CN110484207A - 一种蓝宝石晶片细磨研磨液的制备方法 - Google Patents
一种蓝宝石晶片细磨研磨液的制备方法 Download PDFInfo
- Publication number
- CN110484207A CN110484207A CN201910890490.XA CN201910890490A CN110484207A CN 110484207 A CN110484207 A CN 110484207A CN 201910890490 A CN201910890490 A CN 201910890490A CN 110484207 A CN110484207 A CN 110484207A
- Authority
- CN
- China
- Prior art keywords
- preparation
- dispersant
- added
- lapping liquid
- stirred
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 47
- 238000000227 grinding Methods 0.000 title claims abstract description 40
- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 10
- 239000010980 sapphire Substances 0.000 title claims abstract description 10
- 239000002270 dispersing agent Substances 0.000 claims abstract description 57
- 229910052580 B4C Inorganic materials 0.000 claims abstract description 19
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 239000003945 anionic surfactant Substances 0.000 claims description 8
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 claims description 7
- 229920002545 silicone oil Polymers 0.000 claims description 7
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 2
- 238000003756 stirring Methods 0.000 abstract description 23
- 239000002002 slurry Substances 0.000 abstract description 11
- 239000000375 suspending agent Substances 0.000 abstract description 11
- 239000000463 material Substances 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 7
- 238000004064 recycling Methods 0.000 abstract description 6
- 238000011084 recovery Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 4
- 239000002699 waste material Substances 0.000 abstract description 4
- 238000003801 milling Methods 0.000 abstract 1
- 239000003795 chemical substances by application Substances 0.000 description 20
- 238000002156 mixing Methods 0.000 description 11
- 239000011259 mixed solution Substances 0.000 description 10
- 239000006185 dispersion Substances 0.000 description 6
- 230000003213 activating effect Effects 0.000 description 5
- 125000000129 anionic group Chemical group 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 150000004040 pyrrolidinones Chemical class 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Natural products CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001376 precipitating effect Effects 0.000 description 1
- 239000013049 sediment Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Lubricants (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910890490.XA CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910890490.XA CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110484207A true CN110484207A (zh) | 2019-11-22 |
CN110484207B CN110484207B (zh) | 2020-05-29 |
Family
ID=68558888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910890490.XA Active CN110484207B (zh) | 2019-09-20 | 2019-09-20 | 一种蓝宝石晶片细磨研磨液的制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110484207B (zh) |
Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1469459A (zh) * | 2003-04-30 | 2004-01-21 | 东莞市福地电子材料有限公司 | 一种纳米级蓝宝石衬底的加工方法及其专用抛光液 |
CN101979483A (zh) * | 2010-10-09 | 2011-02-23 | 辽宁奥克化学股份有限公司 | 一种提高碳化硅砂浆分散性能的方法 |
CN102212333A (zh) * | 2011-04-19 | 2011-10-12 | 浙江露笑光电有限公司 | 蓝宝石衬底片精磨研磨液及其配制方法 |
CN102212334A (zh) * | 2011-04-19 | 2011-10-12 | 浙江露笑光电有限公司 | 蓝宝石衬底片粗磨研磨液及其配制方法 |
CN102643613A (zh) * | 2012-03-31 | 2012-08-22 | 江苏鑫和泰光电科技有限公司 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
CN102729116A (zh) * | 2012-06-20 | 2012-10-17 | 大连淡宁实业发展有限公司 | 蓝宝石单晶长方体窗口多面抛光批量加工的加工工艺 |
CN103382575A (zh) * | 2006-12-28 | 2013-11-06 | 圣戈本陶瓷及塑料股份有限公司 | 蓝宝石基材 |
WO2015021002A1 (en) * | 2013-08-05 | 2015-02-12 | Gtat Corporation | A method of analyzing a sapphire article |
CN104999365A (zh) * | 2015-06-16 | 2015-10-28 | 东莞市中微纳米科技有限公司 | 蓝宝石晶片研磨抛光方法 |
