CA2765640C - System and method for use in determining the thickness of a layer of interest in a multi-layer structure - Google Patents
System and method for use in determining the thickness of a layer of interest in a multi-layer structure Download PDFInfo
- Publication number
- CA2765640C CA2765640C CA2765640A CA2765640A CA2765640C CA 2765640 C CA2765640 C CA 2765640C CA 2765640 A CA2765640 A CA 2765640A CA 2765640 A CA2765640 A CA 2765640A CA 2765640 C CA2765640 C CA 2765640C
- Authority
- CA
- Canada
- Prior art keywords
- electrode
- layer structure
- sample
- layer
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
- G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/021,328 | 2011-02-04 | ||
| US13/021,328 US8692564B2 (en) | 2011-02-04 | 2011-02-04 | System and method for use in determining the thickness of a layer of interest in a multi-layer structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2765640A1 CA2765640A1 (en) | 2012-08-04 |
| CA2765640C true CA2765640C (en) | 2020-01-14 |
Family
ID=45655366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2765640A Active CA2765640C (en) | 2011-02-04 | 2012-01-26 | System and method for use in determining the thickness of a layer of interest in a multi-layer structure |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US8692564B2 (https=) |
| EP (1) | EP2485042B1 (https=) |
| JP (1) | JP6188117B2 (https=) |
| KR (1) | KR101899154B1 (https=) |
| CN (1) | CN102628668B (https=) |
| AU (1) | AU2012200547B2 (https=) |
| CA (1) | CA2765640C (https=) |
| IN (1) | IN2012DE00181A (https=) |
| RU (1) | RU2589526C2 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104034295A (zh) * | 2014-06-05 | 2014-09-10 | 格力电器（武汉）有限公司 | 材料厚度检测设备及其使用方法 |
| JP6176220B2 (ja) * | 2014-10-14 | 2017-08-09 | トヨタ自動車株式会社 | 検査装置 |
| TWI636233B (zh) * | 2014-12-12 | 2018-09-21 | 美商通用電機股份有限公司 | 用於測量物件厚度的方法及裝置 |
| CN107430160A (zh) * | 2015-04-09 | 2017-12-01 | 株式会社村田制作所 | 电子元器件的电气特性测定方法以及电气特性测定装置 |
| DE102016117881A1 (de) | 2016-09-22 | 2018-03-22 | Thyssenkrupp Ag | Verfahren und Vorrichtung zur zerstörungsfreien Bestimmung der Dicke einer Kernschicht eines Sandwichblechs |
| KR102799571B1 (ko) * | 2018-07-06 | 2025-04-28 | 주식회사 엘지에너지솔루션 | 전도성 물질의 비표면적 측정 방법 |
| JP2024004678A (ja) * | 2022-06-29 | 2024-01-17 | 富士電機株式会社 | 膜厚評価方法および膜厚評価システム |
| US20250046640A1 (en) * | 2023-08-01 | 2025-02-06 | Applied Materials, Inc. | Dielectric spectroscopy temperature monitoring using electrostatic chuck |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4310389A (en) * | 1980-06-16 | 1982-01-12 | Chrysler Corporation | Method for simultaneous determination of thickness and electrochemical potential in multilayer plated deposits |
| JPS58166202A (ja) * | 1982-03-27 | 1983-10-01 | Nippon Steel Corp | 誘電体多重層の厚さ測定装置 |
| SU1572170A1 (ru) * | 1987-04-21 | 1992-07-30 | Предприятие П/Я В-8769 | Способ контрол толщины диэлектрической пленки на электропровод щей подложке |
| HU199020B (en) * | 1987-05-04 | 1989-12-28 | Magyar Tudomanyos Akademia | Method and apparatus for measuring the layer thickness of semiconductor layer structures |
| JPH02275349A (ja) * | 1989-04-15 | 1990-11-09 | Nok Corp | 加硫接着評価方法 |
| JP3306087B2 (ja) * | 1992-02-22 | 2002-07-24 | アジレント・テクノロジー株式会社 | 体積・表面抵抗率測定装置 |
| JPH07198642A (ja) * | 1993-12-28 | 1995-08-01 | Bridgestone Corp | ゴム組成物の電気抵抗測定機能を備える加硫特性試験機 |
| DE59610353D1 (de) * | 1995-12-22 | 2003-05-22 | Siemens Ag | Bestimmung der dicke einer elektrisch leitfähigen schicht |
| JPH1019948A (ja) * | 1996-06-28 | 1998-01-23 | Sekisui Chem Co Ltd | 微粒子導電抵抗測定器用圧子及び試料台 |
| JP3658504B2 (ja) * | 1998-07-09 | 2005-06-08 | 株式会社日立製作所 | 表面層厚さ測定装置 |
