CN102628541B - 一种气浮转台结构 - Google Patents
一种气浮转台结构 Download PDFInfo
- Publication number
- CN102628541B CN102628541B CN201210102877.2A CN201210102877A CN102628541B CN 102628541 B CN102628541 B CN 102628541B CN 201210102877 A CN201210102877 A CN 201210102877A CN 102628541 B CN102628541 B CN 102628541B
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- CN
- China
- Prior art keywords
- air
- outer shroud
- bearing
- bearing outer
- gas floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210102877.2A CN102628541B (zh) | 2012-04-10 | 2012-04-10 | 一种气浮转台结构 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210102877.2A CN102628541B (zh) | 2012-04-10 | 2012-04-10 | 一种气浮转台结构 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102628541A CN102628541A (zh) | 2012-08-08 |
CN102628541B true CN102628541B (zh) | 2014-09-17 |
Family
ID=46586864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210102877.2A Active CN102628541B (zh) | 2012-04-10 | 2012-04-10 | 一种气浮转台结构 |
Country Status (1)
Country | Link |
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CN (1) | CN102628541B (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014234840A (ja) * | 2013-05-31 | 2014-12-15 | 三星ダイヤモンド工業株式会社 | 重量機器の支持装置 |
CN103542241B (zh) * | 2013-09-25 | 2016-06-29 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
EP3096049A4 (en) * | 2014-01-14 | 2017-07-05 | NSK Ltd. | Rotating mechanism, machine tool, and semiconductor production device |
CN104533956B (zh) * | 2015-01-22 | 2017-02-22 | 哈尔滨工业大学 | 主动补偿式低涡流轴动式气浮轴承 |
CN104848989B (zh) * | 2015-05-29 | 2017-07-28 | 哈尔滨工业大学 | 高精度立式气浮转台自动配平装置的自动配平方法 |
CN106481662A (zh) * | 2016-11-18 | 2017-03-08 | 广东工业大学 | 一种精密气浮转台 |
CN106641676A (zh) * | 2016-12-02 | 2017-05-10 | 无锡特恒科技有限公司 | 回转体气体润滑结构 |
CN108955593A (zh) * | 2018-07-16 | 2018-12-07 | 中国科学院沈阳自动化研究所 | 轴承内外圈尺寸自动检测装置 |
CN111195583B (zh) * | 2018-11-20 | 2023-02-28 | 群翊工业股份有限公司 | 具有气浮轴承的烘箱及其应用方法 |
CN111285031B (zh) * | 2020-03-11 | 2021-09-14 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN111682669B (zh) * | 2020-06-03 | 2021-07-30 | 北京航空航天大学杭州创新研究院 | 基于气浮原理的超小阻尼旋转装置 |
CN112356580A (zh) * | 2020-09-18 | 2021-02-12 | 季华实验室 | 一种喷头调整装置和喷墨打印设备 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7001074B2 (en) * | 2003-04-21 | 2006-02-21 | Seagate Technology Llc | High pressure barrier to oil loss by diffusion |
DE102005007297A1 (de) * | 2005-02-17 | 2006-08-24 | Minebea Co., Ltd. | Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors |
CN101398636A (zh) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | 一种精密减振组件及由其构成的减振平台 |
CN102011918A (zh) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | 一种高精度直驱式气浮转台 |
CN102226948A (zh) * | 2011-05-19 | 2011-10-26 | 张瑞杰 | 一种气浮气缸调平系统 |
CN202598045U (zh) * | 2012-04-10 | 2012-12-12 | 张瑞杰 | 一种气浮转台结构 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004045629B4 (de) * | 2004-09-21 | 2008-07-03 | Minebea Co., Ltd. | Fluiddynamisches Lagersystem |
JP2006275234A (ja) * | 2005-03-30 | 2006-10-12 | Kumamoto Technology & Industry Foundation | エアベアリングおよびリング状モータ |
-
2012
- 2012-04-10 CN CN201210102877.2A patent/CN102628541B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7001074B2 (en) * | 2003-04-21 | 2006-02-21 | Seagate Technology Llc | High pressure barrier to oil loss by diffusion |
DE102005007297A1 (de) * | 2005-02-17 | 2006-08-24 | Minebea Co., Ltd. | Fluiddynamisches Luftlagersystem zur Drehlagerung eines Motors |
CN101398636A (zh) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | 一种精密减振组件及由其构成的减振平台 |
CN102011918A (zh) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | 一种高精度直驱式气浮转台 |
CN102226948A (zh) * | 2011-05-19 | 2011-10-26 | 张瑞杰 | 一种气浮气缸调平系统 |
CN202598045U (zh) * | 2012-04-10 | 2012-12-12 | 张瑞杰 | 一种气浮转台结构 |
Also Published As
Publication number | Publication date |
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CN102628541A (zh) | 2012-08-08 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: TIANJIN ZHONGJING MICRO INSTRUMENT AND EQUIPMENT C Free format text: FORMER OWNER: ZHANG RUIJIE Effective date: 20141208 |
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C41 | Transfer of patent application or patent right or utility model | ||
COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100039 FENGTAI, BEIJING TO: 301800 BAODI, TIANJIN |
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TR01 | Transfer of patent right |
Effective date of registration: 20141208 Address after: 301800 Tianjin city Baodi District Tianbao Industrial Park Tianxiang road and Po Hong Road junction Patentee after: TIANJIN ZHONGJING MICRO INSTRUMENT AND EQUIPMENT CO., LTD. Address before: Beijing 100039 Fengtai District, East Building 19, room 508 Patentee before: Zhang Ruijie |