CN103542241A - 一种气浮转台 - Google Patents
一种气浮转台 Download PDFInfo
- Publication number
- CN103542241A CN103542241A CN201310442764.1A CN201310442764A CN103542241A CN 103542241 A CN103542241 A CN 103542241A CN 201310442764 A CN201310442764 A CN 201310442764A CN 103542241 A CN103542241 A CN 103542241A
- Authority
- CN
- China
- Prior art keywords
- air
- floating
- shaft
- sleeve
- floatation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005188 flotation Methods 0.000 title abstract description 17
- 230000003068 static effect Effects 0.000 claims abstract description 10
- 239000000498 cooling water Substances 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 5
- 230000008859 change Effects 0.000 abstract description 5
- 230000009471 action Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0696—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for both radial and axial load
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q16/00—Equipment for precise positioning of tool or work into particular locations not otherwise provided for
- B23Q16/02—Indexing equipment
- B23Q16/08—Indexing equipment having means for clamping the relatively movable parts together in the indexed position
- B23Q16/10—Rotary indexing
- B23Q16/102—Rotary indexing with a continuous drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2210/00—Machine tools incorporating a specific component
- B23Q2210/004—Torque motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2220/00—Machine tool components
- B23Q2220/002—Tool turrets
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Abstract
Description
Claims (9)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310442764.1A CN103542241B (zh) | 2013-09-25 | 2013-09-25 | 一种气浮转台 |
PCT/CN2014/079317 WO2015043228A1 (zh) | 2013-09-25 | 2014-06-06 | 一种气浮转台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310442764.1A CN103542241B (zh) | 2013-09-25 | 2013-09-25 | 一种气浮转台 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103542241A true CN103542241A (zh) | 2014-01-29 |
CN103542241B CN103542241B (zh) | 2016-06-29 |
Family
ID=49965976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310442764.1A Active CN103542241B (zh) | 2013-09-25 | 2013-09-25 | 一种气浮转台 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN103542241B (zh) |
WO (1) | WO2015043228A1 (zh) |
Cited By (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104019940A (zh) * | 2014-06-20 | 2014-09-03 | 哈尔滨工业大学 | 基于差动测量的高精度气浮垂向调节机构 |
CN104358979A (zh) * | 2014-10-29 | 2015-02-18 | 中国科学院苏州生物医学工程技术研究所 | 一种分体式超精密空气静压单轴转台 |
WO2015043228A1 (zh) * | 2013-09-25 | 2015-04-02 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
CN105692036A (zh) * | 2015-12-28 | 2016-06-22 | 广东工业大学 | 重载平台微小位移装置 |
CN105758643A (zh) * | 2016-03-15 | 2016-07-13 | 洛阳轴研科技股份有限公司 | 一种轴承承载能力检测装置 |
CN105928960A (zh) * | 2016-07-13 | 2016-09-07 | 重庆大学 | 一种精密气浮转台 |
CN105952798A (zh) * | 2016-07-13 | 2016-09-21 | 重庆大学 | 一种高精度静压空气轴承 |
