CN104943045A - Lifting device and method for preparing organic thin film applying same - Google Patents
Lifting device and method for preparing organic thin film applying same Download PDFInfo
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- CN104943045A CN104943045A CN201510418629.2A CN201510418629A CN104943045A CN 104943045 A CN104943045 A CN 104943045A CN 201510418629 A CN201510418629 A CN 201510418629A CN 104943045 A CN104943045 A CN 104943045A
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Abstract
A lifting device comprises a cavity, a base, a mechanical pump, a nitrogen hole, a fixture, a stepping motor, a motor, a horizontal support part and a heating wire, and thin film preparation is conducted in the cavity. The experimental environment is controlled by conducting vacuumization and nitrogen protection on the interior of the cavity through the mechanical pump and the nitrogen hole, therefore, the experimental repeatability is good, and materials are saved. Meanwhile, the thickness and the appearance of a thin film are better controlled by controlling the lifting speed and the soak time, and the precision is high. In addition, the stepping motor and the fixture can clamp a thin film substrate to move transversely, continuous multi-layer lifting is achieved, the efficiency is high, and the appearance of the prepared organic thin film is good.
Description
Technical field
The present invention relates to the equipment technical field preparing material, particularly relate to a kind of pulling apparatus and apply the method that this pulling apparatus prepares organic film.
Background technology
Prepared by organic film, mainly adopt Vacuum Coating method, spin-coating method, injection or volume to volume method etc.Wherein, Vacuum Coating method belongs to solid-state preparation method, and its apparatus expensive, maintenance cost are high.Spin-coating method, injection, volume to volume are owned by France in preparing organic film with solution, wherein, spin-coating method to treat that spin coating liquid is instilled on substrate surface, then redundant solution is got rid of through High Rotation Speed, film is formed by its uniform spreading to substrate, but preparing in thin-film process, the material more than 70% can be wasted, and poor repeatability, film are uneven, film amount is uncontrollable, accuracy is not high.And injection and volume to volume method complex process, apparatus expensive.
Czochralski method also there has been and applies widely in filming technology, it immerses in solution by substrate, again substrate is separated with solution lentamente, film is coated on substrate equably, czochralski method both can adopt lift substrate to make it slowly leave the mode of solution, also can adopt the mode of lift solution tank, make it slowly leave substrate.Some pulling apparatus complex structures, expensive, and the stability that some pulling apparatus accurately can not control film time, film speed and be coated with in membrane process, error is large, affects film preparation.
In addition, CN203440445 discloses a kind of czochralski method film preparation device of sol gel process, this device comprises spacer support frames, linear electric motors, tooth bar, leading arm, supporting station, substrate holder etc., the form adopting leading arm and supporting station to combine realizes collosol container moving up and down relative to substrate, or the form adopting leading arm and substrate holder to combine realizes substrate moving up and down relative to collosol container.But, collosol container wherein and substrate holder can only move up and down, can not translation, continuous multilayer lift cannot be realized, also soak time is not accurately controlled simultaneously, and annealing in process is not carried out to the film lifted, easily cause film defects, in addition, this device is not a closed cavity, easily causes between substrate and solution or different solutions and chemical reaction occurs.These methods seriously constrain organic film industrialization process due to the factor such as cost and technique.
Therefore, industry need badly a kind of possess simultaneously simple to operate, accuracy is high, material saving, can realize the pulling apparatus of continuous multilayer lift, repeated high, and uses this pulling apparatus to carry out organic film preparation.
Summary of the invention
In view of this, the present invention proposes a kind of pulling apparatus, this pulling apparatus has cavity, base, mechanical pump, nitrogen mouth, fixture, stepper motor, motor, horizontal support member and heating wire, can eliminate atmospheric environment impact and have simple to operate, accuracy is high, continuous multilayer lift, save material, repeated advantages of higher, this pulling apparatus is used to carry out film preparation, preparation method is simple, and film thickness is suitable for, and film quality is good.
