WO2015043228A1 - 一种气浮转台 - Google Patents

一种气浮转台 Download PDF

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Publication number
WO2015043228A1
WO2015043228A1 PCT/CN2014/079317 CN2014079317W WO2015043228A1 WO 2015043228 A1 WO2015043228 A1 WO 2015043228A1 CN 2014079317 W CN2014079317 W CN 2014079317W WO 2015043228 A1 WO2015043228 A1 WO 2015043228A1
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WO
WIPO (PCT)
Prior art keywords
air
air floating
shaft
floating
sleeve
Prior art date
Application number
PCT/CN2014/079317
Other languages
English (en)
French (fr)
Inventor
汤秀清
Original Assignee
广州市昊志机电股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 广州市昊志机电股份有限公司 filed Critical 广州市昊志机电股份有限公司
Publication of WO2015043228A1 publication Critical patent/WO2015043228A1/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
    • B23Q16/02—Indexing equipment
    • B23Q16/08—Indexing equipment having means for clamping the relatively movable parts together in the indexed position
    • B23Q16/10—Rotary indexing
    • B23Q16/102—Rotary indexing with a continuous drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2210/00—Machine tools incorporating a specific component
    • B23Q2210/004—Torque motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q2220/00—Machine tool components
    • B23Q2220/002—Tool turrets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Definitions

  • the invention relates to a high precision air static pressure air floating turntable. Background technique
  • Turntable equipment is now widely used in manufacturing, such as CNC hydraulic turntables.
  • the servo motor is usually used in conjunction with the coupling to drive.
  • only one thrust surface with high pressure gas is provided in the air bearing, and the other end is in a free state.
  • the air floating shaft will move slightly toward the free end; when the air pressure is lowered, the air floating shaft is lowered by gravity, that is, the equilibrium position changes with the change of the air pressure.
  • these conventional rotating devices need to be driven by means of an intermediate transmission, and on the other hand, their accuracy and stability are not good. Summary of the invention
  • an object of the present invention to provide an aerostatic air flotation turntable having high rotational accuracy and positioning accuracy.
  • An air floating turret includes an air floating shaft and an air floating sleeve
  • the air floating shaft includes a shaft portion and a top and a bottom disposed at opposite ends of the shaft portion
  • the top portion includes an upper thrust surface opposite to the bottom portion, the bottom portion including the top portion Lower the push surface
  • the air floating cover includes an upper air floating surface at the top and a lower air floating surface at the bottom, and the upper air floating surface and the upper thrust surface are matched with each other, and the lower air floating surface and the lower air bearing surface
  • the upper air floating surface is provided with a plurality of air outlet holes facing the upper thrust surface
  • the lower air floating surface is provided with a plurality of air outlet holes facing the lower thrust surface
  • the air floating sleeve inner surface is uniformly provided with a plurality of air outlet holes facing the shaft portion.
  • a plurality of air outlets are connected to an external high-pressure air source through an air guiding groove provided in the air floating sleeve.
  • the bottom and/or top of the air floating shaft is detachably coupled to the shaft portion.
  • the air floating sleeve is provided with an air flow passage, and the air flow passage includes an air inlet hole connected to the high pressure air source, and the plurality of air outlet holes penetrate the air guiding groove and the upper air floating surface, the air guiding groove and the lower air floating surface, the air guiding groove shaft and the air Between the inner surfaces of the floating sleeves; the plurality of air outlets are circumferentially distributed on the upper air floating surface, the lower air floating surface, and the inner surface of the air floating sleeve.
  • the air floating sleeve includes a column body provided with a receiving space and a supporting portion extending outward in a radial direction of the column body, the shaft portion is received in the receiving space; the top portion is supported on the supporting portion and is on the upper air floating surface After the air outlet is ventilated, it floats away from the air floating sleeve; a certain gap is maintained between the cylinder and the bottom portion, and when the air outlet hole of the lower air floating surface is ventilated, it floats toward the air floating sleeve to reduce the gap between the bottom and the bottom.
