CN102641823B - A kind of even adhesive dispenser of microwave and even gluing method - Google Patents
A kind of even adhesive dispenser of microwave and even gluing method Download PDFInfo
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- CN102641823B CN102641823B CN201210148730.7A CN201210148730A CN102641823B CN 102641823 B CN102641823 B CN 102641823B CN 201210148730 A CN201210148730 A CN 201210148730A CN 102641823 B CN102641823 B CN 102641823B
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- microwave
- vacuum cup
- cull
- photoresist
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 239000000853 adhesive Substances 0.000 title claims abstract description 19
- 230000001070 adhesive effect Effects 0.000 title claims abstract description 19
- 238000004026 adhesive bonding Methods 0.000 title claims abstract description 15
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 35
- 238000001035 drying Methods 0.000 claims abstract description 32
- 230000008569 process Effects 0.000 claims abstract description 18
- 239000003292 glue Substances 0.000 claims abstract description 7
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 239000011248 coating agent Substances 0.000 claims description 7
- 238000000576 coating method Methods 0.000 claims description 7
- 230000000694 effects Effects 0.000 claims description 5
- 238000004528 spin coating Methods 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 claims description 3
- 239000011229 interlayer Substances 0.000 claims description 3
- 239000010445 mica Substances 0.000 claims description 3
- 229910052618 mica group Inorganic materials 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 238000000605 extraction Methods 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 abstract description 13
- 239000002904 solvent Substances 0.000 abstract description 4
- 239000012528 membrane Substances 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 6
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
The present invention relates to the technical field utilizing microwave energy drying of semiconductor, be specifically related to the even adhesive dispenser of a kind of microwave.The even adhesive dispenser of described microwave, comprises microwave cavity, microwave source, waveguide, motor, vavuum pump and control panel; Microwave source is fixed on the control circuit of control panel, and microwave source is connected with microwave cavity by waveguide; Be provided with vacuum cup in microwave cavity, vavuum pump is connected with the suction nozzle of vacuum cup by pipeline, and the output shaft of motor is connected with vacuum cup; Microwave cavity upper end is sliding door type closed head, and sliding door type closed head is provided with photoresist dropper.The present invention also provides a kind of microwave even gluing method.The present invention integrates preliminary drying, even glue, drying, in microwave irradiation process, photoresist self-heating, while solvent volatilization, photoresist entirety is in molten condition, improve the surface planarisation of glued membrane greatly, its follow-up accurate exposure also can improve greatly.Drying time of the present invention is shorter simultaneously, reduces energy ezpenditure.
Description
Technical field
The present invention relates to a kind of equipment utilizing microwave energy drying, be specifically related to the even adhesive dispenser of a kind of microwave and even gluing method.
Background technology
Existing microwave dryer mainly includes microwave source, waveguide, resonator, discharge portion, waveguide is connected between microwave source and resonator, waveguide is communicated with resonator by coupling aperture, microwave source sends microwave and enters resonator by waveguide, a resonance inner chamber is provided with in resonator, resonance inner chamber is all designed to rectangular cavity, and resonator also offers exhaust outlet, and exhaust outlet communicates with discharge portion.When microwave enters after resonator through coupling aperture, in cavity, roundtrip is to reach the heat drying to sample, and is extracted out by moisture by discharge portion.Experiment prove, the shape of the resonator in traditional microwave dryer and the distribution of coupling aperture relevant to the even microwave distribution in cavity, the two directly affects the drying effect of sample.
Substrate, in photoresist coating procedure, is generally first put on vacuum drying oven or flat plate heat and is carried out preliminary drying, thus remove suprabasil moisture by current semicon industry, strengthens the adhesion between photoresist and substrate; Then substrate is transferred on sol evenning machine platform and applies photoresist; Finally the substrate of coating photoresist is transferred on flat plate heat or in baking oven and carries out front baking technique.From said process technological process, traditional even gluing method inefficiency, and in transfer process, certain damage can be had to the photoresist of coating owing to using the fixtures such as tweezers.Therefore need to develop a kind of efficient, integrated equipment for evenly dividing glue.
