CN102560343A - 被覆件及其制造方法 - Google Patents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10T428/00—Stock material or miscellaneous articles
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- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
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Abstract
本发明提供一种被覆件,包括基体及形成于该基体上的润滑层;该润滑层为钼硫硼氮层,其含有MoS2相及BN相。所述被覆件具有良好的润滑性、抗氧化性及耐磨性。本发明还提供了所述被覆件的制造方法。
Description
技术领域
本发明涉及一种被覆件及其制造方法。
背景技术
固体润滑剂二硫化钼(MoS2)由于其具有层状结构、低剪切强度等特性,在改善刀具的润滑性方面发挥了很大的作用。然而,随着金属切削加工朝高切削速度、高进给速度、高可靠性、长寿命、高精度和良好的切削控制性方面发展,对表面涂层的性能提出了更高的要求。
研究发现,使用镀覆有MoS2涂层的切削刀具加工铝合金、镁合金时,由于铝合金、镁合金的熔点低且MoS2涂层与铝合金、镁合金的润湿性较差,在高温条件容易发生粘刀现象,如此大大降低了对产品的加工精度。
发明内容
有鉴于此,有必要提供一种能较好的解决上述问题的被覆件。
另外,还提供上述被覆件的制造方法。
一种被覆件,包括基体及形成于该基体上的润滑层;该润滑层为钼硫硼氮层,其含有MoS2相及BN相。
一种被覆件的制造方法,包括以下步骤:
提供基体;
以MoS2靶及BN靶为靶材,于基体上磁控溅射润滑层,所述润滑层为钼硫硼氮层,其含有MoS2相及BN相。
所述MoS2相的存在,使该润滑层具有良好的润滑性;该硬质BN相的存在可提高所述润滑层的硬度及耐磨性,从而提升所述被覆件的机械寿命。另外,BN相还可以提高所述润滑层的抗氧化性,缓解因MoS2相被氧化而导致润滑层失去润滑性的现象的发生,如此可有效降低被覆件用于切削铝合金、镁合金时出现的粘刀现象的发生,从而大大提升产品的加工精度。
附图说明
图1为本发明一较佳实施例的被覆件的剖视图;
图2为制造图1中镀膜件所用真空镀膜机的示意图。
主要元件符号说明
被覆件 10
基体 11
结合层 13
润滑层 15
镀膜机 100
镀膜室 20
真空泵 30
轨迹 21
第一靶材 22
第二靶材 23
第三靶材 24
气源通道 25
具体实施方式
请参阅图1,本发明一较佳实施例的被覆件10包括基体11及形成于基体11上的润滑层15。
该基体11的材质可以为不锈钢、高速钢及模具钢等。该被覆件10为各类切削刀具,特别为用于切削铝合金或镁合金材料的切削刀具;该被覆件10还可为汽车等交通工具的机械零部件。
所述润滑层15可通过射频磁控溅射镀膜法形成。所述润滑层15为钼硫硼氮(MoSBN)层,该润滑层15含有MoS2相及BN相。该润滑层15的厚度为0.8~1.3μm。
所述被覆件10还包括通过磁控溅射镀膜法形成于所述基体11与润滑层15之间的结合层13。所述结合层13用以提高润滑层15与基体11之间的结合力。该结合层13为钼金属层,其厚度为200~300nm。
本发明一较佳实施例的被覆件10的制造方法主要包括如下步骤:
提供一基体11。该基体11可以通过冲压成型得到。
对该基体11进行预处理。该预处理可包括常规的对基体11进行化学除油、除蜡、酸洗、超声波清洗及烘干等步骤。
请参阅图2,提供一真空镀膜机100,将所述基体11置于该真空镀膜机100内,通过磁控溅射镀膜法依次于该基体11上形成结合层13及润滑层15。
该镀膜机100包括一镀膜室20及与镀膜室20相连接的一真空泵30,真空泵30用以对镀膜室20抽真空。该镀膜室20内设有转架(未图示)、二第一靶材22、二第二靶材23及二第三靶材24。转架带动基体11沿圆形轨迹21运行,且基体11在沿轨迹21运行时亦自转。二第一靶材22与二第二靶材23关于轨迹21的中心对称设置,且二第一靶材22相对地设置在轨迹21的内外侧,二第二靶材23相对地设置在轨迹21的内外侧,二第三靶材24相对地设置在轨迹21的内外侧。每一第一靶材22、每一第二靶材23及每一第三靶材24的两端均设有气源通道25,气体经该气源通道25进入所述镀膜室20中。当基体11穿过二第一靶材22之间时,将镀上第一靶材22表面溅射出的粒子,当基体11穿过二第二靶材23之间时,将镀上第二靶材23表面溅射出的粒子,当基体11穿过二第三靶材24之间时,将镀上第三靶材24表面溅射出的粒子。本实例中,所述第一靶材22为硫化钼(MoS2)靶,所述第二靶材23为硼氮(BN)复合靶,所述第三靶材24为钼靶。
于该基体11的表面磁控溅射一结合层13。该结合层13为钼金属层。形成所述结合层13的具体操作方法及工艺参数为:如图2所示,基体11安装于镀膜室20内,真空泵30对所述镀膜室20进行抽真空处理至真空度为3.0×10-3Pa,然后以氩气为工作气体,设置其流量为300~400sccm,于基体11上施加-100~-300V的偏压,加热该镀膜室至100~200℃(即镀膜温度为100~200℃),开启安装于该镀膜室内的第三靶材24的电源,设置其功率为2~5kw,设置沉积气压为12~18Pa,沉积该结合层13。沉积该结合层13的时间为20~40min,沉积完毕后关闭所述第三靶材24的电源。其中,氩气的纯度为99.999%。
于该结合层13上形成润滑层15。该润滑层15为MoSBN层,形成该润滑层15的具体操作方法及工艺参数为:设置氩气流量为120~350sccm,保持施加于基体11的偏压及镀膜温度不变,开启已安装于所述镀膜室内的第一靶材22靶及硼氮复合靶的电源,设置第一靶材22靶的电源功率为100~300W、硼氮复合靶的电源功率为100~500W,沉积该润滑层15。沉积该润滑层15的时间为90~200min。
关闭负偏压及靶材的电源,停止通入氩气,待所述润滑层15冷却后,向镀膜内通入空气,打开镀膜室门,取出镀覆有结合层13及润滑层15的基体11。