  • the plurality of air outlet holes are distributed on the upper air floating surface along two circumferences, and the air outlet holes distributed along the two circumferences are centered on the center of the shaft portion and respectively! ⁇ and r 2 are arranged in a radius on the upper air floating surface; wherein, and the top is respectively
  • the radius of the inner and outer circumferences formed by the center of the shaft portion as a center.
  • the air float table includes a torque motor coupled to the air floating shaft for driving the air floating shaft to rotate relative to the air floating sleeve.
  • the air floating turntable comprises an upper base and a lower base for supporting the upper base, and the support part supports a plurality of t ⁇ J$ l: the torque is a plurality of tweezers and sub-pieces, and the tweezers are quenched and connected,
  • the stator is disposed on the lower base and is in a stationary state.
  • the lower base is provided with a water inlet nozzle, a water outlet nozzle and a cooling water jacket.
  • the stator is disposed in the cooling water jacket; and a sealing ring for sealing a gap between the cooling water jacket and the lower base is disposed.
  • the air float table includes a reading device including a circular scale mount, a circular scale mounted on the circular scale mount, a readhead mount, and a readhead mounted on the readhead mount; the circular grating
  • the ruler mount is mounted on the bottom of the air-floating shaft and can be floated and rotated together with the air-floating shaft.
  • the readhead mount is mounted on the lower base and is in a stationary state.
  • the air floating sleeve is provided with two upper air floating surfaces and a lower air floating surface, thereby improving the axial static stiffness, the rotational rigidity and the axial rotation precision of the air floating turntable, so that the upper air to be processed is to be processed Or the workpiece is always at a stable height and will not change due to changes in air pressure.
  • FIG. 1 is a schematic structural view of an air floating turntable of the present invention. Main component symbol description
  • Containment space 55, air intake hole; 56, upper air floating surface; 57, lower air floating surface; 58, air outlet; 59, inner surface; 70, torque motor; 71, rotor; 73, stator; Pipeline; 99, reading device; 990, circular scale mount; 991, circular scale; 992, readhead; 993, readhead mounting; 994, fixing. detailed description
  • the present invention relates to an air floatation turret 100 comprising a base 10, an air floating shaft 30, an air floating sleeve 50, a torque motor 70, Intake conduit 90 and reading device 99.
  • the air float sleeve 50 is mounted on the base 10.
  • the air floating shaft 30 is placed in the air floatation sleeve 50.
  • the bottom portion 32 is coupled to the air floating shaft 30 and is upwardly floatable with respect to the air floating shaft 50 when the air intake duct 90 is ventilated, and simultaneously rotated relative to the air floating sleeve 50 by the torque motor 70.
  • the reading device 99 is used to control the rotational speed or positioning of the torque motor 70.
  • the base 10 includes an upper base 11 and a lower base 13 connected to the upper base 11.
  • the upper base 11 is supported on the lower base 13.
  • a cooling water jacket 130 is disposed on the lower base 13 for cooling and cooling the torque motor 70 when the torque motor 70 is in operation.
  • a water inlet 131 and a water outlet 132 are provided on the lower base 13. When water enters from the water inlet nozzle 131, the water will be cooled by the cooling water jacket 130 and then discharged through the water outlet nozzle 132.
  • a seal ring 133 for sealing the gap between the cooling water jacket 130 and the lower base 13 is provided to prevent air leakage.
  • the air floating shaft 30 includes a shaft portion 35 and a top portion 31 and a bottom portion 32 that are disposed at opposite ends of the shaft portion 35.
  • the air floating sleeve 50 is disposed on the upper base 11 and sleeved outside the shaft portion 35, which includes
  • the column body 51 has a support portion 53 extending along a radially outer edge of the column body 51 and a receiving space 54 formed by the support portion 53.
  • the support portion 53 is supported on the upper base 11.
  • the shaft portion 35 is fitted in the accommodating space 54.
  • the bottom portion 32 is attached to one end of the shaft portion 35 away from the top portion 31 by a lock attachment 37, and is spaced apart from the end of the column body 51 away from the support portion 53. Among them, the interval is extremely small, generally less than one millimeter, so it is not shown in the figure. It can be understood that in other embodiments, either the top 31 and the bottom 32 of the air floating shaft 30 can be designed to be detachably connected to the shaft portion 35, thereby facilitating the sleeve portion 35 to be nested in the receiving space. 54 inside.
