CN212077148U

CN212077148U - Full-automatic film preparation device

Info

Publication number: CN212077148U
Application number: CN202020756823.8U
Authority: CN
Inventors: 黄方; 李渊; 张�林; 孙书杰; 殷小丰; 肖振宇
Original assignee: Xinyang Normal University
Current assignee: Xinyang Normal University
Priority date: 2020-05-09
Filing date: 2020-05-09
Publication date: 2020-12-04
Anticipated expiration: 2030-05-09

Abstract

The utility model discloses a full-automatic film preparation facilities, including the box, the box surface is equipped with the multi-functional control panel who is used for controlling experimental condition that electronic display screen, power cord and a plurality of knob are constituteed, is equipped with glue dripping subassembly, spin coating subassembly, heating element and shifts the subassembly in the box. The utility model realizes the integrated preparation process of the film from solution to film forming through the programmed work of automatically dripping solution, automatically spin-coating, automatically transferring the substrate, automatically heating and baking, automatically repeating the spin-coating heat treatment process for a plurality of times and the like; the device greatly reduces the labor cost, saves the time, can more accurately control the dosage, the heating time, the film coating time and the like, reduces the human error and improves the film coating repeatability; the device can be operated automatically, saves the input cost, is more suitable for the beginners with insufficient experience, and has the potential of batch popularization in the very big industry.

Description

Full-automatic film preparation device

Technical Field

The utility model relates to a full-automatic film preparation facilities can be used to the whole set of technology of spin coating preparation film based on various substrates, also can carry out operations such as film spin coating or heating alone.

Background

Sol-gel spin coating is a widely used thin film preparation method. The method has the advantages of short synthesis period, simple experimental operation, low cost, large-area preparation, potential industrial popularization and the like. When the spin-coating method is adopted for preparing the film, the process steps of manual glue dripping, spin coating by a glue homogenizing machine, annealing and baking by a heating table, repeated operation and the like are generally used. However, the method has the problems that the labor cost of manual glue dripping, substrate transferring, repeated operation and the like and the possible manual operation errors or errors exist, for example, the volume of glue dripped each time may be different, the substrate is easy to drop or pollute when being transferred, the repeatability of the experimental process is poor, and the like, and the problems are difficult to control well.

Disclosure of Invention

In order to overcome the defects, the utility model provides a full-automatic film preparation device has overcome that manual spin coating film operation experience is not enough, and operation repeatability is low, and time cost is big, and the many scheduling problems of artificial factor have emphatically realized the pursuit of trade techniques such as high efficiency, high success rate, high repeatability of spin coating preparation film.

The utility model discloses a solve the technical scheme that its technical problem adopted and be: a full-automatic film preparation device comprises a box body, wherein the surface of the box body is provided with a multifunctional control panel which is composed of an electronic display screen, a power line and a plurality of knobs and used for controlling experimental conditions, a glue dripping component, a spin coating component, a heating component and a transfer component which are controlled by the multifunctional control panel are arranged in the box body, the spin coating component, the heating component and the transfer component are arranged at intervals in a triangular mode, and the glue dripping component is arranged above the spin coating component; the spin coating assembly comprises a spin coating platform and a tray which is arranged above the spin coating platform and used for placing a film substrate, and the tray can stretch up and down relative to the spin coating platform and rotate along the central axis of the tray; the glue dripping component comprises a glue dripping booster containing a liquid transferring gun and is used for dripping a sol precursor onto a film substrate placed on the tray; the heating assembly comprises a heating table, at least one heating table column arranged in the center of the upper side surface of the heating table and a thermocouple probe arranged in the heating table; the transfer assembly includes an electrically operated grippable mobile robot for transferring the thin film substrate between the tray and the heating stage.

As a further improvement, the downside center of tray is equipped with hollow pivot, is equipped with the armature that can reciprocate in the upper end of this pivot, is equipped with the electro-magnet in the lower extreme of this pivot, be equipped with reset spring between armature and the electro-magnet.

As a further improvement, the center of the tray is provided with an air vent, and the air vent passes through the hollow structure of the rotating shaft and the air passage are connected with the vacuum-pumping mechanical pump outside the box body.

As a further improvement of the utility model, the glue dripping booster is fixed in the box body through an iron support and a clamp.

As a further improvement of the utility model, the heating component further comprises a heating lamp arranged above the heating table.

As a further improvement of the utility model, the heating lamp is an infrared lamp or a high-power incandescent lamp.

As a further improvement of the utility model, the box is internally provided with a heat insulation plate above the transfer component.

As a further improvement of the utility model, the box is internally provided with an electric control exhaust fan at the rear side.

As a further improvement of the utility model, a temperature probe is also arranged on the box body.

