JP5436582B2 - 位置測定装置 - Google Patents

位置測定装置 Download PDF

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Publication number
JP5436582B2
JP5436582B2 JP2011552373A JP2011552373A JP5436582B2 JP 5436582 B2 JP5436582 B2 JP 5436582B2 JP 2011552373 A JP2011552373 A JP 2011552373A JP 2011552373 A JP2011552373 A JP 2011552373A JP 5436582 B2 JP5436582 B2 JP 5436582B2
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JP
Japan
Prior art keywords
measuring device
support substrate
position measuring
light source
optical component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2011552373A
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English (en)
Japanese (ja)
Other versions
JP2012519291A (ja
JP2012519291A5 (enExample
Inventor
ベンナー・ウルリヒ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Publication of JP2012519291A publication Critical patent/JP2012519291A/ja
Publication of JP2012519291A5 publication Critical patent/JP2012519291A5/ja
Application granted granted Critical
Publication of JP5436582B2 publication Critical patent/JP5436582B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2011552373A 2009-03-02 2010-02-03 位置測定装置 Expired - Fee Related JP5436582B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009001262.1 2009-03-02
DE200910001262 DE102009001262A1 (de) 2009-03-02 2009-03-02 Positionsmesseinrichtung
PCT/EP2010/051290 WO2010100005A2 (de) 2009-03-02 2010-02-03 Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2012519291A JP2012519291A (ja) 2012-08-23
JP2012519291A5 JP2012519291A5 (enExample) 2013-03-14
JP5436582B2 true JP5436582B2 (ja) 2014-03-05

Family

ID=42538255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011552373A Expired - Fee Related JP5436582B2 (ja) 2009-03-02 2010-02-03 位置測定装置

Country Status (6)

Country Link
US (1) US8854630B2 (enExample)
EP (1) EP2404143B1 (enExample)
JP (1) JP5436582B2 (enExample)
CN (1) CN102341676B (enExample)
DE (1) DE102009001262A1 (enExample)
WO (1) WO2010100005A2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010028725B4 (de) 2010-05-07 2023-05-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
EP2693166B1 (de) * 2012-07-31 2015-09-09 SICK STEGMANN GmbH Sende- und Empfangseinheit und Drehgeber mit einer solchen
DE102013220214A1 (de) * 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
JP6047508B2 (ja) 2014-01-27 2016-12-21 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料画像取得方法、およびプログラム記録媒体
EP3009806B1 (de) * 2014-10-14 2016-12-14 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung mit Vorrichtung zur Kompensation von Fehlern durch thermische Dilatation eines Massstabes
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
ES2752656T3 (es) * 2017-08-01 2020-04-06 Fagor Automation S Coop Método de comprobación para un dispositivo optoelectrónico de medida, y dispositivo

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6424407B1 (en) 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
JP4658452B2 (ja) * 2003-02-07 2011-03-23 オリンパス株式会社 光学式エンコーダ
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
DE102006021017A1 (de) 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5155538B2 (ja) 2006-09-11 2013-03-06 株式会社エヌ・ティ・ティ・ドコモ 測定対象物搭載装置、電磁界特性測定システム
JP4912801B2 (ja) * 2006-09-11 2012-04-11 オリンパス株式会社 光学式エンコーダ
DE102007028943A1 (de) 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
US8854630B2 (en) 2014-10-07
JP2012519291A (ja) 2012-08-23
WO2010100005A3 (de) 2011-04-28
CN102341676B (zh) 2015-06-17
CN102341676A (zh) 2012-02-01
WO2010100005A2 (de) 2010-09-10
EP2404143B1 (de) 2017-04-12
EP2404143A2 (de) 2012-01-11
US20120081711A1 (en) 2012-04-05
DE102009001262A1 (de) 2010-09-09

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