  • the upper surface 31 is opposite to the bottom portion 32 and is provided with an upper thrust surface 310.
  • the support portion 53 is provided with an upper air floating surface 56 opposite to the upper thrust surface 310.
  • a side of the bottom portion 32 opposite to the top portion 31 is provided with a lower thrust surface 320, and the cylinder 51 is provided with a lower air floating surface 57 opposite to the lower thrust surface 320.
  • the cylinder 51 includes an inner surface 59 opposite the shaft portion 35.
  • the upper thrust surface 310 is in clearance with the upper air floating surface 56
  • the lower thrust surface 320 is in clearance with the lower air floating surface 57
  • the inner surface 59 of the air floating sleeve 50 is in clearance with the outer surface of the shaft portion 35.
  • the air flotation sleeve 50 is internally provided with an air flow passage.
  • the air flow passage includes an intake hole 55 connected to the intake duct 90, an air guide groove 52, and a plurality of air outlet holes 58.
  • a plurality of air outlets 58 extend through the air guiding groove 52 and the upper air floating surface 56, the air guiding groove 52 and the lower air floating surface 57, and between the air guiding groove 52 and the inner surface 59 for connection with an external high pressure air source.
  • the intake duct 90 is intakeed, the gas can be guided through the air guide groove 52 to act on the air floating shaft 30 and the bottom portion 32 in different directions by the plurality of air outlet holes 58.
  • the upper air floating surface 56 is provided with Two turns of air outlets 58.
  • a plurality of annular air outlets 58 are also uniformly disposed on the inner surface 59. At the same time, due to the area limitation, only one annular air outlet 58 is provided on the lower air floating surface 57. Wherein, the two annular air outlets 58 are respectively centered on the center of the shaft portion 35, and the radius of each of ⁇ and r 2 are arranged on the upper air floating surface.
  • the center of the shaft portion 35 is rounded.
  • the number and distribution of the air outlets 58 on the upper air floating surface 56 and the lower air floating surface 57 can be determined according to requirements.
  • the torque motor 70 includes a rotor 71 and a stator 73 that cooperates with the rotor 71.
  • the rotor 71 is mounted to the bottom portion 32 by screws (not shown) which can be floated and rotated with respect to the air bearing shaft 50 and the bottom portion 32 as the air bearing sleeve 50 is vented.
  • the stator 73 is placed on the lower base 13 and embedded in the cooling water jacket 130 and is in a stationary state.
  • the reading device 99 includes a circular scale mount 990, a circular scale 991, a readhead 992, and a readhead mount 993.
  • the scale mount 990 is mounted on the bottom 32.
  • the circular scale 991 is mounted on the circular scale mount 990 by a fixing member 994 and is floatable and rotatable relative to the air floating sleeve 50 with the air floating shaft 30.
  • the readhead mount 993 is mounted on the lower base 13 and the readhead 992 is mounted on the readhead mount 993 and is stationary.
  • the working principle of the air floating turret 100 will be described in detail by taking the air floating turret 100 from a stationary state to a ventilated state as an example.
  • the air floating table 100 is not ventilated and is in a stationary state
  • the top portion 31 of the air floating shaft 30 is in clearance fit with the support portion 53 of the air floating sleeve 50.
  • the end of the air floating sleeve 50 cylinder 51 away from the support portion 53 and the bottom portion 32 are spaced apart.
  • the gas source When in operation, the gas source is first turned on (not shown), and the high pressure gas enters the air floating jacket 50 through the air inlet 55, and the air outlet 58 located on the upper air floating surface 56, the lower air floating surface 57, and the inner surface 59 is sprayed.
  • the high-pressure gas is applied to the upper thrust surface 310, the lower thrust surface 320, and the shaft portion 35, so that the air-floating shaft 30 drives the bottom portion 32 to float upward toward the top 31 of the air-floating shaft 30, thereby
  • the upper thrust surface 310 and the upper air floating surface 56, the inner surface 59 and the shaft portion 35 are kept at a certain gap, and the interval between the lower air floating surface 57 and the lower thrust surface 320 is reduced.
  • the air floating shaft 30 and the bottom 32 are suspended in a stable equilibrium position.