The utility model has the advantages that: the utility model realizes the integrated preparation process from the solution of the film cluster to the film forming through the programmed work of automatically dripping the solution, automatically spin-coating, automatically transferring the substrate, automatically heating and baking, automatically repeating the spin-coating heat treatment process for a plurality of times and the like; the device greatly reduces the labor cost, saves the time, can accurately control the dosage, the heating time, the film coating time and the like, reduces the human error and improves the film coating repeatability; in addition, the device can automatic operation, practices thrift the input cost, more is applicable to the beginner that the experience is not enough, has the potentiality of very big industrial batch popularization. The equipment has the characteristics of high integration, is convenient to carry, can meet the step-by-step requirements or continuous requirements of spin coating and heating in a laboratory, and is more convenient, quicker and more efficient in experiment.

Drawings

FIG. 1 is a schematic structural diagram of an embodiment of a fully automatic thin film manufacturing apparatus according to the present invention;

FIGS. 2A, 2B and 2C are schematic diagrams illustrating a process of transferring a film substrate by a robot arm according to an embodiment of the full-automatic film manufacturing apparatus of the present invention;

FIG. 3 is a schematic structural view of the tray according to the present invention in a partially extended state;

fig. 4 is the structure diagram of the partially embedded state of the tray of the present invention.

The following description is made with reference to the accompanying drawings:

1-a box body; 2-electronic display screen;

3-power line; 4-multifunctional control panel;

5-glue dripping component; 6-spin-coating the assembly;

7-heating element; 8-a transfer assembly;

51-glue dripping booster; 52-iron stand;

53-clamp; 61-spin-on platform;

62-a tray; 63-rotating shaft;

64-armature; 65-electromagnet;

66-return spring; 67-vacuum pumping mechanical pump;

71-heating stage; 72-heating stage;

73-thermocouple probe; 74-heating lamps;

9-a heat insulation plate; 10-electric control exhaust fan;

11-temperature probe; 101-thin film substrate.

81-Can grasp the mobile robotic arm; 102-Equipment door.

Detailed Description

The following description of the preferred embodiments of the present invention will be made in conjunction with the accompanying drawings.

As shown in fig. 1, the full-automatic thin film preparation device comprises a box body 1, wherein the surface of the box body is provided with an electronic display screen 2, a power line 3 and a multifunctional control panel 4 which is composed of a plurality of knobs and is used for controlling experimental conditions, and a power source connected with the power line 3 is household alternating current 220 v/50 hz. The multifunctional control panel 4 is combined with the electronic display screen 2, the volume amount and the injection speed of the solution injected at each time, the rotating speed and time during spin coating, the repeated times of spin coating, the heating temperature of a heating table, the indoor environment temperature, the baking temperature of the upper surface of the film, the moving height and angle of the mechanical arm, an exhaust fan and the like can be controlled, and meanwhile, the electronic display screen 2 can observe the adjusted parameters and the temperature change in real time.

Be equipped with in the box 1 and glue dripping subassembly 5, spin-coating subassembly 6, heating element 7 and the transfer subassembly 8 through the control of multi-functional control panel 4, spin-coating subassembly 6, heating element 7 and transfer subassembly 8 are triangle interval setting, and glue dripping subassembly 5 is located spin-coating subassembly 6's top.

The spin coating assembly 6 comprises a spin coating platform 61 and a tray 62 arranged above the spin coating platform 61 and used for placing the thin film substrate 101, wherein the center of the tray 62 can rotate relative to the spin coating platform 61 so as to realize the arrangement of different rotating speeds and rotating time. Simultaneously, tray 62 can stretch out and draw back from top to bottom relative spin coating platform 61, realizes fixed embedded on spin coating platform 61, also can pop out and break away from the spin coating platform, and concrete structure is: referring to fig. 3, a hollow rotating shaft 63 is arranged at the center of the lower side surface of the tray, an armature 64 capable of moving up and down is arranged in the upper end of the rotating shaft, an electromagnet 65 is arranged in the lower end of the rotating shaft, and a return spring 66 is arranged between the armature and the electromagnet. When the electromagnet is powered on, the armature is stressed to attract the tray to move downwards, the tray is driven to be embedded into the spin coating platform 61, and when the electromagnet is powered off, the armature rises under the action of the elastic force of the reset spring, and the tray is driven to be separated from the spin coating platform. The tray can also be rotatory through the relative spin-coating platform of pivot, is equipped with the air vent in the center of tray simultaneously, and this air vent connects in setting up through the hollow structure and the air flue of pivot the mechanical pump 67 of evacuation outside the box 1, the mechanical pump 67 of evacuation is through bleeding the air vent. The platform and the wafer bearing frame for bearing the film substrate are arranged above the tray, the wafer bearing frame is slightly higher than the platform, and the film substrate is fixed by the wafer sucking holes through vacuumizing.

