CN107725592A - 一种环形狭缝节流的气浮转台 - Google Patents

一种环形狭缝节流的气浮转台 Download PDF

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CN107725592A
CN107725592A CN201710913209.0A CN201710913209A CN107725592A CN 107725592 A CN107725592 A CN 107725592A CN 201710913209 A CN201710913209 A CN 201710913209A CN 107725592 A CN107725592 A CN 107725592A
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air
radial direction
flow controller
rotating shaft
annular channel
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陶继忠
刘坤
崔海龙
刘有海
吕磊
张小强
俞利庆
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Institute of Mechanical Manufacturing Technology of CAEP
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0622—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via nozzles, restrictors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • F16C32/0625—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via supply slits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C41/00—Other accessories, e.g. devices integrated in the bearing not relating to the bearing function as such
    • F16C41/004—Electro-dynamic machines, e.g. motors, generators, actuators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/22—Optical devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2380/00—Electrical apparatus
    • F16C2380/26—Dynamo-electric machines or combinations therewith, e.g. electro-motors and generators

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Regulation And Control Of Combustion (AREA)

Abstract

本发明公开了一种环形狭缝节流的气浮转台，所述的气浮转台中的转轴由止推节流器和径向节流器支承，气体从进气管接头进入，沿气道给径向节流器和止推节流器供气，用于支承转轴。电机转子和圆光栅与转轴同轴装配，电机定子固定在壳体中，电机定子通电后产生电磁场，驱动电机转子和转轴旋转，圆光栅反馈角度信号，实现转轴的精确定位。本发明利用零件表面加工的台阶，通过装配形成环形狭缝，狭缝宽度与气膜厚度接近，因此气隙内部气体流动的速度变化较小，产生气锤振动的概率较小。内部气道布置简单，加工时狭缝不易堵塞，降低了加工难度。在不增加尺寸、不更改材料的情况下，可增大供气压力，进一步提高了气浮转台的刚度和精度。

