CN102341676B - 位置测量设备 - Google Patents

位置测量设备 Download PDF

Info

Publication number
CN102341676B
CN102341676B CN201080010169.5A CN201080010169A CN102341676B CN 102341676 B CN102341676 B CN 102341676B CN 201080010169 A CN201080010169 A CN 201080010169A CN 102341676 B CN102341676 B CN 102341676B
Authority
CN
China
Prior art keywords
light source
optical element
measuring device
grid
transmission grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080010169.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN102341676A (zh
Inventor
U.本纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of CN102341676A publication Critical patent/CN102341676A/zh
Application granted granted Critical
Publication of CN102341676B publication Critical patent/CN102341676B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201080010169.5A 2009-03-02 2010-02-03 位置测量设备 Expired - Fee Related CN102341676B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009001262.1 2009-03-02
DE200910001262 DE102009001262A1 (de) 2009-03-02 2009-03-02 Positionsmesseinrichtung
PCT/EP2010/051290 WO2010100005A2 (de) 2009-03-02 2010-02-03 Positionsmesseinrichtung

Publications (2)

Publication Number Publication Date
CN102341676A CN102341676A (zh) 2012-02-01
CN102341676B true CN102341676B (zh) 2015-06-17

Family

ID=42538255

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080010169.5A Expired - Fee Related CN102341676B (zh) 2009-03-02 2010-02-03 位置测量设备

Country Status (6)

Country Link
US (1) US8854630B2 (enExample)
EP (1) EP2404143B1 (enExample)
JP (1) JP5436582B2 (enExample)
CN (1) CN102341676B (enExample)
DE (1) DE102009001262A1 (enExample)
WO (1) WO2010100005A2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010028725B4 (de) 2010-05-07 2023-05-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP2693166B1 (de) * 2012-07-31 2015-09-09 SICK STEGMANN GmbH Sende- und Empfangseinheit und Drehgeber mit einer solchen
DE102013220214A1 (de) * 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
JP6047508B2 (ja) 2014-01-27 2016-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料画像取得方法、およびプログラム記録媒体
EP3009806B1 (de) * 2014-10-14 2016-12-14 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
ES2752656T3 (es) * 2017-08-01 2020-04-06 Fagor Automation S Coop Método de comprobación para un dispositivo optoelectrónico de medida, y dispositivo

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030142288A1 (en) * 1998-03-09 2003-07-31 Opher Kinrot Optical translation measurement
US20040155178A1 (en) * 2003-02-07 2004-08-12 Olympus Corporation Optical encoder and output adjustment for the same
US20050023450A1 (en) * 2003-07-28 2005-02-03 Olympus Corporation Optical encoder and optical lens module
CN101067560A (zh) * 2006-05-05 2007-11-07 约翰尼斯海登海恩博士股份有限公司 位置测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5155538B2 (ja) 2006-09-11 2013-03-06 株式会社エヌ・ティ・ティ・ドコモ 測定対象物搭載装置、電磁界特性測定システム
JP4912801B2 (ja) * 2006-09-11 2012-04-11 オリンパス株式会社 光学式エンコーダ
DE102007028943A1 (de) 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030142288A1 (en) * 1998-03-09 2003-07-31 Opher Kinrot Optical translation measurement
US20040155178A1 (en) * 2003-02-07 2004-08-12 Olympus Corporation Optical encoder and output adjustment for the same
US20050023450A1 (en) * 2003-07-28 2005-02-03 Olympus Corporation Optical encoder and optical lens module
CN101067560A (zh) * 2006-05-05 2007-11-07 约翰尼斯海登海恩博士股份有限公司 位置测量装置

Also Published As

Publication number Publication date
WO2010100005A3 (de) 2011-04-28
US8854630B2 (en) 2014-10-07
JP5436582B2 (ja) 2014-03-05
WO2010100005A2 (de) 2010-09-10
DE102009001262A1 (de) 2010-09-09
CN102341676A (zh) 2012-02-01
JP2012519291A (ja) 2012-08-23
EP2404143A2 (de) 2012-01-11
EP2404143B1 (de) 2017-04-12
US20120081711A1 (en) 2012-04-05

Similar Documents

Publication Publication Date Title
JP4982242B2 (ja) 位置測定装置
CN102341676B (zh) 位置测量设备
JP5147368B2 (ja) エンコーダ
JP5005969B2 (ja) 位置測定装置
JP5100266B2 (ja) エンコーダ
JP5147367B2 (ja) エンコーダ
JP6312505B2 (ja) 光学式エンコーダおよびこれを備えた装置
JP5710105B2 (ja) 光学式位置測定装置
JPWO2008126836A1 (ja) 光学式エンコーダ
JP2017129573A (ja) 光電センサ及び物体検出方法
JP2005257521A (ja) 光学式変位測定装置
CN101473366A (zh) 散斑导航系统
KR20070020133A (ko) 광학식 인코더
JPH1183432A5 (enExample)
JP2020193929A (ja) 光学式エンコーダ
US7705289B2 (en) Scanning unit for an optical position-measuring device
JP2022087326A (ja) エンコーダ
JP6525546B2 (ja) 位置計測装置
KR20220097912A (ko) 위치 측정 디바이스
JP7572834B2 (ja) 光学的な位置測定装置
JP6427093B2 (ja) 光学式位置測定装置
JPWO2011114938A1 (ja) 光学式エンコーダ
JP2017167145A (ja) 光学式の距離センサおよび光学式の距離センサを備える位置測定装置
JP5635439B2 (ja) 光学式エンコーダ
JP2015197445A (ja) 機械を較正するための測定マークシステム

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
CB02 Change of applicant information
CB02 Change of applicant information

Address after: German Te Rauen Rohit

Applicant after: DR. JOHANNES HEIDENHAIN GmbH

Address before: German Te Rauen Rohit

Applicant before: Dr. Johannes Heidenhain GmbH

COR Change of bibliographic data

Free format text: CORRECT: APPLICANT; FROM: DR. JOHANNES HEIDENHAIN GMBH TO: HEIDENHAIN GMBH. DOCTOR JOHANNES

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150617

Termination date: 20220203