The glue dripping component 5 is arranged above the spin coating component 6 and comprises a glue dripping booster 51 containing a liquid transferring gun, and the glue dripping booster is used for dripping the sol precursor onto the film substrate 101 placed on the tray. The glue dripping assistor 51 is fixed in the case 1 by an iron stand 52 and a jig 53, that is, the glue dripping assistor 51 is fixed to the iron stand 52 by the jig 53, and the iron stand 52 is fixed to the case. The liquid gun head is prevented from shaking during boosting, and the dripping accuracy is greatly improved.

The heating assembly 7 is located on one side of the spin coating assembly and comprises a heating table 71, and at least one heating table column 72 is arranged in the center of the upper side face of the heating table, so that the thin film substrate can be conveniently placed on the heating table or can be conveniently transferred. The heating table is mainly used for carrying out heat treatment on the spin-coated film substrate and the spin-coated film, and the heat of the film substrate is conducted to the spin-coated coating, so that the coating solution is evaporated to dryness, and the primary film is formed. A thermocouple probe 73 is arranged in the heating table 71 and used for controlling the temperature of the heating table; meanwhile, a heating lamp 74, namely a high-power incandescent lamp or an infrared lamp, is arranged above the heating table 71, the height of the lamp or the power of the lamp can be controlled, the upper surface of the substrate film is heated and baked, and the evaporation of the solution is accelerated; the two modes of addition (heating by the heating table 71 and heating by the incandescent lamp/infrared lamp) can work simultaneously or selectively; the side wall of the box body is provided with a temperature probe 11 which can display the indoor environment temperature.

The transfer assembly 8 comprises an electrically operated clamping movable mechanical arm 81 which is arranged between the spin coating assembly and the heating assembly, can automatically realize the transfer of the film substrate from the tray 62 of the spin coating assembly to the heating table column 72 and can realize the reverse transfer, namely, the transfer from the heating table column 72 to the tray 62 of the spin coating assembly; the specific process is as follows: after the spin coating is finished, an electric control reset spring pops up, the sucking disc is loosened, the film substrate 101 is clamped by a clamp capable of clamping the movable mechanical arm 81, the film substrate is rotated by a fixed angle to be positioned above the heating table column 72 on the heating table 71, and the film substrate 101 is released by loosening the clamp; after the heating time is over, the clamp on the movable mechanical arm 81 can be clamped to clamp the film substrate 101, the film substrate 101 is released by rotating the clamp to a bearing frame above the tray 62 of the spin coating assembly at a fixed angle, the electric control reset spring shrinks and fixes, the film substrate 101 is sucked in a vacuum manner, and the next spin coating is carried out. Further explanation is shown in the schematic diagrams of FIGS. 2A, 2B and 2C.

The heat insulation plate 9 is arranged above the transfer assembly 8 and is mainly used for preventing the heat influence, such as thermal evaporation and thermal deformation, on the glue dripping booster 51 containing the liquid-transfering gun when a high-power incandescent lamp or an infrared lamp is heated, and reducing the service life of the glue dripping booster 51 containing the liquid-transfering gun.

The electric control exhaust fan 10 is positioned at the middle lower position of the rear part of the box body 1 and used for indoor heat dissipation and air purification, and simultaneously preventing the volatile organic compounds from depositing on the surface of the instrument and equipment to influence the use of the equipment, the service life of the equipment and the like.

The vacuumizing mechanical pump 67 connected with the spin coating assembly 6 is externally arranged on the outer side surface of the box body, so that the influence of mechanical vibration on the spin coating process is reduced or avoided.

The specific example steps are as follows: firstly, a proper amount of prepared spin-coating precursor solution is filled into a glue dripping booster 51 containing a liquid-transferring gun; then setting the injection dosage, injection time, rotating speed, rotating time, heating temperature, indoor temperature, power of the incandescent lamp/infrared lamp 6, spin coating times and the like, setting a corner capable of clamping the movable mechanical arm 81, a switch of the vacuum-pumping mechanical pump 67, a switch of the spin coating assembly 6, a switch of the heating assembly 7, a switch of the electric control exhaust fan 10 and the like; then, the film substrate 101 is placed to start operation; the method comprises the following steps of dripping solution onto a film substrate 101, rotating the film substrate 101 on a spin-coating assembly 6 at a certain rotating speed, popping up an electric control return spring after the rotation is finished, loosening a sucker, transferring the film substrate 101 onto a heating table column 72 of a heating table 71 through a movable clamping mechanical arm 81, heating for a few minutes at a certain temperature, stopping heating, enabling an electric control exhaust fan 10 to work, cooling, clamping the movable clamping mechanical arm 81, transferring the film substrate 101 onto a tray 62 on the spin-coating assembly 6 from the heating table 71, shrinking the electric control return spring, fixing the tray 62, dripping solution onto the film substrate 101 for the second time, repeating the processes until the heating is finished in the last step after the spin-coating times are met, cooling, stopping the whole device, and sounding a prompt tone for a few seconds; finally, the device door 102 is opened, the thin film substrate 101 is taken out, and if necessary, a high temperature annealing treatment is performed in a high temperature furnace or a tube furnace under a desired atmosphere condition, thereby obtaining a target thin film.