Traditional drying mode has baking oven to heat (Convective Heating mode), infrared radiation heating (radiant heating pattern) and hot plate heating (heat transfer mode of heating).Being compared as follows of microwave drying and other drying modes: it is heat substrate sample entirety that baking oven heats; Infrared radiation heating is from the upper surface of photoresist; Flat heater is from backside of substrate; And heating using microwave can cause photoresist self-heating, the overall uniform intensification of photoresist, while solvent volatilization, photoresist entirety is softening, thus obtains the photoresist film of uniform flat.
Summary of the invention
The object of the present invention is to provide the even adhesive dispenser of a kind of microwave, drying can be carried out to photoresist in the short period of time, and obtain the photoresist film of uniform flat.
Another object of the present invention is to provide a kind of microwave even gluing method.
In order to achieve the above object, the technical solution used in the present invention is as follows:
The even adhesive dispenser of a kind of microwave, comprises microwave cavity, microwave source, waveguide, motor, vavuum pump and control panel; Described microwave source is fixed on the control circuit of described control panel, and described microwave source is connected with described microwave cavity by described waveguide; Be provided with vacuum cup in described microwave cavity, described vavuum pump is connected by the suction nozzle of pipeline with described vacuum cup, and the output shaft of described motor is connected with described vacuum cup; Described microwave cavity upper end is sliding door type closed head, and described sliding door type closed head is provided with photoresist dropper.
In such scheme, described control panel is provided with motor speed control knob, and described motor speed control knob is used for controlling rotating speed and the acceleration of described motor, and the rotating speed of described motor is 100 ~ 8000rpm.
In such scheme, described control panel is provided with variable time control, and described variable time control is for controlling the even glue timing of pending sample and dry timing.
In such scheme, the even adhesive dispenser of described microwave also comprises temperature control equipment and coupled temperature indicating device, and wherein temperature control equipment is arranged on the control circuit of described control panel, and it is outside that described temperature indicating device is arranged on described microwave cavity.
In such scheme, be provided with cull disk in described microwave cavity, described cull disk is arranged on the below of described vacuum cup.
In such scheme, described vavuum pump is connected with the outlet of described cull disk with the suction nozzle of described vacuum cup respectively by triple valve, pipeline between described triple valve and described vacuum cup is provided with the first valve, the pipeline between described triple valve and described cull disk is provided with successively Dewar bottle and the second valve.
In such scheme, described sliding door type closed head is provided with organic solution dropper and deionized water dropper.
In such scheme, the exit of the described waveguide in described microwave cavity is provided with mica sheet.
In such scheme, described microwave cavity inner upper is provided with yellow fluorescence lamp.
In such scheme, in the interlayer of described sliding door type closed head, be provided with wire netting.
The even gluing method of a kind of microwave, comprises the steps:
(1) pending sample is placed on the vacuum cup in microwave cavity, open the vavuum pump be connected with the suction nozzle of described vacuum cup, described pending sample adsorption is lived by described vacuum cup, simultaneously, setting microwave drying time and baking temperature, and start microwave source preliminary drying is carried out to described pending sample;
(2) by photoresist dropper, photoresist is dropped in described pending sample surfaces, set rotating speed and the spin coating time of motor according to demand, described vacuum cup completes spin processes under the drive of described motor;
(3), after spin processes completes, the rotating speed of setting motor, then carries out drying process by control microwave drying time and baking temperature to described pending sample.
In such scheme, after described step (2) completes, also comprise the steps: the effect of the photoresist coating checking described pending sample surfaces, if apply uneven or have bubble, by organic solution dropper, organic solution is dropped in described pending sample surfaces photoresist is removed, and then clean described pending sample surfaces by deionized water dropper instillation deionized water, clean rear repeating said steps (2), spin processes has been carried out to described pending sample.
In such scheme, described even gluing method also comprises the steps: when being arranged on the cull in the cull disk below described vacuum cup and being more, organic solvent can be instilled in described cull disk cull is dissolved, then by the extraction of described vavuum pump, cull be discharged described cull disk.
