CN102628668B - 用于确定多层结构中感兴趣的层的厚度的系统和方法 - Google Patents

用于确定多层结构中感兴趣的层的厚度的系统和方法 Download PDF

Info

Publication number
CN102628668B
CN102628668B CN201210031176.4A CN201210031176A CN102628668B CN 102628668 B CN102628668 B CN 102628668B CN 201210031176 A CN201210031176 A CN 201210031176A CN 102628668 B CN102628668 B CN 102628668B
Authority
CN
China
Prior art keywords
sample
electrode
multilayer structure
temperature
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201210031176.4A
Other languages
English (en)
Chinese (zh)
Other versions
CN102628668A (zh
Inventor
A·萨哈
K·阿南德
H·N·塞沙德里
K·V·古里尚卡
F·卡普奇尼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN102628668A publication Critical patent/CN102628668A/zh
Application granted granted Critical
Publication of CN102628668B publication Critical patent/CN102628668B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CN201210031176.4A 2011-02-04 2012-02-03 用于确定多层结构中感兴趣的层的厚度的系统和方法 Active CN102628668B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/021,328 2011-02-04
US13/021328 2011-02-04
US13/021,328 US8692564B2 (en) 2011-02-04 2011-02-04 System and method for use in determining the thickness of a layer of interest in a multi-layer structure

Publications (2)

Publication Number Publication Date
CN102628668A CN102628668A (zh) 2012-08-08
CN102628668B true CN102628668B (zh) 2017-03-01

Family

ID=45655366

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210031176.4A Active CN102628668B (zh) 2011-02-04 2012-02-03 用于确定多层结构中感兴趣的层的厚度的系统和方法

Country Status (9)

Country Link
US (1) US8692564B2 (https=)
EP (1) EP2485042B1 (https=)
JP (1) JP6188117B2 (https=)
KR (1) KR101899154B1 (https=)
CN (1) CN102628668B (https=)
AU (1) AU2012200547B2 (https=)
CA (1) CA2765640C (https=)
IN (1) IN2012DE00181A (https=)
RU (1) RU2589526C2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034295A (zh) * 2014-06-05 2014-09-10 格力电器（武汉）有限公司 材料厚度检测设备及其使用方法
JP6176220B2 (ja) * 2014-10-14 2017-08-09 トヨタ自動車株式会社 検査装置
TWI636233B (zh) * 2014-12-12 2018-09-21 美商通用電機股份有限公司 用於測量物件厚度的方法及裝置
CN107430160A (zh) * 2015-04-09 2017-12-01 株式会社村田制作所 电子元器件的电气特性测定方法以及电气特性测定装置
DE102016117881A1 (de) 2016-09-22 2018-03-22 Thyssenkrupp Ag Verfahren und Vorrichtung zur zerstörungsfreien Bestimmung der Dicke einer Kernschicht eines Sandwichblechs
KR102799571B1 (ko) * 2018-07-06 2025-04-28 주식회사 엘지에너지솔루션 전도성 물질의 비표면적 측정 방법
JP2024004678A (ja) * 2022-06-29 2024-01-17 富士電機株式会社 膜厚評価方法および膜厚評価システム
US20250046640A1 (en) * 2023-08-01 2025-02-06 Applied Materials, Inc. Dielectric spectroscopy temperature monitoring using electrostatic chuck

