CN220075311U - Even glue solidification spraying device - Google Patents
Even glue solidification spraying device Download PDFInfo
- Publication number
- CN220075311U CN220075311U CN202321603857.3U CN202321603857U CN220075311U CN 220075311 U CN220075311 U CN 220075311U CN 202321603857 U CN202321603857 U CN 202321603857U CN 220075311 U CN220075311 U CN 220075311U
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- CN
- China
- Prior art keywords
- shell
- vacuum
- pipe
- rotary pipe
- rotary
- Prior art date
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- 239000003292 glue Substances 0.000 title claims abstract description 23
- 238000005507 spraying Methods 0.000 title claims abstract description 23
- 238000007711 solidification Methods 0.000 title description 4
- 230000008023 solidification Effects 0.000 title description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 32
- 238000004528 spin coating Methods 0.000 claims abstract description 21
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 13
- 239000007921 spray Substances 0.000 claims abstract description 8
- 238000009413 insulation Methods 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 230000005855 radiation Effects 0.000 claims description 6
- 239000004964 aerogel Substances 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 4
- 238000001723 curing Methods 0.000 abstract 1
- 230000010354 integration Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000249 desinfective effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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- Coating Apparatus (AREA)
Abstract
The utility model provides a glue homogenizing and solidifying spraying device which comprises a shell, and a turntable, a motor, a liquid inlet pump, a heating rod, a vacuum pump and a rotary pipe which are arranged in the shell; the top end of the shell is provided with a feed inlet, the tail end of the liquid inlet pump is fixed at the feed inlet, and the head end spray head extends into the shell; a material taking opening is formed in the side face of the shell, and a material taking door is hinged to the material taking opening; the rotary table is arranged below the spray head, a vacuum hole is formed in the center of the rotary table, the rotary pipe is arranged along the height direction of the vacuum hole, the rotary pipe comprises a rotary pipe, a sealed rotary pipe joint and a vacuum pipe, the rotary pipe and the vacuum pipe are both arranged in the sealed rotary pipe joint and communicated, the bottom of the rotary pipe is rotationally connected with the sealed rotary pipe joint, and the head of the vacuum pipe is fixedly connected with the sealed rotary pipe joint; the motor is used for driving the rotating tube to rotate, and the vacuum pump is used for vacuumizing the rotating tube and the vacuum tube; the heating rods are fixed on one side of the inside of the shell. The utility model can realize the integration of spin coating, curing and spin coating.
Description
Technical Field
The utility model relates to the field of mechanical spraying devices, in particular to a glue homogenizing and solidifying spraying device.
Background
A typical film forming process includes several steps of spin coating, and spin coating. The step of glue homogenizing is to instill glue onto the surface of the substrate and uniformly distribute, the solidification is to heat the glue to form a film of the sample glue, and the spin coating needs to cover the surface of the film with liquid spraying to increase the performance which is not available per se. However, there are only some simple spin-coating machines, drying boxes, and spraying devices, hot tables, etc. which can only be used for spraying, and these devices have single functions and high purchase cost. To produce a film with excellent properties requires various equipment and involves cumbersome operations, is inefficient and time consuming, and is also prone to errors during the process. Therefore, a glue homogenizing and solidifying spraying device is urgently needed.