CN106195007A (zh) * | 2016-07-28 | 2016-12-07 | 重庆大学 | 一种气动气浮旋转装置 |
CN106425521A (zh) * | 2016-10-31 | 2017-02-22 | 广东技术师范学院 | 一种高速直驱机床第四轴 |
CN106425829A (zh) * | 2016-10-31 | 2017-02-22 | 广东技术师范学院 | 一种气浮式轴类研抛机 |
CN106481662A (zh) * | 2016-11-18 | 2017-03-08 | 广东工业大学 | 一种精密气浮转台 |
CN107830852A (zh) * | 2017-12-09 | 2018-03-23 | 杨学智 | 气动张力控制器及光纤陀螺绕环机 |
CN107883896A (zh) * | 2017-12-27 | 2018-04-06 | 东莞市显隆电机有限公司 | 一种气浮式平面度检测装置 |
CN107953117A (zh) * | 2017-11-24 | 2018-04-24 | 哈工大机器人集团(哈尔滨)华粹智能装备有限公司 | 一种大型重载超精密卧式空心气浮转台 |
CN107972605A (zh) * | 2017-11-21 | 2018-05-01 | 上海航天测控通信研究所 | 一种高精度车载转台 |
WO2018114083A1 (de) * | 2016-12-19 | 2018-06-28 | Taktomat Kurvengesteuerte Antriebssysteme Gmbh | Drehvorrichtung |
CN108731877A (zh) * | 2017-04-21 | 2018-11-02 | 北京航天计量测试技术研究所 | 一种大型重载转动惯量的高精度测量装置 |
CN109490332A (zh) * | 2018-10-19 | 2019-03-19 | 中国科学院地质与地球物理研究所 | 测试转台 |
CN110094421A (zh) * | 2019-04-11 | 2019-08-06 | 马元中 | 一种超静音气浮轴承 |
CN111285031A (zh) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN112692795A (zh) * | 2020-12-28 | 2021-04-23 | 江苏集萃精凯高端装备技术有限公司 | 一种配备高真空度吸盘的精密气浮转台 |
CN113635085A (zh) * | 2021-08-19 | 2021-11-12 | 江苏集萃精凯高端装备技术有限公司 | 一种外转子电机驱动的精密气浮转台 |
CN113635084A (zh) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | 一种气浮转台 |
CN113898671A (zh) * | 2021-10-14 | 2022-01-07 | 江苏集萃精凯高端装备技术有限公司 | 一种气浮转台 |
CN114248122A (zh) * | 2021-12-21 | 2022-03-29 | 北京海普瑞森超精密技术有限公司 | 一种超精密空气静压伺服转台 |
CN114619266A (zh) * | 2022-02-28 | 2022-06-14 | 泰山学院 | 一种紧凑型气体静压轴系结构 |
CN116476017A (zh) * | 2023-04-25 | 2023-07-25 | 苏州速易德工业装备系统有限公司 | 一种气浮转台 |
CN117086655A (zh) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | 一种高精度微小型空气静压气浮转台 |
US11898921B2 (en) | 2022-05-17 | 2024-02-13 | Honeywell Federal Manufacturing & Technologies, Llc | Air bearing apparatus for calibrating force measurement devices |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11067124B2 (en) * | 2018-07-23 | 2021-07-20 | Alio Industries, Inc. | Planar rotary air bearing stage |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02209622A (ja) * | 1989-02-03 | 1990-08-21 | Nippon Seiko Kk | 静圧気体軸受 |
JPH06207617A (ja) * | 1993-01-11 | 1994-07-26 | Tokyo Seimitsu Co Ltd | 静圧空気軸受 |
JPH06341435A (ja) * | 1993-05-31 | 1994-12-13 | Sony Corp | 空気静圧軸受装置 |
CN102011918A (zh) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | 一种高精度直驱式气浮转台 |
CN201918846U (zh) * | 2010-12-29 | 2011-08-03 | 广州市昊志机电有限公司 | 一种气浮电主轴的定子水冷结构 |
CN203533113U (zh) * | 2013-09-25 | 2014-04-09 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1047342A (zh) * | 1963-01-30 | |||
JPH08303464A (ja) * | 1995-05-09 | 1996-11-19 | Canon Inc | 割り出し装置 |
JP2008155337A (ja) * | 2006-12-26 | 2008-07-10 | Toshiba Mach Co Ltd | 割出装置 |
JP4870036B2 (ja) * | 2007-07-04 | 2012-02-08 | 東芝機械株式会社 | 旋回テーブル装置 |
CN101407024B (zh) * | 2008-11-25 | 2010-07-14 | 吴行飞 | 高精度高刚度封闭式流体静压/动静压回转工作台 |
CN202065344U (zh) * | 2010-11-11 | 2011-12-07 | 伟宝精密有限公司 | 流体静压轴承旋转工作台 |