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4310389A (en) * 1980-06-16 1982-01-12 Chrysler Corporation Method for simultaneous determination of thickness and electrochemical potential in multilayer plated deposits
JPS58166202A (ja) * 1982-03-27 1983-10-01 Nippon Steel Corp 誘電体多重層の厚さ測定装置
SU1572170A1 (ru) * 1987-04-21 1992-07-30 Предприятие П/Я В-8769 Способ контрол толщины диэлектрической пленки на электропровод щей подложке
HU199020B (en) * 1987-05-04 1989-12-28 Magyar Tudomanyos Akademia Method and apparatus for measuring the layer thickness of semiconductor layer structures
JPH02275349A (ja) * 1989-04-15 1990-11-09 Nok Corp 加硫接着評価方法
JP3306087B2 (ja) * 1992-02-22 2002-07-24 アジレント・テクノロジー株式会社 体積・表面抵抗率測定装置
JPH07198642A (ja) * 1993-12-28 1995-08-01 Bridgestone Corp ゴム組成物の電気抵抗測定機能を備える加硫特性試験機
DE59610353D1 (de) * 1995-12-22 2003-05-22 Siemens Ag Bestimmung der dicke einer elektrisch leitfähigen schicht
JPH1019948A (ja) * 1996-06-28 1998-01-23 Sekisui Chem Co Ltd 微粒子導電抵抗測定器用圧子及び試料台
JP3658504B2 (ja) * 1998-07-09 2005-06-08 株式会社日立製作所 表面層厚さ測定装置
US6208146B1 (en) * 1999-02-08 2001-03-27 General Motors Corporation Method and apparatus for measuring contact resistance for spot welding simulations
US6388452B1 (en) * 2000-04-20 2002-05-14 Hewlett-Packard Company Device for sensing media thickness using capacitance measurements
JP4840952B2 (ja) * 2000-09-19 2011-12-21 株式会社フィジオン 生体電気インピーダンス計測方法及び計測装置、並びに該計測装置を用いた健康指針管理アドバイス装置
US6512379B2 (en) 2001-02-05 2003-01-28 Siemens Westinghouse Power Corporation Condition monitoring of turbine blades and vanes in service
US6730918B2 (en) 2001-12-20 2004-05-04 General Electric Company Apparatus for determining past-service conditions and remaining life of thermal barrier coatings and components having such coatings
US7582359B2 (en) 2002-09-23 2009-09-01 Siemens Energy, Inc. Apparatus and method of monitoring operating parameters of a gas turbine
JP2004333311A (ja) * 2003-05-08 2004-11-25 Toyota Central Res & Dev Lab Inc 材料物性の高電圧測定方法とその高電圧測定装置
EP1564537A1 (de) 2004-02-17 2005-08-17 Siemens Aktiengesellschaft Zerstörungfreie Überwachung mikrostruktureller Veränderungen eines Bauteils ( Schichtsystem, Turbinenschaufeln, Brennkammerauskleidung )
US20050274611A1 (en) * 2004-05-25 2005-12-15 Schlichting Kevin W Probes for electrochemical impedance spectroscopy
CN2733368Y (zh) * 2004-06-10 2005-10-12 河南黄河旋风股份有限公司 膜状电阻或片状电阻精密测量装置
JP2006071576A (ja) * 2004-09-06 2006-03-16 Hiroshima Univ 金属材料の高温酸化モニタリング方法、モニタリング装置、モニタリングプログラムおよびモニタリングプログラムを記録したコンピュータ読取可能な記録媒体
KR20070044647A (ko) * 2005-10-25 2007-04-30 현대자동차주식회사 스폿용접 비파괴 검사장치
CN101533046A (zh) * 2008-03-14 2009-09-16 宝山钢铁股份有限公司 薄板点焊接触电阻的测量方法
US8106651B2 (en) * 2008-04-17 2012-01-31 Novellus Systems, Inc. Methods and apparatuses for determining thickness of a conductive layer
CN201218825Y (zh) * 2008-06-06 2009-04-08 宝山钢铁股份有限公司 接触电阻测量装置
KR101064658B1 (ko) * 2009-10-26 2011-09-16 한국지질자원연구원 상대함수율에 따른 시편의 전기비저항 계측방법
CN101833039B (zh) * 2010-04-30 2012-08-29 河海大学常州校区 接触电阻测量系统的加压装置

Also Published As

Publication number Publication date
JP2012163557A (ja) 2012-08-30
IN2012DE00181A (https=) 2015-08-21
RU2012103469A (ru) 2013-08-10
US8692564B2 (en) 2014-04-08
CN102628668A (zh) 2012-08-08
AU2012200547B2 (en) 2015-05-07
EP2485042A1 (en) 2012-08-08
EP2485042B1 (en) 2016-11-23
CA2765640C (en) 2020-01-14
US20120200304A1 (en) 2012-08-09
KR20120090816A (ko) 2012-08-17
AU2012200547A1 (en) 2012-08-23
JP6188117B2 (ja) 2017-08-30
CA2765640A1 (en) 2012-08-04
RU2589526C2 (ru) 2016-07-10
KR101899154B1 (ko) 2018-09-14

Similar Documents

Publication Publication Date Title
CN102628668B (zh) 用于确定多层结构中感兴趣的层的厚度的系统和方法
CN105203847A (zh) 一种薄层材料方块电阻和连接点接触电阻测试方法
CN104502400A (zh) 一种隔热材料高温热导率平面热源测试系统及方法
JP2015230290A (ja) 結露試験方法および結露試験装置
Wilson et al. Contact spot temperature and the temperature of external surfaces in an electrical connection
CN117368255A (zh) 一种丝状或薄膜材料导热系数的测试系统和测量方法
CN103713013B (zh) 测试管状材料轴向导热系数的装置
Liu et al. Quartet structure generation set algorithm based 3D reconstruction on porous structures of sintered copper joints for power electronics packaging
CN107328886A (zh) 色谱在线分析系统的进样装置及利用其处理样品的方法
Ocoleanu et al. Temperature investigations in two type of crimped connection using experimental determinations
Anatychuk et al. Methods for assuring high quality electric and thermal contacts when measuring parameters of thermoelectric materials
CN108519406A (zh) 一种架空地线轴向的导体热阻和对流热阻的计算方法
CN106771623A (zh) 一种高温环境下绝缘材料电阻及电阻率的测试装置
CN205003246U (zh) 可变温测量薄膜电击穿性能的电极装置
Xing et al. Thermophysical property measurement of electrically nonconductive fibers by the electrothermal technique
CN103901071B (zh) 一种测试膜状热电材料Seebeck系数的方法及其测试装置
JP5414068B2 (ja) 導電性試料の比熱容量及び半球全放射率の測定方法及び装置
Korzunin et al. Control of the dielectric properties of a grain oriented electrical steel coating
CN206710185U (zh) 用于测量水质高锰酸盐指数的铝块干浴加热消解装置
Anatychuk et al. Automated equipment for measurement of properties of thermoelectric material rods
RU2593650C1 (ru) Способ измерения теплопроводности покрытий
CN205754897U (zh) 接触式加热装置
RU2313082C1 (ru) Устройство для разбраковки металлических изделий
CN219434213U (zh) 一种用于铁路红外光子传感器的高温热靶装置
Ordonez-Miranda et al. Modelling and measurement of the thermal conductivity of composites with silver particles

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant