 | |
CN108864949A (zh) | 一种用于抛光玻璃的稀土抛光液及其制备方法 | |
CN111073518A (zh) | 一种硅铝复合抛光粉的制备方法 | |
CN106903559A (zh) | 一种蓝宝石基片制作方法 | |
CN106967386B (zh) | 一种水性碳化硅晶片研磨液及其制备方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20120822 Assignee: Changzhou Tongtai Photoelectric Co., Ltd. Assignor: Jiangsu Xinheatai Machinery Group Contract record no.: 2013320000153 Denomination of invention: Grinding liquid for sapphire substrate and preparation method of grinding liquid License type: Exclusive License Record date: 20130319 |
|
LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
ASS | Succession or assignment of patent right |
Owner name: CHANGZHOU TONGTAI OPTOELECTRONIC CO., LTD. Free format text: FORMER OWNER: JIANGSU XINHETAI OPTOELECTRONIC TECHNOLOGY CO., LTD. Effective date: 20131112 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20131112 Address after: 213000, Jiangsu, Wujin District, Changzhou hi tech Industrial Development Zone, No. 588 South Road, Tian An Digital City, the first phase of A building, Tian An Innovation Plaza, room 404 Applicant after: Changzhou Tongtai Photoelectric Co., Ltd. Address before: Huang Zhen Zhai Qiao Cun, Wujin District of Jiangsu city in Changzhou Province before 213000 Applicant before: Jiangsu Xinheatai Machinery Group |
|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140312 Termination date: 20180331 |
|
CF01 | Termination of patent right due to non-payment of annual fee |