  • the air floating gap between the upper air floating surface 56 and the upper thrust surface 310, the lower air floating surface 57 and the lower thrust surface 320 is a stable value (about 0.015 mm), so that the air floating shaft 30 and the bottom portion 32 are both It cannot float upwards or sink downwards, and neither of them will float up and down due to changes in air pressure, so that the entire air floating shaft 30, the bottom 32, and the circular scale mount 990 and the circular grating mounted on the bottom 32
  • the rulers 991 are all in a suspended state, and are not in contact with any non-moving parts.
  • the rotor 71 When the torque motor 70 is energized to start working, the rotor 71 rotates and drives the air floating shaft 30 and the bottom 32 to rotate together. At the same time, the circular scale mount 990 and the circular scale 991 connected to the air floating shaft 30 also rotate with the bottom 32. Since the readhead 992 is mounted on the lower base 13 and is fixed, the readhead 992 reads the raster signal from the rotating circular scale 991 and uploads it to the control system (not shown), and the control system further controls the torque according to the raster signal. Motor 70 speed or positioning, so as to achieve high-precision control of the air float table 100 of.
  • the air floating sleeve 50 and the bottom portion 32 after the machine tool finishes processing the workpiece, an artificial fine grinding process is additionally added to the air floating sleeve 50 repeatedly.
  • the upper air floating surface 56 and the lower air floating surface 57 are finely ground to ensure that the flatness and parallelism of the upper air floating surface 56 and the lower air floating surface 57 are at a precise level.
  • the upper thrust surface 310 of the air floating shaft 30 and the surface of the shaft portion 35 are ground to ensure the verticality of the upper thrust surface 310 and the shaft portion 35.
  • the lower end push surface 320 of the bottom portion 32 is ground to ensure its flatness.