CN102229107B (zh) * | 2011-05-31 | 2013-01-02 | 无锡市明鑫数控磨床有限公司 | 一种立式磨床回转工作台 |
CN102628541B (zh) * | 2012-04-10 | 2014-09-17 | 张瑞杰 | 一种气浮转台结构 |
CN103111855B (zh) * | 2013-02-18 | 2014-12-24 | 哈尔滨工业大学 | 一种大径高比超精密液体静压转台 |
CN103317360B (zh) * | 2013-05-20 | 2016-11-23 | 西安交通大学 | 一种公共供油轨道的高精度静压回转工作台 |
CN103286660B (zh) * | 2013-06-05 | 2015-12-09 | 上海交通大学 | 一种大型表面节流自补偿超精密液体静压转台 |
CN203317051U (zh) * | 2013-07-18 | 2013-12-04 | 北京微纳精密机械有限公司 | 一种超精密气体静压回转工作台 |
CN103542241B (zh) * | 2013-09-25 | 2016-06-29 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
-
2013
- 2013-09-25 CN CN201310442764.1A patent/CN103542241B/zh active Active
-
2014
- 2014-06-06 WO PCT/CN2014/079317 patent/WO2015043228A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02209622A (ja) * | 1989-02-03 | 1990-08-21 | Nippon Seiko Kk | 静圧気体軸受 |
JPH06207617A (ja) * | 1993-01-11 | 1994-07-26 | Tokyo Seimitsu Co Ltd | 静圧空気軸受 |
JPH06341435A (ja) * | 1993-05-31 | 1994-12-13 | Sony Corp | 空気静圧軸受装置 |
CN102011918A (zh) * | 2010-11-04 | 2011-04-13 | 北京卫星制造厂 | 一种高精度直驱式气浮转台 |
CN201918846U (zh) * | 2010-12-29 | 2011-08-03 | 广州市昊志机电有限公司 | 一种气浮电主轴的定子水冷结构 |
CN203533113U (zh) * | 2013-09-25 | 2014-04-09 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015043228A1 (zh) * | 2013-09-25 | 2015-04-02 | 广州市昊志机电股份有限公司 | 一种气浮转台 |
CN104019940A (zh) * | 2014-06-20 | 2014-09-03 | 哈尔滨工业大学 | 基于差动测量的高精度气浮垂向调节机构 |
CN104019940B (zh) * | 2014-06-20 | 2016-03-30 | 哈尔滨工业大学 | 基于差动测量的高精度气浮垂向调节机构 |
CN104358979A (zh) * | 2014-10-29 | 2015-02-18 | 中国科学院苏州生物医学工程技术研究所 | 一种分体式超精密空气静压单轴转台 |
CN105692036A (zh) * | 2015-12-28 | 2016-06-22 | 广东工业大学 | 重载平台微小位移装置 |
CN105758643A (zh) * | 2016-03-15 | 2016-07-13 | 洛阳轴研科技股份有限公司 | 一种轴承承载能力检测装置 |
CN105758643B (zh) * | 2016-03-15 | 2018-07-10 | 洛阳轴承研究所有限公司 | 一种轴承承载能力检测装置 |
CN105928960A (zh) * | 2016-07-13 | 2016-09-07 | 重庆大学 | 一种精密气浮转台 |
CN105952798A (zh) * | 2016-07-13 | 2016-09-21 | 重庆大学 | 一种高精度静压空气轴承 |
CN106195007A (zh) * | 2016-07-28 | 2016-12-07 | 重庆大学 | 一种气动气浮旋转装置 |
CN106195007B (zh) * | 2016-07-28 | 2019-03-19 | 重庆大学 | 一种气动气浮旋转装置 |
CN106425521A (zh) * | 2016-10-31 | 2017-02-22 | 广东技术师范学院 | 一种高速直驱机床第四轴 |
CN106425829A (zh) * | 2016-10-31 | 2017-02-22 | 广东技术师范学院 | 一种气浮式轴类研抛机 |
CN106481662A (zh) * | 2016-11-18 | 2017-03-08 | 广东工业大学 | 一种精密气浮转台 |
WO2018114083A1 (de) * | 2016-12-19 | 2018-06-28 | Taktomat Kurvengesteuerte Antriebssysteme Gmbh | Drehvorrichtung |
CN108731877A (zh) * | 2017-04-21 | 2018-11-02 | 北京航天计量测试技术研究所 | 一种大型重载转动惯量的高精度测量装置 |
CN107972605A (zh) * | 2017-11-21 | 2018-05-01 | 上海航天测控通信研究所 | 一种高精度车载转台 |
CN107953117A (zh) * | 2017-11-24 | 2018-04-24 | 哈工大机器人集团(哈尔滨)华粹智能装备有限公司 | 一种大型重载超精密卧式空心气浮转台 |
CN107830852B (zh) * | 2017-12-09 | 2024-03-19 | 杨学智 | 气动张力控制器及光纤陀螺绕环机 |
CN107830852A (zh) * | 2017-12-09 | 2018-03-23 | 杨学智 | 气动张力控制器及光纤陀螺绕环机 |
CN107883896A (zh) * | 2017-12-27 | 2018-04-06 | 东莞市显隆电机有限公司 | 一种气浮式平面度检测装置 |
CN109490332A (zh) * | 2018-10-19 | 2019-03-19 | 中国科学院地质与地球物理研究所 | 测试转台 |
