CN104533956B - 主动补偿式低涡流轴动式气浮轴承 - Google Patents
主动补偿式低涡流轴动式气浮轴承 Download PDFInfo
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CN106643693B (zh) * | 2016-10-14 | 2019-09-13 | 哈尔滨工业大学 | 一种气浮球轴承三维姿态测量装置 |
JP7049165B2 (ja) * | 2018-04-19 | 2022-04-06 | 株式会社ミツトヨ | 回転テーブルおよび真円度測定機 |
CN110360223B (zh) * | 2019-08-20 | 2024-03-19 | 中国科学院合肥物质科学研究院 | 一种气浮轴承 |
CN114294330B (zh) * | 2021-12-30 | 2022-09-23 | 哈尔滨工业大学 | 一种高精度旋转圈形零件内支撑气浮式静平衡装置 |
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CN102109011B (zh) * | 2009-12-25 | 2013-01-16 | 上海微电子装备有限公司 | 均压腔气浮止推轴承 |
CN102628541B (zh) * | 2012-04-10 | 2014-09-17 | 张瑞杰 | 一种气浮转台结构 |
CN203098574U (zh) * | 2012-09-03 | 2013-07-31 | 中国工程物理研究院总体工程研究所 | 大型精密转台气浮组件 |
CN102817915A (zh) * | 2012-09-03 | 2012-12-12 | 中国工程物理研究院总体工程研究所 | 大型精密转台气浮组件 |
CN103982545B (zh) * | 2014-05-28 | 2016-06-22 | 西安工业大学 | 基于狭缝型气膜间隙节流的圆柱气浮导轨 |
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Inventor after: Qi Naiming Inventor after: Liu Yanfang Inventor after: Huo Mingying Inventor after: Yu Linghui Inventor after: Qi Ji Inventor after: Liu Xingfu Inventor after: Huang Lin Inventor before: Liu Yanfang Inventor before: Qi Ji Inventor before: Liu Xingfu Inventor before: Qi Naiming Inventor before: Yu Linghui Inventor before: Huang Lin |