  • the air floatation sleeve 50 is respectively provided with an upper air floating surface 56 and a lower air floating surface 57, thereby greatly improving the axial static stiffness, the rotational rigidity and the axial rotation precision of the air floating rotary table 100, so that the air floating rotary table 100 is placed thereon for processing Or the workpiece is always at a stable height and will not change due to changes in air pressure.
  • the air float turret 100 is directly driven in conjunction with the torque motor 70, thereby eliminating the intermediate transmission mechanism.
  • the air-floating shaft 30 cooperates with the air-floating sleeve 50 to provide high radial and axial precision and high rigidity to the air-floating turret 100.
  • the torque motor 70 provides a large rotational torque and a holding torque and is matched with a high-precision circular scale 991.
  • 100 can provide high rotation accuracy and positioning accuracy.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)

Abstract

一种气浮转台包括气浮轴（30）及气浮套（50）。气浮轴（30）包括轴部（35）以及设置于轴部相对两端的顶部（31）与底部（32）。顶部包括与底部相对的上止推面（310），底部包括与顶部相对下止推面（320）。气浮套（50）包括位于顶部的上气浮面（56）及位于底部的下气浮面（57），上气浮面（56）与上止推面（310）间隙配合，下气浮面（57）与下止推面（320）间隙配合，气浮套内表面（59）与轴部外表面间隙配合。上气浮面（56）、下气浮面（57）以及气浮套内表面（59）上设置有若干与外部高压气源连接的出气孔（58）。该气浮转台中气浮套设置有相对的两个上气浮面与下气浮面，从而提高了气浮转台的轴向静刚度、旋转刚度以及轴向回转精度，使放置其上待加工或检测工件始终处于一个稳定的高度，不会因气压的改变而改变。

Description

一种气浮转台 技术领域
本发明涉及一种高精度空气静压气浮转台。 背景技术
转台设备现已广泛应用于制造业， 如数控液压转台等。 现有气浮 转台中通常釆用伺服电机与联轴器配合进行驱动。 另外， 气浮轴承中 仅设置有一个有高压气体作用的止推面， 另一端则处于自由状态。 当 气压升高时， 气浮轴会向自由端作微小移动； 当气压降低后， 受重力 作用， 气浮轴又降下来， 亦即平衡位置随气压的改变而改变。 这些传 统的旋转装置一方面需要借助中间传动机构进行驱动，另一方面其精 度和稳定性不好。 发明内容
针对现有技术的不足，本发明的目的旨在于提供一种转动精度与 定位精度较高的空气静压气浮转台。
为实现上述目的， 本发明釆用如下技术方案：
一种气浮转台包括气浮轴及气浮套，该气浮轴包括轴部以及设置 于轴部相对两端的顶部与底部， 顶部包括与底部相对的上止推面， 该 底部包括与顶部相对下止推面。气浮套包括位于顶部的上气浮面及位 于底部的下气浮面， 上气浮面与上止推面间隙配合， 下气浮面与下止 推面间隙配合， 气浮套内表面与轴部外表面间隙配合。 上气浮面上设 置有朝向上止推面的若干出气孔，下气浮面上设置有朝向下止推面的 若干出气孔， 该气浮套内表面上均匀设置有朝向轴部的若干出气孔。 若干出气孔通过设置于气浮套内的导气槽与外部高压气源连接。
该气浮轴的底部和 /或顶部与轴部可拆卸的连接。
气浮套内设置有气流通道，气流通道包括与高压气源连接的进气 孔， 该若干出气孔贯通于导气槽与上气浮面、 导气槽与下气浮面、 导 气槽轴与气浮套内表面之间；该若干出气孔沿圓周的方式分布于上气 浮面、 下气浮面以及气浮套内表面上。
该气浮套包括设置有收容空间的柱体及沿柱体的径向向外延伸 形成的支撑部， 该轴部收容于收容空间内； 该顶部支撑于该支撑部上 且当上气浮面的出气孔通气后向远离气浮套方向浮动；该柱体与底部 之间保持一定间隙且当下气浮面的出气孔通气后向靠近气浮套方向 浮动使其与底部之间的间隙减小。
该若干出气孔沿两个圓周的方式分布于上气浮面上，该沿两个圓 周分布的出气孔以轴部中心为圓心且分别以 ！^与 r2为半径排列在上 气浮面上； 其中， 与 分别为顶部
Figure imgf000004_0001
以轴部中心为圓心形成的内外两个圓周的半径。
该气浮转台包括与气浮轴连接的用于驱动气浮轴相对于气浮套 转动的力矩电机。
该气浮转台包括上底座及用于支撑上底座的下底座，该支撑部支 索千 t^J$ l :该力矩 ^几 括祛子及 子，该祛子 下 淬 ϋ车接， 该定子设置于下底座上且处于静止状态。
该下底座上设置有进水嘴、 出水嘴以及冷却水套， 该定子设置于 冷却水套内；该冷却水套与下底座之间设置有用于密封两者之间间隙 的密封圈。
该气浮转台包括读数装置， 该读数装置包括圓光栅尺安装座、 安 装于圓光栅尺安装座上的圓光栅尺、读数头安装件以及安装于读数头 安装件上的读数头；该圓光栅尺安装座安装于气浮轴底部上并可随气 浮轴一同向上浮动与旋转，该读数头安装件安装于下底座上且处于静 止状态。
本发明中气浮转台中气浮套设置有相对的两个上气浮面与下气 浮面，从而提高了气浮转台的轴向静刚度、旋转刚度以及轴向回转精 度， 使放置其上待加工或检测工件始终处于一个稳定的高度， 不会因 气压的改变而改变。 附图说明
图 1为本发明气浮转台的结构示意图。 主要元件符号说明
100、 气浮转台； 10、 底座； 11、 上底座； 13、 下底座； 130、 冷 却水套； 131、 进水嘴； 132、 出水嘴； 133、 密封圈； 30、 气浮轴； 31、 顶部； 310、 上止推面； 32、 底部； 320、 下止推面； 35、 轴部； 37、 锁附件； 50、 气浮套； 51、 柱体； 52、 导气槽； 53、 支撑部； 54、 收容空间； 55、 进气孔； 56、 上气浮面； 57、 下气浮面； 58、 出 气孔； 59、 内表面； 70、 力矩电机； 71、 转子； 73、 定子； 90、 进气 管道； 99、 读数装置； 990、 圓光栅尺安装座； 991、 圓光栅尺； 992、 读数头； 993、 读数头安装件； 994、 固定件。 具体实施方式
下面将结合附图以及具体实施方式， 对本发明做进一步描述： 请参见图 1， 本发明涉及一种气浮转台 100， 其包括底座 10、 气 浮轴 30、 气浮套 50、 力矩电机 70、 进气管道 90以及读数装置 99。 气浮套 50安装于底座 10上。 气浮轴 30套装于气浮套 50内。 底部 32与气浮轴 30连接并可当进气管道 90通气时与气浮轴 30—同相对 于气浮套 50向上浮动，并同时在力矩电机 70的作用下相对于气浮套 50转动。 读数装置 99用于控制力矩电机 70的转速或定位。
底座 10包括上底座 11及与上底座 11连接的下底座 13。 上底座 11支撑于下底座 13上。 下底座 13上间隔设置有冷却水套 130， 用于 当力矩电机 70工作时对力矩电机 70冷却降温。 下底座 13上设置进 水嘴 131及出水嘴 132。 当水由进水嘴 131进入时， 水将经由冷却水 套 130对力矩电机 70进行降温后经由出水嘴 132排出。 在本实施例 中， 冷却水套 130与下底座 13之间设置有用于密封两者之间间隙的 密封圈 133， 防止漏气。
气浮轴 30包括轴部 35以及设置于轴部 35相对两端的顶部 31与 底部 32。 气浮套 50设置于上底座 11上且套设于轴部 35外， 其包括 柱体 51、 沿柱体 51的径向向外边缘延伸形成的支撑部 53 以及由支 撑部 53围设形成的收容空间 54。 支撑部 53支撑于上底座 11上。 轴 部 35套装于收容空间 54内。 当气浮套 50套设于气浮轴 30外时， 顶 部 31支撑于支撑部 53上，轴部 35沿平行于柱体 51的方向收容于收 容空间 54内。 底部 32通过锁附件 37安装于轴部 35远离顶部 31的 一端， 并与柱体 51远离支撑部 53的末端保持一定间隔。 其中， 该间 隔极小， 一般不到一毫米， 所以图中未示出。 可以理解， 在其它一些 实施例中， 气浮轴 30的顶部 31与底部 32两者中任意一者可设计为 与轴部 35可拆卸的连接， 从而有利于将轴部 35套设于收容空间 54 内。