CN110094421A (zh) * | 2019-04-11 | 2019-08-06 | 马元中 | 一种超静音气浮轴承 |
CN111285031A (zh) * | 2020-03-11 | 2020-06-16 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN111285031B (zh) * | 2020-03-11 | 2021-09-14 | 上海精测半导体技术有限公司 | 一种旋转台 |
CN112692795A (zh) * | 2020-12-28 | 2021-04-23 | 江苏集萃精凯高端装备技术有限公司 | 一种配备高真空度吸盘的精密气浮转台 |
CN112692795B (zh) * | 2020-12-28 | 2024-05-31 | 江苏集萃精凯高端装备技术有限公司 | 一种配备高真空度吸盘的精密气浮转台 |
CN113635085A (zh) * | 2021-08-19 | 2021-11-12 | 江苏集萃精凯高端装备技术有限公司 | 一种外转子电机驱动的精密气浮转台 |
CN113635084A (zh) * | 2021-08-25 | 2021-11-12 | 中国工程物理研究院机械制造工艺研究所 | 一种气浮转台 |
CN113898671B (zh) * | 2021-10-14 | 2024-01-30 | 江苏集萃精凯高端装备技术有限公司 | 一种气浮转台 |
CN113898671A (zh) * | 2021-10-14 | 2022-01-07 | 江苏集萃精凯高端装备技术有限公司 | 一种气浮转台 |
CN114248122A (zh) * | 2021-12-21 | 2022-03-29 | 北京海普瑞森超精密技术有限公司 | 一种超精密空气静压伺服转台 |
CN114619266A (zh) * | 2022-02-28 | 2022-06-14 | 泰山学院 | 一种紧凑型气体静压轴系结构 |
US11898921B2 (en) | 2022-05-17 | 2024-02-13 | Honeywell Federal Manufacturing & Technologies, Llc | Air bearing apparatus for calibrating force measurement devices |
CN116476017A (zh) * | 2023-04-25 | 2023-07-25 | 苏州速易德工业装备系统有限公司 | 一种气浮转台 |
CN117086655A (zh) * | 2023-10-19 | 2023-11-21 | 无锡星微科技有限公司杭州分公司 | 一种高精度微小型空气静压气浮转台 |
CN117086655B (zh) * | 2023-10-19 | 2024-01-19 | 无锡星微科技有限公司杭州分公司 | 一种高精度微小型空气静压气浮转台 |
Also Published As
Publication number | Publication date |
---|---|
CN103542241B (zh) | 2016-06-29 |
WO2015043228A1 (zh) | 2015-04-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103542241B (zh) | 一种气浮转台 | |
CN203533113U (zh) | 一种气浮转台 | |
CN202065344U (zh) | 流体静压轴承旋转工作台 | |
CN110039330A (zh) | 一种高推力闭式气体静压转台 | |
CN102179532B (zh) | 超高精度气静压轴承主轴系统 | |
JP4870036B2 (ja) | 旋回テーブル装置 | |
CN103056397B (zh) | 一种大直径超精密气体静压回转轴系 | |
CN204122771U (zh) | 一种超精密气浮电主轴 | |
CN111438540A (zh) | 一种狭缝节流气浮转台 | |
CN113635085B (zh) | 一种外转子电机驱动的精密气浮转台 | |
KR20100100829A (ko) | 공작기계용 회전 분할 테이블 장치 | |
KR101735853B1 (ko) | 로터리 인덱싱 시스템용 로터리 플렉셔 및 공기 베어링 지지체 | |
KR101714054B1 (ko) | 직접 구동식 로터리 테이블 장치 | |
CN110732887A (zh) | 一种超精密液体静压转台 | |
CN110788633A (zh) | 一种摇篮式复合转台 | |
CN221097205U (zh) | 直驱外转子气浮转台 | |
CN113530975B (zh) | 一种分体式扁轴气浮转台 | |
CN117497479A (zh) | 用于承载晶圆的回转升降复合气浮台 | |
CN205465556U (zh) | 磨球机 | |
KR20240129109A (ko) | 동적 균형 시험기 | |
CN113635084A (zh) | 一种气浮转台 | |
CN212192103U (zh) | 狭缝节流气浮转台 | |
CN108672831B (zh) | 一种高精度通用齿轮磨齿装置 | |
CN202021347U (zh) | 超高精度气静压轴承主轴系统 | |
CN105817651A (zh) | 静压流体轴承装置及其制造方法、机床用主轴装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: An air floating turntable Effective date of registration: 20220419 Granted publication date: 20160629 Pledgee: China Co. truction Bank Corp Guangzhou Tianhe subbranch Pledgor: GUANGZHOU HAOZHI INDUSTRIAL Co.,Ltd. Registration number: Y2022980004445 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20230512 Granted publication date: 20160629 Pledgee: China Co. truction Bank Corp Guangzhou Tianhe subbranch Pledgor: GUANGZHOU HAOZHI INDUSTRIAL Co.,Ltd. Registration number: Y2022980004445 |