Full-automatic film preparation facilities, can realize the film spin coating and the heating process of various substrates, like silicon substrate, glass substrate, ITO substrate, FTO substrate etc. moreover through setting up different parameters, can guarantee the accuracy nature in dropwise add, spin coating and heating process, save time, equipment height is integrated simultaneously, convenient transport can satisfy spin coating film and heating automation mechanized operation, also can carry out substrate spin coating film or substrate heating operation alone. The equipment can greatly save labor and material cost, is convenient to operate, improves the repeatability of operation and reduces errors.

Therefore, the utility model provides a human cost, time cost and promote success rate, the repeatable efficiency etc. of experiment, especially conveniently film the not enough beginner of experience, can master laboratory glassware fast, promote its experiment progress. The device only needs to prepare an experimental solution, sets corresponding experimental parameters, and finally directly obtains a primary film through automatic spin coating, automatic transfer, automatic baking and automatic heating treatment and automatic repeated operation.

In the previous description, numerous specific details were set forth in order to provide a thorough understanding of the invention. The foregoing description is only illustrative of the preferred embodiments of the invention, which can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. All the contents that do not depart from the technical solution of the present invention, any simple modification, equivalent change and modification made to the above embodiments according to the technical substance of the present invention all still belong to the protection scope of the technical solution of the present invention.

Claims

1. The utility model provides a full-automatic film preparation facilities, includes box (1), and this box surface is equipped with electronic display screen (2), power cord (3) and multi-functional control panel (4) that are used for controlling experimental condition that a plurality of knob are constituteed, its characterized in that: a glue dripping component (5), a spin coating component (6), a heating component (7) and a transfer component (8) which are controlled by the multifunctional control panel are arranged in the box body, the spin coating component (6), the heating component (7) and the transfer component (8) are arranged at triangular intervals, and the glue dripping component (5) is arranged above the spin coating component (6); the spin coating assembly (6) comprises a spin coating platform (61) and a tray (62) which is arranged above the spin coating platform (61) and used for placing a film substrate (101), and the tray (62) can vertically extend and retract relative to the spin coating platform (61) and rotate along the central axis of the tray; the glue dripping assembly (5) comprises a glue dripping booster (51) containing a liquid transferring gun, and is used for dripping a sol precursor onto a thin film substrate (101) placed on the tray; the heating assembly (7) comprises a heating table (71), at least one heating table column (72) arranged in the center of the upper side surface of the heating table and a thermocouple probe (73) arranged in the heating table; the transfer assembly (8) comprises an electrically operated grippable mobile robot arm (81) for transferring the thin film substrate between the tray and the heating stage.

2. The fully automatic thin film preparation apparatus according to claim 1, wherein: the lower side center of the tray is provided with a hollow rotating shaft (63), the upper end of the rotating shaft is internally provided with an armature (64) capable of moving up and down, the lower end of the rotating shaft is internally provided with an electromagnet (65), and a return spring (66) is arranged between the armature and the electromagnet.

3. The fully automatic thin film preparation apparatus according to claim 1, wherein: the center of the tray is provided with a vent hole which is connected with a vacuum-pumping mechanical pump (67) arranged outside the box body (1) through the hollow structure of the rotating shaft and an air passage.

4. The fully automatic thin film preparation apparatus according to claim 1, wherein: the glue dripping booster (51) is fixed in the box body through an iron support (52) and a clamp (53).

5. The fully automatic thin film preparation apparatus according to claim 1, wherein: the heating assembly (7) further comprises a heating lamp (74) arranged above the heating table.

6. The fully automatic thin film preparation apparatus according to claim 5, wherein: the heating lamp is an infrared lamp or a high-power incandescent lamp.

7. The fully automatic thin film preparation apparatus according to claim 1, wherein: and a heat insulation plate (9) is arranged above the transfer assembly (8) in the box body.

8. The fully automatic thin film preparation apparatus according to claim 1, wherein: an electric control exhaust fan (10) is arranged on the rear side in the box body.

9. The fully automatic thin film preparation apparatus according to claim 1, wherein: the box body is also provided with a temperature probe (11).