CN105038607A (zh) * | 2015-06-16 | 2015-11-11 | 东莞市中微纳米科技有限公司 | 高效蓝宝石精磨方法及精磨液 |
CN105215838A (zh) * | 2015-10-29 | 2016-01-06 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片的研磨装置及其研磨方法 |
CN105482715A (zh) * | 2015-12-02 | 2016-04-13 | 珠海东精大电子科技有限公司 | 蓝宝石研磨液、蓝宝石研磨液制备工艺及蓝宝石研磨液的使用方法 |
CN105505316A (zh) * | 2015-12-23 | 2016-04-20 | 北京国瑞升科技股份有限公司 | 蓝宝石粗磨用研磨助剂、研磨液及它们的制备方法 |
CN106271900A (zh) * | 2016-08-31 | 2017-01-04 | 天通银厦新材料有限公司 | 一种蓝宝石抛光工艺 |
CN106590441A (zh) * | 2016-12-29 | 2017-04-26 | 东莞市淦宏信息科技有限公司 | 一种蓝宝石研磨液 |
CN106736875A (zh) * | 2016-11-30 | 2017-05-31 | 江苏师范大学 | 一种蓝宝石整流罩的加工方法 |
CN106967386A (zh) * | 2017-03-27 | 2017-07-21 | 北京世纪金光半导体有限公司 | 一种水性碳化硅晶片研磨液及其制备方法 |
-
2019
- 2019-09-20 CN CN201910890490.XA patent/CN110484207B/zh active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1469459A (zh) * | 2003-04-30 | 2004-01-21 | 东莞市福地电子材料有限公司 | 一种纳米级蓝宝石衬底的加工方法及其专用抛光液 |
CN103382575A (zh) * | 2006-12-28 | 2013-11-06 | 圣戈本陶瓷及塑料股份有限公司 | 蓝宝石基材 |
CN101979483A (zh) * | 2010-10-09 | 2011-02-23 | 辽宁奥克化学股份有限公司 | 一种提高碳化硅砂浆分散性能的方法 |
CN102212333A (zh) * | 2011-04-19 | 2011-10-12 | 浙江露笑光电有限公司 | 蓝宝石衬底片精磨研磨液及其配制方法 |
CN102212334A (zh) * | 2011-04-19 | 2011-10-12 | 浙江露笑光电有限公司 | 蓝宝石衬底片粗磨研磨液及其配制方法 |
CN102643613A (zh) * | 2012-03-31 | 2012-08-22 | 江苏鑫和泰光电科技有限公司 | 一种用于蓝宝石衬底的研磨液及其制备方法 |
CN102729116A (zh) * | 2012-06-20 | 2012-10-17 | 大连淡宁实业发展有限公司 | 蓝宝石单晶长方体窗口多面抛光批量加工的加工工艺 |
WO2015021002A1 (en) * | 2013-08-05 | 2015-02-12 | Gtat Corporation | A method of analyzing a sapphire article |
CN104999365A (zh) * | 2015-06-16 | 2015-10-28 | 东莞市中微纳米科技有限公司 | 蓝宝石晶片研磨抛光方法 |
CN105038607A (zh) * | 2015-06-16 | 2015-11-11 | 东莞市中微纳米科技有限公司 | 高效蓝宝石精磨方法及精磨液 |
CN105215838A (zh) * | 2015-10-29 | 2016-01-06 | 江苏吉星新材料有限公司 | 一种蓝宝石晶片的研磨装置及其研磨方法 |
CN105482715A (zh) * | 2015-12-02 | 2016-04-13 | 珠海东精大电子科技有限公司 | 蓝宝石研磨液、蓝宝石研磨液制备工艺及蓝宝石研磨液的使用方法 |
CN105505316A (zh) * | 2015-12-23 | 2016-04-20 | 北京国瑞升科技股份有限公司 | 蓝宝石粗磨用研磨助剂、研磨液及它们的制备方法 |
CN106271900A (zh) * | 2016-08-31 | 2017-01-04 | 天通银厦新材料有限公司 | 一种蓝宝石抛光工艺 |
CN106736875A (zh) * | 2016-11-30 | 2017-05-31 | 江苏师范大学 | 一种蓝宝石整流罩的加工方法 |
CN106590441A (zh) * | 2016-12-29 | 2017-04-26 | 东莞市淦宏信息科技有限公司 | 一种蓝宝石研磨液 |
CN106967386A (zh) * | 2017-03-27 | 2017-07-21 | 北京世纪金光半导体有限公司 | 一种水性碳化硅晶片研磨液及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110484207B (zh) | 2020-05-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104010770B (zh) | 研磨材料再生方法及再生研磨材料 | |
US4775393A (en) | Autogenous attrition grinding | |
CN104946895B (zh) | 利用废稀土抛光粉循环再生稀土化合物方法 | |
CN102730696B (zh) | 物理法回收硅片切割废砂浆中的切割液、晶硅粉和碳化硅微粉的方法 | |
CN101282790B (zh) | 提高矿石、矿物和精矿的研磨效率的方法 | |
CN104387094B (zh) | 一种炼钢耐火材料回收利用工艺 | |
CN103663453A (zh) | 碳化硅粉的制造方法 | |
CN111925196B (zh) | 一种以青砂为原料的陶瓷砖及其制备方法 | |
CN104507639A (zh) | 研磨材料再生方法 | |
CN106542827B (zh) | 碳化硅陶瓷粉的绿色制备方法 | |
CN104703759B (zh) | 研磨材料再生方法 | |
CN111348856A (zh) | 一种人造岗石用粉料的制备工艺 | |
CN110484207A (zh) | 一种蓝宝石晶片细磨研磨液的制备方法 | |
CN103429706A (zh) | 沥青分离组合物和工艺过程 | |
CN104023915B (zh) | 研磨材料分离方法及再生研磨材料 | |
CN111487111A (zh) | 粉末样品的岩相光片制备方法 | |
CN208213305U (zh) | 一种涂料研磨机 | |
CN107983541A (zh) | 一种强化微细粒赤铁矿选择性絮凝的方法 | |
CN208978004U (zh) | 一种淤泥浆制砖用的设备 | |
CN206526920U (zh) | 一种浮选用低品位菱镁矿浆制备系统 | |
CN102061108A (zh) | 一种叶腊石微粉增白工艺 | |
CN106903559A (zh) | 一种蓝宝石基片制作方法 | |
CN204825005U (zh) | 一种用于富集分离废稀土抛光粉的螺旋分级器 | |
CN102372486A (zh) | 低成本镁质中间包涂料及其制备方法 | |
CN214051291U (zh) | 一种粉体原料混料、研磨、除铁过滤生产线 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240328 Address after: 364105 Yongding Industrial Park, Gaopo Town, Yongding District, Longyan City, Fujian Province Patentee after: FUJIAN ZOOMKING TECHNOLOGY CO.,LTD. Country or region after: China Address before: 8 Feiyue Road, Shanghuang science and Technology Pioneer Park, Liyang City, Changzhou City, Jiangsu Province 213300 Patentee before: Jiangsu Jingjing Photoelectric Technology Co.,Ltd. Country or region before: China |
|
TR01 | Transfer of patent right |