Description

一种环形狭缝节流的气浮转台
技术领域
本发明属于精密加工技术领域，具体涉及一种环形狭缝节流的气浮转台的总体结构。采用本发明可有效提高气浮转台的精度指标，显著提高气浮转台的稳定性，满足精密测量装置和加工设备的要求。
背景技术
气浮转台属于高精度的回转定位装置，由转轴、节流器、伺服电机、圆光栅等组成。气浮转台包括支承部件和驱动部件，支承部件由转轴和节流器组成，实现非接触支承；驱动部件由伺服电机和圆光栅组成，实现精密回转定位。如果气浮转台精度不够高或不稳定，将影响测量和加工结果。
发明内容
为了解决现有气浮转台精度和稳定性不足的问题，本发明提供一种环形狭缝节流的气浮转台。本发明利用过盈装配零件的台阶形成环形狭缝节流，狭缝宽度与气膜厚度接近，因此气隙内部气体流动的速度变化较小，能有效提高精度与稳定性，解决了常规气浮转台精度与稳定性不足的问题。
本发明的环形狭缝节流的气浮转台，其特点是，所述气浮转台包括转轴、止推节流器、垫环、径向节流器、壳体、进气管接头、电机定子、电机转子和圆光栅。转轴由止推节流器和径向节流器支承，气体从进气管接头进入，沿气道给径向节流器和止推节流器供气，用于支承转轴。电机转子和圆光栅与转轴同轴装配，电机定子固定在壳体中，电机定子通电后产生电磁场，驱动电机转子和转轴旋转，圆光栅反馈角度信号，实现转轴的精确定位。本发明利用过盈装配零件的台阶形成环形狭缝节流，狭缝宽度与气膜厚度接近，因此气隙内部气体流动的速度变化较小，产生气锤振动的概率较小。内部气道布置简单，研磨时狭缝不易堵塞，降低了加工难度。在不增加尺寸、不更改材料的情况下，可增大供气压力，进一步提高了气浮转台的刚度和精度。
所述的止推节流器由止推节流环和止推节流座装配而成，止推节流环上加工有环形台阶，与止推节流座装配形成环形狭缝。狭缝宽度为10μm～30μm，深度为3mm～5mm。
所述的径向节流器由上径向节流环、下径向节流环与径向节流座装配而成，上径向节流环、下径向节流环上加工有环形台阶，与径向节流座装配形成环形狭缝。狭缝宽度为10μm～30μm，深度为3mm～5mm。
所述的环形狭缝的宽度由台阶高度来保证，狭缝的深度由台阶宽度来保证。
所述的环形狭缝由气道连通供气。
所述的止推节流器和径向节流器，组成它们的零件采用过盈装配（或粘接或螺钉联接）而成。
本发明的环形狭缝节流的气浮转台有益效果是：采用装配零件的台阶形成的环形狭缝降低了气隙内部气体流动速度，提高了气浮转台的精度和稳定性，从而解决气浮转台精度与稳定性不足的问题。
附图说明
图1为本发明的环形狭缝节流的气浮转台结构示意图；
图2为图1中的环形狭缝节流示意图。
具体实施方式
下面结合附图和实施例对本发明进行详细的描述。
图1为本发明的环形狭缝节流的气浮转台的结构示意图。图2为图1中的环形狭缝的结构示意图。
从图1、2中可以看出，本发明的环形狭缝节流气浮转台，包括转轴1、止推节流器2、垫环3、径向节流器4、壳体5、进气管接头6、电机定子7、电机转子8和圆光栅9。其连接关系是，所述的转轴1轴向方向由止推节流器2、垫环3和径向节流器4支承，径向方向由径向节流器4支承。气体从进气管接头6进入壳体5和径向节流器4之间的腔体，然后沿气道给径向节流器4和止推节流器2供气，用于支承转轴1。电机转子8和圆光栅9与转轴1同轴装配，电机定子7固定在壳体5中，电机转子8和电机定子7间的气隙均匀。电机定子7通电后产生电磁场，驱动电机转子8和转轴1旋转，圆光栅9反馈角度信号，实现转轴1的精确定位。
止推节流器2由止推节流环10和止推节流座11装配而成，止推节流环上加工有环形台阶，形成环形狭缝节流。狭缝宽度为10μm～30μm，深度为3mm～5mm。
径向节流器4由上径向节流环12、下径向节流环14与径向节流座13装配而成，上径向节流环12、下径向节流环14上加工有环形台阶，形成环形狭缝节流。狭缝宽度为10μm～30μm，深度为3mm～5mm。
环形狭缝的宽度由零件表面加工的台阶高度来保证，狭缝的深度由台阶宽度来保证。
环形狭缝与供气管道连接。
止推节流器2和径向节流器4，组成它们的零件采用过盈装配（或粘接或螺钉联接）而成。
本发明的环形狭缝节流的气浮转台工作状态是这样的：压缩空气沿着气道向止推环形狭缝和径向环形狭缝供气，将转轴及其上的电机转子、圆光栅支承起来；电机驱动转轴旋转，圆光栅反馈角度信号，实现转轴的精确定位。采用环形狭缝节流，气隙内部气体流动的速度变化较小，能进一步提高支承稳定性，满足高精度的要求。

Claims (4)

1.一种环形狭缝节流的气浮转台，包括转轴（1）、止推节流器（2）、垫环（3）、径向节流器（4）、壳体（5）、进气管接头（6）、电机定子（7）、电机转子（8）和圆光栅（9）；所述的转轴（1）轴向方向由止推节流器（2）、垫环（3）和径向节流器（4）支承，径向方向由径向节流器（4）支承；气体从进气管接头（6）进入壳体（5）和径向节流器（4）之间的腔体，然后沿气道给径向节流器（4）和止推节流器（2）供气，用于支承转轴（1）；电机转子（8）和圆光栅（9）与转轴（1）同轴装配，电机定子（7）固定在壳体（5），电机转子（8）和电机定子（7）间的气隙均匀；电机定子（7）通电后产生电磁场，驱动电机转子（8）和转轴（1）旋转，圆光栅（9）反馈角度信号，实现转轴（1）的精确定位。
2.根据权利要求1所述的环形狭缝节流的气浮转台，其特征在于：所述的止推节流器（2）由止推节流环和止推节流座过盈装配而成，止推节流环上设置有环形台阶，形成环形狭缝节流，狭缝宽度为10μm～30μm，深度为3mm～5mm。
3.根据权利要求1所述的环形狭缝节流的气浮转台，其特征在于：所述的径向节流器（4）由上径向节流环、下径向节流环与径向节流座过盈装配而成，上径向节流环、下径向节流环上设置有环形台阶，形成环形狭缝节流，狭缝宽度为10μm～30μm，深度为3mm～5mm。
4.根据权利要求1所述的环形狭缝节流的气浮转台，其特征在于：所述的环形狭缝与供气管道连接。
CN201710913209.0A 2017-09-30 2017-09-30 一种环形狭缝节流的气浮转台 Pending CN107725592A (zh)

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CN110067811A (zh) * 2019-05-30 2019-07-30 中国工程物理研究院机械制造工艺研究所 一种气浮转台
CN111285031A (zh) * 2020-03-11 2020-06-16 上海精测半导体技术有限公司 一种旋转台
CN111927886A (zh) * 2020-07-15 2020-11-13 杭州电子科技大学 基于静压气浮轴承的aacmm高精度关节及其支承方法
CN111963572A (zh) * 2020-08-14 2020-11-20 北京稳力科技有限公司 一种气体压缩机、电机及箔片径向气体动压轴承
CN113530975A (zh) * 2021-07-30 2021-10-22 中国计量大学 一种分体式扁轴气浮转台
CN113770674A (zh) * 2021-09-18 2021-12-10 中国工程物理研究院机械制造工艺研究所 一种装配装置和装配方法
CN114992242A (zh) * 2022-06-16 2022-09-02 中国工程物理研究院机械制造工艺研究所 一种抗扰动气浮轴承

Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1484880A (fr) * 1966-06-16 1967-06-16 Aerostatic Ltd Paliers lisses à gaz
EP0212277A1 (en) * 1985-07-26 1987-03-04 Compact Spindle Bearing Corporation Improved gas bearing
CN2209238Y (zh) * 1994-04-08 1995-10-04 北京科阳气体液化技术联合公司 π形槽动静压混合式气体轴承
JPH1096423A (ja) * 1996-09-20 1998-04-14 Ntn Corp 静圧空気軸受スピンドル
JP2000074066A (ja) * 1998-08-26 2000-03-07 Disco Abrasive Syst Ltd 回転体支持装置
JP2000246565A (ja) * 1999-02-24 2000-09-12 Ntn Corp 静圧気体軸受スピンドル
JP2000291657A (ja) * 1999-04-01 2000-10-20 Ntn Corp 静圧気体軸受
JP2001140884A (ja) * 1999-09-02 2001-05-22 Ntn Corp 静圧気体軸受スピンドル
JP2001140882A (ja) * 1999-11-09 2001-05-22 Ntn Corp 静圧気体軸受装置
JP2001182748A (ja) * 1999-12-24 2001-07-06 Ntn Corp 静圧気体軸受スピンドル
JP2002070861A (ja) * 2000-08-29 2002-03-08 Ntn Corp 静圧気体軸受スピンドル
US6439773B1 (en) * 1909-11-09 2002-08-27 Ntn Corporation Externally pressurized gas bearing spindle assembly
US20030044095A1 (en) * 2001-08-30 2003-03-06 Matsuo Satou Aerostatic gas bearing
EP1790833A2 (en) * 2005-11-29 2007-05-30 Rolls-Royce plc Bearing arrangement for a gas turbine
CN102011918A (zh) * 2010-11-04 2011-04-13 北京卫星制造厂 一种高精度直驱式气浮转台
CN202028776U (zh) * 2011-03-22 2011-11-09 惠州市大亚湾天马电子机械有限公司 一种数控机床用气浮电主轴
JP2014047827A (ja) * 2012-08-30 2014-03-17 Ntn Corp 静圧気体軸受スピンドル装置
CN103939467A (zh) * 2014-05-04 2014-07-23 中国电子科技集团公司第十六研究所 一种用于自由活塞式往复运动机械的气体静压轴承
WO2014172189A1 (en) * 2013-04-15 2014-10-23 Stein Seal Company Circumferential back-to-back seal assembly with bifurcated flow
US20140314345A1 (en) * 2013-03-21 2014-10-23 Aerolas Gmbh Gas pressure bearing element
EP2829752A2 (de) * 2013-07-24 2015-01-28 ess-micromechanik GmbH Aerostatisches Lager
JP2015087180A (ja) * 2013-10-29 2015-05-07 日本精工株式会社 トルク測定装置付回転伝達装置
JP2015175484A (ja) * 2014-03-17 2015-10-05 スターライト工業株式会社 静圧流体軸受
CN106321634A (zh) * 2016-11-18 2017-01-11 广州市昊志机电股份有限公司 一种复合式气浮轴系结构