Compared with prior art, the invention has the beneficial effects as follows:
The even adhesive dispenser of microwave provided by the invention integrates preliminary drying, even glue, drying, in microwave irradiation process, because dielectric heating phenomenon makes photoresist self-heating, while solvent volatilization, photoresist entirety is in molten condition, improve the surface planarisation of glued membrane greatly, its follow-up accurate exposure also can improve greatly.Drying time of the present invention is shorter simultaneously, reduces energy ezpenditure.
Accompanying drawing explanation
The structural representation of the even adhesive dispenser of microwave that Fig. 1 provides for the embodiment of the present invention;
The process chart of the even gluing method of microwave that Fig. 2 provides for the embodiment of the present invention.
Detailed description of the invention
Be described principle of the present invention and feature below in conjunction with accompanying drawing, example, only for explaining the present invention, is not intended to limit scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of microwave even adhesive dispenser, comprises microwave cavity 2, microwave source 7, waveguide, motor 11, vavuum pump 15 and control panel 18.The even adhesive dispenser of described microwave also comprises temperature control equipment and coupled temperature indicating device 1, be used for controlling the constant temperature of microwave cavity 2, wherein temperature control equipment is arranged on the control circuit of control panel 18, and it is outside that temperature indicating device 1 is arranged on microwave cavity 2.
Microwave source 7 is fixed on the control circuit of control panel 18, and microwave source 7 is connected with microwave cavity 2 by waveguide.Wherein microwave source 7 is made up of magnetron, high-tension transformer, high-voltage capacitance and diode etc.
Vacuum cup 10 and the cull disk 17 of metal material is provided with in microwave cavity 2, cull disk 17 is arranged on the below of vacuum cup 10, vacuum cup 10 is used for placing pending sample 9, and cull disk 17 is for the cull that holds in spin coating process and hold organic solution etc. in follow-up cleaning process.Vavuum pump 15 is connected with the outlet of cull disk 17 with the suction nozzle of vacuum cup 10 respectively by triple valve 14, pipeline between triple valve 14 and vacuum cup 10 is provided with the first valve 12, the pipeline between triple valve 14 and cull disk 17 is provided with successively Dewar bottle 20 and the second valve 13.Pending sample 9 can be adsorbed on vacuum cup 10 under the vacuum action of vavuum pump 15, and the cull in cull disk 17 and organic solution etc. can discharge cull disk 17 under the vacuum action of vavuum pump 15, leave in Dewar bottle 20.The output shaft of motor 11 is connected with vacuum cup 10, and vacuum cup 10 is rotary work under the drive of motor.
Microwave cavity 2 upper end is sliding door type closed head 21, and sliding door type closed head 21 is provided with photoresist dropper 3, organic solution dropper 4 and deionized water dropper 5.Be provided with wire netting in the interlayer of sliding door type closed head 21, be used for preventing electromagnetic leakage.
In the present embodiment, control panel 18 is provided with motor speed control knob 19, and motor speed control knob 19 is used for controlling the rotating speed of motor 11 and acceleration, and the rotary speed of motor is adjustable, and its velocity interval is 100 ~ 8000rpm.Control panel 18 is also provided with variable time control 8, and variable time control 8 is for controlling the even glue timing of pending sample and dry timing.
In the present embodiment, the exit of the waveguide in microwave cavity 2 is provided with mica sheet 16, prevents other fouls such as cull from entering in waveguide.
In the present embodiment, microwave cavity 2 inner upper is provided with yellow fluorescence lamp 6, can prevent photoresists sex change while illuminating in microwave cavity 2 chamber.
As depicted in figs. 1 and 2, the embodiment of the present invention also provides a kind of microwave even gluing method, specifically comprises the steps:
(1) the pending sample 9 cleaned up is placed on the vacuum cup 10 in microwave cavity 2, open the vavuum pump 15 be connected with the suction nozzle of vacuum cup 10, close the second valve 13, open the first valve 12, pending sample 9 is adsorbed by vacuum cup 10, meanwhile, by variable time control 8 and temperature control equipment setting microwave drying time and baking temperature, and start microwave source 7 and treat processing sample 9 and carry out preliminary drying;
(2) by photoresist dropper 3, photoresist is dropped in pending sample 9 surface, according to concrete demand, set rotating speed and the spin coating time of motor 11 by motor speed control knob 19 and variable time control 8, vacuum cup 10 rotary work under the drive of motor 11, completes spin processes;
Now, the effect of the photoresist coating on pending sample 9 surface can be checked, if apply uneven or have other problemses such as bubble time, by organic solution dropper 4, organic solution is dropped in pending sample 9 surface photoresist is removed, and then by deionized water dropper 5 instill deionized water clean pending sample 9 surface, clean rear repetition above-mentioned steps, continued to treat processing sample 9 and carry out spin processes; If coating effect is better, namely directly carry out the technique of step (3);
(3) after spin processes completes, again set the rotating speed of motor 11 by motor speed control knob 19, then control microwave drying time and baking temperature by variable time control 8 and temperature control equipment, treat processing sample 9 and carry out drying process; After completing drying, pending sample 9 can be taken out and carry out the techniques such as follow-up photolithographic exposure.
Also comprise the steps in the present embodiment, when being arranged on the cull in the cull disk 17 below vacuum cup 10 and being more, organic solvent can be instilled in cull disk 17 cull is dissolved, then the second valve 13 is opened, cull is discharged cull disk 17 by the vacuum produced by vavuum pump, and the cull extracted leaves in the Dewar bottle 20 that is arranged between vavuum pump 15 and cull disk 17 on pipeline.
Even adhesive dispenser based on microwave drying provided by the invention and even gluing method, that the preliminary drying of the pending sample of set pair, even glue, drying are in one, in microwave irradiation process, because dielectric heating phenomenon makes photoresist self-heating, while solvent volatilization, photoresist entirety is in molten condition, improve the surface planarisation of glued membrane greatly, the accurate exposure of its subsequent technique also can improve greatly.The drying time that the present invention simultaneously uses is shorter, reduces energy ezpenditure.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. the even adhesive dispenser of microwave, is characterized in that: comprise microwave cavity, microwave source, waveguide, motor, vavuum pump and control panel; Described microwave source is fixed on the control circuit of described control panel, and described microwave source is connected with described microwave cavity by described waveguide; Be provided with vacuum cup in described microwave cavity, described vavuum pump is connected by the suction nozzle of pipeline with described vacuum cup, and the output shaft of described motor is connected with described vacuum cup; Described microwave cavity upper end is sliding door type closed head, and described sliding door type closed head is provided with photoresist dropper;
Described control panel is provided with motor speed control knob, and described motor speed control knob is used for controlling rotating speed and the acceleration of described motor, and the rotating speed of described motor is 100 ~ 8000rpm; Described control panel is provided with variable time control, and described variable time control is for controlling the even glue timing of pending sample and dry timing; The even adhesive dispenser of described microwave also comprises temperature control equipment and coupled temperature indicating device, and wherein temperature control equipment is arranged on the control circuit of described control panel, and it is outside that described temperature indicating device is arranged on described microwave cavity;
Be provided with cull disk in described microwave cavity, described cull disk is arranged on the below of described vacuum cup; Described vavuum pump is connected with the outlet of described cull disk with the suction nozzle of described vacuum cup respectively by triple valve, pipeline between described triple valve and described vacuum cup is provided with the first valve, the pipeline between described triple valve and described cull disk is provided with successively Dewar bottle and the second valve.
2. the even adhesive dispenser of microwave as claimed in claim 1, is characterized in that: described sliding door type closed head is provided with organic solution dropper and deionized water dropper.
3. the even adhesive dispenser of microwave as claimed in claim 1, is characterized in that: the exit of the described waveguide in described microwave cavity is provided with mica sheet.
4. the even adhesive dispenser of microwave as claimed in claim 1, is characterized in that: described microwave cavity inner upper is provided with yellow fluorescence lamp.