Disclosure of Invention
The utility model provides a glue homogenizing and solidifying spraying device aiming at the defects in the prior art.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the even glue solidifying spraying device comprises a shell, and further comprises a turntable, a motor, a liquid inlet pump, a heating rod, a vacuum pump and a rotating pipe which are arranged in the shell; the top end of the shell is provided with a feed inlet, the tail end of the liquid inlet pump is fixed at the feed inlet, a spray head at the head end extends into the shell, and the liquid inlet pump can directly pump paint to the spray head; a material taking opening is formed in the side face of the shell, and a material taking door is hinged to the material taking opening; the rotary table is arranged below the spray head, films with different thicknesses are obtained by controlling different rotating speeds and time of the rotary table, a vacuum hole is formed in the center of the rotary table, the rotary pipe is arranged along the height direction of the vacuum hole and comprises a rotary pipe, a sealed rotary pipe joint and a vacuum pipe, the bottom of the rotary pipe and the head of the vacuum pipe are both arranged in the sealed rotary pipe joint and are mutually communicated, the bottom of the rotary pipe is rotationally connected with the sealed rotary pipe joint, the head of the vacuum pipe is fixedly connected with the sealed rotary pipe joint, one tail of the vacuum pipe is communicated with the vacuum pump, and the other tail of the vacuum pipe is fixed on the inner bottom surface of the shell; the motor is used for driving the rotating tube to rotate, and the vacuum pump is used for vacuumizing the rotating tube and the vacuum tube; the heating rods are fixed on one side of the inside of the shell, so that the shell can be heated uniformly, and the function of curing after spin coating is realized.
In order to optimize the technical scheme, the specific measures adopted further comprise:
further, the glue homogenizing and curing spraying device further comprises ultraviolet lamps, and a plurality of the ultraviolet lamps are fixed on the top surface inside the shell; the ultraviolet lamp can be used for sterilizing and disinfecting the sample.
Further, the glue homogenizing and curing spraying device also comprises a fan, wherein the fan is arranged at one side of the heating rod in the shell, which is far away from the turntable; after the fan is started, heat is transferred to the shell at the other side, a convection ventilation structure is formed, and the temperature in the shell is ensured to be constant so as to provide the temperature required by the experiment.
Further, the turntable comprises a semiconductor heating plate and a heat insulation layer, and the heat insulation layer is fixed at the bottom of the semiconductor heating plate.
Further, the heat insulation layer is silicon dioxide heat insulation aerogel, and the silicon dioxide heat insulation aerogel is light and excellent in heat insulation performance.
Further, the glue homogenizing and curing spraying device also comprises a top cover, wherein the top cover is hinged with the feeding port; when the feeding is finished, the closeable top cover is closed, so that the influence caused by external impurities is reduced.
Further, even glue solidification spraying device still includes the thermovent of seting up at the casing surface, it has the heat dissipation door to articulate on the thermovent, can open the heat dissipation door after the experiment is accomplished, accelerates the heat dissipation.
Further, a plurality of transparent observation windows are formed in the surface of the shell, so that the situation in the shell can be observed conveniently.
The ultraviolet lamp, the motor, the liquid inlet pump, the heating rod, the fan, the vacuum pump and the semiconductor heating disc are powered by an external power supply.
The beneficial effects of the utility model are as follows:
the utility model provides a device integrating spin coating, spin coating and spin coating, which is characterized in that a motor and a vacuum pump are started when the device is used, the motor drives a rotating pipe to rotate, the vacuum pump vacuumizes the rotating pipe and a vacuum pipe, and spin coating of a substrate is realized by utilizing a rotating turntable; starting a heating rod to finish curing after the spin coating is finished, when the heating rod is used for heating and curing, simultaneously starting a fan, and transmitting heat to the shell at the other side after the fan is started to form a convection ventilation structure, so that the temperature in the shell is ensured to be constant, and uniform curing temperature is provided; and spraying liquid by using a liquid inlet pump after curing is finished, and performing functional spin coating on the film.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic structural view of a turntable;
FIG. 3 is a schematic view of a rotating tube;
wherein 1 is the carousel, 2 is ultraviolet lamp, 3 is the shower nozzle, 4 is the motor, 5 is the casing, 6 is the income liquid pump, 7 is the heating rod, 8 is the vacuum hole, 9 is the fan, 10 is the vacuum pump, 11 is the semiconductor heating dish, 12 is the insulating layer, 13 is the swivelling tube, 14 is the swivelling tube, 15 is sealed swivelling joint, 16 is the vacuum tube, 17 is the heat dissipation door, 18 is the material taking door.
Detailed Description
The present utility model will be described in detail with reference to the accompanying drawings.