顶部 31与底部 32相对的一面设置有上止推面 310， 支撑部 53 设置有与上止推面 310相对的上气浮面 56。 底部 32与顶部 31相对 的一面设置有下止推面 320， 柱体 51设置有与下止推面 320相对的 下气浮面 57。 柱体 51包括与轴部 35相对的内表面 59。 其中， 上止 推面 310与上气浮面 56间隙配合，下止推面 320与下气浮面 57间隙 配合， 且气浮套 50内表面 59与轴部 35外表面间隙配合。 气浮套 50 内部设置有气流通道。气流通道包括与进气管道 90连接的进气孔 55、 导气槽 52以及若干出气孔 58。 若干出气孔 58贯通于导气槽 52与上 气浮面 56、 导气槽 52与下气浮面 57、 以及导气槽 52与内表面 59之 间， 用以与外部高压气源连接。 当进气管道 90进气时， 气体能经导 气槽 52引导由若干出气孔 58沿不同方向作用于气浮轴 30与底部 32 上。 在本实施例中， 为了增加气浮套 50的刚度， 上气浮面 56设置有 两圈出气孔 58。 内表面 59上亦均匀设置有若干圈出气孔 58。 同时由 于面积限制， 下气浮面 57上仅设置一圈出气孔 58。 其中， 两圈出气 孔 58分别以轴部 35中心为圓心， ^与 r2为半径均勾排列在上气浮面
56上 其中， = r (Ri与 R2分别为顶部 31
Figure imgf000008_0001
以轴部 35中心为圓心形 可以理解， 在其 它一些实施例中， 上气浮面 56与下气浮面 57上出气孔 58的数量以 及分布位置均可根据需求而定。
力矩电机 70包括转子 71及与转子 71配合的定子 73。 转子 71 通过螺钉（图未示）安装于底部 32上， 其可在气浮套 50通气时随气 浮轴 30与底部 32—同相对于气浮套 50向上浮动并旋转。定子 73设 置于下底座 13上并镶嵌于冷却水套 130内， 且处于静止状态。
读数装置 99 包括圓光栅尺安装座 990、 圓光栅尺 991、 读数头 992以及读数头安装件 993。 圓光栅尺安装座 990安装于底部 32上。 圓光栅尺 991通过固定件 994安装于圓光栅尺安装座 990上并可随气 浮轴 30相对于气浮套 50向上浮动并旋转。读数头安装件 993安装于 下底座 13上， 读数头 992安装于读数头安装件 993上且处于静止状 态。
下面以气浮转台 100 由静止状态变化为通气后状态为例对气浮 转台 100工作原理进行详细说明。 其中， 当气浮转台 100不通气而处 于静止状态时，气浮轴 30顶部 31与气浮套 50的支撑部 53间隙配合。 气浮套 50柱体 51远离支撑部 53的一端与底部 32之间保持一定间隔。 此日十， 洚鈾 30及祛子 71 菩所右都件 會蚤都亩接作用下 l 洚面 56上， 即气浮轴 30的所有轴向气浮间隙都在底部 32与气浮套 50之 间， 约 0.03mm。
当在工作时，先接通气源（图未示)， 高压气体由进气孔 55进入气 浮套 50内， 位于上气浮面 56、 下气浮面 57以及内表面 59上的出气 孔 58喷出高压气体， 高压气体同时作用于上止推面 310、 下止推面 320以及轴部 35上， 使气浮轴 30带动底部 32—起向靠近气浮轴 30 顶部 31方向向上浮动， 从而使上止推面 310与上气浮面 56、 内表面 59与轴部 35保持一定间隙， 且下气浮面 57与下止推面 320之间的 间隔变小。 当上气浮面 56与下气浮面 57的气压与气浮轴 30、 底部 32以及位于两者上的所有部件的重量达到一个平衡时， 气浮轴 30与 底部 32悬浮停在一个稳定的平衡位置。 此时， 上气浮面 56与上止推 面 310、 下气浮面 57与下止推面 320间的气浮间隙都是一个稳定值 (约 0.015mm )，如此使气浮轴 30及底部 32既不能向上浮动亦不能 向下下沉， 且两者也不会因为气压的改变而上下浮动，从而使整个气 浮轴 30、 底部 32以及安装于底部 32上的圓光栅尺安装座 990以及 圓光栅尺 991就全都处于一种悬浮状态， 与任何非运动件都不接触。
当力矩电机 70通电开始工作， 转子 71转动并带动气浮轴 30以 及底部 32—同转动。 同时， 与气浮轴 30相连的圓光栅尺安装座 990 以及圓光栅尺 991亦随底部 32—同转动。 由于读数头 992安装于下 底座 13上固定不动， 读数头 992从转动的圓光栅尺 991上读取光栅 信号并上传到控制系统（图未示）， 控制系统才艮据光栅信号进一步控 制力矩电机 70转速或定位， 从而达到对气浮转台 100高精度控制目 的。