Patent Citations (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6439773B1 (en) * 1909-11-09 2002-08-27 Ntn Corporation Externally pressurized gas bearing spindle assembly
FR1484880A (fr) * 1966-06-16 1967-06-16 Aerostatic Ltd Paliers lisses à gaz
EP0212277A1 (en) * 1985-07-26 1987-03-04 Compact Spindle Bearing Corporation Improved gas bearing
CN2209238Y (zh) * 1994-04-08 1995-10-04 北京科阳气体液化技术联合公司 π形槽动静压混合式气体轴承
JPH1096423A (ja) * 1996-09-20 1998-04-14 Ntn Corp 静圧空気軸受スピンドル
JP2000074066A (ja) * 1998-08-26 2000-03-07 Disco Abrasive Syst Ltd 回転体支持装置
JP2000246565A (ja) * 1999-02-24 2000-09-12 Ntn Corp 静圧気体軸受スピンドル
JP2000291657A (ja) * 1999-04-01 2000-10-20 Ntn Corp 静圧気体軸受
JP2001140884A (ja) * 1999-09-02 2001-05-22 Ntn Corp 静圧気体軸受スピンドル
JP2001140882A (ja) * 1999-11-09 2001-05-22 Ntn Corp 静圧気体軸受装置
JP2001182748A (ja) * 1999-12-24 2001-07-06 Ntn Corp 静圧気体軸受スピンドル
JP2002070861A (ja) * 2000-08-29 2002-03-08 Ntn Corp 静圧気体軸受スピンドル
US20030044095A1 (en) * 2001-08-30 2003-03-06 Matsuo Satou Aerostatic gas bearing
EP1790833A2 (en) * 2005-11-29 2007-05-30 Rolls-Royce plc Bearing arrangement for a gas turbine
CN102011918A (zh) * 2010-11-04 2011-04-13 北京卫星制造厂 一种高精度直驱式气浮转台
CN202028776U (zh) * 2011-03-22 2011-11-09 惠州市大亚湾天马电子机械有限公司 一种数控机床用气浮电主轴
JP2014047827A (ja) * 2012-08-30 2014-03-17 Ntn Corp 静圧気体軸受スピンドル装置
US20140314345A1 (en) * 2013-03-21 2014-10-23 Aerolas Gmbh Gas pressure bearing element
WO2014172189A1 (en) * 2013-04-15 2014-10-23 Stein Seal Company Circumferential back-to-back seal assembly with bifurcated flow
EP2829752A2 (de) * 2013-07-24 2015-01-28 ess-micromechanik GmbH Aerostatisches Lager
JP2015087180A (ja) * 2013-10-29 2015-05-07 日本精工株式会社 トルク測定装置付回転伝達装置
JP2015175484A (ja) * 2014-03-17 2015-10-05 スターライト工業株式会社 静圧流体軸受
CN103939467A (zh) * 2014-05-04 2014-07-23 中国电子科技集团公司第十六研究所 一种用于自由活塞式往复运动机械的气体静压轴承
CN106321634A (zh) * 2016-11-18 2017-01-11 广州市昊志机电股份有限公司 一种复合式气浮轴系结构

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
臧颖恺;陆振华;: "不同端口下单级狭缝引射对冷却气膜影响的数值计算", 机电设备 *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110067811A (zh) * 2019-05-30 2019-07-30 中国工程物理研究院机械制造工艺研究所 一种气浮转台
CN110067811B (zh) * 2019-05-30 2024-03-26 中国工程物理研究院机械制造工艺研究所 一种气浮转台
CN111285031A (zh) * 2020-03-11 2020-06-16 上海精测半导体技术有限公司 一种旋转台
CN111285031B (zh) * 2020-03-11 2021-09-14 上海精测半导体技术有限公司 一种旋转台
CN111927886A (zh) * 2020-07-15 2020-11-13 杭州电子科技大学 基于静压气浮轴承的aacmm高精度关节及其支承方法
CN111963572A (zh) * 2020-08-14 2020-11-20 北京稳力科技有限公司 一种气体压缩机、电机及箔片径向气体动压轴承
CN113530975A (zh) * 2021-07-30 2021-10-22 中国计量大学 一种分体式扁轴气浮转台
CN113530975B (zh) * 2021-07-30 2023-03-10 中国计量大学 一种分体式扁轴气浮转台
CN113770674A (zh) * 2021-09-18 2021-12-10 中国工程物理研究院机械制造工艺研究所 一种装配装置和装配方法
CN114992242A (zh) * 2022-06-16 2022-09-02 中国工程物理研究院机械制造工艺研究所 一种抗扰动气浮轴承
CN114992242B (zh) * 2022-06-16 2023-06-20 中国工程物理研究院机械制造工艺研究所 一种抗扰动气浮轴承

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