CN102569486B - 一种肖特基栅场效应紫外探测器及其制备方法 - Google Patents
一种肖特基栅场效应紫外探测器及其制备方法 Download PDFInfo
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- CN102569486B CN102569486B CN201210013991.8A CN201210013991A CN102569486B CN 102569486 B CN102569486 B CN 102569486B CN 201210013991 A CN201210013991 A CN 201210013991A CN 102569486 B CN102569486 B CN 102569486B
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- ultraviolet detector
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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CN201210013991.8A CN102569486B (zh) | 2012-01-17 | 2012-01-17 | 一种肖特基栅场效应紫外探测器及其制备方法 |
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CN201210013991.8A CN102569486B (zh) | 2012-01-17 | 2012-01-17 | 一种肖特基栅场效应紫外探测器及其制备方法 |
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CN102569486A CN102569486A (zh) | 2012-07-11 |
CN102569486B true CN102569486B (zh) | 2014-07-09 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104900745B (zh) * | 2015-05-26 | 2017-10-27 | 北京工业大学 | 一种基于高电子迁移率晶体管的光谱探测器及其制备方法 |
CN106876516B (zh) * | 2017-02-15 | 2019-02-01 | 上海大学 | 基于ZnO薄膜晶体管的集成式全固态中子探测器及其制备方法 |
CN109698250B (zh) * | 2018-12-26 | 2021-01-01 | 中南大学 | 栅极调控AlGaN基金属-半导体-金属紫外探测器及制备方法 |
CN109817757B (zh) * | 2019-01-18 | 2021-02-05 | 中国空间技术研究院 | 一种二硒化钨薄片/氧化锌纳米带结型场效应晶体管光电探测器及其制备方法 |
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EP1172858A1 (en) * | 1999-03-25 | 2002-01-16 | Japan Science and Technology Corporation | Semiconductor device |
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KR100348269B1 (ko) * | 2000-03-22 | 2002-08-09 | 엘지전자 주식회사 | 루데니움 산화물을 이용한 쇼트키 콘택 방법 |
US6846731B2 (en) * | 2002-01-04 | 2005-01-25 | Rutgers, The State University Of New Jersey | Schottky diode with silver layer contacting the ZnO and MgxZn1-xO films |
KR101168729B1 (ko) * | 2005-08-16 | 2012-07-26 | 삼성전자주식회사 | 배선 구조와 배선 형성 방법 및 박막 트랜지스터 기판과 그제조 방법 |
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EP1172858A1 (en) * | 1999-03-25 | 2002-01-16 | Japan Science and Technology Corporation | Semiconductor device |
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Inventor after: Zhang Xinan Inventor after: Hai Fusheng Inventor after: Zheng Haiwu Inventor after: Dang Yujing Inventor after: Ding Linghong Inventor after: Jiao Yang Inventor after: Zhang Weifeng Inventor before: Zhang Xinan Inventor before: Hai Fusheng Inventor before: Dang Yujing Inventor before: Ding Linghong Inventor before: Jiao Yang Inventor before: Zhang Weifeng |
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Free format text: CORRECT: INVENTOR; FROM: ZHANG XINAN HAI FUSHENG DANG YUJING DING LINGHONG JIAO YANG ZHANG WEIFENG TO: ZHANG XINAN HAI FUSHENG ZHENG HAIWU DANG YUJING DING LINGHONG JIAO YANG ZHANG WEIFENG |
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