其中， 本实施例中， 在加工气浮轴 30、 气浮套 50 以及底部 32 这三件工件的工艺上， 在机床对工件加工完毕之后，还另外增加人工 精细研磨工序反复对气浮套 50的上气浮面 56以及下气浮面 57进行 精细研磨，以确保上气浮面 56以及下气浮面 57的平面度和平行度达 到精密级程度。 同时， 对气浮轴 30的上止推面 310和轴部 35的表面 进行研磨， 保证上止推面 310与轴部 35的垂直度。对底部 32的下止 推面 320进行研磨， 保证其平面度。 这样组装后， 保证气膜间隙是均 匀的， 不会出现因为平行度不好， 出现楔形间隙或平面度不好而出现 间隙不均匀现象， 影响其精度。
本发明中， 气浮套 50分别设置有上气浮面 56及下气浮面 57， 从而大幅度提高了气浮转台 100的轴向静刚度、旋转刚度以及轴向回 转精度， 使放置其上待加工或检测工件始终处于一个稳定的高度， 不 会因气压的改变而改变。 同时， 气浮转台 100结合力矩电机 70直接 驱动，从而省去中间传动机构。 气浮轴 30与气浮套 50配合为气浮转 台 100提供较高的径向和轴向精度及高刚度， 力矩电机 70提供较大 的转动扭矩和保持力矩并同时配合高精度圓光栅尺 991后，气浮转台
100能提供较高的转动精度和定位精度。
对于本领域的技术人员来说，可根据以上描述的技术方案以及构 思， 做出其它各种相应的改变以及变形， 而所有的这些改变以及变形 都应该属于本发明权利要求的保护范围之内。

Claims

O 2015/043228 权 禾1 J 要 求 书 PCT/CN2014/079317
1. 一种气浮转台， 其特征在于： 该气浮转台包括气浮轴及套设于气 浮轴上的气浮套， 该气浮轴包括轴部及设置于轴部相对两端的顶 部与底部； 顶部包括与底部相对的上止推面， 该底部包括与顶部 相对下止推面； 气浮套包括位于顶部的上气浮面及位于底部的下 气浮面， 上气浮面与上止推面间隙配合， 下气浮面与下止推面间 隙配合， 气浮套内表面与轴部外表面间隙配合； 上气浮面上设置 有朝向上止推面的若干出气孔， 下气浮面上设置有朝向下止推面 的若干出气孔， 该气浮套内表面上均匀设置有朝向轴部的若干出 气孔； 该若干出气孔通过设置于气浮套内的导气槽与外部高压气 源连接。
2. 如权利要求 1所述的气浮转台， 其特征在于： 该气浮轴的底部和 / 或顶部与轴部可拆卸的连接。
3. 如权利要求 1所述的气浮转台， 其特征在于： 气浮套内设置有气 流通道， 气流通道包括与高压气源连接的进气孔， 该若干出气孔 贯通于导气槽与上气浮面、 导气槽与下气浮面、 导气槽轴与气浮 套内表面之间； 该若干出气孔沿圓周的方式分布于上气浮面、 下 气浮面以及气浮套内表面上。
4. 如权利要求 3所述的气浮转台， 其特征在于： 该气浮套包括设置 有收容空间的柱体及沿柱体的径向向外延伸形成的支撑部， 该轴 部收容于收容空间内； 该顶部支撑于该支撑部上且当上气浮面的 出气孔通气后向远离气浮套方向浮动； 该柱体与底部之间保持一 定间隙且当下气浮面的出气孔通气后向靠近气浮套方向浮动使其 O 2015/043228 权 禾1 J 要 求 书 PCT/CN2014/079317 与底部之间的间隙减小。
5. 如权利要求 3所述的气浮转台， 其特征在于： 该若干出气孔沿两 个圓周的方式分布于上气浮面上， 该沿两个圓周分布的出气孔以 轴部中心为圓心且分别以 ri与 r2为半径排列在上气浮面上；其中， rx = ， r2 = ^R^l， 与 R2分别为顶部以轴部中心为
Figure imgf000012_0001
圓心形成的内外两个圓周的半径。
6. 如权利要求 1所述的气浮转台， 其特征在于： 该气浮转台包括与 气浮轴连接的用于驱动气浮轴相对于气浮套转动的力矩电机。
7. 如权利要求 6所述的气浮转台， 其特征在于： 该气浮转台包括上 底座及用于支撑上底座的下底座， 该支撑部支撑于上底座上； 该 力矩电机包括转子及定子， 该转子与下气浮板连接， 该定子设置 于下底座上且处于静止状态。
8. 如权利要求 7所述的气浮转台， 其特征在于： 该下底座上设置有 进水嘴、 出水嘴以及冷却水套， 该定子设置于冷却水套内； 该冷 却水套与下底座之间设置有用于密封两者之间间隙的密封圈。
9. 如权利要求 7所述的气浮转台， 其特征在于： 该气浮转台包括读 数装置， 该读数装置包括圓光栅尺安装座、 安装于圓光栅尺安装 座上的圓光栅尺、 读数头安装件以及安装于读数头安装件上的读 数头； 该圓光栅尺安装座安装于气浮轴底部上并可随气浮轴一同 向上浮动与旋转， 该读数头安装件安装于下底座上且处于静止状 态。
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