5. the even adhesive dispenser of microwave as claimed in claim 1, is characterized in that: be provided with wire netting in the interlayer of described sliding door type closed head.
6. the even gluing method of microwave, is characterized in that, comprise the steps:
(1) pending sample is placed on the vacuum cup in microwave cavity, open the vavuum pump be connected with the suction nozzle of described vacuum cup, described pending sample adsorption is lived by described vacuum cup, simultaneously, setting microwave drying time and baking temperature, and start microwave source preliminary drying is carried out to described pending sample;
(2) by photoresist dropper, photoresist is dropped in described pending sample surfaces, set rotating speed and the spin coating time of motor according to demand, described vacuum cup completes spin processes under the drive of described motor;
(3), after spin processes completes, the rotating speed of setting motor, then carries out drying process by control microwave drying time and baking temperature to described pending sample.
7. the even gluing method of microwave as claimed in claim 6, it is characterized in that, after described step (2) completes, also comprise the steps: the effect of the photoresist coating checking described pending sample surfaces, if apply uneven or have bubble, by organic solution dropper, organic solution is dropped in described pending sample surfaces photoresist is removed, and then clean described pending sample surfaces by deionized water dropper instillation deionized water, clean rear repeating said steps (2), spin processes has been carried out to described pending sample.
8. the even gluing method of microwave as claimed in claim 6, it is characterized in that, described even gluing method also comprises the steps: when being arranged on the cull in the cull disk below described vacuum cup and being more, organic solvent can be instilled in described cull disk cull is dissolved, then by the extraction of described vavuum pump, cull be discharged described cull disk.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210148730.7A CN102641823B (en) | 2012-05-14 | 2012-05-14 | A kind of even adhesive dispenser of microwave and even gluing method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210148730.7A CN102641823B (en) | 2012-05-14 | 2012-05-14 | A kind of even adhesive dispenser of microwave and even gluing method |
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| CN102641823A CN102641823A (en) | 2012-08-22 |
| CN102641823B true CN102641823B (en) | 2015-10-28 |
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| CN201210148730.7A Expired - Fee Related CN102641823B (en) | 2012-05-14 | 2012-05-14 | A kind of even adhesive dispenser of microwave and even gluing method |
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| CN103353209B (en) * | 2013-06-20 | 2015-04-29 | 京东方科技集团股份有限公司 | Vacuum drying device and photolithographic process |
| CN104525456A (en) * | 2014-10-18 | 2015-04-22 | 湖北瀛通电子有限公司 | Glued wire airing device and airing method having timing and protecting functions |
| CN104880916A (en) * | 2015-06-25 | 2015-09-02 | 武汉华星光电技术有限公司 | Photoresist solvent removing device |
| CN105057163A (en) * | 2015-07-15 | 2015-11-18 | 中国科学院长春光学精密机械与物理研究所 | Spin coating device and method utilizing airflow for controlling thickness of photoresist film |
| CN105543977B (en) * | 2015-12-07 | 2018-01-12 | 天津中环半导体股份有限公司 | Automatic silicon sol evenning machine |
| CN105396754A (en) * | 2015-12-07 | 2016-03-16 | 天津中环半导体股份有限公司 | Glue coating device for automatic silicon wafer spin coater |
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| CN107366934B (en) * | 2017-07-21 | 2019-04-16 | 广东美的厨房电器制造有限公司 | Microwave furnace module and micro-wave oven |
| US10916452B2 (en) * | 2018-12-04 | 2021-02-09 | Nanya Technology Corporation | Wafer drying equipment and method thereof |
| CN111380332A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | Microwave drying device with power self-adaptive adjustment |
| CN111380331A (en) * | 2018-12-29 | 2020-07-07 | 中国科学院微电子研究所 | Microwave drying device |
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| CN115138536B (en) * | 2022-06-28 | 2023-05-02 | 上海交通大学 | Vacuum treatment method and device for glue homogenizing bubbles of embedded chip packaging substrate |
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Granted publication date: 20151028 |