所述润滑层15中含有MoS2相及BN相。该MoS2相的存在,使该润滑层15具有良好的润滑性;该硬质BN相的存在可提高所述润滑层15的硬度及耐磨性,从而提升所述被覆件10的机械寿命。另外,BN相还可以提高所述润滑层15的抗氧化性,缓解因MoS2相被氧化而导致润滑层15失去润滑性的现象的发生,如此可有效降低被覆件10用于切削铝合金、镁合金时出现的粘刀现象的发生,从而大大提升产品的加工精度。
Claims (9)
1.一种被覆件,包括基体及形成于该基体上的润滑层,其特征在于:所述润滑层为钼硫硼氮层,其含有MoS2相及BN相。
2.如权利要求1所述的被覆件,其特征在于:所述润滑层的厚度为0.8~1.3μm。
3.如权利要求1所述的被覆件,其特征在于:所述被覆件还包括形成于所述基体与润滑层之间的结合层。
4.如权利要求3所述的被覆件,其特征在于:该结合层为钼金属层,其厚度为200~300nm。
5.如权利要求1所述的被覆件,其特征在于:所述基体的材质为不锈钢、高速钢或模具钢。
6.一种被覆件的制造方法,包括以下步骤:
提供基体;
以MoS2靶及BN靶为靶材,于基体上磁控溅射润滑层,所述润滑层为钼硫硼氮层,其含有MoS2相及BN相。
7.如权利要求6所述的被覆件的制造方法,其特征在于:磁控溅射形成所述润滑层的步骤采用如下方式实现:采用氩气为工作气体,其流量为120~350Sccm,设置MoS2靶的电源功率为100~300W、BN靶的电源功率为100~500W,于基体上施加-100~-300V的偏压,沉积气压为12~18Pa,镀膜温度为100~200℃,沉积时间为90~200min。
8.如权利要求6所述的被覆件的制造方法,其特征在于:所述被覆件的制造方法还包括于所述基体与润滑层之间磁控溅射形成结合层的步骤。
9.如权利要求8所述的被覆件的制造方法,其特征在于:磁控溅射形成所述结合层的步骤采用如下方式实现:以氩气为工作气体,设置其流量为300~400sccm,于基体上施加-100~-300V的偏压,采用钼靶为靶材,设置其电源功率为2~5kw,镀膜温度为100~200℃,溅射时间为20~40min。
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US13/084,655 US20120164410A1 (en) | 2010-12-23 | 2011-04-12 | Coated article and method for manufacturing coated article |
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US20160168687A1 (en) * | 2014-12-14 | 2016-06-16 | Applied Materials, Inc. | Particle reduction in a deposition chamber using thermal expansion coefficient compatible coating |
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JPS6056546A (ja) * | 1983-09-08 | 1985-04-02 | エヌオーケー株式会社 | 表面被膜を設けたゴム成形品 |
JP2002020773A (ja) * | 2000-07-10 | 2002-01-23 | Japan Science & Technology Corp | 自己潤滑機能をもつ表面改質構造およびその製造方法 |
CN101275449A (zh) * | 2007-03-26 | 2008-10-01 | 马自达汽车株式会社 | 车辆用开闭体的锁装置 |
CN101503995A (zh) * | 2009-02-26 | 2009-08-12 | 浙江长盛滑动轴承有限公司 | 自润滑耐磨涂层斜盘及其生产工艺 |
WO2010021725A1 (en) * | 2008-08-20 | 2010-02-25 | Exxonmobil Research And Engineering Company | Ultra-low friction coatings for drill stem assemblies |
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DE3421569C1 (de) * | 1984-06-09 | 1985-06-27 | Goetze Ag, 5093 Burscheid | Verschleissfeste Beschichtung |
WO2000052223A1 (de) * | 1999-03-03 | 2000-09-08 | Widia Gmbh | Werkzeug mit einer molybdänsulfid enthaltenden beschichtung und verfahren zu dessen herstellung |
JP4890839B2 (ja) * | 2005-11-22 | 2012-03-07 | 大同メタル工業株式会社 | 複層摺動部材および摺動部材の被覆層形成方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6056546A (ja) * | 1983-09-08 | 1985-04-02 | エヌオーケー株式会社 | 表面被膜を設けたゴム成形品 |
JP2002020773A (ja) * | 2000-07-10 | 2002-01-23 | Japan Science & Technology Corp | 自己潤滑機能をもつ表面改質構造およびその製造方法 |
CN101275449A (zh) * | 2007-03-26 | 2008-10-01 | 马自达汽车株式会社 | 车辆用开闭体的锁装置 |
WO2010021725A1 (en) * | 2008-08-20 | 2010-02-25 | Exxonmobil Research And Engineering Company | Ultra-low friction coatings for drill stem assemblies |
CN101503995A (zh) * | 2009-02-26 | 2009-08-12 | 浙江长盛滑动轴承有限公司 | 自润滑耐磨涂层斜盘及其生产工艺 |
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