A kind of pulling apparatus that object according to the present invention proposes; comprise cavity, base, mechanical pump, nitrogen mouth, fixture, stepper motor, motor, horizontal support member and heating wire; described mechanical pump is communicated with described inside cavity respectively with nitrogen mouth; described mechanical pump vacuumizes cavity; described nitrogen mouth is filled with nitrogen protection gas by nitrogen pipeline to cavity; described base is positioned at cavity bottom; described horizontal support member is laterally located at cavity top; described stepper motor and motor are arranged in horizontal support member, described stepper motor jockey.
Preferably, the transverse shifting of described Electric Machine Control stepper motor and fixture.
Preferably, described stepper motor drives fixture to move up and down.
Preferably, described fixture comprises arm, claw and fixed bar, and described fixed bar is in " ㄇ " shape, and described claw clamps the horizontal edge of fixed bar.
Preferably, described base is placed the material groove that there is material solution at least one inside.
Preferably, described material groove has heat-insulating property.
Preferably, described heat-insulating property is realized by the solid dry ice heat-insulation layer of heat dam outer surface.
Preferably, described base is at least two-layer.
Preferably, described heating wire heats cavity, makes the temperature in cavity reach anneal of material temperature.
The invention allows for a kind of method preparing organic film, comprise step:
S1, configuration material solution;
S2, setting program parameter, comprise pull rate and soak time;
S3, material groove is put into cavity, with fixture fixed film substrate, close cavity;
S4, mechanical pump is utilized to vacuumize cavity, removing air, steam;
S5, in nitrogen mouth, pass into nitrogen protection gas;
S6, working procedure, fixture lifts up and down under the drive of stepper motor;
S7, by electric-heating-wire-heating cavity, to lift after film substrate carry out annealing in process;
S8, new pull rate and soak time are set, and by above motor transverse shifting fixture to the material groove of another layer material to be lifted;
The step of S9, repetition S6-S8;
S10, all film pulling-ups take off film substrate after completing, and terminate program.
Compared with prior art, the present invention has following technical advantage:
Pulling apparatus possesses cavity; film preparation is carried out in cavity; there is mechanical pump; cavity is vacuumized; separately be filled with nitrogen protection in cavity, the impact of atmospheric environment can be eliminated thus, Control release environment; avoid sample room mutually chemical reaction to occur, the favorable repeatability of experiment, material are economized, film quality is good.
Stepper motor can realize the accurate control of pull rate and soak time, and better can control thickness and the pattern of film, accuracy is high.
Stepper motor and fixture are positioned on horizontal track, and under the drive of motor, fixture can clip substrate and move left and right, and with turnover mobile in different materials groove, realize continuous multilayer lift.
Be provided with heating wire in cavity, so that film carries out annealing in process, improve the adhesive force between each layer of film, ensure that the quality of film.
Fixture comprises arm, claw and fixed bar, and film substrate lived by two vertical bar cramps of fixed bar, be conducive to film substrate thus and immerse in very dark material groove, and the contact area of fixed bar and material solution is little, not easily pollutes.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the front view of pulling apparatus in the preferred embodiment of the present invention
The Reference numeral related in accompanying drawing and part illustrate: 1. cavity; 2. base; 3. mechanical pump; 4. nitrogen mouth; 5. fixture; 6. stepper motor; 7 motors; 8. horizontal support member; 9. heating wire; 10. material groove; 11. film substrates; 51. arms; 52. claws; 53. fixed bars.
Detailed description of the invention
As described in the background art, existing pulling apparatus cannot realize multilayer lift, and accurately control soak time, speed, experimental situation cannot be protected, and experimental repeatability is low simultaneously.
Below, will be described in detail concrete technical scheme of the present invention.
Refer to Fig. 1, pulling apparatus in the preferred embodiment of the present invention, comprise cavity 1, base 2, mechanical pump 3, nitrogen mouth 4, fixture 5, stepper motor 6, motor 7, horizontal support member 8 and heating wire 9, wherein, mechanical pump 3 is arranged at the lower angular range of cavity 1, be connected with inside cavity by pipeline, mechanical pump 3 can vacuumize cavity 1, with the air of draining in cavity, steam, be beneficial to and follow-uply pass into nitrogen protection gas, and nitrogen mouth 4 is communicated with nitrogen pipeline, by nitrogen mouth 4, nitrogen protection gas is filled with to inside cavity, be filled with nitrogen protection gas, because nitrogen chemical property is extremely stable, and it is nontoxic, cavity is filled with as protection gas, the impact of atmospheric environment can be eliminated, control the experimental situation in cavity, storeroom is avoided mutually chemical reaction to occur, because material does not pollute each other, so after prepared by organic film, to prepare before still can using once used material and device next time, make the favorable repeatability of testing thus, material is economized, film quality is good.
In the bottom of cavity 1, be provided with base 2, for placing material groove 10 on base 2, base 2 is divided at least two-layer, arranges at least two-layer, can move up and down between layers, be convenient to height up and down, according to the liquid level of material solution in the falling head of fixture 5 and material groove 10, adjusting base 2, to suitable height, facilitates the lift of film substrate.
When preparing organic film, according to the actual requirements, namely need the number of times lifted, material groove 10 can have one or be greater than one, to realize continuous multilayer lift in the process of lift, without the need to frequent more conversion materials groove 10, and impact lift efficiency.Material groove 10 is used to provide the material of immersion, enable substrate be dipped in material, material groove 10 has the performance of insulation, by wrapping up solid dry ice heat-insulation layer in the outside of material groove 10, in order to keep the temperature of material solution, prevent the heat damage of subsequent anneal process in which materials.
Fixture 5 is used for fixing film substrate 11, fixture 5 comprises arm 51, claw 52, fixed bar 53, the upper end of arm 51 is connected to the lower end of stepper motor 6, claw 52 clamps fixed bar 53, fixed bar 53 is in " ㄇ " shape, claw 52 clamps the horizontal edge of " ㄇ " shape, film substrate 11 then clamped by two vertical bars of fixed bar 53, make it not shake in the process of lift, the phenomenon such as come off, be provided with the fixture of fixed bar 53 simultaneously, be conducive to clamping film substrate 11 and immerse in very dark material groove 10.
Horizontal support member 8 is provided with in the upper lateral of cavity, horizontal support member 8 is rectangular-shaped, wherein be provided with guide rail, the inside of horizontal support member 8 is provided with stepper motor 6, be provided with motor 7 in one end of horizontal support member 8 inside simultaneously, wherein, motor 7 can control step motor 6 transverse shifting on the guide rail of horizontal support member 8, fixture 5 is under the drive of stepper motor 6, also transverse shifting while, with mobile film substrate, can move laterally in another material groove 10 after making it lift, proceed next step lift, realize the conversion of film substrate in different materials groove 10.Arm 51 is rectangular-shaped, horizontal support member 8 has sufficiently high height, stepper motor 6 can move up and down, arm 51 and stepper motor 6 are in the process pulling out film substrate 11, the guide rail of following horizontal support member 8 moves up, top gradually to horizontal support member 8 is moved close, stop after arriving certain height, then horizontal movement is carried out, in moving process, ensure that film substrate 11 can not touch material groove 10, move laterally to after above the material groove 10 of another layer material lifted, then control step motor 6 moves down, drive fixture 5, film substrate 11 is made to be immersed in required material groove 10, simultaneously, by console to stepper motor 6 setting program parameter, with the pull rate of accurate control step motor 6 and soak time, better control the thickness of film thus.
Heating wire 9 is arranged on the inside of cavity 1, if carry out multilayer lift, repeat this process, namely after one deck has lifted, console (not shown) controls heating wire 9 and heats, and heating wire 9 heating cavity 1, makes the temperature in cavity 1 reach the temperature of anneal of material, to carry out thermal annealing to the film substrate 11 lifted, according to actual needs, new pull rate and soak time can be set after having annealed, the lower thin film of working procedure lift.
When preparing organic film, need through each step following: (1) configuration material solution, required a kind of or material solution not of the same race is put into respectively the material groove 10 of or different; (2) by console (not shown), setting program parameter according to the actual requirements, parameter comprises pull rate and the soak time of film substrate 11; (3) material groove 10 is placed on the base 2 in cavity 1, fixes substrate by the fixed bar 53 of fixture 5, close cavity, make cavity airtight; (4) vacuumized by mechanical pump 3 pairs of cavitys 1, air, the steam of removing cavity 1 inside; (5) nitrogen pipeline by being communicated with nitrogen mouth 4, is filled with nitrogen protection gas to cavity 1 inside; (6) Push switch (not shown), working procedure, substrate and fixture 5 immerse in the material solution in material groove 10 under the drive of stepper motor 6, after certain soak time, stepper motor 6 and fixture move up, gradually in upwards retraction horizontal support member 8, now, film substrate 11 is exposed in the nitrogen protection gas in cavity 1; (7) console control heating wire 9 heats, and makes the temperature in cavity reach the temperature of anneal of material, carries out annealing in process thus to the film substrate 11 after lift; (8) by console, click the corresponding button, new pull rate and soak time are set, and transverse shifting stepper motor 6, to the top of the material groove 10 of another layer material to be lifted; (9) step (6) ~ (8) are repeated; (10) after all film pulling-ups complete, take off film substrate 11, terminate program.
Pulling apparatus in the present invention, comprise cavity, base, mechanical pump, nitrogen mouth, fixture, stepper motor, motor, horizontal support member and heating wire, film preparation is carried out in cavity.Mechanical pump can vacuumize inside cavity; nitrogen mouth passes into nitrogen to protect by nitrogen pipeline in cavity; eliminate the impact of atmospheric environment thus; Control release environment; avoid sample room mutually chemical reaction to occur, assay reproducibility is good, material economizes, and heating wire can heat cavity; make the temperature in cavity reach anneal of material temperature, film quality is good.Meanwhile, by controlling pull rate and soak time, better can control thickness and the pattern of film, accuracy is high.Further, stepper motor and fixture can clip film substrate transverse shifting, and with turnover mobile in different materials groove, realize continuous multilayer lift, efficiency is high, and the organic film pattern prepared is good.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and when not deviating from spirit of the present invention or essential characteristic, the present invention can be realized in other specific forms.Therefore, no matter from which point, all should embodiment be regarded as exemplary, and be nonrestrictive, scope of the present invention is limited by claims instead of above-mentioned explanation, and all changes be therefore intended in the implication of the equivalency by dropping on claim and scope are included in the present invention.Any Reference numeral in claim should be considered as the claim involved by limiting.
In addition, be to be understood that, although this description is described according to embodiment, but not each embodiment only comprises an independently technical scheme, this narrating mode of description is only for clarity sake, those skilled in the art should by description integrally, and the technical scheme in each embodiment also through appropriately combined, can form other embodiments that it will be appreciated by those skilled in the art that.
Claims (10)
1. a pulling apparatus; it is characterized in that: comprise cavity, base, mechanical pump, nitrogen mouth, fixture, stepper motor, motor, horizontal support member and heating wire; described mechanical pump is communicated with described inside cavity respectively with nitrogen mouth; described mechanical pump vacuumizes cavity; described nitrogen mouth is filled with nitrogen protection gas by nitrogen pipeline to cavity; described base is positioned at cavity bottom; described horizontal support member is laterally located at cavity top; described stepper motor and motor are arranged in horizontal support member, and described stepper motor connects described fixture.
2. a kind of pulling apparatus as claimed in claim 1, is characterized in that: the transverse shifting of described Electric Machine Control stepper motor and fixture.
3. a kind of pulling apparatus as claimed in claim 1, is characterized in that: described stepper motor drives fixture to move up and down.
4. a kind of pulling apparatus as claimed in claim 1, it is characterized in that: described fixture comprises arm, claw and fixed bar, described fixed bar is
shape, described claw clamps the horizontal edge of fixed bar.
5. a kind of pulling apparatus as claimed in claim 1, is characterized in that: described base is placed the material groove that there is material solution at least one inside.
6. a kind of pulling apparatus as claimed in claim 5, is characterized in that: described material groove has heat-insulating property.
7. a kind of pulling apparatus as claimed in claim 6, is characterized in that: described heat-insulating property is realized by the solid dry ice heat-insulation layer of heat dam outer surface.
8. a kind of pulling apparatus as claimed in claim 1, is characterized in that: described base is at least two-layer.
9. a kind of pulling apparatus as claimed in claim 1, is characterized in that: described heating wire heats cavity, makes the temperature in cavity reach anneal of material temperature.
10. application rights requires that the pulling apparatus in 1 prepares a method for organic film, it is characterized in that, comprises step:
S1, configuration material solution;
S2, setting program parameter, comprise pull rate and soak time;
S3, material groove is put into cavity, with fixture fixed film substrate, close cavity;
S4, mechanical pump is utilized to vacuumize cavity, removing air, steam;
S5, in nitrogen mouth, pass into nitrogen protection gas;
S6, working procedure, fixture lifts up and down under the drive of stepper motor;
S7, by electric-heating-wire-heating cavity, to lift after film substrate carry out annealing in process;
S8, new pull rate and soak time are set, and by above motor transverse shifting fixture to the material groove of another layer material to be lifted;
The step of S9, repetition S6-S8;
S10, all film pulling-ups take off film substrate after completing, and terminate program.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510418629.2A CN104943045A (en) | 2015-07-16 | 2015-07-16 | Lifting device and method for preparing organic thin film applying same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510418629.2A CN104943045A (en) | 2015-07-16 | 2015-07-16 | Lifting device and method for preparing organic thin film applying same |
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| CN104943045A true CN104943045A (en) | 2015-09-30 |
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| CN201510418629.2A Pending CN104943045A (en) | 2015-07-16 | 2015-07-16 | Lifting device and method for preparing organic thin film applying same |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106115613A (en) * | 2016-07-22 | 2016-11-16 | 西北工业大学 | A kind of large area monolayer compact nanometer microsphere thin film assemble method, device and the using method of device |
| CN108435000A (en) * | 2017-02-16 | 2018-08-24 | 上海硅苑膜科技有限公司 | A kind of automatic film coating device of ceramic membrane and the preparation method of ceramic membrane |
| CN109049453A (en) * | 2018-07-19 | 2018-12-21 | 芜湖青悠静谧环保科技有限公司 | A kind of Polymer Processing machinery shield |
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| CN102728514A (en) * | 2012-06-27 | 2012-10-17 | 天津木牛流马科技发展有限公司 | Composite nanometer film preparation apparatus |
| CN203227593U (en) * | 2013-03-18 | 2013-10-09 | 东华大学 | Constant-temperature program control multi-station and multi-circulating lifting filming coating machine |
| CN103736623A (en) * | 2013-12-25 | 2014-04-23 | 上海三研科技有限公司 | Dipping lifting coating equipment and dipping lifting coating method |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102728514A (en) * | 2012-06-27 | 2012-10-17 | 天津木牛流马科技发展有限公司 | Composite nanometer film preparation apparatus |
| CN203227593U (en) * | 2013-03-18 | 2013-10-09 | 东华大学 | Constant-temperature program control multi-station and multi-circulating lifting filming coating machine |
| CN103736623A (en) * | 2013-12-25 | 2014-04-23 | 上海三研科技有限公司 | Dipping lifting coating equipment and dipping lifting coating method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106115613A (en) * | 2016-07-22 | 2016-11-16 | 西北工业大学 | A kind of large area monolayer compact nanometer microsphere thin film assemble method, device and the using method of device |
| CN108435000A (en) * | 2017-02-16 | 2018-08-24 | 上海硅苑膜科技有限公司 | A kind of automatic film coating device of ceramic membrane and the preparation method of ceramic membrane |
| CN108435000B (en) * | 2017-02-16 | 2023-12-08 | 上海硅苑膜科技有限公司 | Automatic film coating device for flat ceramic film and preparation method of flat ceramic film |
| CN109049453A (en) * | 2018-07-19 | 2018-12-21 | 芜湖青悠静谧环保科技有限公司 | A kind of Polymer Processing machinery shield |
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Application publication date: 20150930 |