| US6208146B1 (en) * | 1999-02-08 | 2001-03-27 | General Motors Corporation | Method and apparatus for measuring contact resistance for spot welding simulations |
| US6388452B1 (en) * | 2000-04-20 | 2002-05-14 | Hewlett-Packard Company | Device for sensing media thickness using capacitance measurements |
| JP4840952B2 (ja) * | 2000-09-19 | 2011-12-21 | 株式会社フィジオン | 生体電気インピーダンス計測方法及び計測装置、並びに該計測装置を用いた健康指針管理アドバイス装置 |
| US6512379B2 (en) | 2001-02-05 | 2003-01-28 | Siemens Westinghouse Power Corporation | Condition monitoring of turbine blades and vanes in service |
| US6730918B2 (en) | 2001-12-20 | 2004-05-04 | General Electric Company | Apparatus for determining past-service conditions and remaining life of thermal barrier coatings and components having such coatings |
| US7582359B2 (en) | 2002-09-23 | 2009-09-01 | Siemens Energy, Inc. | Apparatus and method of monitoring operating parameters of a gas turbine |
| JP2004333311A (ja) * | 2003-05-08 | 2004-11-25 | Toyota Central Res & Dev Lab Inc | 材料物性の高電圧測定方法とその高電圧測定装置 |
| EP1564537A1 (de) | 2004-02-17 | 2005-08-17 | Siemens Aktiengesellschaft | Zerstörungfreie Überwachung mikrostruktureller Veränderungen eines Bauteils ( Schichtsystem, Turbinenschaufeln, Brennkammerauskleidung ) |
| US20050274611A1 (en) * | 2004-05-25 | 2005-12-15 | Schlichting Kevin W | Probes for electrochemical impedance spectroscopy |
| CN2733368Y (zh) * | 2004-06-10 | 2005-10-12 | 河南黄河旋风股份有限公司 | 膜状电阻或片状电阻精密测量装置 |
| JP2006071576A (ja) * | 2004-09-06 | 2006-03-16 | Hiroshima Univ | 金属材料の高温酸化モニタリング方法、モニタリング装置、モニタリングプログラムおよびモニタリングプログラムを記録したコンピュータ読取可能な記録媒体 |
| KR20070044647A (ko) * | 2005-10-25 | 2007-04-30 | 현대자동차주식회사 | 스폿용접 비파괴 검사장치 |
| CN101533046A (zh) * | 2008-03-14 | 2009-09-16 | 宝山钢铁股份有限公司 | 薄板点焊接触电阻的测量方法 |
| US8106651B2 (en) * | 2008-04-17 | 2012-01-31 | Novellus Systems, Inc. | Methods and apparatuses for determining thickness of a conductive layer |
| CN201218825Y (zh) * | 2008-06-06 | 2009-04-08 | 宝山钢铁股份有限公司 | 接触电阻测量装置 |
| KR101064658B1 (ko) * | 2009-10-26 | 2011-09-16 | 한국지질자원연구원 | 상대함수율에 따른 시편의 전기비저항 계측방법 |
| CN101833039B (zh) * | 2010-04-30 | 2012-08-29 | 河海大学常州校区 | 接触电阻测量系统的加压装置 |
-
2011
- 2011-02-04 US US13/021,328 patent/US8692564B2/en active Active
-
2012
- 2012-01-20 IN IN181DE2012 patent/IN2012DE00181A/en unknown
- 2012-01-26 CA CA2765640A patent/CA2765640C/en active Active
- 2012-01-31 AU AU2012200547A patent/AU2012200547B2/en active Active
- 2012-01-31 JP JP2012017416A patent/JP6188117B2/ja active Active
- 2012-02-02 EP EP12153734.4A patent/EP2485042B1/en not_active Not-in-force
- 2012-02-02 KR KR1020120010789A patent/KR101899154B1/ko active Active
- 2012-02-02 RU RU2012103469/28A patent/RU2589526C2/ru active
- 2012-02-03 CN CN201210031176.4A patent/CN102628668B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102628668B (zh) | 2017-03-01 |
| JP2012163557A (ja) | 2012-08-30 |
| IN2012DE00181A (https=) | 2015-08-21 |
| RU2012103469A (ru) | 2013-08-10 |
| US8692564B2 (en) | 2014-04-08 |
| CN102628668A (zh) | 2012-08-08 |
| AU2012200547B2 (en) | 2015-05-07 |
| EP2485042A1 (en) | 2012-08-08 |
| EP2485042B1 (en) | 2016-11-23 |
| US20120200304A1 (en) | 2012-08-09 |
| KR20120090816A (ko) | 2012-08-17 |
| AU2012200547A1 (en) | 2012-08-23 |
| JP6188117B2 (ja) | 2017-08-30 |
| CA2765640A1 (en) | 2012-08-04 |
| RU2589526C2 (ru) | 2016-07-10 |
| KR101899154B1 (ko) | 2018-09-14 |
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Legal Events
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| MPN | Maintenance fee for patent paid |
Free format text: FEE DESCRIPTION TEXT: MF (PATENT, 14TH ANNIV.) - STANDARD Year of fee payment: 14 |
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