As shown in fig. 1, the spin-coating device comprises a shell 5, and further comprises a rotary table 1, an ultraviolet lamp 2, a motor 4, a liquid inlet pump 6, a heating rod 7, a fan 9, a vacuum pump 10 and a rotary pipe 13 which are arranged in the shell 5;
the top end of the shell 5 is provided with a feed inlet, the tail end of the liquid inlet pump 6 is fixed at the feed inlet, and the nozzle 3 at the head end extends into the shell 5; the glue homogenizing and curing spraying device further comprises a top cover, and the top cover is hinged with the feeding port; the glue homogenizing and curing spraying device further comprises a heat radiation opening formed in the surface of the shell 5, and a heat radiation door 17 is hinged to the heat radiation opening; a material taking opening is formed in the side face of the shell 5, and a material taking door 18 is hinged to the material taking opening; the surface of the shell 5 is provided with a plurality of transparent observation windows;
a plurality of ultraviolet lamps 2 are fixed on the top surface inside the shell 5; the turntable 1 is arranged below the spray head 3, as shown in fig. 2, the turntable 1 comprises a semiconductor heating disc 11 and a heat insulation layer 12, the heat insulation layer 12 is fixed at the bottom of the semiconductor heating disc 11, the heat insulation layer 12 is silicon dioxide heat insulation aerogel, a vacuum hole 8 is formed in the center of the turntable 1, as shown in fig. 3, a rotary pipe 13 is arranged along the height direction of the vacuum hole 8, the rotary pipe 13 comprises a rotary pipe 14, a sealed rotary pipe joint 15 and a vacuum pipe 16, the bottom of the rotary pipe 14 and the head of the vacuum pipe 16 are both arranged in the sealed rotary pipe joint 15 and are mutually communicated, the bottom of the rotary pipe 14 is rotationally connected with the sealed rotary pipe joint 15, the head of the vacuum pipe 16 is fixedly connected with the sealed rotary pipe joint 15, one tail of the vacuum pipe 16 is communicated with the vacuum pump 10, and the other tail is fixed at the inner bottom surface of the shell 5; the motor 4 is used for driving the rotary pipe 14 to rotate, and the vacuum pump 10 is used for vacuumizing the rotary pipe 14 and the vacuum pipe 16;
a plurality of heating rods 7 are fixed on one side of the inside of the shell 5, and the fan 9 is arranged on one side of the heating rods 7 away from the turntable 1 in the shell 5.
The ultraviolet lamp, the motor, the liquid inlet pump, the heating rod, the fan, the vacuum pump and the semiconductor heating disc are powered by an external power supply.
The working principle of the utility model is as follows:
firstly, placing a silicon wafer (or a substrate) with glue solution dropped on the middle position of a turntable 1 to block a vacuum hole 8, then starting a motor 4 and a vacuum pump 10 to enable the silicon wafer to be adsorbed on the turntable 1 and simultaneously rotate along with the turntable 1, and controlling the rotating speed of the turntable 1 by adjusting parameters of the motor to realize glue homogenizing; after the spin coating is completed, a heating rod 7 is used for curing, when the heating rod 7 is used for heating and curing, a fan 9 is turned on at the same time, heat is transferred to the shell 5 on the other side after the fan 9 is started, a convection ventilation structure is formed, the temperature in the shell 5 is ensured to be constant, so that uniform curing temperature is provided, a film and a silicon wafer substrate are separated after the curing is completed, and one surface of the film, which is contacted with the silicon wafer substrate, is upwards placed on a semiconductor heating disc 11 again; the coating is input into the liquid inlet pump 6, the parameters of the liquid inlet pump 6 are adjusted, the coating is sprayed on the film, the spin coating of the sample is realized, the spin coated sample is dried by heating the semiconductor heating plate 11, and the spin coated film is taken out for various performance tests. And when the performance of the film sample after spin coating does not reach the expected performance, further spin coating and drying the sample until the performance of the sample reaches the standard.
It should be noted that the terms like "upper", "lower", "left", "right", "front", "rear", and the like are also used for descriptive purposes only and are not intended to limit the scope of the utility model in which the utility model may be practiced, but rather the relative relationship of the terms may be altered or modified without materially altering the teachings of the utility model.
The above is only a preferred embodiment of the present utility model, and the protection scope of the present utility model is not limited to the above examples, and all technical solutions belonging to the concept of the present utility model belong to the protection scope of the present utility model. It should be noted that modifications and adaptations to the utility model without departing from the principles thereof are intended to be within the scope of the utility model as set forth in the following claims.
Claims (8)
1. The spin-coating device comprises a shell (5) and is characterized by further comprising a rotary table (1), a motor (4), a liquid inlet pump (6), a heating rod (7), a vacuum pump (10) and a rotary pipe (13) which are arranged in the shell (5);
the top end of the shell (5) is provided with a feed inlet, the tail end of the liquid inlet pump (6) is fixed at the feed inlet, and the spray head (3) at the head end extends into the shell (5); a material taking opening is formed in the side face of the shell (5), and a material taking door (18) is hinged to the material taking opening;
the rotary table (1) is arranged below the spray head (3), a vacuum hole (8) is formed in the center of the rotary table (1), the rotary pipe (13) is arranged along the height direction of the vacuum hole (8), the rotary pipe (13) comprises a rotary pipe (14), a sealing rotary pipe joint (15) and a vacuum pipe (16), the bottom of the rotary pipe (14) and the head of the vacuum pipe (16) are both arranged in the sealing rotary pipe joint (15) and are mutually communicated, the bottom of the rotary pipe (14) is rotationally connected with the sealing rotary pipe joint (15), the head of the vacuum pipe (16) is fixedly connected with the sealing rotary pipe joint (15), one tail of the vacuum pipe (16) is communicated with the vacuum pump (10), and the other tail is fixed on the inner bottom surface of the shell (5); the motor (4) is used for driving the rotating pipe (14) to rotate, and the vacuum pump (10) is used for vacuumizing the rotating pipe (14) and the vacuum pipe (16);
the heating rods (7) are fixed on one side of the inside of the shell (5).
2. The glue homogenizing and curing spraying device according to claim 1, further comprising ultraviolet lamps (2), wherein a plurality of the ultraviolet lamps (2) are fixed on the top surface inside the shell (5).
3. The spin-coating apparatus according to claim 1, further comprising a fan (9), wherein the fan (9) is mounted in the housing (5) on a side of the heating rod (7) remote from the turntable (1).
4. The spin-coating device according to claim 1, wherein the turntable (1) comprises a semiconductor heating plate (11) and a heat insulating layer (12), and the heat insulating layer (12) is fixed at the bottom of the semiconductor heating plate (11).
5. The gel curing spraying device as claimed in claim 4, wherein the thermal insulation layer (12) is silica thermal insulation aerogel.
6. The glue homogenizing and curing spraying apparatus of claim 1 further comprising a top cover hinged to the feed inlet.
7. The glue homogenizing and curing spraying device according to claim 1, further comprising a heat radiation opening arranged on the surface of the shell (5), wherein the heat radiation opening is hinged with a heat radiation door (17).
8. The glue homogenizing and curing spraying device according to claim 1, wherein a plurality of transparent observation windows are formed on the surface of the shell (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321603857.3U CN220075311U (en) | 2023-06-25 | 2023-06-25 | Even glue solidification spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321603857.3U CN220075311U (en) | 2023-06-25 | 2023-06-25 | Even glue solidification spraying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220075311U true CN220075311U (en) | 2023-11-24 |
Family
ID=88830945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321603857.3U Active CN220075311U (en) | 2023-06-25 | 2023-06-25 | Even glue solidification spraying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220075311U (en) |
-
2023
- 2023-06-25 CN CN202321603857.3U patent/CN220075311U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |