CN110484207B - 一种蓝宝石晶片细磨研磨液的制备方法 - Google Patents
一种蓝宝石晶片细磨研磨液的制备方法 Download PDFInfo
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- CN110484207B CN110484207B CN201910890490.XA CN201910890490A CN110484207B CN 110484207 B CN110484207 B CN 110484207B CN 201910890490 A CN201910890490 A CN 201910890490A CN 110484207 B CN110484207 B CN 110484207B
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- stirring
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- 238000000227 grinding Methods 0.000 title claims abstract description 72
- 239000012530 fluid Substances 0.000 title claims abstract description 34
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 10
- 239000010980 sapphire Substances 0.000 title claims abstract description 10
- 238000003756 stirring Methods 0.000 claims abstract description 73
- 239000002270 dispersing agent Substances 0.000 claims abstract description 63
- 229910052580 B4C Inorganic materials 0.000 claims abstract description 22
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims abstract description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 238000002156 mixing Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 8
- 239000003945 anionic surfactant Substances 0.000 claims description 13
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 7
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 7
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 claims description 7
- 229920002545 silicone oil Polymers 0.000 claims description 7
- 239000002002 slurry Substances 0.000 abstract description 39
- 239000007788 liquid Substances 0.000 abstract description 12
- 239000000375 suspending agent Substances 0.000 abstract description 11
- 239000002699 waste material Substances 0.000 abstract description 7
- 238000004064 recycling Methods 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 10
- 239000011259 mixed solution Substances 0.000 description 10
- 238000011084 recovery Methods 0.000 description 8
- 239000002245 particle Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 5
- 238000000638 solvent extraction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 239000003082 abrasive agent Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000006228 supernatant Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Abstract
Description
Claims (5)
Priority Applications (1)
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CN201910890490.XA CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
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CN201910890490.XA CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
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CN110484207A CN110484207A (zh) | 2019-11-22 |
CN110484207B true CN110484207B (zh) | 2020-05-29 |
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CN201910890490.XA Active CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
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Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1227730C (zh) * | 2003-04-30 | 2005-11-16 | 东莞市福地电子材料有限公司 | 一种纳米级蓝宝石衬底的加工方法 |
KR101369828B1 (ko) * | 2006-12-28 | 2014-03-05 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 사파이어 기판 로트 |
CN101979483B (zh) * | 2010-10-09 | 2013-02-27 | 辽宁奥克化学股份有限公司 | 一种提高碳化硅砂浆分散性能的方法 |
CN102212334B (zh) * | 2011-04-19 | 2013-06-26 | 浙江露笑光电有限公司 | 蓝宝石衬底片粗磨研磨液及其配制方法 |
CN102212333B (zh) * | 2011-04-19 | 2013-06-26 | 浙江露笑光电有限公司 | 蓝宝石衬底片精磨研磨液及其配制方法 |
CN102643613B (zh) * | 2012-03-31 | 2014-03-12 | 常州同泰光电有限公司 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
CN102729116B (zh) * | 2012-06-20 | 2016-04-27 | 大连淡宁实业发展有限公司 | 蓝宝石单晶长方体窗口多面抛光批量加工的加工工艺 |
TW201514128A (zh) * | 2013-08-05 | 2015-04-16 | Gtat Corp | 分析藍寶石物品的方法 |
CN105038607B (zh) * | 2015-06-16 | 2017-09-29 | 东莞市中微纳米科技有限公司 | 高效蓝宝石精磨方法及精磨液 |
CN104999365B (zh) * | 2015-06-16 | 2018-02-16 | 东莞市中微纳米科技有限公司 | 蓝宝石晶片研磨抛光方法 |
CN105215838B (zh) * | 2015-10-29 | 2017-11-28 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片的研磨装置及其研磨方法 |
CN105482715A (zh) * | 2015-12-02 | 2016-04-13 | 珠海东精大电子科技有限公司 | 蓝宝石研磨液、蓝宝石研磨液制备工艺及蓝宝石研磨液的使用方法 |
CN105505316B (zh) * | 2015-12-23 | 2017-08-01 | 北京国瑞升科技股份有限公司 | 蓝宝石粗磨用研磨助剂、研磨液及它们的制备方法 |
CN106271900A (zh) * | 2016-08-31 | 2017-01-04 | 天通银厦新材料有限公司 | 一种蓝宝石抛光工艺 |
CN106736875B (zh) * | 2016-11-30 | 2019-01-11 | 江苏师范大学 | 一种蓝宝石整流罩的加工方法 |
CN106590441A (zh) * | 2016-12-29 | 2017-04-26 | 东莞市淦宏信息科技有限公司 | 一种蓝宝石研磨液 |
CN106967386B (zh) * | 2017-03-27 | 2021-01-29 | 北京世纪金光半导体有限公司 | 一种水性碳化硅晶片研磨液及其制备方法 |
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Effective date of registration: 20240328 Address after: 364105 Yongding Industrial Park, Gaopo Town, Yongding District, Longyan City, Fujian Province Patentee after: FUJIAN ZOOMKING TECHNOLOGY CO.,LTD. Country or region after: China Address before: 8 Feiyue Road, Shanghuang science and Technology Pioneer Park, Liyang City, Changzhou City, Jiangsu Province 213300 Patentee before: Jiangsu Jingjing Photoelectric Technology Co.,Ltd. Country or region before: China |